太阳能玻璃表面高强度双层减反膜制备研究

用膜系设计软件设计了λ/4-λ/2的W型的双层减反射薄膜,优化了薄膜的光学常量,并使用溶胶-凝胶技术在玻璃基底上成功镀制了该双层折射率梯度的减反射薄膜.用椭圆偏振光谱仪、紫外-可见-近红外分光光度计、原子力显微镜等分析表征了薄膜的性能.结果表明,镀制了该双层薄膜的玻璃在400 nm～800 nm波段平均透过率增加了近6%,同时薄膜显示出了极佳的机械强度.     

新型溶胶-凝胶二氧化硅微孔增透膜的制备及性能研究

以正硅酸乙酯为前驱体,二甲基二乙氧基硅烷为造孔剂,采用溶胶凝胶技术在酸催化条件下制备了二氧化硅溶胶;采用提拉法在K9玻璃基片上双面镀膜,经500 ℃热处理,制备得到一种新型单层微孔二氧化硅增透膜。通过改变造孔剂加入量,膜层峰值透过率可达到99.7％,而硬度仍保持在2H以上,同时具有良好的耐摩擦性及粘附性。加速腐蚀实验表明,膜层的环境稳定性是常规膜层的10倍以上。由于该新型增透膜兼具高透过率、良好的机械性能以及很强的环境稳定性,因而在改善太阳能玻璃增透性能方面有极大的应用价值。     

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

This paper reports that SiO₂ is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO₂ layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850~nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2~J/cm$^{2}$.     

太阳能玻璃表面高强度双层减反膜制备研究

用膜系设计软件设计了λ/4-λ/2的W型的双层减反射薄膜,优化了薄膜的光学常量,并使用溶胶-凝胶技术在玻璃基底上成功镀制了该双层折射率梯度的减反射薄膜.用椭圆偏振光谱仪、紫外-可见-近红外分光光度计、原子力显微镜等分析表征了薄膜的性能.结果表明,镀制了该双层薄膜的玻璃在400 nm～800 nm波段平均透过率增加了近6%,同时薄膜显示出了极佳的机械强度.     

Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system(SWLOMS). In this paper, a broadband antireflection(AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering(IBS). Ta_2O_5 and Si O_2 were chosen as high and low refractive index coating materials,respectively. The optimized coating structure contains 9 non-quarter-wave(QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.     

基于傅里叶模方法的KDP晶体镀膜减反技术

 采用傅里叶模方法,分析了单点金刚石铣削后KDP晶体表面小尺度波纹的周期和幅值对单层增透膜折射率、厚度以及透射率的影响。研究表明：膜层最佳折射率在1.22左右,在此折射率条件下,保证透射率大于99%的单层增透膜的理想厚度范围应为180~220 nm,并且折射率和膜厚值的选取基本不受晶体表面小尺度波纹周期和幅值的影响。若只考虑SPDT法加工后KDP晶体表面小尺度波纹周期和幅值的实际范围,透射率基本不受波纹周期的影响,但却会随波纹幅值的增大而加速下降。理想镀膜条件下透射率最大值大于99%,并且通常在99.67%~99.94%之间。     

1.55 μm偏振无关半导体光放大器腔面减反膜的研制

设计并制作了1.55 μm偏振无关半导体光放大器腔面TiO2/SiO2多层减反膜, 工艺过程中设计并使用了反射率实时监控装置, 得到了低于5×10－4的腔面剩余反射率. 器件测试结果表明, 管芯在250 mA电流下仍处于未激射状态, 表明减反膜有效抑制了芯片的激射. 半导体光放大器的自发辐射（ASE）谱波动在0.4 dB以下, 3 dB带宽大于52 nm, 半导体光放大器小信号增益近27 dB, 在1520~1580 nm波长范围内偏振灵敏度小于0.5 dB.     

离子束溅射制备低应力深紫外光学薄膜

采用离子束溅射制备了Al F3、Gd F3单层膜及193 nm减反和高反膜系,分别使用分光光度计、原子力显微镜和应力仪研究了薄膜的光学特性、微观结构以及残余应力。在优选的沉积参数下制备出消光系数分别为1.1×10~(-4)和3.0×10~(-4)的低损耗AlF_3和GdF_3薄膜,对应的折射率分别为1.43和1.67,193 nm减反膜系的透过率为99.6%,剩余反射几乎为零,而高反膜系的反射率为99.2%,透过率为0.1%。应力测量结果表明,AlF_3薄膜表现为张应力而GdF_3薄膜具有压应力,与沉积条件相关的低生长应力是AlF_3和GdF_3薄膜残余应力较小的主要原因,采用这两种材料制备的减反及高反膜系应力均低于50 MPa。针对平面和曲率半径为240 mm的凸面元件,通过设计修正挡板,250 mm口径膜厚均匀性均优于97%。为亚纳米精度的平面元件镀制193 nm减反膜系,镀膜后RMS由0.177 nm变为0.219 nm。     

薄膜法布里-珀罗滤光片中反射高斯光束分裂现象

提出了一种模拟薄膜法布里-珀罗滤光片中反射光束分裂现象的方法.根据反射率曲线，简单解释了产生这个现象的原因.实验上制备了薄膜法布里-珀罗滤光片，观察和测量了反射光束分裂的现象，理论计算基本与实验结果符合. 关键词： 薄膜 法布里-珀罗 光束分裂     

Anti-Reflective Fluoride Coatings for Widely Tunable Deep-Ultraviolet Diode-Pumped Solid-State Laser Applications

An anti-reflective （AR） fluoride coating in the 170-230 nm spectral range is prepared by the thermal evaporation method for the applications of widely tunable deep-ultraviolet diode-pumped solid-state lasers. The transmittance of an AR coated calcium fluoride （CaF2） window in thickness 3mm is measured to be in the range of 95.8% at 170 nm to 97.1 % at 230 nm, with the maximum transmittance 99.2% and the minimum residual reflectance 0.04% appeared at 195 nm. The experimental results indicate that treating the AR coated window and the bare substrate with ultraviolet irradiation can significantly improve their optical performance.     

Plasmon based antireflection coatings containing nanostructured Ag and silica medium

The transmittance and scattering of the antireflection (AR) coatings based on nanostructured Ag and silica medium were enhanced by the exploitation of the localized surface plasmon resonance (LSPR). The transmittance and scattering values of AR coatings are relative to the annealing temperature, Ag concentration and thickness of AR coatings. The transmittance values of 95.7% and 97.2% of AR coatings with 0.10 wt.% Ag and annealed at 400 °C were obtained in the visible wavelength for a single-side and double-side coated glass slides, respectively. The enhanced transmittance and scattering of the AR coatings are primarily attributable to the large forward scattering of nanostructured Ag and the lesser refractive indices of Ag/SiO₂ coatings.     

SiO_2/TiO_2复合薄膜的制备及其可见光透过率

采用溶胶凝胶法在载波片上制备了SiO2/TiO2复合薄膜。研究了TiO2含量、热处理温度、热处理时间、薄膜层数及溶胶陈化时间对其可见光透过率的影响。结果表明:复合薄膜的可见光透过率随TiO2含量的增加而降低;当TiO2含量为20%时,薄膜会出现"变白"现象;当热处理温度为80℃时,透过率最高;当TiO2含量为30%时,溶胶陈化时间为3天,镀膜两次,80℃/3h热处理所得到的薄膜透过率可达到基体的100%,耐磨性良好。初步检测显示,该薄膜具有一定的光催化活性。     

Effects of dipolar interactions on the magnetic hyperthermia of Zn0.3Fe2.7O4 nanoparticles with different sizes

Tumor-targeted magnetic hyperthermia has recently attracted much attention.Magnetic nanoparticles(NPs) are heat mediator nanoprobes in magnetic hyperthermia for cancer treatment.In this paper,single cubic spinel structural Zn_0.3Fe_2.7O₄ magnetic NPs with sizes of 14 nm-20 nm were synthesized,followed by coating with SiO₂ shell.The SLP value of Zn_0.3Fe_2.7O₄/SiO₂ NPs below 20 nm changes non-monotonically with the concentration of solution under the alternating current(AC) magnetic field of 430 kHz and 27 kA/m.SLP values of all Zn_0.3Fe_2.7O₄/SiO₂ NPs appear a peak value with change of solution concentration.The solution concentrations with optimal SLP value decrease with increasing magnetic core size.This work can give guidance to the better prediction and control of the magnetic hyperthermia performance of materials in clinical applications.     

常压百级洁净度环境中SiO2薄膜稳定性

在常压百级洁净度环境下,采用三种不同折射率的SiO₂溶胶在熔石英基底上涂制四种不同薄膜,利用光学理论计算模拟了三种胶体涂制的膜层稳定性,通过实验考查了膜层光学指标随时间的变化规律。SiO₂薄膜能够显著提升光学元件透射率,但由于膜层表面的大量羟基及其多孔结构,SiO₂薄膜易吸附周围环境中的有机污染物及水分填充膜层孔隙,从而导致膜层折射率发生变化,影响膜层透射率、反射率等光学性能。实验结果发现,三种溶胶凝胶化学膜在常压百级环境中的有效期为80 d(绝对变化率小于0.1%),且三种胶体涂制的膜层稳定性由高到低依次为折射率1.19, 1.15, 1.25的膜层。     

溶胶-凝胶法制备TiO_2纳米薄膜及其光催化性能的研究

本文通过溶胶－凝胶工艺在玻璃表面制得了均匀透明的ＴｉＯ２纳米薄膜，其纳米颗粒的大小在５０～１５０ｎｍ范围内。该镀膜玻璃的透光性较好，在可见光范围内它相对于普通玻璃来说透光率在７２％以上。敌敌畏水溶液的光催化降解实验表明：起光催化作用的ＴｉＯ２晶型主要是锐钛矿型，因此热处理温度控制在５５０℃较好。随着镀膜次数的增加，光催化效率提高，当镀膜达到１０次时，光解率达到最高，再增加镀膜次数，光解率几乎没有提高。随着光催化效率的进一步提高，该类材料可望在环境保护、污水处理、空气净化等方面具有广阔的应用前景。     

Controlled fabrication of transparent and superhydrophobic coating on a glass matrix via a Green method

A facile, green method was explored for the organic-inorganic complex coating with superhydrophobic and transparent property on glass matrix. The glass surface was firstly treated with polyethylene glycol (PEG) and SiO₂ organic-inorganic solution and then modified with a layer of 1,1,1,3,3,3-Hexamethyldisilazane (HMDS). The glass samples were characterized by scanning electron microscopy (SEM), water contact angle (CA) measurement, and UV–Vis spectrophotometry. The results showed that the optical transmission over the visible range up to 89 % (in reference to 100 % transmission defined by bare glass substrate), and the water CA of the film reached 168^°. Superhydrophobic coatings with excellent optical transmittance will have potential applications in our daily life.     

缓冲层对LBO晶体上1 064 nm,532 nm二倍频增透膜的激光损伤阈值的影响

采用电子束蒸发方法在LBO晶体上制备了无缓冲层和具有不同缓冲层的1 064 nm,532 nm二倍频增透膜.利用Lambda900分光光度计和调Q脉冲激光装置对样品的光学性能和抗激光损伤性能进行了测试分析.结果表明,所有样品在1 064 nm和532 nm波长的剩余反射率都分别小于0.1%和0.2%.与无缓冲层样品相比,采用SiO2和MgF2缓冲层薄膜的激光损伤阈值分别提高了23.1%和25.8%,而Al2O3缓冲层的插入却导致薄膜的激光损伤阈值降低.通过观察薄膜的激光损伤形貌,分析破斑的深度信息和电场分布,表明LBO晶体上1 064 nm,532 nm二倍频增透膜的激光损伤破坏主要表现为膜层剥落,激光产生的热冲击应力使薄膜应力发生很大变化,超过膜层之间的结合而引起膜层之间的分离.采用SiO2或MgF2缓冲层可改进Al2O3膜层的质量,从而有利于提高薄膜的激光损伤阈值.     

Research on the UV Dielectric Coatings with High Damage Threshold

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Surface modification on a glass surface with a combination technique of sol-gel and air brushing processes

This study fabricated the large area and optically transparent superhydrophobic silica based films on glass surface with optimized hardness. A silane coupling agent, tetraethoxysilane (TEOS), effectively bonds silica particles onto the glass substrate. Desired surface roughness was obtained by adjusting nano silica particles concentration of the precursors prepared by the sol-gel process. Silica suspension was coated onto the glass substrate by the air brushing methods. This method can deposit a uniform, transparent coating on the glass substrate efficiently. Diluting the precursor by adding ethanol or a mixture of D.I. water and ethanol further improved the transmittance and superhydrophobicity efficiency. The results showed that as the silica particle concentration and the thickness of the coating were increased, the surface roughness was enhanced. Rougher surface displayed a higher superhydrophobicity and lower transmittance. Therefore, the concentration of silica particle, volume of coatings, and the ratio of ethanol and D.I. water are of great importance to deposit a transparent, superhydrophobic coating on glass.     

Superhydrophobic,antireflective, flexible hard coatings with mechanically ultra-resilient moth-eye structure for foldable displays

Biomimetic inspiration from the moth-eye structure has led to many studies combining nanoimprint lithography (NIL) to realize low cost and large area anti-reflection (AR) coatings. However, the scope of application is severely limited by poor mechanical performance due to the intrinsic properties of the coating materials and the nanosized patterns. In this work, we demonstrate a moth-eye structured epoxy-siloxane molecular hybrid (ME-ESMH) fabricated using single UV-based NIL (UV-NIL) on a colorless polyimide (CPI), to be utilized as a flexible cover window (FCW) for foldable displays. Low reflection, a superhydrophobicity and good inward foldability were achieved, together with excellent thermal and chemical resistance. Furthermore, in situ uniaxial compression tests revealed that the fabricated structure can be elastically deformed and nearly restored to its original shape even after a large degree of compression. Our findings provide an easy-to-integrate solution for flexible hard coatings with superhydrophobic and AR properties, applicable to foldable optoelectronics.