Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

Patterns of energy release in the plasma of a new modification of RF discharge, viz., hybrid RF discharge, which are maintained by vortex and potential RF electric fields, are experimentally studied. RF power input unit in the form of inductor and capacitor plates connected in parallel are used for initiating this discharge. This paper presents data obtained during the investigation of the influence of power supplied to the plasma and argon pressure on the equivalent resistance of the hybrid discharge, which is the measure of plasma capability of absorbing RF power. The role of the capacitive channel in the balance of RF power supplied to the discharge is considered.     

The influence of external parameters on the peculiarities of a hybrid low-pressure radio-frequency discharge

This paper deals with the experimental study of the patterns of the RF power input into the plasma of a hybrid RF discharge that was sustained by an RF power unit, which consisted of a spiral antenna connected in parallel with capacitor electrodes. At low values of RF generator power, RF power has been shown to be derived in the hybrid discharge through the capacitive channel; the role of the inductive channel becomes more significant at higher RF generator power as the power of the RF generator increases. It was demonstrated that at a low power of the RF generator the RF power occurs in the hybrid discharge essentially through the capacitive channel and then increases as the power of the RF generator increases. The larger the contribution of the inductive channel is, the smaller the value of the dividing capacity included in the capacitive discharge chain is.     

The inductive channel effect on the parameters of the space-charge electrode sheaths in a hybrid RF discharge

The physical properties of a new modification of RF discharge—hybrid RF discharge (HRFD)—are studied experimentally. A HRFD is sustained by both the vortical RF electric field and the potential one generated by the inductive and capacitive channels of the discharge. The inductive channel effect on the parameters of the space-charge electrode sheaths, which determine the capacitive component of the physical mechanism of a HRFD, is discussed.     

射频电感性耦合等离子体调谐基片自偏压特性

采用调节射频电感性耦合等离子体中基片电极与地之间的外部电路阻抗的方法,控制基片电极的射频自偏压。研究了调谐基片自偏压随外部调谐电容值的变化特征,得到了调谐基片射频自偏压随射频放电功率、气压的变化曲线。在一定放电参数区域内,调谐基片射频自偏压随调谐电容的变化曲线呈现跳变、双稳、迟滞现象。     

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

脉冲放电射流辅助射频辉光放电研究

通过实验研究了脉冲放电射流辅助下大气压氦气射频辉光放电的电学和光学特性。采用组合电极结构,在射频放电前段增加脉冲电极,脉冲放电产生的射流以等离子体子弹形式注入射频放电区域,主要研究脉冲射流辅助射频放电的电流电压曲线、最低放电维持电压、放电强度和空间结构时空分布。研究结果表明:等离子体子弹经过射频放电区域后,由于等离子体子弹引入的活性粒子,会使射频放电区域等离子体强度增强;而射频放电最低维持电压也从0.93 kV降低至0.43 kV。     

The Radio Frequency Hollow Cathode Discharge Induced by the RF Discharge in the Plasma‐Jet Chemical Reactor

In the recent decade an RF driven, low‐pressure plasma reactor with supersonic plasma jet was developed (RPJ). This reactor was successfully used for deposition of thin films of various materials. The deposition of thin films indicates that the properties of the deposited films are dependent on the sputtering or reactive sputtering processes appearing inside the nozzle (hollow athode). The nozzle (hollow athode) fabricated of different kinds of materials and alloys works both as a cathode of the radio frequency (RF) hollow cathode discharge and as a nozzle for plasma jet channel generation as well. The RF hollow cathode discharge is a secondary discharge, which is induced by the primary RF plasma generated in the reactor chamber. The present paper deals with the experimental study of this RF hollow cathode discharge. The stress is laid on the investigation of the axial distribution of discharge parameters and sputtering processes inside the nozzle. On the base of experiments, the simple model of the axial distribution of the investigated RF hollow cathode discharge has been developed.     

气压对微束射频容性放电模式调制的研究

微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99%氩/1%氢混合气体微束射频放电中,丝状放电模式消失,而是从低气压全空间分布的辉光放电模式,到中等气压向轴心收缩的辉光放电模式,最后到高气压的“环状”辉光放电模式;而在纯氢气微束射频放电中,随着气压的增加,放电模式直接从全空间分布的辉光放电模式向“环状”辉光放电模式转换.最后通过射频电场中电子加热、趋肤效应和气体热传导的共同作用解释了产生不同放电模式的物理机制.     

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

A one-dimensional self-consistent calculation model of capacitively coupled plasma(CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation.Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency(RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-d B higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.     

Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code

A high-frequency capacitive discharge is simulated in the geometry of a plasma accelerator with closed electron drift. It has been shown that, in such a discharge, as in a dc discharge, an azimuthal electron drift takes place and a potential drop is formed at the discharge channel exit, which leads to the emergence of an accelerated ion beam from the channel.     

射频功率对氢气与反式二丁烯的低压电感耦合等离子体的影响（英）

利用等离子体聚合技术制备的GDP壳层是目前ICF靶丸的主要烧蚀层材料。为了了解GDP薄膜沉积过程中的CH等离子体的状态,采用朗缪尔探针和质谱仪对C4H8/H2等离子体的组分和状态参数进行了诊断,并对等离子体的电子能量分布函数、电子密度、电子温度等进行了深入分析。同时讨论了等离子体状态与放电参数之间的关系。研究发现,射频功率对等离子体参数有明显的影响。从10 W到35 W,电子密度正比于射频功率。随着射频功率的增加,在两步电离机制作用下,电子温度和等离子体电势呈现先减小后增大的变化趋势。另外,在高气压下,质谱诊断中发现了大量的稳定的小质量碎片离子,这表明在高气压下等离子体气相中的离子碎片聚合反应被抑制。     

Model of magnetically enhanced, capacitive RF discharges

Magnetically enhanced, capacitive RF discharges (called RF magnetrons or MERIE discharges) are playing an increasing role in thin film etching for integrated circuit processing. In these discharges, a weak DC magnetic field is imposed, lying parallel to the powered electrode surface. The authors determine the RF power transferred to the discharge electrons by the oscillating electron sheath in the presence of the magnetic field. Using this, along with particle and energy conservation, they obtain discharge parameters such as the ion flux and ion bombarding energy at the powered electrode as functions of pressure, RF power, and the magnetic field. Some results of the model show good agreement with experiments done on a commercial MERIE system     

Modeling of pulsed spark discharge in water and its application to well cleaning

This paper presents a simulation model for the generation of strong pressure wave by means of pulsed spark discharge in water and its application to well cleaning. In the simulation model, one-dimensional time-dependent magnetohydrodynamic equations are coupled to a capacitive discharge circuit equation. A cylindrical conducting spark channel formed by electrical breakdown of water gap between a pair of electrodes is treated as a load of which resistance and inductance are allowed to change with time. For describing the spark channel properties accurately, precise calculations on thermodynamic properties and electrical conductivity are included in the simulation model. The simulation results show an excellent agreement with the experimentally measured shock pressure as well as the current and voltage waveforms. The simulation reveals that Joule heating of the spark channel during the very early phase of electrical discharge plays a key role in the formation of shock wave in water. The voltage on a capacitor at breakdown, the circuit inductance, and the resistance of the spark channel are found to be the most important parameters for the shock wave formation. With this technique, a pilot test for the cleaning of a clogged well has been performed in a water well which was constructed as a test-bed for riverbank filtration near the Anseong-cheon (river) in Korea. Well treatments have been carried out with an electrical energy of 510 J stored on a pulsed power system, at which the maximum shock pressure is measured to be around 7 MPa at the position of the well screen, i.e. 0.1 m away from the spark gap. A slug test shows 2.9 times improvement in the hydraulic conductivity of the well, which, combined with a visual inspection inside the well using an underwater camera, clearly demonstrates that the strong pressure wave generated by underwater spark discharge can effectively remove almost all incrustations formed in the well screen and thus improve well performance. Operating parameters for controlling the strength of shock pressure are discussed using the simulation model for extensive applications of the present technique to various types of water wells.     

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为探究射频离子源驱动器线圈电气参数对射频放电的影响,主要进行了射频离子源等离子体激发的物理分析,并计算了射频电源的频率选择与线圈放电电流、线圈匝间电压以及放电气压之间的关系,设计了射频离子源驱动器的主要参数。研制的射频离子源驱动器装置,成功获得氢等离子体射频放电。实验结果和理论计算结果符合很好。     

大面积NBI 射频离子源电气参数设计分析

为探究射频离子源驱动器线圈电气参数对射频放电的影响,主要进行了射频离子源等离子体激发的物理分析,并计算了射频电源的频率选择与线圈放电电流、线圈匝间电压以及放电气压之间的关系,设计了射频离子源驱动器的主要参数。研制的射频离子源驱动器装置,成功获得氢等离子体射频放电。实验结果和理论计算结果符合很好。     

柱面天线射频感性耦合等离子体放电模式特性的实验研究

利用Z-scan、电流、电压探头,通过测量等离子体吸收功率、天线电流、电压、等离子体直流悬浮电位等多种参数,研究了匹配网络、天线耦合强度、导电地面积、气压等多种因素对E,H放电模式特性及模式转化行为的影响.基于Γ型阻抗匹配网络中串联电容对射频电源输出功率的影响,提出了E—H放电模式转化的正负反馈区概念.研究发现：在相同的其他放电条件下,处于正反馈区时等离子体放电易于产生跳变型模式转化,而且模式跳变的临界天线电流、回滞宽度、跳变临界功率、跳变功率差等参数均随阻抗匹配网络参数产生明显变化;在负反馈区内,模式转化过程趋于连续.由于阻抗匹配网络的影响,E—H模式的跳变电流并不是总大于H—E模式的跳变电流.在不同导电地面积、阻抗匹配网络、气压下,模式转化过程中等离子体直流悬浮电位的变化呈现多样性. 关键词： 射频等离子体 感性耦合 容性耦合 模式转化     

Reactor modeling of magnetically enhanced capacitive RF discharge

Magnetic and collisional effects on capacitive radio frequency (RF) discharges for magnetically enhanced reactive ion etching (MERIE) are investigated. Using simplified plasma and sheath models, a collisional magnetic-sheath equation that governs the sheath dynamics under a de magnetic field crossed with a sinusoidal RF electric field is obtained. The sheath equation includes global effects of the bulk plasma. Together with the power-balance equation and the particle-conservation equation, the sheath equation is used to extract a circuit model and predict the electrical behavior of MERIE reactors. Numerical results on the plasma density and the power in MERIE reactors agree well with reported experimental results and the circuit model describes the repeated discharge properties well     

Modeling and optimization of the multichannel spark discharge

This paper reports a novel analytic model of this multichannel spark discharge, considering the delay time in the breakdown process, the electric transforming of the discharge channel from a capacitor to a resistor induced by the air breakdown, and the varying plasma resistance in the discharge process. The good agreement between the experimental and the simulated results validated the accuracy of this model. Based on this model, the influence of the circuit parameters on the maximum discharge channel number(MDCN) is investigated. Both the input voltage amplitude and the breakdown voltage threshold of each discharge channel play a critical role. With the increase of the input voltage and the decrease of the breakdown voltage, the MCDN increases almost linearly. With the increase of the discharge capacitance, the MDCN first rises and then remains almost constant. With the increase of the circuit inductance, the MDCN increases slowly but decreases quickly when the inductance increases over a certain value. There is an optimal value of the capacitor connected to the discharge channel corresponding to the MDCN. Finally, based on these results, to shorten the discharge time, a modified multichannel discharge circuit is developed and validated by the experiment. With only 6-kV input voltage, 31-channels discharge is achieved. The breakdown voltage of each electrode gap is larger than 3 kV. The modified discharge circuit is certain to be widely used in the PSJA flow control field.     

Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

大气压He-Ar射频容性放电Ar亚稳态粒子数密度

利用发射光谱法测量大气压He-Ar混合气体射频容性放电中的Ar亚稳态1s5(3s23p54s［3/2］2)粒子数密度。在不同的放电功率和气体组分下测量放电等离子体中的重要参数:气体转动温度、电子激发温度和Ar亚稳态1s5粒子数密度。结果表明:气体温度在不同放电功率及Ar气压在5103 Pa以内时变化不大,范围为300~350 K;电子激发温度随着放电功率的增加而增加,并且在Ar气压为4103 Pa时最大,在放电功率为70 W时达到0.58 eV;1s5粒子数密度随着放电功率以及电子激发温度的增加而增加,在放电功率为70 W、Ar气压为4103 Pa时达到1.53109 cm-3。