空心针-板电极大气压氩气辉光放电的特性研究

大气压均匀放电等离子体在工业领域具有非常广泛的应用前景,它是利用直流电源激励的空心针-板放电装置,以氩气为工作气体在大气压空气中产生均匀稳定的放电。对氩气流量和气隙间距对辉光放电发光特性的关系进行了研究,结果表明放电所产生的等离子体柱连接两个电极,发光较为均匀(观察不到放电丝)。在板电极附近放电等离子体柱直径最大,最大直径随着电流和气流的增大而增大。放电伏安特性研究发现,与低气压辉光放电相类似,两电极间的电压随着电流的增大而减小,并且随气流和气隙间距的增大而增大。对该大气压直流均匀放电在扫描范围为330～450 nm的光学发射光谱进行分析,获得了放电等离子体的分子振动温度和谱线强度比I_391.4/I_337.1随氩气流量和气隙间距的变化关系。I_391.4/I_337.1均随流量和气隙间距的增大而降低。对等离子体柱的I_391.4/I_337.1沿气流方向(等离子体柱轴向)进行了空间分辨测量,并进行了定性分析,结果表明,振动温度及电子平均能量随着远离空心针口距离的增大而增大。这些结果对大气压辉光放电在工业中的应用具有重要意义。     

Glow Discharge Characteristics of Hollow Needle-Plate Electrode in Atmospheric Pressure ArgonSCIEI北大核心CSCD

Atmosphere pressure uniform plasma has the broad application prospect in the industrial field. Using hollow needle cathode - plate anode device excited by direct-current voltage, a uniform and stable glow discharge is generated at atmospheric pressure in ambient air with argon used as working gas. The influence of the experimental parameters (including gas flow rate and the gas gap width) on discharge has been investigated by optical method. It can be found that a glow-discharge plasma column can bridge the two electrodes. The plasma column is uniform, and no filaments can be discerned. Near the plate electrode, the diameter of the plasma column is largest of all positions. The maximal diameter of the plasma column increases with increasing the discharge current or the gas flow rate. Through electrical method, the voltage-current characteristic has been investigated. It has been found that the discharge voltage decreases with increasing the current which is similar with the characteristic of glow discharge in low pressure. It increases with increasing the gas gap width or the gas flow rate. By analyzing the optical emission spectrum scanning from 330 to 450 nm emitted from the direct-current glow discharge, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated as functions of the gas flow rate and gas gap width. Results indicate that both the vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 decrease with increasing the gas flow rate or the gas gap width. In addition, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated in spatial resolution along the direction of gas flow(plasma column axial), and give a qualitative analysis as well. It is found that the vibrational temperature and the average electron energy increase with increasing the distance from the hollow needle cathode. These results are important to the industrial applications of glow discharge.     

Observations of plasma dynamics in a gas-embedded compressionalZ-pinch

A series of experiments carried out in a gas embedded compressional Z-pinch are presented. A dc micro discharge of 150 μA between two conical sharp edged electrodes is established to produce a hollow cylindrical discharge. A few nanoseconds before the application of the main voltage, a pulsed laser is focused through the anode onto the cathode. With this preionization scheme an initial coaxial current structure is established. H₂ and D₂ at a pressure of 1/3 atm were used as a working gas. The experiments have been carried out using a pulse power generator capable of delivering current of up to I~200 kA with a dI/dt>10¹² A/s. The use of H₂ and D₂ allows the study of discharges with the same electrical properties, but with different dynamics. At early times this preionization scheme produces a coaxial double column pinch, which as current rises, coalesces into a single column becoming a gas embedded compressional Z-pinch. Diagnostics used are current and voltage monitors, single frame holographic interferometry and shadowgraphy, visible streak camera, and single frame image converter camera. Electron density, line density, pinch radius, and plasma motion are obtained from the optical diagnostics. It was found that the maximum electron density achieved on axis is greater than twice the expected value according with the filling pressure used in the discharges, which contrasts with a traditional gas embedded pinch in which the density is lower than the expected value from filling pressure. The expansion rate of the plasma column is reduced to a third of the observed value for the single channel laser initiated gas embedded pinch. These measurements agree with the existence of a central current channel in this new configuration of gas embedded pinch. The experimental results clearly show that compression is achieved with the composite preionization scheme     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

气压对微束射频容性放电模式调制的研究

微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99%氩/1%氢混合气体微束射频放电中,丝状放电模式消失,而是从低气压全空间分布的辉光放电模式,到中等气压向轴心收缩的辉光放电模式,最后到高气压的“环状”辉光放电模式;而在纯氢气微束射频放电中,随着气压的增加,放电模式直接从全空间分布的辉光放电模式向“环状”辉光放电模式转换.最后通过射频电场中电子加热、趋肤效应和气体热传导的共同作用解释了产生不同放电模式的物理机制.     

气体脉冲放电等离子体阻抗的参量研究

在纯净氦气条件下，对高频纵向脉冲放电的等离子体动态阻抗进行了实验研究.测量了放电等离子体阻抗随放电电压、频率以及气体压强之间的变化关系，表明等离子体阻抗随频率和电压的增加而下降，随气压的升高而增大.定性分析了这些宏观参量与等离子体阻抗变化之间的关系，拟合出等离子体阻抗随电压、频率、气压变化的经验公式，并对数值模拟与实验结果进行了比较研究. 关键词： 等离子体阻抗 气体脉冲放电     

大气压低温氦等离子体射流的诊断研究

为了加快低温氦气等离子体射流的工程化进程,通过自主设计的同轴式介质阻挡放电等离子体射流发生器,在放电频率10 kHz,一个大气压条件下产生了稳定的氦气等离子体射流。通过分析不同工况下的电压电流波形可以发现单纯增加氦气体积流量只能小幅的增加电流脉冲幅值,而对放电时间、电流脉冲数的影响不大。增加放电峰值电压时电流脉冲幅值会得到较大幅度增加。通过发射光谱法对大气压氦气等离子射流的活性粒子种类、电子激发温度、电子密度进行了诊断。结果表明,大气压氦气等离子体射流中的主要活性粒子为He Ⅰ原子、N₂第二正带系、N+₂的第一负带系、羟基（OH）,H原子的巴尔末线系（H_α和H_β）与O原子,这表明虽然该试验中使用的氦气纯度已达99.99%,但其中仍残留有少量的空气,同时放电时大气中的空气会被卷吸到放电空间发生电离。还可以发现,主要活性粒子的相对光谱强度随氦气体积流量的增加及放电峰值电压的增大均呈现上涨的趋势。选用He Ⅰ原子的四条谱线对不同试验工况下的电子激发温度进行了计算,得到大气压氦气等离子体射流的电子激发温度在3 500~6 300 K之间,电子激发温度随放电峰值电压与氦气体积流量的增大总体上呈现上升的趋势。但由于反向电场的存在,某些峰值电压可能会出现电子激发温度下降的情况;根据Stark展宽原理对大气压氦气等离子体射流的电子密度进行了计算,发现电子密度的数量级可达1015 cm-3,同时增大峰值电压与氦气体积流量均可有效的提高射流中的电子密度。这些参数的研究对氦气等离子体射流在工程实际中的应用具有重要意义。     

容性耦合射频氩等离子体放电诊断研究及仿真模拟

针对中等气压、中等功率下射频容性耦合(CCRF)等离子体的放电特性,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar为工作气体,研究同一气压时不同射频输入功率下等离子体电子温度和电子密度的分布规律。同时依据仿真模型设计制作相同尺寸的密闭玻璃腔体和平板电极,实验测量了不同射频输入功率时放电等离子体的有效电流电压及发射光谱,进而计算等离子体的电子温度及电子密度;利用玻耳兹曼双线测温法,得到光谱法下等离子体的电子温度及电子密度。结果表明：当气体压强为250 Pa、输入功率为100~450 W时,等离子体电压电流呈线性关系,电子密度随功率的增大而增大,而电子温度并未随功率的变化而有明显变化,其与功率无关。运用仿真模拟验证了实验的准确性,通过比较,三种方法所得的结果相近。通过结合等效回路法、光谱法和数值模拟仿真法初步诊断出中等气压下等离子体的放电参数,提出了结合三种方法作为实验研究的方法,使实验结果更具说服力,证明其方法的可靠性,也为进一步的等离子体特性研究提供依据。     

较大体积的大气压空气介质阻挡放电特性研究

利用三电极介质阻挡放电装置, 在主放电区产生了较大体积的大气压空气均匀放电. 利用光学与电学方法, 对主放电特性进行了研究, 发现随驱动功率的不同, 主放电存在等离子体羽和等离子体柱两种模式, 等离子体羽的击穿电压随外加电压峰值的增加而减小. 利用光电倍增管对两种放电模式进行了空间分辨测量, 发现等离子体羽是以发光光层的形式传播, 而等离子体柱是连续放电. 通过采集两种放电的发射光谱, 对其振动温度和转动温度进行了测量. 发现两种放电模式的振转温度均随着U_p的增大而降低. 关键词： 介质阻挡放电 等离子体羽 等离子体柱 发射光谱     

An investigation of the temporal development of the pseudosparkdischarge

A study of the different discharge phases of the pseudospark discharge is presented. During the temporal development several modes of the pseudospark discharge are observed leading to a transient, high current, low pressure gas discharge with current densities of the order of 10⁴A/cm² and a forward voltage drop of about 10 ² volts. Therefore measurements of the discharge current, the total charge transported, the forward voltage drop and the influence of the gas pressure and LRC circuit, from initial phase of discharge until the transient phase to the superdense glow, are reported. Through comparison of experimental results with literature the different types of discharges are characterized. Optical studies of the radially expanding plasma column enable the temporal and spatial location of the discharge plasma. In the high current phase estimations of the temperature on the cathode surface and the solution of the Schottky-Equation show that a constriction of the ion current at microscopic surface irregularities is necessary to sustain the discharge     

Microhollow cathode sustained discharges: comparative studies in micro- and equivalent macro-cell geometries

We present an experimental study of discharge initiation in a three-electrode configuration consisting of a microhollow cathode discharge (MHCD) and a third planar electrode, biased positively and placed some distance away. This work is based on the microcathode sustained (MCS) configuration where the MHCD acts as a plasma cathode and enables the generation of a stable, non-equilibrium plasma at high pressure in the volume between the MHCD and the third electrode. Our experiments were carried out in two different set-ups, one using a MHCD as a cathode and another in an “equivalent” macrocell geometry, easier to implement and operating at lower pressure in which the same phenomena are observed. Consistent with previous modeling results, we find that the plasma column in the volume between the MHCD and the third electrode is characterized by a low reduced electric field, with values similar to those expected for a positive column. The ignition voltage of the plasma column depends on the voltage difference between the MHCD and the third electrode, the MHCD current, and the gas pressure and gap spacing.     

沿面型介质阻挡放电喷枪的发光特性及气体温度研究

利用氩气作为工作气体,采用正弦电压驱动沿面型等离子体喷枪,在大气压空气环境中产生了均匀的等离子体羽。电学和光学测量结果表明,等离子体羽放电只存在于外加峰值电压的正半周期,并且正半周期的放电脉冲个数随气体流量的增加而增加。通过对正半周期不同位置的发光脉冲信号进行比较,发现等离子体羽均按子弹形式传播,其中每一个发光脉冲均对应一次等离子体子弹传播过程。通过对比放电电流和等离子体羽的发光信号,发现等离子体羽的发光脉冲滞后于放电电流脉冲,且该延迟时间基本服从正态分布。该延迟时间随着外加电压峰值及气体流量的增大而减小。利用光纤测温仪测量了等离子体羽的气体温度,发现气体温度随外加峰值电压的增大而升高,随工作气体流量的增大而降低。通过分析放电过程,对上述现象进行了定性解释。     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明：s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明:s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

Experimental Study of the Creation of a Fire‐rod I: Temporal Development of the Electron Energy Distribution Function

Positive voltage steps are applied to a planar electrode (collector) immersed in a magnetized discharge plasma column with its surface perpendicular to the magnetic field lines. If the voltage step and the neutral gas pressure are high enough additional ionization occurs in front of the collector and a fire‐rod is created. Time resolved measurements of the plasma response are performed by a one‐sided plane Langmuir probe using standard boxcar technique. The temporal development of the electron energy distribution function after the application of a positive voltage step to the collector is measured by a one‐sided plane Langmuir probe. In a magnetized plasma the electron energy distribution function is proportional to the first derivative of a plane Langmuir probe characteristics. It is found that immediately (∼1 μs) after the application of a positive voltage step to the collector a short lifetime electron population is created. This electron population disappears in approximately 2 μs. It is related to the anomalously large initial electron current collected by the collector “current overshoot”. When the initial current overshoot to the collector is terminated, a high potential (anode) plasma starts to form in front of the collector if the voltage step and the pressure are high enough. The formation of the anode plasma electron population is followed experimentally.     

射频放电阻抗测量用于等离子体诊断研究

利用自行研制的传感器和测量装置,通过对射频放电电压、电流以及其相位角的精确测定,算出放电管的总阻抗,结合放电管的等效电路模型与Godyak等建立的射频放电模型,对射频激励铜离子激光管在氦气中的放电特性进行了研究,得出射频激励铜离子激光器不同气压及电流密度下的等离子体电阻、容抗、鞘层厚度及电子密度 关键词： 射频放电 阻抗测量 等离子体诊断     

大气压氩气介质阻挡辉光放电的一维仿真研究

为了研究氩气(Ar)中介质阻挡大气压辉光放电(APGD)的放电机理, 通过建立一个一维的多粒子自洽耦合流体模型, 采用有限元方法进行数值计算, 得到了气体间隙压降、介质表面电荷密度、放电电流密度随时间的周期变化波形, 以及电子、离子、亚稳态粒子密度和空间电场强度的时空分布. 仿真计算结果表明：介质表面积聚的电荷对于放电的过程的起始及熄灭具有重要作用;当增大外施电压时, 放电击穿时刻提前, 放电电流密度和介质表面电荷密度峰值增大, 表明放电过程更加剧烈;随着阻挡介质相对介电常数的增大, 放电电流密度也随之增大. 各粒子密度及电场的时空分布表明放电过程在外施电压半个周期中只有一次放电, 且存在明显的阴极位降区、负辉区、等离子体正柱区等辉光放电的典型区域, 为大气压辉光放电(APGD).     

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在四阳极直流放电装置上,测量并分析了辉光放电的电流-电压和发光特征随气压的变化关系。结果表明,采用稳流放电模式比稳压放电具有更宽的稳定放电气压和电流范围,能在从1～800Pa的较宽气压范围内实现氦气辉光放电,放电电流可达到500mA左右。随着电极表面亮斑的变化,对于同一气压,在低电流区,放电电压几乎成指数增长;随电流增大,电压的增长速度变缓;对于高的气压,碰撞频率的增大使得电压随电流升高的速率变小。分析表明,放电处于异常辉光区。从放电管的CCD图像可以看出,对于同一放电电流,随气压的升高,等离子体往阴极收缩。     

Probe Measurements of Wave Fluctuations Excited in Glow Discharges

Fluctuations of the electric field, the charged particle density, the electron temperature and the plasma potential are simultaneously measured by a probe in the positive column of helium glow discharge at a few torr gas pressure by exciting a small amplitude ionization wave. It is proposed that these values can be determined by analyzing the probe current.     

Probe Measurements of Wave Fluctuations Excited in Glow Discharges

Fluctuations of the electric field, the charged particle density; the electron temperature and the plasma potential are simultaneously measured by a probe in the positive column of helium glow discharge at a few torr gas pressure by exciting a small amplitude ionization wave. It is proposed that these values can be determined by analyzing the probe current.