Two wavelength simultaneous DSPI and DSP for 3D displacement field measurements

A novel optical system is proposed that implements digital speckle pattern interferometry (DSPI) and digital speckle photography (DSP) simultaneously using two wavelength illumination of an object for simultaneous measurement of all three components of the displacement vector field. A collimated red light illuminates both the object and a reference surface in a DSPI configuration which is sensitive to out-of-plane displacement field while a blue light illuminates the object in a DSP configuration which is sensitive to in-plane displacement fields. A color 3-CCD camera records the red and blue lights individually through its red and blue channels, respectively. Two reference images and one image in the deformed state of the object are required for quantitative measurement. Experimental results are presented to validate the system.     

一种可用于离面位移测量的光路的优化设计

为了实现对复杂三维物体表面轮廓、小空间内物体的纵向位移或振动等测量，有必要研制高分辨力、非接触的光学检测系统。由于激光多普勒技术具有动态响应快、线性度好、非接触、测量精度高等特点而优先被用于复杂三维物体离面位移的测量。但是物体表面散射光的多普勒信号非常微弱，因此解决信号的强度、信噪比则是实现测量的关键。研究了激光多普勒技术及散射光相位的无规变化的统计规律，设计出一种空间分辨力很高的参考光路，将它用于固体离面位移测量效果很好，其相对误差为0．3％。     

物光参考光同光轴的体全息存储光学系统设计

将两块漫射板分别置于输入面的两侧,使物光和参考光同光轴,可以使体全息存储傅里叶变换光学系统更为紧凑。然而,在这种全息存储光学系统中,物光和参考光的总数值孔径较物光数值孔径大很多。分析这种体全息存储光学系统物光和参考光光路的设计要求和光学参量的确定;采用多重结构方法对物光正向光路、逆向光路和参考光光路同时优化设计,实现对物光光路二对物像共扼位置控制像差,并满足参考光光路的要求;给出前后组焦距分别为33 mm和30 mm的物光和参考光同光轴,前工作距为30 mm,物光和参考光总数值孔径为0.53的全息存储光学系统的设计结果。系统的波像差小于0.071λ,达到衍射极限。     

New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes

We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach—Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach—Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates.     

基于相位共轭的动态体全息衍射特性的实时非破坏性测量

基于相位共轭技术,提出了一种动态体全息衍射特性的实时测量方法.在光学系统设计中,通过调整使得物光和参考光较强,而与参考光共轭的再现光非常弱（约为参考光的1/1 000）,借助非常微弱的共轭再现光实现了动态体全息的非破坏性实时测量.三束光的强度和偏振态可通过1/4波片、偏振片和衰减片进行调节和组合,可记录光强调制型或偏振态调制型体全息.本方法适合于光致折射率变化和光致变色材料体全息的测量.     

Synchronous self-elimination of autocorrelation interference in Fourier-domain optical coherence tomography

We have developed a new algorithm and configuration for self-eliminating the autocorrelation of the object wave in Fourier-domain optical coherence tomography. A self-interferogram of the object wave is acquired synchronously with the standard interferogram of the recombined object and reference waves. The former is then subtracted from the latter after Fourier transformation. The algorithm is validated by numerical simulation and by experimental measurement of a U.S. Air Force target and a feline eye.     

3D deformation and shape measurement using phase-stepping DSPI

A new optical arrangement of phase-stepping digital speckle pattern interferom-etry is presented.The system can be used to measure 3D deformation and shape of a curvesurface simultaneously.The phase at each pixel can be determined by appling phase-steppingtechniques.This not only provides high accurate measurement results,but also permits auto-matic analysis of the experimental data.A speckled object reference beam is used,and itmakes the system has the advantage that the measurements are less sensitive to vibration andwhole body motion.     

A position sensor based on grating projection with spatial filtering and polarization modulation

A position sensor based on grating projection with spatial filtering and polarization modulation is presented. A grating is projected onto the object to be measured through a 4f optical system with a spatial filter. After reflected by the object, the grating projection is imaged on a detection grating through an other 4f optical system to form moit(e) fringes.The polarization modulated moir(e) signal is deteted to obtain the position of object.The measurement is independent of the incident intensity on the projection grating and the reflectivity of the object to be measured. In experiments, the effectiveness of the position sensor is proved, and the root mean square (RMS) error at each measurement position is less than 13 nm.     

基于光学涡旋相移技术的离面位移测量

设计了基于光学涡旋相移技术的离面位移测量实验方案,实现了电子散斑干涉中相移的数字控制.该方法利用输入液晶空间光调制器中的叉形光栅产生涡旋光束,通过涡旋光束绕轴的旋转产生相移;同时,产生的涡旋光束又作为参考光与物光干涉.实验中,在物体发生离面位移前后依次输入四幅叉形光栅,产生相移步长为π/2的涡旋光束,利用CCD获得涡旋光与物光的干涉光场,从而获得离面位移场的包裹相位;再通过解包裹,获得物体离面变形的相位变化.光学涡旋相移法可应用于离面位移测量.     

基于光学测棒的立体视觉坐标测量系统的研究

提出了一种基丁测量与校准功能合一的光学测棒的立体视觉坐标测最系统.采用光学测棒作为成像目标,通过任意放置的两台摄像机获取测棒上的发光特征点的图像实现被测物体三维坐标的测量,同时利用测量数据定期对两台摄像机外部方位参数进行校准.深入研究了两台摄像机内部参数和外部方位参数校准过程中的校准件和校准算法的设计,以及系统测量建模等关键技术,提出了相应的解决方案,减小了摄像机内外参数校准及测量模型对测量结果的影响,提高系统的测量精度.实验结果表明.该系统的最大测量误差为0.11 mm.     

三维面形测量数据的计算全息可视化

提出利用计算机制全息进行三维面形测量数据立体重现的技术。首先利用三维面形测量技术同时获取三维物体的强度和距离像；然后根据三维面形测量数据，设计和制作菲涅耳计算全息图；最后将计算全息和光学全息相结合，以菲涅耳计算全息图的光学再现像为对象，记录光学像全息。这样既解决了计算机制全息术中真实三维物体立体信息数据捕捉的问题，又为三维面形检测提供了一个行之有效的立体重构技术。给出了这种方法的原理、计算全息的设计、制作方案和实验验证结果。     

基于弹光调制的高灵敏旋光测量

为了实现连续稳定、高速、高精度和高灵敏度的光学旋光测量, 考虑到弹光偏振调制技术具有高的调制频率、调制纯度、调制精度和良好的调制稳定度等应用优势, 设计了一种基于弹光调制的旋光测量新方案. 检测激光经起偏器、测量样品、弹光调制器和检偏器到探测器的光路设计, 使得测量系统选用较少的光学器件, 最大化地降低了光学器件可能引入的测量误差; 起偏器和检偏器偏振轴相对于弹光调制器快轴方向分别取0°和45°的光学安排, 并选择弹光调制的二倍频信号作为研究对象, 有效避免了弹光调制器剩余双折射对旋光样品测量的影响, 提高了旋光测量精确度; 将探测器输出调制信号的直流和交流分开输出, 并将交流信号进行前置放大处理, 然后再锁相输出, 进一步提高了测量灵敏度. 设计了将激光调制为圆偏光, 然后精确调节起偏器来替代样品的旋光测量验证试验, 确定了系统旋光测量的比列系数, 并且获得旋光测量灵敏度为3.15×10^-7 rad, 测量精度优于0.3%. 所以, 本方案实现了较高灵敏度旋光测量, 有望应用于高灵敏旋光测量领域, 并且本方案的实验可为高灵敏旋光测量系统的定标提供参考.     

A genetic optical interferometric inspection on micro-deformation

This paper describes a feasibility study of an optical method for measuring nanoscale deformation of micro-components that are commonly employed in the field of microelectromechanical systems (MEMS). Both theoretical and experimental results demonstrate that an optical interference fringe pattern resulted from an air gap consisting of two surfaces (object and reference surfaces) is a simple function of the deformation of the micro-component. A microscopic system incorporating a coaxial monochromatic light illumination and a high resolution CCD sensor is utilized to record the interference fringe pattern. The experimental results on different micro-components show that the proposed technique is applicable to the deformation measurement on micro-components of MEMS devices.     

基于光学原理的三维形貌测量技术研究

为了加快产品开发和保证产品制造质量需要对物体的三维形貌进行精确的测量。光学形貌测量技术由于其高分辨率、无破坏、数据获取速度快等优点而被认为是最有前途的三维形貌测量方法。介绍了各种基于光学原理的三维形貌测量技术,并作了比较深入的分析和对比,为正确和广泛应用三维形貌测量技术提供了参考。给出了在该领域的发展方向和研究热点。     

Optical heterodyne measurement of vibration phase

An optical heterodyne system for measuring a vibration phase, which uses a frequency-shifted and phase-modulated reference beam, is proposed. This system is applicable to a rough surface. By using the light scattered by a standard vibrating point on the object surface as the reference beam (local reference beam technique), effects of the uniform displacement of the object can be eliminated, i.e. only the vibration component is detected with no sensitivity to the uniform displacement. Preliminary experiments demonstrate the validity of the theory.     

斜光轴面内位移测量的数字散斑相关法研究

以工程环境中远距离位移和位移场的光学测量为研究课题,分析了远距离斜光轴成像时,像模糊和成像位置变化对白光数字散斑相关方法产生的影响,给出了这两种影响的误差理论计算公式。提出使用参考测量技术克服斜光轴成像位置变化带来影响,给出一种新的远距离斜光轴高精度测量面内位移的方法,在2～50m处作静载挠度测量,其最大相对误差小于1％,测量精度在实验室环境和工程测量环境中都得到了验证。该方法无需共轴光路的测量环境要求,特别适用于桥梁、高速公路立交桥的静载挠度测量等工程应用。使用高速图像采集卡,该方法可应用于斜光轴动态位移测量,拓展了数字散斑相关方法的应用范围。     

基于剪切散斑干涉技术的物体变形动态检测

为使仅适用于静态测量的空间相移剪切散斑干涉系统可用于物体变形的动态测量,在对传统剪切散斑干涉系统加以改进的基础上,提出一种物体变形动态检测方法。将检测系统中的压电陶瓷控制器用参考镜代替,减少了物理装置控制与执行的时间。对于物体发生变形的同一状态,仅需采集一幅干涉图像即可满足后期计算,加以二维连续小波滤波和最小二乘相位解包算法,能满足物体变形动态在线检测的需求。理论和实测实验表明,该方法能快速可靠地检测出物体动态形变,整个系统的最大误差范围在-1.5 rad~1.5 rad之间,整个检测过程最大误差百分比为6.4%,有较高的精度和实用性,为新型剪切散斑干涉测量系统的改进和设计提供参考。     

倾斜式测量系统的傅里叶变换轮廓术研究

在传统傅里叶变换轮廓术的研究基础上,本文提出了一种倾斜式测量系统的傅里叶变换轮廓术,该技术放宽了传统傅里叶变换轮廓术测量系统的三个约束条件:CCD成像系统的光轴不需要与参考平面垂直,即有一定的倾斜度;投射系统的出瞳和CCD成像系统的入瞳中心之间的连线不需要与参考平面平行;投射系统的光轴和CCD成像系统的光轴不在同一平面内,且不交于参考平面上一点. 并且通过严格的理论分析,推导出高度与相位之间的关系式,与传统傅里叶变换轮廓术相比较,在保证一定的测量精度的前提下,倾斜式测量系统具有更强的实用性和可操作性. 关键词： 傅里叶变换轮廓术 倾斜式 测量系统 相位     

Measurement of spatial object''''s exterior attitude based on linear CCD

It is difficult to realize real-time measurement of exterior attitude by the traditional systems based on the area image sensor which have conflict between speed and accuracy.The subsystem for three-dimensional (3D) coordinate rcconstruction of point target (S3DCRPT) which is composed of three one-dimensional (1D) cameras based on linear charge-coupled device (CCD) can determine the distant light spots' spatial position. The attitude angle of the measured object is determined by the spatial solution while the coordinate reconstruction is separately carried on by the S3DCRPT with some point cooperation targets (PCTs) on the measured object. A new optical system is designed to solve the interference problem with one-to-one relationship between the PCTs and the S3DCRPT optical subsystems,which improves the measurement accuracy and saves space. The mathematical model of the attitude measurement is established,and partial and global calibrations are realized for the multi-camera attitude measurement system.The test results show the feasibility of the exterior attitude measurement based on linear CCD.     

红外光纤测温仪光学系统设计原理

介绍红外光纤测温仪光学系统的设计原理,指出在测温仪中严格限制红外视场来消除杂散辐射的干扰可使温度测量值不随被测目标距离的改变而变化。