Total dose radiation effects on SOI NMOS transistors with different layouts

Partially-depleted Silicon-On-Insulator Negative Channel Metal Oxide Semiconductor (SOI NMOS)transistors with different layouts are fabricated on radiation hard Separation by IMplanted OXygen (SIMOX)substrate and tested using 10 keV X-ray radiation sources.The radiation performance is characterized by transistor threshold voltage shift and transistor leakage currents as a function of the total dose up to 2.0×106 rad(Si).The results show that the total dose radiation effects on NMOS devices are very sensitive to their layout structures.     

Total dose radiation effects on SOI NMOS transistors with different layouts

Partially-depleted Silicon-On-Insulator Negative Channel Metal Oxide Semiconductor (SOI NMOS) transistors with different layouts are fabricated on radiation hard Separation by IMplanted OXygen (SIMOX) substrate and tested using 10keV X-ray radiation sources. The radiation performance is characterized by transistor threshold voltage shift and transistor leakage currents as a function of the total dose up to 2.0×10⁶ rad(Si). The results show that the total dose radiation effects on NMOS devices are very sensitive to their layout structures.     

双极线性稳压器电离辐射剂量率效应及其损伤分析

为了对双极线性稳压器在电离辐射环境下损伤变化特征及其剂量率效应进行研究,选择一组器件进行⁶⁰Co γ高低剂量率的辐照和退火试验. 结果表明线性稳压器的输出电压、最大负载电流、线性调整率、压降电压等多个关键参数都有不同程度的蜕变. 且各器件在高低剂量率下的辐照响应略有不同,表现出不同的剂量率效应. 文中通过多种形式的测试结果分析,系统地讨论了各参数变化的原因及其内部各模块对稳压器功能的影响. 结合电离损伤退火特性,探讨了各剂量率效应形成的原因. 这不但对工程应用考核提供了参考,而且为设 关键词： 双极线性稳压器 总剂量效应 剂量率效应 辐射损伤     

A novel technique for predicting ionizing radiation effects of commercial MOS devices

A nondestructive selection technique for predicting ionizing radiation effects of commercial metal-oxide-semiconductor (MOS) devices has been put forward. The basic principle and application details of this technique have been discussed. Practical application for the 54HC04 and 54HC08 circuits has shown that the predicted radiation-sensitive parameters such as threshold voltage, static power supply current and radiation failure total dose are consistent with the experimental results obtained only by measuring original electrical parameters. It is important and necessary to choose suitable information parameters. This novel technique can be used for initial radiation selection of some commercial MOS devices.     

微电路FPGA的γ电离总剂量效应与加固技术

讨论了Actel公司的FPGA芯片A1280XL在有偏置和无偏置条件下的γ电离总剂量效应,试验结果表明偏置条件对FPGA芯片电离总剂量效应有较大影响,在有偏置下FPGA芯片A1280XL失效阈最小,为12.16 Gy(Si);无偏置时FPGA失效阈最大,为33.2 Gy(Si)。对芯片内部结构进行了辐射效应分析,并提出一些加固方法提高器件的抗总剂量能力,如电路设计中采用冗余技术来实现对故障的检测和隔离,以及选取适当的屏蔽材料对器件进行屏蔽。     

基于环形栅和半环形栅N沟道金属氧化物半导体晶体管的总剂量辐射效应研究

在商用0.35 μm互补金属氧化物半导体工艺上制备了两种栅氧化层厚度(t_ox)的条形栅、环形栅和半环形栅N沟道金属氧化物半导体 (n-channel metal oxide semiconductor, 简记为NMOS) 晶体管, 并进行了2000 Gy(Si)的总剂量辐射效应实验. 实验结果显示, 栅氧厚度对阈值电压漂移的影响大于栅氧厚度的3次方. 对于t_ox为11 nm的低压NMOS晶体管, 通过环形栅或半环形栅的加固方式能将其抗总剂量辐射能力从300 Gy(Si)提高到2000 Gy(Si)以上; 而对于t_ox为26 nm的高压NMOS晶体管, 通过环栅或半环栅的加固方式, 则只能在低于1000 Gy(Si)的总剂量下, 一定程度地抑制截止漏电流的增加. 作为两种不同的版图加固方式, 环形栅和半环形栅对同一t_ox的NMOS器件加固效果类似, 环形栅的加固效果略优于半环形栅. 对于上述实验结果, 进行了理论分析并阐释了产生这些现象的原因. 关键词： 环形栅 半环形栅 总剂量 辐射效应     

硅双极器件及电路电离总剂量辐照损伤研究

针对硅双极器件及其构成的双极集成电路有着如低剂量率辐照损伤增强效应等不同于其他类型电路的特殊的辐照响应问题, 分析了空间辐射电离总剂量环境及铝屏蔽作用, 双极晶体管及电路总剂量辐照损伤机理, 低剂量率辐照损伤增强效应、规律和电参数变化。通过选取几种典型的双极晶体管和电路进行地面辐照模拟试验和测试, 证明了双极器件及电路的关键参数受辐照影响较大, 特别是对低剂量率辐照损伤增强效应敏感, 低剂量率辐照损伤增强因子基本都大于1.5, 不同双极器件和电路的低剂量率辐照损伤增强效应有着明显的不同, 与器件类型、加工工艺(如氧化层厚度)等密切相关。     

Comparison of radiation degradation induced by x-ray and 3-MeV protons in 65-nm CMOS transistors

The total ionizing dose(TID) response of 65-nm CMOS transistors is studied by 10-ke V x-ray and 3-Me V protons up to 1 Grad(SiO_2) total dose.The degradation levels induced by the two radiation sources are different to some extent.The main reason is the interface dose enhancement due to the thin gate oxide and the low energy photons.The holes' recombination also contributes to the difference.Compared to these two mechanisms,the influence of the dose rate is negligible.     

基于4晶体管像素结构的互补金属氧化物半导体图像传感器总剂量辐射效应研究

对基于4晶体管像素结构互补金属氧化物半导体图像传感器的电离总剂量效应进行了研究,着重分析了器件的满阱容量和暗电流随总剂量退化的物理机理.实验的总剂量为200 krad(Si),测试点分别为30 krad(Si),100 krad(Si),150 krad(Si)和200 krad(Si),剂量率为50 rad(Si)/s.实验结果发现随着辐照总剂量的增加,器件的满阱容量下降并且暗电流显著增加.其中辐照使得传输门沟道掺杂分布发生改变是满阱容量下降的主要原因,而暗电流退化则主要来自于浅槽隔离界面缺陷产生电流和传输门-光电二极管交叠区产生电流.实验还表明样品器件的转换增益在辐照前后未发生明显变化,并且与3晶体管像素结构不同,4晶体管像素结构的互补金属氧化物半导体图像传感器没有显著的总剂量辐照偏置效应.     

CMOS电路总剂量效应最劣偏置甄别

采用电路分析和解析建模方法研究了CMOS电路中甄别总剂量效应最劣辐照与测试偏置的问题。通过引入小规模模拟电路和数字电路的例子进行具体分析,获取了不同电路的最劣偏置情况。对于数字电路,引入了敏感因子的概念用于定量计算不同辐照与测试偏置组合下电路的总剂量效应敏感程度。利用实测数据或电路仿真结果对甄别结果进行了一一验证,得到相一致的结论,证明了该研究思路的正确性。     

浮栅ROM集成电路空间低剂量率辐射失效时间预估

利用60Coγ射线开展了浮栅ROM集成电路（AT29C256）总剂量辐照实验， 研究了集成 电路功耗电流和出错数在不同剂量率下的辐射响应；按照定义的失效标准和外推实验技术， 探索了集成电路参数失效与功能失效时间随辐射剂量率的变化关系；根据失效时间与辐射剂 量率的函数关系，预估了浮栅ROM集成电路AT29C256(9911)和AT29C256(9939)空间低剂量率辐射失效时间. 关键词： 低剂量率 辐射损伤 失效时间 总剂量     

浮栅ROM器件x射线剂量增强效应实验研究

给出了浮栅ROM器件在钴源和北京同步辐射装置(BSRF)3W1白光束线辐照的实验结果;比较了两种辐照的实验结果及其损伤异同性.通过实验在线测得位错误数随总剂量的变化,给出相同累积剂量时x射线辐照和γ射线辐照的总剂量效应损伤等效关系.获得了浮栅ROM器件x射线剂量增强因子.这些结果对器件抗x射线辐射加固技术研究有重要价值 关键词： EEPROM x射线 剂量增强剂量效应 同步辐射     

Combined effects of cycling endurance and total ionizing dose on floating gate memory cells

The combined effects of cycling endurance and radiation on floating gate memory cell are investigated in detail, and the obtained results are listed below. (i) The programmed flash cells with a prior appropriate number of program and easing cycling stress exhibit much smaller threshold voltage shift than without those in response to radiation, which is ascribed mainly to the recombination of trapped electrons (introduced by cycling stress) and trapped holes (introduced by irradiation) in the oxide surrounding the floating gate. (ii) The radiation induced transconductance degradation in prior cycled flash cell is more severe than those without cycling stress in the programmed state or erased state. (iii) Radiation is more likely to set up the interface generation in programmed state than in erased state. This paper will be useful in understanding the issues involved in cycling endurance and radiation effects as well as in designing radiation hardened floating gate memory cells.     

Total dose radiation response of modified commercial silicon-on-insulator materials with nitrogen implanted buried oxide

Nitrogen ions of various doses are implanted into the buried oxide(BOX) of commercial silicon-on-insulator(SOI) materials,and subsequent annealings are carried out at various temperatures.The total dose radiation responses of the nitrogen-implanted SOI wafers are characterized by the high frequency capacitance-voltage(C-V) technique after irradiation using a Co-60 source.It is found that there exist relatively complex relationships between the radiation hardness of the nitrogen implanted BOX and the nitrogen implantation dose at different irradiation doses.The experimental results also suggest that a lower dose nitrogen implantation and a higher post-implantation annealing temperature are suitable for improving the radiation hardness of SOI wafer.Based on the measured C-V data,secondary ion mass spectrometry(SIMS),and Fourier transform infrared(FTIR) spectroscopy,the total dose responses of the nitrogen-implanted SOI wafers are discussed.     

超深亚微米器件总剂量辐射效应三维数值模拟

本文分析了浅槽隔离(STI)结构辐射诱导电荷的分布情况,给出一种模拟超深亚微米器件总剂量辐射效应的新方法.研究结果表明,如果在栅附近沿着STI侧墙不加辐照缺陷,仿真出的0.18 μm超深亚微米晶体管亚阈区I-V特性没有反常的隆起,并且能够很好地反映试验结果.在研究总剂量辐照特性改善方面,在剂量不是很大的情况下,采用超陡倒掺杂相对于均匀掺杂能有效地减小辐照所引起的泄漏电流.如果采用峰值(Halo)掺杂,不仅有利于提高超深亚微米器件的抗辐照能力,而且在大剂量的情况下,可以得到明显的效果. 关键词： 总剂量 超陡倒掺杂 Halo掺杂 辐射效应     

金属氧化物半导体场效应管长期辐射效应的数值模拟

将粒子输运的蒙特卡罗方法与器件数值模拟的有限体积法相耦合来模拟典型金属氧化物半导体场效应管(MOSFET)的长期辐射效应。二氧化硅中的陷阱电荷及硅中的自由电子和空穴均使用漂移扩散模型来描述,入射粒子的能量沉积可作为源项耦合至漂移扩散模型方程,并根据有限体积法得到控制方程的离散格式,方程的数值解即为MOSFET的长期辐射响应结果。使用该方法模拟了MOSFET受射线粒子辐照后的阈值电压漂移与关态漏电流现象。结果表明,耦合方法适用于典型半导体器件长期辐射效应模拟,其阈值电压漂移及漏电流计算结果与文献符合较好。     

Effect of bias condition on heavy ion radiation in bipolar junction transistors

The characteristic degradations in a silicon NPN bipolar junction transistor(BJT) of 3DG142 type are examined under irradiation with 40-MeV chlorine(Cl) ions under forward,grounded,and reverse bias conditions,respectively.Different electrical parameters are in-situ measured during the exposure under each bias condition.From the experimental data,a larger variation of base current(I B) is observed after irradiation at a given value of base-emitter voltage(V BE),while the collector current is slightly affected by irradiation at a given V BE.The gain degradation is affected mostly by the behaviour of the base current.From the experimental data,the variation of current gain in the case of forward bias is much smaller than that in the other conditions.Moreover,for 3DG142 BJT,the current gain degradation in the case of reverse bias is more severe than that in the grounded case at low fluence,while at high fluence,the gain degradation in the reverse bias case becomes smaller than that in the grounded case.     

总剂量辐照效应对窄沟道SOI NMOSFET器件的影响

本文深入研究了130 nm Silicon-on-Insulator (SOI) 技术下的窄沟道n型metal-oxide-semiconductor-field-effect-transistor (MOSFET) 器件的总剂量辐照效应. 在总剂量辐照下, 相比于宽沟道器件, 窄沟道器件的阈值电压漂移更为明显. 论文利用电荷守恒定律很好地解释了辐照增强的窄沟道效应. 另外, 本文首次发现, 对于工作在线性区的窄沟道器件, 辐照产生的浅沟槽隔离氧化物(STI) 陷阱正电荷会增加沟道区载流子之间的碰撞概率和沟道表面粗糙度散射, 从而导致主沟道晶体管的载流子迁移率退化以及跨导降低. 最后, 对辐照增强的窄沟效应以及迁移率退化进行了三维器件仿真模拟, 仿真结果与实验结果符合得很好. 关键词： 总剂量效应(TID) 浅沟槽隔离(STI) 氧化层陷阱正电荷 SOI MOSFET     

CMOS电路瞬态辐照脉冲宽度效应的实验研究

 在“强光一号”加速器上,对两种CMOS反相器和一种CMOS存储器进行了长脉冲状态和短脉冲状态下的辐照实验,测量了CMOS电路的瞬时辐照效应规律,得到了CMOS电路辐射损伤阈值与脉冲宽度的关系,分析了CMOS电路在不同脉冲宽度下的效应差异。实验结果表明：CMOS电路的辐射损伤阈值随脉冲宽度的增加而降低,在20 ns的脉冲宽度辐照下,CMOS反相器4007和4069的闩锁阈值大约为150 ns脉冲辐照下的2倍,CMOS存储器6264的翻转阈值在20 ns脉冲宽度辐照下为150 ns脉冲宽度辐照下的3倍。     

大规模集成电路总剂量效应测试方法初探

提出了初步的大规模集成电路总剂量效应测试方法。在监测器件和电路功能参数的同时，监测器件功耗电流的变化情况，分析数据错误与器件功耗电流变化的关系及其总剂量效应机理。给出了大规模集成电路：静态随机存取存储器（SRAM）、电擦除电编程只读存储器（EEPROM）、闪速存储器（FLASH ROM）和微处理器（CPU）的⁶⁰Co γ总剂量效应实验的结果. 关键词： 测试方法 总剂量效应 大规模集成电路