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1.
采用射频磁控溅射和N2气氛退火处理制备了多晶Ga2O3薄膜和Cu掺杂Ga2O3薄膜.用X射线衍射仪、紫外-可见分光光度计、荧光光谱仪对Ga2O3薄膜和Cu掺杂Ga2O3薄膜的结构和光学性能进行了表征.结果表明,Cu掺杂后Ga2O3薄膜的结晶质量变差,透过率明显降低,吸收率增加,光学带隙减小.本征Ga2O3薄膜在紫外、蓝光和绿光出现了发光带,Cu掺杂后紫外和蓝光发射增强,且在475 nm 处出现了一个新的发光峰.  相似文献   

2.
赵银女 《光子学报》2012,41(10):1242-1246
β-Ga2O3是一种宽带隙半导体材料,能带宽度Eg≈5.0eV,在光学和光电子学领域有广泛的应用.用射频磁控溅射方法在Si衬底和远紫外光学石英玻璃衬底制备了本征β-Ga2O3薄膜及Zn掺杂β-Ga2O3薄膜,用紫外-可见分光光度计、X射线衍射仪、荧光分光光度计对本征β-Ga2O3薄膜及Zn掺杂β-Ga2O3薄膜的光学透过、光学吸收、结构和光致发光进行了测量,研究了Zn掺杂和热退火对薄膜结构和光学性质的影响.退火后的β-Ga2O3薄膜为多晶结构,与本征β-Ga2O3薄膜相比,Zn掺杂β-Ga2O3薄膜的β-Ga2O3(111)衍射峰强度变小,结晶性变差,衍射峰位从35.69°减小至35.66°.退火后的Zn掺杂β-Ga2O3薄膜的光学带隙变窄,光学透过降低,光学吸收增强,出现了近边吸收,薄膜的紫外、蓝光及绿光发射增强.表明退火后Zn掺杂β-Ga2O3薄膜中的Zn原子被激活充当受主.  相似文献   

3.
射频磁控溅射法制备N掺杂β-Ga2O3薄膜的光学特性   总被引:2,自引:2,他引:0  
在不同氨分压比(0~30%)下,用射频磁控溅射法在玻璃和硅衬底上制备了N掺杂β-Ga2O3薄膜.研究了氨分压比和退火对薄膜光学和结构特性的影响.N掺杂β-Ga2O3薄膜的微结构、光学透过率、光学吸收和光学带隙随着氨分压比的增加发生了显著变化.观察到了绿光、蓝光和紫外发光带,并对每个发光带进行了讨论.  相似文献   

4.
赵银女 《光子学报》2014,41(10):1242-1246
β-Ga2O3是一种宽带隙半导体材料,能带宽度Eg≈5.0eV,在光学和光电子学领域有广泛的应用。用射频磁控溅射方法在Si衬底和远紫外光学石英玻璃衬底制备了本征β-Ga2O3薄膜及Zn掺杂β-Ga2O3薄膜,用紫外 可见分光光度计、X射线衍射仪、荧光分光光度计对本征β-Ga2O3薄膜及Zn掺杂β-Ga2O3薄膜的光学透过、光学吸收、结构和光致发光进行了测量,研究了Zn掺杂和热退火对薄膜结构和光学性质的影响。退火后的β-Ga2O3薄膜为多晶结构,与本征β-Ga2O3薄膜相比,Zn掺杂β-Ga2O3薄膜的β-Ga2O3(111)衍射峰强度变小,结晶性变差,衍射峰位从35.69°减小至35.66°。退火后的Zn掺杂β-Ga2O3薄膜的光学带隙变窄,光学透过降低,光学吸收增强,出现了近边吸收,薄膜的紫外、蓝光及绿光发射增强。表明退火后Zn掺杂β-Ga2O3薄膜中的Zn原子被激活充当受主。  相似文献   

5.
制备Cu掺杂的纳米Sn O2/Ti O2溶胶,采用旋涂法在载玻片上镀膜,经干燥、煅烧制得Cu掺杂的Sn O2/Ti O2薄膜,通过对比实验探讨掺杂比例、条件、复合形式等对结构和性能的影响。采用XRD、SEM、EDS、UVVis等测试手段对样品进行表征,并以甲基橙为探针考察了其光催化降解性能。XRD测试结果显示薄膜的晶型为锐钛矿型,结晶度较高。SEM谱图显示薄膜表面无明显开裂,粒子分布均匀,粒径约为20 nm。EDS测试结果表明薄膜材料中含有Cu元素,谱形一致。UV-Vis吸收光谱表明Cu掺杂以及Sn O2/Ti O2的复合使得在近紫外区的光吸收比纯Ti O2明显增强。光催化实验表明Cu掺杂后使得Sn O2/Ti O2复合薄膜对甲基橙的光催化降解效率进一步提高,Sn O2/Ti O2复合薄膜的光催化活性在10%Cu掺杂时达到最高。  相似文献   

6.
Eu3+掺杂Gd2W2O9和Gd2(WO43纳米荧光粉发光性质研究   总被引:2,自引:0,他引:2       下载免费PDF全文
采用共沉淀法制备了不同Eu3+掺杂浓度的Gd2W2O9和Gd2(WO4)3纳米发光材料.通过对纳米材料样品的X射线衍射谱(XRD)和场发射扫描电镜(FE-SEM)照片的观察和分析,对样品的结构和形貌进行了表征.测量了各样品的发射光谱、激发光谱,计算了各样品的部分J-O参数和Eu3+5D0能级量子效率,绘制了不同基质中Eu3+发光的浓度猝灭曲线,对Eu3+掺杂的Gd2W2O9和Gd2(WO4)3纳米发光材料的光致发光性质进行了研究.实验结果证明,与较常见的Gd2(WO4)3:Eu一样,Gd2W2O9:Eu中Eu3+5D0→7F2跃迁的红色发光也能被395nm和465nm激发光有效激发,具有近紫外(蓝光)相对激发效率高,猝灭浓度大的优点,有潜力成为高效的近紫外(蓝光)激发白光LED用红色荧光粉材料.  相似文献   

7.
郑树文  范广涵  张涛  皮辉  徐开放 《物理学报》2014,63(8):87101-087101
利用密度泛函理论的平面波超软赝势方法,对纤锌矿T M_(0.125)Zn_(0.875)O(TM=Be,Mg)合金和Ga掺杂T M_(0.125)Zn_(0.875)O的结构参数、能带、电子态密度和光学能隙进行计算和分析,结果表明:T M_(0.125)Zn_(0.875)O掺入Ga容易实现并且结构更稳定,T M_(0.125)Zn_(0.875)O合金掺Ga能获得很好的n型材料改性,能隙由导带底Ga 4s态和价带顶O 2p态决定,由于Bllrstein-Moss移动和多体效应,Ga掺杂后的T M_(0.125)Zn_(0.875)O光学能隙变大,这与实验结果相一致,T M_(0.125)Zn_(0.875)O掺Ga材料可作透明导电薄膜应用到紫外和深紫外光电子器件中。  相似文献   

8.
采用脉冲激光沉积技术(PLD)在LaAlO3(100)单晶衬底上外延生长YBa2Cu3O7-δ-Y2O3多层薄膜,用X射线衍射技术(XRD)分析薄膜的物相结构和外延特性,通过原子力显微镜(AFM)观察薄膜的表面形貌.本文主要研究了最佳工艺参数下交替生长多层YBCO-Y2O3膜的超导性能.结果表明,YBa2Cu3O7-δ-Y2O3薄膜为纯c轴取向外延生长,临界电流密度Jc(H=0或H//C)均高于纯YBCO薄膜,纳米Y2O3起到磁通钉扎中心作用.  相似文献   

9.
本文采用分子束外延技术,通过对金属分子束的精确控制,在MgO(002)基底上成功生长了GaxN2∶Zn3-x合金薄膜.高分辨率单晶X光衍射仪表征结果表明GaxN2∶Zn3-x合金薄膜仍是以(400)Zn3N2为主导的复合晶体结构,对衍射数据的分析得到该薄膜晶粒尺寸小.用扫描电子显微镜和能谱射线分析仪对其表面和成分做了深入的分析和讨论,在固定的金属流量比的生长环境下,不同厚度的样品在成膜后x均为0.65,化学通式Zn2.35Ga0.65N2.该结果表明Ga元素属于重度掺杂,同时也体现了分子束外延技术在共掺杂技术中的优越性.本文也测量并讨论了Zn2.35Ga0.65N2薄膜的光学性能,实验得到的1.85 eV的光学带隙与理论推算基本吻合,说明Ga的掺入有Ga-N结构...  相似文献   

10.
李政达  焦腾  董鑫  刁肇悌  陈威 《发光学报》2022,43(4):545-551
高厚度的Ga2 O3薄膜能够提高器件的击穿电压,这种高厚度Ga2 O3薄膜往往是通过HVPE法制备的.然而HVPE法存在着成本高、设备少等缺点.本文通过金属有机化学气相沉积(MOCVD)工艺,以SiH4为n型掺杂源,在Ga2 O3衬底上生长了高厚度的n型β-Ga2 O3薄膜,并且研究了SiH4流量对β-Ga2 O3性质...  相似文献   

11.
The Cu2O and Au-doped Cu2O films are prepared on MgO(001) substrates by pulsed laser deposition. The X-ray photoelectron spectroscopy proves that the films are of Au-doped Cu2O. The optical absorption edge decreases by 1.6%after Au doping. The electronic and optical properties of pure and Au-doped cuprite Cu2O films are investigated by the first principles. The calculated results indicate that Cu2O is a direct band-gap semiconductor. The scissors operation of 1.64 eV has been carried out. After correcting, the band gaps for pure and Au doped Cu2O are about 2.17 eV and2.02 eV, respectively, decreasing by 6.9%. All of the optical spectra are closely related to the dielectric function. The optical spectrum red shift corresponding to the decreasing of the band gap, and the additional absorption, are observed in the visible region for Au doped Cu2O film. The experimental results are generally in agreement with the calculated results.These results indicate that Au doping could become one of the more important factors influencing the photovoltaic activity of Cu2O film.  相似文献   

12.
Ga doped ZnO nanorod arrays were prepared on silicon substrates in a mixture solution of zinc nitrate hexahydrate, methenamine, and gallium nitrate hydrate. Effect of synthesis conditions on crystal structures, morphologies, surface compositions, and optical properties was analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and photoluminescence techniques (PL). Experimental results reveal that Ga doping amount can reach 1.67 at% with the increase of gallium nitrate concentration. Ga doping greatly affects the morphologies of ZnO nanorod arrays. The photoluminescence spectra show a sharp UV emission and a broad visible emission. With Ga doping, UV emission has an apparent broadening effect and its peak shifts from 3.27 eV to 3.31 eV. The intensity ratio of UV emission to visible emission demonstrates that appropriate Ga doping amount is beneficial for the improvement of ZnO crystalline quality.  相似文献   

13.
Co与Cu掺杂ZnO薄膜的制备与光致发光研究   总被引:2,自引:0,他引:2       下载免费PDF全文
采用溶胶-凝胶旋涂法在玻璃衬底上制备了Co, Cu单掺杂及Co,Cu共掺杂ZnO薄膜.用金相显微镜观察了Co与Cu掺杂对ZnO薄膜形貌的影响.X射线衍射(XRD)研究揭示所有ZnO薄膜样品都存在(002)择优取向,在Cu单掺的ZnO薄膜中晶粒尺寸最大.对所有样品的室温光致发光测量都观察到较强的蓝光双峰发射和较弱的绿光发射,其中长波长的蓝光峰和绿光峰都能够通过掺杂进行控制.对不同掺杂源的ZnO薄膜发光性能进行了分析,认为蓝光峰来源于电子由导带底到锌空位能级的跃迁及锌填隙到价带顶的跃迁,绿光峰是由于掺杂造成的 关键词: ZnO薄膜 溶胶-凝胶 Co Cu掺杂 光致发光  相似文献   

14.
The pulsed laser deposition (PLD) technique is used to deposit Gallium doped zinc oxide (GZO) thin films on glass substrates at 250 with different Gallium (Ga) doping concentration of 0, 1.0, 3.0 and 5.0%. The influence of Ga doping concentration on structure, chemical atomic compositions, electrical and optical properties was investigated by XRD, XPS, Hall measurement and UV spectrophotometer, respectively. The relationship between electrical properties and Ga doping concentration was clarified by analyzing the chemical element compositions and the chemical states on the GZO films. It is found that the carrier concentrations and oxygen vacancies in the GZO films increase with increasing Ga doping concentration. The lowest resistivity (3.63 × 10−4 Ω cm) and barrier height of grain boundaries (14 mV) were obtained with 3% Ga doping. In particular, we suppose the band gap of 5% Ga doping sample larger than that of 3% Ga doping sample is due to the quantum size effect from the amorphous structure rather than Moss-Burstein shift.  相似文献   

15.
MOCVD生长的GaN单晶膜的蓝带发光研究   总被引:6,自引:0,他引:6  
对实验室用MOCVD方法生长的未掺杂GaN单晶膜的发光性能进行了研究。结果表明:在室温时未掺杂GaN单晶出现的能量为2.9eV左右蓝带发光与被偿度有较强的依赖关系。高补偿GaN的蓝带发射强,低补偿GaN的蓝带发射弱。对蓝带发光机理进行了探讨,认为蓝 导带电子过至受主能级的发光(eA发光)。观察到降低GaN补偿度能提高GaN带边发射强度。  相似文献   

16.
Cu incorporated zinc sulfide (ZnS) films are prepared by a RF magnetron sputtering technique and the influence of Cu doping concentration on the structural, morphological and optical properties is systematically analyzed using techniques like grazing incidence X-Ray diffraction (GIXRD), micro-Raman spectroscopy, atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDS) and UV–vis spectroscopy. XRD examination of the as-prepared films revealed the presence of polycrystalline structure with co-existence of cubic and hexagonal phases in the pure and lower Cu incorporated films. Increase in Cu doping concentration causes a gradual phase transformation from mixed phase to cubic phase. Micro-Raman spectra further confirms the structural phase modifications with the addition of Cu in ZnS. Morphological analysis shows compact distribution of elongated grain geometry with good connectivity and detectable grain boundary in the pure and Cu incorporated films. Increase in Cu incorporation results in the systematic reduction of RMS surface roughness. EDS analysis confirms the incorporation of Cu and surface vacancy defects in the doped films. All the films are transparent in the visible region and band gap calculation by Tauc plot shows that increase in Cu incorporation results in band gap renormalization.  相似文献   

17.
过渡金属与F共掺杂ZnO薄膜结构及磁、光特性   总被引:1,自引:0,他引:1       下载免费PDF全文
周攀钒  袁欢  徐小楠  鹿轶红  徐明 《物理学报》2015,64(24):247503-247503
采用溶胶-凝胶法在玻璃衬底上制备了过渡金属元素与F共掺杂Zn0.98-xTMxF0.02O (TMx=Cu0.02, Ni0.01, Mn0.05, Fe0.02, Co0.05)薄膜, 进而利用X射线衍射仪、扫描电子显微镜、紫外-可见透过谱、光致发光及振动样品磁强计等研究了薄膜的表面形貌、微结构、禁带宽度及光致发光(PL)和室温磁学特性. 研究表明: 掺杂离子都以替位的方式进入了ZnO晶格, 掺杂不会破坏ZnO的纤锌矿结构. 其中Zn0.93Co0.05F0.02O薄膜样品的颗粒尺寸最大, 薄膜的结晶度最好且c轴择优取向明显; Zn0.93Mn0.05F0.02O薄膜样品的颗粒尺寸最小, 薄膜结晶度最差且无明显的c轴择优取; Cu, Ni, Fe与F共掺杂样品的颗粒尺寸大小几乎相同. TM掺杂样品均表现出很高的透过率, 同时掺杂后的薄膜样品的禁带宽度都有不同程度的红移. PL谱观察到Zn0.98-xTMxF0.02O薄膜的发射峰主要由较强的紫外发射峰和较弱的蓝光发射峰组成. Zn0.93Mn0.05F0.02O薄膜样品的紫外发光峰最弱, 蓝光发射最强, 饱和磁化强度最大; 与之相反的是Zn0.96Cu0.02F0.02O薄膜, 其紫外发光峰最强, 蓝光发射最弱, 饱和磁化强度最小. 结合微结构和光学性质对Zn0.98-xTMxF0.02O薄膜的磁学性质进行了讨论.  相似文献   

18.
Fabrication and properties of ZnO:Cu and ZnO:Ag thin films   总被引:1,自引:0,他引:1  
Thin films of ZnS and ZnO:Cu were grown by an original metal–organic chemical vapour deposition (MOCVD) method under atmospheric pressure onto glass substrates. Pulse photo-assisted rapid thermal annealing of ZnO:Cu films in ambient air and at the temperature of 700–800 C was used instead of the common long-duration annealing in a vacuum furnace. ZnO:Ag thin films were prepared by oxidation and Ag doping of ZnS films. At first a closed space sublimation technique was used for Ag doping of ZnO films. The oxidation and Ag doping were carried out by a new non-vacuum method at a temperature >500 C. Crystal quality and optical properties were investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), and photoluminescence (PL). It was found that the doped films have a higher degree of crystallinity than undoped films. The spectra of as-deposited ZnO:Cu films contained the bands typical for copper, i.e. the green band and the yellow band. After pulse annealing at high temperature the 410 and 435 nm photoluminescent peaks were observed. This allows changing of the emission colour from blue to white. Flat-top ZnO:Ag films were obtained with the surface roughness of 7 nm. These samples show a strong ultraviolet (UV) emission at room temperature. The 385 nm photoluminescent peak obtained is assigned to the exciton–exciton emission.  相似文献   

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