平面磁控阴极用于PEPC等离子体放电实验研究

 平面磁控阴极用于大面积等离子体放电具有大幅降低放电电压和放电气压的优点,是PEPC首选的放电途径。通过对不同尺寸、不同磁场强度和不同气压状态下放电实验研究表明：在较宽的磁场强度范围内都可实现全口径的均匀等离子体放电,电极几何尺寸的小量变化对放电均匀性的影响不大。给出了满足300mm×300mm放电腔的放电参数。     

平面磁控阴极用于PEPC等离子体放电实验研究

平面磁控阴极用于大面积等离子体放电具有大幅降低放电电压和放电气压的优点 ,是PEPC首选的放电途径。通过对不同尺寸、不同磁场强度和不同气压状态下放电实验研究表明 :在较宽的磁场强度范围内都可实现全口径的均匀等离子体放电 ,电极几何尺寸的小量变化对放电均匀性的影响不大。给出了满足 30 0 mm× 30 0 mm放电腔的放电参数。     

大气压等离子体针产生空气均匀放电特性研究

大气压空气放电由于脱离了真空装置,易于实现流水线生产,因而在工业上具有广泛的应用. 采用等离子体针装置在空气中产生了稳定的大气压均匀放电. 利用光谱法对等离子体的相关参数进行了空间分辨率测量,并通过光学方法对放电机理进行了研究. 结果表明,等离子体针产生的放电存在电晕放电和等离子体羽放电两种模式. 在稳定的等离子体羽放电模式中,发光分为强光区和弱光区. 弱光区放电的发展速度远大于强光区的发展速度,电子能量和电子密度均是弱光区比强光区大. 对均匀放电的气体温度和振动温度的研究表明,强光区放电遵循汤生击穿机理而弱光区为流光放电. 这些结果对大气压空气放电的工业应用具有重要意义. 关键词： 大气压均匀放电 等离子体针 发射光谱 放电机理     

正弦削波电压调控大气压氦气非平滑表面介质阻挡放电均匀性的仿真研究

在大气压介质阻挡放电的实际应用中,等离子体通常作用于非平滑表面.其表面形貌导致的电场畸变和表面电荷分布不均匀,会对放电的均匀稳定产生不利影响.建立了下介质板为波浪状的大气压氦气介质阻挡放电仿真模型,并采用正弦削波电压对放电均匀性进行调控.结果表明:相比于未削波情况下,放电均匀性提高,介质阻挡放电从柱状放电模式转换为准均匀放电模式.这可以归因于气隙电压降低而产生的不完全放电消散;随后的电子回流过程使残余空间电子与表面电荷中和,限制了表面电荷积累.随着削波比例增加,表面电荷分布更为均匀,进而导致电场分布在径向上波动减弱.此外,在一定削波范围内放电效率也有所提高.本研究揭示了削波电压对非平滑表面介质阻挡放电的影响机理,为介质阻挡放电均匀性调控提供了新的思路.     

电极构形对形成大面积放电均匀性影响

 设计并制作了空心阴极、钮扣阴极、针阴极和条形阴极，利用CCD照相，在5cm×5cm口径范围内，分别对四种阴极放电的空间均匀性进行了研究。实验表明，在预电离电压800V，主放电电压3kV和气体气压约30Pa的条件下，利用空心阴极放电，能够获得空间较为均匀的放电等离子体。放电等离子体可以用作普克尔盒电光开关的等离子体电极。     

电容耦合分区放电等离子体的研究

介绍了一种新的大气压下空气中等离子体产生方法─── 电容耦合分区放电。该方法综合了电晕放电和介质阻挡放电的优点,在大气压下可以生成大规模、高密度、均匀稳定的非平衡等离子体。其放电功率可达常规介质阻挡放电100倍以上,且可根据需要灵活调整。     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

较大体积的大气压空气介质阻挡放电特性研究

利用三电极介质阻挡放电装置, 在主放电区产生了较大体积的大气压空气均匀放电. 利用光学与电学方法, 对主放电特性进行了研究, 发现随驱动功率的不同, 主放电存在等离子体羽和等离子体柱两种模式, 等离子体羽的击穿电压随外加电压峰值的增加而减小. 利用光电倍增管对两种放电模式进行了空间分辨测量, 发现等离子体羽是以发光光层的形式传播, 而等离子体柱是连续放电. 通过采集两种放电的发射光谱, 对其振动温度和转动温度进行了测量. 发现两种放电模式的振转温度均随着U_p的增大而降低. 关键词： 介质阻挡放电 等离子体羽 等离子体柱 发射光谱     

感应耦合等离子体的1维流体力学模拟

 采用双极扩散近似的流体力学模型，通过数值模拟方法研究了射频感应耦合等离子体(ICP)中等离子体密度和电子温度等物理量的空间分布，其中射频源的功率沉积由动力学理论给出。分析了不同的射频线圈的驱动电流和放电气压对等离子体密度和电子温度空间分布的影响。在低气压下，等离子体密度基本上保持空间均匀分布。随着放电压强的增加，等离子体密度的分布呈现出明显的空间不均匀性。当线圈电流增大时，等离子体密度和电子温度都随着增大。     

Langmuir单探针诊断电子回旋共振等离子体参数分布特性

本文采用Langmuir单静电探针法,分析诊断了电子回旋共振等离子体的参数分布特性,并分析了微波功率、气压对轴向、径向等离子体空间分布的影响。在微波功率400W~650W范围内等离子体具有较高的密度及良好的径向均匀性。     

Spatial Uniformity of Atmospheric Pressure Discharges: A Simulation Study

Spatial uniformity is important in most applications of dielectric barrier discharges operating at atmospheric pressure. However, such uniformity is not easily achieved. Under many conditions, a filamentary structure usually develops. In this paper, we employ a two‐dimensional self‐consistent fluid model to explore the influence of several factors on the evolution of spatial structure of dielectric barrier discharges. In particular, we contrast the behavior of discharges in pure helium and He‐N₂ gas mixture, which represent the reduction in breakdown voltage of gas during the evolvement of uniform glow discharge plasma. The transformation from filamentary to uniform mode of discharge plasma is analyzed by the phenomenon of coalescence of filaments and we investigate the effect of several external discharge parameters, such as driving frequency and effect of overvoltage, and the dielectric constant of the barrier material for the uniform and filamentary discharge plasmas. This simulation study is useful to describe the spatio‐temporal profiles of electron density in different phases of the filamentary, uniform Townsend and glow discharge regimes under various constraints. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Characteristics of a dual‐radio‐frequency cylindrical inductively coupled plasma

The plasma parameters such as electron density, effective electron temperature, plasma potential, and uniformity are investigated in a new dual‐frequency cylindrical inductively coupled plasma (ICP) source operating at two frequencies (2 and 13.56 MHz) and two antennas (a two‐turn high‐frequency antenna and a six‐turn low‐frequency (LF) antenna). It is found that the electron density increases with 2 MHz power, whereas the electron temperature and plasma potential decrease with 2 MHz power at a fixed 13.56 MHz power. Moreover, the plasma uniformity can be improved by adjusting the LF power. These results indicate that a dual‐frequency synergistic discharge in a cylindrical ICP can produce a high‐density, low‐potential, low‐effective‐electron‐temperature, and uniform plasma.     

Enhancement of soft X-ray emission from a pinch plasma using a rotating plasma for pre-ionization

An experimental study on the enhancement of soft X-ray emission from a pinch plasma has been carried out by using a rotating plasma for pre-ionization. The rotating plasma is produced by a pulsed J×B cross-field discharge between coaxial electrodes, and subjected to a pinch discharge. Under an optimized discharge condition, it has been observed that UV emission of 251.6 nm (Ar III) soft X-ray intensity increases with increasing applied axial magnetic field B. At 400 G, the X-ray intensity is enhanced by a factor of 3 compared to that without the rotating plasma. It is considered that this result is due to the improved characteristics of the pre-ionization rotating plasma, which influences the uniformity and stability of subsequent pinch plasma.     

Plasma coating of nanoparticles in the presence of an external electric field

Film deposition onto nanoparticles by low-pressure plasma in the presence of an external electric field is studied numerically. The plasma discharge fluid model along with surface deposition and heating models for nanoparticles, as well as a dynamics model considering the motion of nanoparticles, are employed for this study. The results of the simulation show that applying external field during the process increases the uniformity of the film deposited onto nanoparticles and leads to that nanoparticles grow in a spherical shape. Increase in film uniformity and particles sphericity is related to particle dynamics that is controlled by parameters of the external field like frequency and amplitude. The results of this work can be helpful to produce spherical core-shell nanoparticles in nanomaterial industry.     

Influence of wire mesh electrodes on the volume and surface characteristics of dielectric barrier discharge of atmospheric pressure helium

The dielectric barrier discharge of helium in a 6 mm gap at atmospheric pressure was studied. In this paper, the influence of electric field distribution on the uniformity of DBD is analyzed theoretically and verified by experiments. The experimental results show that the mesh electrode produces a local enhancement effect by affecting the electric field and then produces corona discharge, which provides seed electrons for the subsequent discharge process. The effects of mesh diameter and size on discharge uniformity and stability are analyzed, the electrode structure parameters are optimized, the method of a segmented electrode is proposed, and the discharge process and charge distribution are studied. The electrical diagnosis results of plasma technology show that the segmented mesh electrode reduces the breakdown voltage of DBD and increases the charge deposition.     

不同氩气气压下铝丝电爆炸的二次放电特性

搭建了RLC放电回路,研究了不同氩气气压下铝丝电爆炸二次放电特性。结果表明,随着气压的变化,电爆炸二次放电电压曲线呈U形。为了阐明氩气和铝蒸气在二次放电过程中的作用,利用光谱仪和高速分幅相机分别研究了二次放电等离子体的自辐射光谱特性和空间分布特性,发现:在低气压下氩气会参与放电,放电通道在铝蒸气表面;高气压下主要是铝蒸气放电,氩气基本不参与放电过程,放电通道在铝蒸气内部。     

Influence of Gap Spacing between Dielectric Barriers in Atmospheric Pressure Discharges

The breakdown activity in helium atmospheric pressure dielectric barrier discharge (DBD) plasma is strongly modified by introducing small impurities (nitrogen (N₂) and air in ppm), although its precise implications for the behavior of discharge plasma is not evident under several constraints. In this simulation study, we investigate the influence of gap spacing between the dielectric barriers to explore the dynamic modification in the structure of discharge plasma in distinct phases of the discharge current pulse using a two‐dimensional fluid model in He‐air gas mixture. Specifically, the impact of nitrogen and air impurities is contrasted by exploring the spatial distributions of electrons in the breakdown phase under similar operating conditions. The filamentary mode of DBD plasma in He‐N₂ is transformed into uniform glow discharge in He‐air gas mixture by the dominant effect of Penning ionization. Finally, the outcomes of two‐dimensional fluid model are validated by comparing with three‐dimensional fluid model to provide the reliability of numerical simulations. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Discharge characteristics in plasma display cell at high frequency

We present the experimental and simulation studies of the glow discharge plasma in a macroscopic AC plasma display panel cell operating at a high frequency. We find that at high frequencies the plasma from the previous pulse has a significant influence on the discharge properties. The xenon excitation efficiency is larger than that at low frequencies.The discharge mode and efficiency at high frequencies have been discussed in this paper.     

等离子体气动激励机理数值研究

基于介质阻挡与准直流电弧放电的物理过程, 分析了它们的气动激励机理, 建立了各自的气动激励模型, 并分别研究了它们对低速和超声速流动的激励效果. 结果显示: 介质挡板放电等离子体气动激励机理是改变了连续流体中的三种力, 即由牛顿内摩擦引起的剪切应力、由电动力学引起的体积力及由压力突变引起的冲击力, 其中基于电动力学的体积力效应占主导地位; 临近空间环境中体积力的作用效果更强, 诱导速度更大; 超声速来流下准直流电弧放电气动激励机理主要是等离子体的热阻塞效应, 本文所建立的爆炸丝传热模型可以用于仿真其控制激波的过程; 热电弧对于超声速来流而言就像一个具有一定斜坡角度的虚拟突起, 可用于高超声速飞行器前体激波的控制.     

不同电极结构下介质阻挡放电电离特征的试验研究

由于具有工作气压高、放电均匀等特点,大气压介质阻挡放电成为近年来非平衡等离子体领域研究的主要技术。电极结构是电离特性的主要影响因素之一,因此,通过电极结构优化来改善电离特性,对等离子体放电设备的应用领域拓展及性能优化至关重要。为改善大气压介质阻挡放电的电离特性,产生高活性、高均匀性的低温等离子体,基于自主设计的同轴介质阻挡放电装置进行了不同电极结构的电离试验及参数诊断;在一个标准大气压、放电频率11.4 kHz、放电峰值电压5.4～13.4 kV条件下进行了氩气电离试验;采用原子发射光谱法（AES）对氩等离子体谱线的激发、分光进行了检测分析;研究了螺纹电极、齿状电极、圆柱电极放电的特征光谱参数及外施电压对介质阻挡放电特征参数的影响。结果表明,齿状电极放电所形成等离子体的放电强度更大且放电效果显著,电子平均能量利用率低,电子激励温度弱于圆柱电极;圆柱电极放电强度较弱,但易形成大面积均匀性等离子体;大气压环境下电子激励温度不因外源电压的升高而单调递加,这表明通道内微放电的主要特征并不依赖于外施电压的供给,而是取决于电极结构、气体组份、气体压强;增大外施电压仅能增加单位时间内微放电的数量,经整合电子激励温度可达3 500 K,符合典型的低温等离子体特征。