Angular distribution and differential sputtering yields for low-energy light-ion irradiation of polycrystalline nickel and tungsten

Angular differential and total sputtering yields of polycrystalline nickel and tungsten have been measured for 1 and 4 keV H⁺ and 4 keV He⁺ ion bombardment at incidence angles between 0° and 80°. The differential sputtering yields (dY/dΩ) were determined with the aid of the collector technique, whereas the total yieldY was determined from the weight loss of the target during irradiation. Asymmetric angular distributions are observed at oblique angles of incidence, the emission maximum being shifted in forward direction (with respect to the incident ions). Even more pronounced than the change in shape of the emission distribution is an increase in the differential yield:dY/dΩ rises with increasing incidence angle over the whole range of ejection angles, the increase being most prominent in the direction of primary recoil emission. This effect is therefore ascribed to emission of surface atoms in direct projectile-surface atom collisions. On short term leave from Institut für Plasmaphysik der Kernforschungsanlage Jülich GmbH, D-5170, Jülich, Fed. Rep. Germany.     

Radiation damage of material surfaces under prolonged irradiation with He+ and Ar+ ions with broad energy spectra

The results of studying the redistribution of Be, Al, Ti, Fe, Cu, Zr, Mo, and W atoms incorporated in polycrystalline metal samples under irradiation with He⁺, (He⁺ + Ar⁺), and Ar⁺ ion beams with a broad energy spectrum and an average energy of 10 keV at irradiation doses of 1 × 10²¹ ion/cm² are studied. It is discovered that irradiation at doses exceeding 1 × 10¹⁹ ion/cm² results in local small-crystal formations being produced in a near-surface substrate layer. Their typical dimensions are less than 1–5 μm, and their the density is up to 1–100. They contain incorporated atoms and impurity atoms with a concentration of 0.1–10 at %. Subsequent irradiation at a dose of 1 × 10²⁰ ions/cm² or more leads to disappearance of these formations, mainly because of sputtering processes.     

Exit angle dependence of charge-state distribution of backscattered He ions

Exit angle and energy dependences of the charge-state distribution of backscattered He ions were investigated when 500 keV He⁺ ions were incident on SiO₂. The energy dependence of the He⁺ fraction was estimated by comparing the measured He⁺ spectra with the simulated spectra of He ions in all charge states at the exit angles of 5-25° with respect to the SiO₂ surface. We found that the He⁺ fraction is almost independent of the exit angle at energies higher than 250 keV and the observed energy dependence of the He⁺ fraction is in good agreement with that for the carbon-foil-transmission experiment. In the low energy region (<250 keV), however, the He⁺ fraction decreases as the exit angle decreases.     

Carbon sputtering yield measurements at grazing incidence

In this investigation, carbon sputtering yields were measured experimentally at varying angles of incidence under Xe⁺ bombardment. The measurements were obtained by etching a coated quartz crystal microbalance (QCM) with a low energy ion beam. The material properties of the carbon targets were characterized with a scanning electron microscope (SEM) and Raman spectroscopy. C sputtering yields measured under Ar⁺ and Xe⁺ bombardment at normal incidence displayed satisfactory agreement with previously published data over an energy range of 200 eV-1 keV. For Xe⁺ ions, the dependence of the yields on angle of incidence θ was determined for 0° ≤ θ ≤ 80°. Over this range, an increase in C sputtering yield by a factor of 4.8 was observed, with the peak in yield occurring at 70°. This is a much higher variation compared to Xe⁺ → Mo yields under similar conditions, a difference that may be attributed to higher scattering of the incident particles transverse to the beam direction than in the case of Xe⁺ → C. In addition, the variation of the yields with θ was not strongly energy dependent. Trapping of Xe in the surface was observed, in contrast to observations using the QCM technique with metallic target materials. Finally, target surface roughness was characterized using atomic force microscope measurements to distinguish between the effects of local and overall angle of incidence of the target.     

Ion sputtering of minerals and glasses: a first step to the simulation of solar wind erosion

Selected rockforming minerals (plagioclase, augite, olivine, ilmenite, silicate and metal phases of the meteorite “Brenham”) as well as silicate and phosphate glasses were irradiated with heavy ions (⁴He⁺, ¹⁴N+, ²⁰Ne⁺, ⁴⁰Ar+, ⁵⁶Fe+, Xe⁺ _nat) in the energy range of 50-130 keV in order to study ion-induced sputtering. Sputtering yields were measured independently by means of multiple beam interferometry and particle track autoradiography.

The theory of sputtering by Sigmund, modified by Smith, was used to convert experimental heavy ion sputtering yields to H⁺- and He⁺-sputtering yields of the same target. Taking into account solar wind irradiation conditions at the lunar surface, an estimate of lunar erosion rates due to solar wind sputtering is given for the targets studied.     

The effect of incident angle on the C60 bombardment of molecular solids

The effect of incident angle on the quality of SIMS molecular depth profiling using C₆₀⁺ was investigated. Cholesterol films of ∼300 nm thickness on Si were employed as a model and were eroded using 40 keV C₆₀⁺ at an incident angle of 40° and 73° with respect to the surface normal. The erosion process was characterized by determining at each angle the relative amount of chemical damage, the total sputtering yield of cholesterol molecules, and the interface width between the film and the Si substrate. The results show that there is less molecule damage at an angle of incidence of 73° and that the total sputtering yield is largest at an angle of incidence of 40°. The measurements suggest reduced damage is not necessarily dependent upon enhanced yields and that depositing the incident energy nearer the surface by using glancing angles is most important. The interface width parameter supports this idea by indicating that at the 73° incident angle, C₆₀⁺ produces a smaller altered layer depth. Overall, the results show that 73° incidence is the better angle for molecular depth profiling using 40 keV C₆₀⁺.     

Infrared studies on ion irradiated quartz

Damage produced inα- and fused quartz bombarded with low energy (∼ 100 keV) D⁺, He⁺ and Ar⁺ ions, has been studied by observing the changes in their spectrum. Besides bulk reflectivity, the attenuated total reflection spectrum has also been studied, the latter with a view to obtaining the surface polariton frequencies. It is observed that for the same fluence, the changes following D⁺ irradiation are much higher compared to that for Ar⁺ irradiation. The variation of the surface polariton frequency inα-quartz with the damage energy deposited has the same trend as observed earlier for refractive index. Some annealing studies have also been performed in argon-irradiated samples. These studies indicate that whereas in fused quartz the damaged layer recovers completely, inα-quartz there is a residual amorphization even after annealing. A two-layer model is proposed which gives a reasonable simulation of the observedir properties.     

Balmer Hβ vs. Dβ line intensity in the collisions of H+, H2 +, H3 +, D+, D2 +, and D3 + ions with “realistic” metal surface at energies below 1 keV

The intensities of hydrogen H_β and deuterium D_β spectral lines of the Balmer series were measured as a function of collision energy when H⁺, H₂ ⁺, H₃ ⁺, D⁺, D₂ ⁺, and D₃ ⁺ ions impinged on Al, Ti, Cu, Mo, W, and Pb targets. The collision energies were kept in the 100–1000 eV range. The target surface was contaminated with hydrocarbons from the vacuum pumping system and possibly also by oxygen molecules due to limited vacuum conditions. At projectile velocities above 200 km/s the luminescence of backscattered deuterium atoms is about 30–50% weaker than that of hydrogen atoms.     

高电荷态离子与Si(110)晶面碰撞的沟道效应研究

不同电荷态低速离子(Ar^q+,Pb^q+)轰击Si(110)晶面,测量不同入射角情况下的次级粒子的产额. 通过比较溅射产额与入射角的关系,证实沟道效应的存在. 高电荷态离子与Si相互作用产生的沟道效应说明溅射产额主要是由动能碰撞引起的. 在小角入射条件下,高电荷态离子能够增大溅射产额. 当高电荷态离子以40°—50°入射时,存在势能越高溅射产额越大的势能效应. 关键词： 高电荷态离子 溅射 沟道效应     

Non-Relativistic H2 +-Molecule in a Strong Magnetic Field

We show that under the influence of a strong uniform magnetic field the energy of the H₂⁺-ion at the 0-th order Born-Oppenheimer approximation goes over into that of the corresponding united atom limit, He⁺.     

A new technique for the measurement of sputtering yields

We have measured the yields of 90 keV ⁴⁰Ar⁺ and V⁴He⁺ sputtering of Mo and V samples by the use of a new radio-tracer technique. This technique involves activating the samples by high-energy charged-particle irradiation before sputtering, and using conventional γ-ray counting methods to analyze the material subsequently sputtered onto collector foils. We have also measured angular distributions of the sputtered material, and compared these results and our total sputtering yields with the predictions of Sigmund's sputtering theory. Further comparisons between our radiotracer results and those obtained for ⁴⁰Ar⁺ sputtering of unactivated Mo and V samples, determined from elastic backscattering measurements using 12 MeV ¹⁶O ions, show that the techniques give consistent results.     

Energy and charge distributions of fast hydrogen ions and atoms reflected from Cu in the case of grazing incidence

The energy and charge distributions of protons and hydrogen atoms reflected from the Cu surface in the case of grazing incidence angles are measured at energies of incident particles (H⁺ and H⁰) of 200 and 250 keV. The charged fractions of reflected particles are analyzed. A weak dependence of the neutral fraction of reflected particles on the scattering angle is discovered for incidence angles of 1°–2° and an energy of scattered particles of 60 keV or less. It is shown that the neutral fraction of reflected particles with an energy of 60–80 keV or more is independent of the scattering angle and is determined by the ratio of the cross sections for the electron capture and loss by ions in the material.     

Yields of H+ and He+ at the energy for elastic scattering from H2+3He+ incident on Ag and Pd

Yields, Y, of H⁺ and He⁺ emerging specularly with the energy for single binary elastic collisions have been measured from polycrystalline Ag and Pd surfaces bombarded with mixed monoenergetic (300 < E₀ < 2600 eV) beams of H₂⁺³He⁺ impinging at an angle of 45° from the surface normal. The surfaces were exposed to H₂⁺ at a dynamic pressure of 8 × 10^?3 Pa (6 × 10^?5 Torr) during the measurements. The He⁺ yields from Pd are slightly larger than from Ag, and the H⁺ yields from Pd are 10 to 40 times as large as those from Ag. These results suggest that differences between Pd and Ag in the amount of hydrogen adsorbed and in the character of the hydrogen-metal bond may be responsible for the yield differences through shadowing by, and possibly the sputtering of, adsorbed hydrogen. The Y versus E₀ curves for all four systems have qualitatively the same singly peaked shape which implies that reactive and noble gas ions undergo similar neutralization processes during elastic surface collisions. The ratios of the yields from Ag and Pd do not exhibit the theoretically expected exponential dependence on collision time over the entire range studied, but at the lowest energies the ratios lead to estimates of the difference of neutralization constants which do agree with theory. The potential utility of the large difference in proton yields from Ag and Pd for studying the Ag-Pd alloy system is noted.     

Desorption of chemisorbed Carbon on Mo(1 0 0) by noble gas ion sputtering: Validation of ground test measurements of ion engine lifetimes

We report desorption cross section measurements for one monolayer of chemisorbed carbon on a Mo(1 0 0) surface induced by sputtering with noble gas ions (Ne⁺, Ar⁺, Xe⁺) at different incident angles, ion energies, and substrate temperatures. Desorption cross sections were determined by using low-energy ion scattering (LEIS) to monitor the increase of the signal from the Mo substrate. A monolayer of p(1 × 1) carbon adatoms on the Mo(1 0 0) surface was created by dosing ethylene (C₂H₄) to the substrate at 800 K, and characterized by Auger electron spectroscopy (AES) and low energy electron diffraction (LEED). We find that the carbon desorption cross section increases with increasing mass and energy of the impinging ions, and there is a maximum value for the desorption cross section at an incident angle for the ions of 30° from the surface plane. The desorption cross section also increases up to a substrate temperature of 300 °C. Values for the carbon desorption cross section for carbon adatoms on Mo(1 0 0) by 400-eV Xe⁺ ion sputtering are about 2 × 10⁻¹⁵ cm², which is one order of magnitude higher than those for bulk carbon samples. This information is particularly important for evaluation of ion-engine lifetimes from ground-test measurements in which contaminant carbon is deposited on Mo accelerator grids, potentially altering the sputtering rate of the Mo. Our measurements show that monolayer amounts of carbon on Mo have desorption cross sections that are two orders of magnitude higher than estimates of what would be required to reduce the Mo erosion rate, and thus ground-test measurements can be used with confidence to predict ion-engine wear in space, from this perspective.     

Sputtering of AlxGa1−x As semiconductor targets by Ar+ ions with energies of 2–14 keV

Investigations of the sputtering of Al_xGa_1−x As semiconductor solid solutions by Ar⁺ ions with energies of 2–14 keV are performed. The dependence of the sputtering yield on the energy and angle of incidence of the ions are determined and the character of the surface relief formed during the sputtering is investigated. A comparison with theory shows that the best agreement between theory and experiment is achieved when the Haff-Switkowski formula is used together with Yudin’s stopping cross section. It is shown that the surface binding energies obtained differ from the atomization energies by an amount approximately equal to the amorphization energy. Zh. Tekh. Fiz. 67, 113–117 (June 1997)     

Effect of surface steps on sputtering and surface defect formation: molecular-dynamics study of 5 keV Xe bombardment of Pt(1 1 1) at glancing incidence angles

Using molecular-dynamics simulation, we study sputtering and defect formation induced by 5 keV Xe⁺ ion impact on a Pt(1 1 1) surface at oblique and glancing incidence angles. Impact on a terrace produces yield maxima at ?=60-65° incidence angle towards the surface normal. Beyond 75-80°, no damage is produced due to projectile ion reflection. Impact on a dense-packed step, however, produces defects in sizeable numbers up to glancing incidence, ?=85°. The dependence of the yields on the incidence angle and distance of the impact point of the projectile to the step are discussed.     

Sputtering yields of nickel and chromium

The sputtering yield of polycrystalline nickel and chromium was determined as a function of projectile energy (1–8 keV), projectile mass (N⁺, Ne⁺, Ar⁺, Xe⁺), angle of incidence (0°–75°), and oxygen partial pressure. Where theoretical values exist, the agreement is reasonable.EURATOM Association     

A study of the electronic excitation of he from grazing incidence ion-surface interaction

The neutralization of He⁺ at grazing incidence from a Ni(111) surface leads to excited states. The light emission from the 3d ³ D and 3d ¹ D states is studied as a function of the beam energy and angular parameters. The observed circular polarization dependence on the crystallographic surface directions is interpreted in terms of the Brillouin zone of the solid.     

Influence of ion-molecular reactions on μ-capture in hydrogen and on fusion in 3Hedμ muonic molecule

The de-excitation processes (J=1)→ (J=0) in muonic molecular ions (ppμ)⁺ and (³Hedμ)⁺ are studied. It is shown that the rate of such transitions substantially depends on the chain of ion-molecular reactions initiated by positively charged muonic ions. The probabilities of ortho-para transition in the [(ppμ)⁺H₂] and [(ppμ)⁺e] complexes formed as a result of chemical reactions in the pure hydrogen were estimated. Taking into account the ion-molecular processes in D₂ + He mixtures, the evaluation of the observed rate λ_f of nuclear fusion in the ³Hedμ muonic molecules was performed. The expected yield of fusion reactions per muon at the mixture density φ=0.1 and concentration C _He =0.05 was obtained to be equal to . This revised version was published online in August 2006 with corrections to the Cover Date.     

Theory for Relative Strengths of Trapping of He+ Ions in Solid, Liquid and Gaseous Hydrogen

The study of trapping of He⁺ ion in solid hydrogen is important both as a problem in solid state physics and also as an applied physics problem in the field of muon catalyzed fusion (μCF). In μCF, He⁺ ion acts as a trap for μ⁻, interrupting the chain reaction aspect of the catalytic role of μ⁻ in producing fusion of deuteron and triton and of triton and triton in solid hydrogen composed of ²H–³H and ³H–³H molecules, respectively. Using the Hartree–Fock procedure, combined with procedures for including many-body effects, as well as relaxation effects associated with the He⁺–H₂ distances and the adjustment of the H–H separation, we have investigated the trapping of He⁺ in gaseous and solid state environments. For the former, the environment of He⁺ is simulated by a single hydrogen molecule and for the solid by clusters appropriately chosen to represent the hexagonal close-packed structure. Our results for the gaseous state indicate that the trapping is rather strong with a binding energy of 8.5 eV, with almost equal binding energy in the linear and triangular configurations with respect to the H–H direction. For the solid, both the likely sites for He⁺ trapping, namely the tetrahedral and octahedral interstitial sites, are also found to provide deep traps (8.6 eV) of almost equal strength, independent of the orientations of the neighboring molecules, showing that the trapping is not influenced by the orientational disorder in the surrounding hydrogen molecules. Further, the influence of next nearest neighbor hydrogen molecules is found to enhance the trapping energy for He⁺ substantially, by 0.6 eV, with the incorporation of the third nearest neighbors having a much smaller added effect, demonstrating the convergence of our results with respect to the size of the cluster chosen to simulate the solid. The substantial influence on the He⁺ trapping energy found for the neighbors beyond the nearest ones provides an explanation of the greater accumulation of helium in the solid state of hydrogen in μCF experiments as compared to the liquid. Suggestions are made regarding the possible reasons for the almost negligible accumulation of helium in the liquid state. This revised version was published online in August 2006 with corrections to the Cover Date.