Resonance tracking and vibration stablilization for high power ultrasonic transducers

Resonant frequency shift and electrical impedance variation are common phenomena in the application of high power ultrasonic transducers, e.g. in focused ultrasound surgery and in cutting. They result in low power efficiency and unstable vibration amplitude. To solve this problem, a driving and measurement system has been developed to track the resonance of high power transducers and to stabilise their vibration velocity. This has the ability to monitor the operating and performance parameters of the ultrasonic transducers in real time. The configuration of the system, with its control algorithm implemented in LabVIEW (National Instruments, Newbury, UK), ensures flexibility to suit different transducers and load conditions. In addition, with different programs, it can be utilised as a high power impedance analyser or an instantaneous electrical power measurement system for frequencies in the MHz range. The effectiveness of this system has been demonstrated in detailed studies. With it, high transducer performance at high power can be achieved and monitored in real time.     

夹心式纵-扭复合模式压电超声换能器的共振频率

本文对夹心式纵－扭复合振动模式压电超声换能进行了研究，从换能器的等效电路出发，在无耦合时，得出换热能器纵向振动模式及扭转振动模式的各自共振频率方程，实验表明，换能器各自共振频率的测试值与理论计算值基本符合。     

Review of the design of power ultrasonic generator for piezoelectric transducer

The power ultrasonic generator (PUG) is the core device of power ultrasonic technology (PUT), and its performance determines the application of this technology in biomedicine, semiconductor, aerospace, and other fields. With the high demand for sensitive and accurate dynamic response in power ultrasonic applications, the design of PUG has become a hot topic in academic and industry. However, the previous reviews cannot be used as a universal technical manual for industrial applications. There are many technical difficulties in establishing a mature production system, which hinder the large-scale application of PUG for piezoelectric transducers. To enhance the performance of the dynamic matching and power control of PUG, the studies in various PUT applications have been reviewed in this article. Initially, the demand design covering the piezoelectric transducer application and parameter requirements for ultrasonic and electrical signals is overall summarized, and these parameter requirements have been recommended as the technical indicators of developing the new PUG. Then the factors affecting the power conversion circuit design are analyzed systematically to realize the foundational performance improvement of PUG. Furthermore, advantages and limitations of key control technologies have been summarized to provide some different ideas on how to realize automatic resonance tracking and adaptive power adjustment, and to optimize the power control and dynamic matching control. Finally, several research directions of PUG in the future have been prospected.     

夹心式纵-扭复合模式压电超声换能器的共振频率

本文对夹心式纵-扭复合振动模式压电超声换能器进行了研究．从换能器的等效电路出发，在无耦合时，得出了换能器中纵向振动模式及扭转振动模式的各自共振频率方程．实验表明，换能器各自共振频率的测试值与理论计算值基本符合．     

压电MEMS超声换能器研究进展

MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。     

厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

功率超声振动系统的研究进展

功率超声振动系统是功率超声技术中的关键部分,其主要部分包括功率超声换能器、超声变幅杆以及超声工具头或超声辐射器。本文就功率超声换能振动系统设计中经常遇到的一些关键问题进行了简要的归纳和总结,目的在于为功率超声换能器的优化设计和性能改善提供一些有用的设计指南和解决措施。同时,对一些新的功率超声振动系统进行了介绍,并简要分析了其发展趋势和应用领域。     

PZT厚膜及高频超声换能器的研究

近年来,基于PZT厚膜的超声换能器研究受到了广泛的重视。本文综述了PZT厚膜制备技术的发展情况,简要介绍了水下声纳和医用超声领域中PZT厚膜型高频超声换能器的应用研制进展。     

Study of the sandwiched piezoelectric ultrasonic torsional transducer

The sandwiched piezoelectric ultrasonic torsional transducer was studied. The transducer consists of front and back metal cylinders, and coaxially segmented, tangentially polarized, piezoelectric ceramic tubes. The torsional vibration of the tangentially polarized piezoelectric ceramic slender tube was studied first and its electromechanical equivalent circuit was derived. Based on the network theory and the electromechanical equivalent circuit, the torsional vibration of the piezoelectric ceramic cylinder, formed by stacking a number of identical short piezoelectric ceramic rings, was analysed and the electromechanical equivalent circuit of the piezoelectric ceramic stack in torsional vibration was developed. Finally, the sandwiched ultrasonic torsional transducer was studied and resonance frequency equations were derived which can be used to design and calculate the torsional transducers for different applications.     

对悬链式超声功率计测量误差的理论探讨

对在使用悬链式超声功率计测量时由于声源指向性所产生的误差进行了理论探讨，并对几个实例进行了数值计算，给出了相应的修正值。     

Boundary element simulation of backscattering properties for red blood with high frequency ultrasonic transducers

High frequency ultrasonic imaging (e.g. >30 MHz) from blood is difficult due to its tenuous backscattered pressure and the interference from adjacent tissues as well. To increase the sensitivity focused transducer has to be used, thus raising the complexity of interpreting the received signals. A numerical simulation of the ultrasonic scattering property from erythrocyte and rouleaux based on boundary element method was performed with experimental results based on a modified substitution method. The results (proportional relationship between backscattered pressure and frequency and the frequency limit for Rayleigh scattering) closely coincide with experimental data for erythrocyte. Rouleaux model results also show the dependence of degree of red cell aggregation on backscattering properties. The boundary element method serves as a good means to calculate the acoustic scattering from blood cells under arbitrary incident waves.     

Optimization design of high power ultrasonic circular ring radiator in coupled vibration

This paper presents a new high power ultrasonic (HPU) radiator, which consists of a transducer, an ultrasonic horn, and a metal circular ring. Both the transducer and horn in longitudinal vibrations are used to drive a metal circular ring in a radial-axial coupled vibration. This coupled vibration cannot only generate ultrasound in both the radial and axial directions, but also focus the ultrasound inside the circular ring. Except for the radial-axial coupled vibration mode, the third longitudinal harmonic vibration mode with relative large vibration amplitude is also detected, which can be used as another operation mode. Overall, the HPU with these two vibration modes should have good potential to be applied in liquid processing, such as sonochemistry, ultrasonic cleaning, and Chinese herbal medicine extraction.     

Modeling of a high frequency ultrasonic transducer using periodic structures

Solidly mounted integrated transducers with a Bragg cell inserted between the piezoelectric film and the substrate are investigated for high frequency ultrasonic applications. A numerically stable recursive one dimensional transmission/reflection model was used to analyze the behavior of the periodic structure. This theoretical analysis includes the study of the influence of the acoustic properties of the constitutive layer, the effect of the number of cells and their arrangement. A 35 MHz integrated transducer consisting in a PZT ceramic laid down on a Au/PZT Bragg cell deposited on a porous substrate was fabricated and characterized. Both theoretical and experimental results highlight the interest of using a periodic structure for high frequency ultrasonic applications.     

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

压电陶瓷非线性对大功率换能器结构参数匹配影响的计算分析

在Guyomar非线性模型基础上,通过机电等效法将晶堆前向负载作为等效质量和阻尼加入振动方程的质量项和阻尼项,推导了换能器振速、辐射声压级和谐振频率偏移率等表达式,计算分析了压电陶瓷非线性参数和结构参数对换能器声辐射性能的影响,研究了压电陶瓷的非线性对换能器结构参数匹配的影响。结果表明,换能器节面靠前,前盖板厚度越小,前盖板大径越小,都可以减少压电陶瓷非线性引起的换能器频率偏移。当设计频率确定时,压电陶瓷处于非线性工作域的换能器的结构参数有所减小。换能器加入辐射端匹配后,可以改善压电晶堆前向负载匹配,降低换能器的谐振频率偏移率。换能器激励电流也会出现频率偏移现象。在提高换能器激励电压时,换能器的结构参数应适当减小。得到的结论可为换能器设计提供理论依据和帮助。     

Vibration amplitude and induced temperature limitation of high power air-borne ultrasonic transducers

The acoustic impedances of matching layers, their internal loss and vibration amplitude are the most important and influential parameters in the performance of high power airborne ultrasonic transducers. In this paper, the optimum acoustic impedances of the transducer matching layers were determined by using a genetic algorithm, the powerful tool for optimizating domain. The analytical results showed that the vibration amplitude increases significantly for low acoustic impedance matching layers. This enhancement is maximum and approximately 200 times higher for the last matching layer where it has the same interface with the air than the vibration amplitude of the source, lead zirconate titanate-pizo electric while transferring the 1 kW is desirable. This large amplitude increases both mechanical failure and temperature of the matching layers due to the internal loss of the matching layers. It has analytically shown that the temperature in last matching layer with having the maximum vibration amplitude is high enough to melt or burn the matching layers. To verify suggested approach, the effect of the amplitude of vibration on the induced temperature has been investigated experimentally. The experimental results displayed good agreement with the theoretical predictions.     

Simple method for measuring vibration amplitude of high power airborne ultrasonic transducer: Using thermo-couple

Vibration amplitude of transducer’s elements is the influential parameters in the performance of high power airborne ultrasonic transducers to control the optimum vibration without material yielding. The vibration amplitude of elements of provided high power airborne transducer was determined by measuring temperature of the provided high power airborne transducer transducer’s elements. The results showed that simple thermocouples can be used both to measure the vibration amplitude of transducer’s element and an indicator to power transmission to the air. To verify our approach, the power transmission to the air has been investigated by other common method experimentally. The experimental results displayed good agreement with presented approach.     

超声检测用窄脉冲探头高阻抗背衬的研制

利用一种简单的压力装置，制作与PZT压电晶片匹配的背衬块，最高声阻抗可达25．1×106kg·m-2·s－1用于试制窄脉冲探头，可以实现1.5周期的脉冲．     

Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.     

Characterization of multilayered piezoelectric ceramics for high power transducers

In some circumstances, large vibrational displacements at ultrasonic frequency must be generated using a low voltage drive. This result cannot be obtained with monolithic PZT ceramics which require voltages larger than 1000 V to produce displacements of the micrometer order at resonance. The use of multilayered hard lead zirconate titanate ceramics as transduction material in resonant devices is experimentally investigated for Langevin-type transducers. Large amplitudes are obtained under low drive (5 microm under 10 V). Material constant (compliance, losses) variations under large dynamic stress are, at least, one order of magnitude larger than for monolithic ceramics. Depolarization is found to be a critical issue when the transducer is driven continuously. It is demonstrated that this problem can be solved by polishing the interfaces between different parts of the device and applying an electrical DC bias to the transducer.