紫外波段SiO2/Si3N4介质膜分布式布拉格反射镜的制备与研究

采用光学传递矩阵方法设计了紫外波段SiO₂/Si₃N₄介质膜分布式布拉格反射镜, 并利用等离子体增强化学气相沉积技术在蓝宝石(0001)衬底上制备了SiO₂/Si₃N₄介质膜分布式布拉格反射镜. 光反射测试表明, 样品反射谱的峰值波长仅与理论模拟谱线相差10 nm, 并随着反射镜周期数的增加而蓝移. 由于SiO₂与Si₃N₄具有相对较大的折射率比, 因而制备的周期数为13的样品反射谱的峰值反射率就已大于99%. 样品反射谱的中心波长为333 nm, 谱峰的半高宽为58 nm. 样品截面的扫描电子显微镜和表面的原子力显微镜测量结果表明, 样品反射谱的中心波长蓝移是由子层的层厚和界面粗糙度的变化引起的. X射线反射谱表明,子层界面过渡层对于反射率的影响较小, 并且SiO₂膜的质量比Si₃N₄差, 也是造成反射率低于理论值的原因之一.     

Growth and magnetism of Ni nanoparticles in Ni/Al2O3/Si or Si3N4 multilayers

We report on the fabrication of Ni/Al₂O₃/Si and textured Ni/Al₂O₃/Si₃N₄ multilayers containing Ni nanoparticles that exhibit significantly improved results. The secondary phases arising from thermal reaction between Ni and Si can be remarkably suppressed with increasing layers of Al₂O₃ and deposition of Ni/Al₂O₃ multilayers on Si₃N₄ substrates. Atomic force microscopy shows the formation of large as well as nanoclusters of Ni when grown on Si, whereas textured Ni nanoparticles are formed on Si₃N₄ substrates. The magnetization measurements on Ni/Al₂O₃/Si containing a single buffer layer of Al₂O₃ shows higher coercivity field with magnetic nanowire-like behavior, whereas with several Al₂O₃ alternate layers almost a superparamagnetic-like behavior is observed. However, significantly improved magnetic hysteresis was observed in textured Ni/Al₂O₃/Si₃N₄ multilayers due to preferred alignment of Ni nanocrystallites.     

InGaAs/Si3N4 interface obtained in ultrahigh vacuum multipolar plasma: In-situ control by ellipsometry and electrical characterization

A multipolar plasma passivation scheme controlled by in-situ ellipsometry has been developed to produce a high electrical quality InGaAs/Si₃N₄ interface. We have demonstrated the possibility to remove all native oxides at the InGaAs surface by heating the sample at 240°C, then using the action of a multipolar H₂ plasma at 185°C, without optical degradation of the surface. The passivation by a native nitride layer is then performed using a N₂ plasma, and Si₃N₄ is deposited. The treatment induces a reduction of the density of interface states N_ss(E), and also a change of the nature of these interface states as shown by a reduction in the capture cross section σ_n(E).     

Analytical electron microscopy of a reaction-bonded Si3N4-based ceramic containing oxide additions

The microstructure of a silicon nitride (Si₃N₄)-based ceramic, prepared by a process combining direct nitridation and reactive liquid phase sintering of silicon/ceramic oxide powder compacts, has been characterised using analytical transmission electron microscopy. The presence of the reactive liquid phase, promoted by the addition of oxides from the CaO-Al₂O₃-SiO₂ ternary system, resulted in an as-fired microstructure containing a mixture of crystalline phases based on -Si₃N₄, β-Si₃N₄ and Si₂ N₂O, and distinct amorphous regions rich in Si, Al and Ca. X-ray microanalysis revealed the calcium to be wholly partitioned to the glassy phase, while significant concentrations of aluminium were detected in both β-Si₃N₄ and Si₂N₂O. The observed compositions of these phases, together with measured lattice parameters systematically in excess of those of the pure compounds, imply that they are in fact β- and O-sialons respectively. Semi-quantitative energy dispersive X-ray spectroscopy, using an ultra-thin window detector, is demonstrated to be capable of distinguishing clearly between these phases according to their oxygen content and of determining the aluminium content of both phases to within ± 1 equ.%, even at concentration levels of <5 equ.%.     

Laser irradiation of AISI 316L stainless steel coated with Si3N4 and Ti

AISI 316L stainless steel was laser surface treated with different compositions of Si₃N₄ and Ti under various laser-processing parameters to improve its surface hardness through reinforcement of Ti-based silicides. The laser-treated regions exhibited improved surface hardness (250–1000 HV), variations in the surface morphology (smooth and bowl like) and presence of cracks and pores depending upon the Si₃N₄–Ti composition and laser-processing parameters. The study shows that when the Si₃N₄–Ti composition is 75–25 wt% and laser parameters are 1.5 kW laser power and 1.0 m min⁻¹ scan speed, a laser-treated region with high hardness of about 800 HV and smooth surface morphology as well as free from pores and cracks is observed. The X-ray diffractometer (XRD) and Energy-Dispersive Spectroscopy (EDS) analyses show that the laser surface-treated region has reinforced phase of Ti₅Si₃ and retained austenitic structure. The reinforced phase gives rise to very high hardness (or wear resistance) and also a corrosion resistance.     

Narrow-bandwidth tunable bandstop filters with circularly cylindrical self-suspended silicon gratings

A circularly cylindrical self-suspended silicon grating (SSG) is proposed, and its reflectance spectrum is investigated by the rigorous coupled-wave method (RCWM). For TM incident polarization, when the grating period is tuned, numerical results by the RCWM reveal that the circularly cylindrical SSG possesses a tunable narrow reflectance bandwidth property in the optical telecommunication wavelength region. It is also demonstrated that both TM incident polarization and the circular grating cross section are easier to bring narrow reflectance bandwidth, compared with TE incident polarization and square grating cross section. Via a micro-electromechanical systems actuator, the proposed circularly cylindrical SSG is expected to serve as a narrow-bandwidth tunable bandstop filter in micro-optical telecommunication systems.     

电荷俘获存储器的过擦现象

基于密度泛函理论的第一性原理平面波超软赝势方法和VASP软件对电荷俘获存储器过擦现象进行了分析研究.通过形成能的计算,确定了含有氮空位缺陷的Si3N4和含有间隙氧缺陷的Hf O2作为研究的对象;俘获能的计算结果表明两种体系对电子的俘获能力比对空穴的大,因而对两体系擦写载流子确定为电子.分别计算了Hf O2和Si3N4擦写前后的能量、擦写前后电荷分布变化、吸附能和态密度,以说明过擦的微观机理.对能量和擦写电荷变化的研究,表明Si3N4相比于Hf O2,其可靠性较差,且Si3N4作为俘获层,在一个擦写周期后,晶胞中电子出现减少现象;界面吸附能的研究表明,Si3N4相比于Hf O2在缺陷处更容易与氧进行电子交换;最后,通过对态密度的分析表明Si3N4和Hf O2在对应的缺陷中均有缺陷能级俘获电子,前者为浅能级俘获,后者为深能级俘获.综上分析表明,Si3N4在氮空位的作用下,缺陷附近原子对电子的局域作用变弱,使得Si3N4作为俘获层时,材料本身的电子被擦出,使得擦操作时的平带偏移电压增大,导致存储器发生过擦.本文的研究结果揭示了过擦的本质,对提高电荷俘获存储器的可靠性以及存储特性有着重要的指导意义.     

第一性原理研究O和S掺杂的石墨相氮化碳(g-C_3N_4)_6量子点电子结构和光吸收性质

利用密度泛函和含时密度泛函理论研究了氧(O)和硫(S)原子掺杂的石墨相氮化碳(g-C_3N_4)_6量子点的几何、电子结构和紫外-可见光吸收性质.结果表明:掺杂后(g-C_3N_4)_6量子点杂质原子周围的C-N键长发生了一定的改变,最高电子占据分子轨道-最低电子未占据分子轨道(HOMO-LUMO)能隙显著减小.形成能的计算表明O原子取代掺杂的(g-C_3N_4)_6量子点体系更稳定,且O原子更易取代N3位点,而S原子更易取代N8位点.模拟的紫外-可见电子吸收光谱表明,O和S原子的掺杂改善了(g-C_3N_4)_6量子点的光吸收,使其吸收范围覆盖了整个可见光区域,甚至扩展到了红外区.而且适当的杂质浓度使(g-C_3N_4)_6量子点光吸收在强度和范围上都得到明显改善.通过O和S掺杂的比较,发现二者在可见光区对(g-C_3N_4)_6量子点的光吸收有相似的影响,然而在长波长区域二者的影响有明显差异.总体而言,O掺杂要优于S掺杂对(g-C_3N_4)_6量子点光吸收的影响.     

高温隐形材料SiBN陶瓷

已有的实验结果表明, 硅硼氮陶瓷材料具有非晶态的微观结构, 并且可在六方相氮化硅 (β-Si₃N₄) 的基础上得到较好理论模型. 本文通过同样方法建立硅硼氮陶瓷材料的理论模型, 并在此基础上进行分子动力学与密度泛函理论结合的计算研究, 得到其高温下光学性质的显著变化. 与氮化硅 (Si₃N₄) 的光学性质比较分析后发现, 低温下SiBN陶瓷对可见光甚至紫外及高频光吸收显著, 而高温下呈现对微米波的较好吸收和其他波段小于0.3的吸收系数; 低温下SiBN陶瓷的反射系数全波段接近0.1, 而高温下其反射系数可小至1%; 单晶Si₃N₄的光学性质则随温度升高几乎不发生变化. 这一结果表明SiBN陶瓷作为高温激光隐形材料的可能, 也为非晶材料光电应用指出一个新的方向. 关键词： 硅硼氮陶瓷 密度泛函理论 光吸收系数 反射系数     

无杂质空位扩散法造成InGaAsP/InP多量子阱结构带隙蓝移规律的研究

采用光荧光谱(PL)和光调制反射谱(PR)的方法,研究了由Si₃N₄、SiO₂电介质盖层引起的无杂质空位(IFVD)诱导的InGaAsP四元化合物半导体多量子阱(MQWs)结构的带隙蓝移。实验中Si₃N₄、SiO₂作为电介质盖层,用来产生空位,再经过快速热退火处理(RTA)。实验结果表明:多量子阱结构带隙蓝移和退火温度、复合盖层的组合有关。带隙蓝移随退火温度的升高而加大。InP、Si₃N₄复合盖层产生的带隙蓝移量大于InP、SiO₂复合盖层。而InGaAs、SiO₂复合盖层产生的带隙蓝移量则大于InGaAs、Si₃N₄复合盖层。同时,光调制反射谱的测试结果与光荧光测试的结果基本一致,因此,PR谱是用于测试带隙变化的另一种方法。     

特殊构型Si_2N_2分子团簇电致激发特性的密度泛函理论研究

以在可见光区有吸收峰的Cs构型的Si2N2分子团簇为研究对象,利用密度泛函B3LYP方法,在aug-ccpVTZ基组水平下优化得到了处于不同外电场中的Si2N2分子团簇的稳定结构.分析发现:在不同的外电场中,Si2N2分子构型对称性没有发生改变,均为Cs对称性,且都有6种振动模式;随着外电场强度的逐渐增大,Si2N2分子振动频率较低的前三种振动模式的频率略有减小,而后三种振动模式的频率逐渐增加;随着外电场强度的逐渐增大,在一定电场范围内最高占据分子轨道与最低空分子轨道的能隙值出现振荡,之后能隙值随着外电场强度的增大而减小.在此基础上,采用含时密度泛函TD-B3LYP方法研究了外电场对Si2N2分子吸收谱的影响规律.计算得到的吸收谱范围在紫外-可见光区,这与实验值相符合.随着外电场强度的逐渐增大,在可见光区吸收谱发生红移,最大跃迁振子强度逐渐增大.结果表明,施加外电场有利于Si2N2分子在可见光区的吸收,也有利于操控分子特定激发态的电子状态,进而调节相应的跃迁光谱特性,可达到获得所需特定波长的要求.     

高分辨电子显微镜研究α-Si3N4晶格缺陷

对于用MgO和LiF作为添加剂以热压法制备的α-Si₃N₄进行高分辨电子显微镜观察时,发现结构缺陷。观察到在三晶粒晶界处有分相现象,这表明晶界玻璃相化学成分不均匀。在晶粒中,由晶格变形和(100)晶面位移所引起应力区域时有发现。在有些区域晶格变形是如此严重,以致晶胞的六方对称性都失掉了。晶格的形变可借助于(100)晶面间距与正常值6.771?的偏离加以衡量。用高分辨电子显微镜,我们发现α-Si₃N₄存在辐射损伤,这可能 关键词：     

Gated photoluminescence study of oxide-free InP MIS structure having an ultrathin silicon interface control layer

In order to investigate the effectiveness of a novel oxide-free surface passivation approach for InP, using an ultrathin silicon interface control layer (Si ICL), gated photoluminescence characteristics of the Si₃N₄/Si ICL/n-InP metal–semiconductor–insulator (MIS) structure were studied at room temperature. As compared with gated PL spectra of Si₃N₄/n-InP MIS without Si ICL, PL intensities of the sample with Si ICL were much more strongly modulated by the gate voltage. The interface state density distribution was estimated by an optical analog of the Terman’s C–V analysis and a good agreement with the C–V analysis was obtained. The result indicates complete removal of Fermi level pinning over the entire bandgap in the novel oxide-free MIS structure.     

Dielectrics for passivation of planar InP/InGaAs diodes

We have investigated dielectrics for passivating planar InP or InGaAs photodiodes: thermally evaporated Al₂O₃ and SiO, sputtered Si₃N₄ and SiO₂ and also SiO₂ using chemical vapour deposition. The measured bulk and field-effect properties of all dielectrics excluding sputtered SiO₂ were suitable for this application. In planar InGaAs diodes with Cd diffused or Mg implanted p⁺-region a disordered dielectric/semiconductor surface led to high reverse current densities above 1 mA/cm². In InP diodes with p⁺-diffusion and dielectrics exhibiting positive flatband voltages, e.g. Si₃N₄ and Al₂O₃, reverse current densities of 10 μA/cm² were measured probably caused by a slight inversion of the semiconductor surface. With a SiO or CVD-SiO₂ passivating layer on n-InP lowest leakage current densities (10 nA/cm²) were achieved. Very low dark-current planar photodiodes InP/InGaAsP/InGaAs have been fabricated using SiO passivation (30 nA/cm²).     

Raman scattering and optical absorption in S2N2 and partially polymerized S2N2 films

Raman scattering and optical absorption measurements between 0.5 and 5.0 eV on crystalline films of S₂N₂ and partly polymerized S₂N₂ have been made for the first time. The Raman active molecular and librational phonons have been observed and assigned. The Raman spectra of partly polymerized S₂N₂ show the appearance of weak scattering at 635 cm⁻¹ and appreciable broadening of the librational phonon peaks. Optical absorption maxima occur at 4.0 and 4.7 eV in pure S₂N₂ at 14 K, while absorptions at 0.86, 1.1 and 4 eV evolve with increasing polymerization.     

The Ag M5N45N45 Auger photoelectron coincidence spectra of disordered Ag0.5Pd0.5 alloy

An effect of disorder broadening (DB) on the Ag M₅N₄₅N₄₅ Auger spectra in the random substituted Ag_0.5Pd_0.5 has been investigated by Auger photoelectron coincidence spectroscopy (APECS). Data were collected for the Ag M₅N₄₅N₄₅ Auger line coincident with the Ag 3d_5/2 photoelectron line (and its higher and lower binding energy sides). It is shown that the broadening of the Ag M₅N₄₅N₄₅ line is directly associated with the presence of disorder broadening of the Ag 3d_5/2 photoelectron line. The APECS experiment is used to demonstrate the broadening in a novel way.     

Wet etching and passivation of GaSb-based very long wavelength infrared detectors

The etching and passivation processes of very long wavelength infrared (VLWIR) detector based on the InAs/GaSb/AlSb type-II superlattice have been studied. By studying the effect of each component in the citric acid solution (citric acid, phosphoric acid, hydrogen peroxide, deionized water), the best solution ratio is obtained. After comparing different passivation materials such as sulfide + SiO₂, Al₂O₃, Si₃N₄ and SU8, it is found that SU8 passivation can reduce the dark current of the device to a greater degree. Combining this wet etching and SU8 passivation, the R₀A of VLWIR detector with a mesa diameter of 500 μm is about 3.6 Ω ·cm² at 77 K.     

Two dimensional GeO2/MoSi2N4 van der Waals heterostructures with robust type-II band alignment

Constructing two-dimensional (2D) van der Waals heterostructures (vdWHs) can expand the electronic and optoelectronic applications of 2D semiconductors. However, the work on the 2D vdWHs with robust band alignment is still scarce. Here, we employ a global structure search approach to construct the vdWHs with monolayer MoSi₂N₄ and wide-bandgap GeO₂. The studies show that the GeO₂/MoSi₂N₄ vdWHs have the characteristics of direct structures with the band gap of 0.946 eV and type-II band alignment with GeO₂ and MoSi₂N₄ layers as the conduction band minimum (CBM) and valence band maximum (VBM), respectively. Also, the direct-to-indirect band gap transition can be achieved by applying biaxial strain. In particular, the 2D GeO₂/MoSi₂N₄ vdWHs show a robust type-II band alignment under the effects of biaxial strain, interlayer distance and external electric field. The results provide a route to realize the robust type-II band alignment vdWHs, which is helpful for the implementation of optoelectronic nanodevices with stable characteristics.     

改善Si3N4俘获层过擦现象的第一性原理研究

采用第一性原理方法对如何改善电荷俘获存储器的过擦现象进行了研究. 过擦是由于氮空位中Si原子对电荷的局域能力弱导致, 因此, 在Si₃N₄超胞中分别建立了以C, N, O替换氮空位中的Si原子的缺陷结构作为本文的研究模型. 分别计算了擦写之后体系的巴德电荷分布、相互作用能、态密度, 借以分析替位原子对过擦的影响. 巴德电荷分布的计算结果表明, Si₃N₄在O替位128号Si后的过擦现象被明显改善; C替位128号Si也可以改善过擦, 但由于C替位对电荷的局域作用变弱, 不利于电荷的存储实现; N替位128号Si则不能改善过擦; 而在162和196号Si位置, 三种原子的替换均无法改善过擦现象. 相互作用能的研究表明, 在128号Si位置, 三种原子都能够和氮空位形成团簇, 在体系中稳定存在. 特别地, O替位Si后, 体系中两缺陷的相互吸引作用最弱, 从而写入的电荷能够短暂的打破O团簇的稳定性, 实现电荷重构, 将电荷局域在O团簇周围. 此外, 态密度的分析结果表明O在128号Si位置能够在Si₃N₄禁带中引入深能级缺陷, 深能级局域电荷的能力强. 以上分析证明, O替位可以很好的改善Si₃N₄中的过擦现象. 本文的研究结果为电荷俘获存储器改善过擦提供了一种方法, 对提高器件的电荷保持特性和优化存储窗口具有指导意义.     

Linear and nonlinear optical response of g-C_3N_4-based quantum dots

Graphite carbon nitride(g-C_3N_4) attracts wide-ranging research interest due to its extraordinary physicochemical properties and promising applications ranging from heterogeneous catalysis to fuel cells. In this work, we design different g-C_3N_4-based quantum dots(g CNQDs), carry out a systematic study of optical properties, and elucidate the shape selectivity, composite nanostructure, and outfield effect. In particular, composites of g CNQDs and metal nanochains present excellent optical response, making it applicable to bioimaging, nano-plasma devices, and metalloenzyme in infrared light related fields. Besides, QDs which original bridging nitrogen atoms are replaced by amino(–NH_2), hydroxyl(–OH),and methyl(–CH_3) functional groups respectively, have excellent spectral selectivity in the deep ultraviolet region. More interestingly, in the study of the laser interaction with materials, the g CNQDs exhibit extremely high stability and light corrosion resistance. Phase transition from insulation to metal is observed under the critical condition of about 5 e V intensity or 337 nm wavelength. All provided theoretical support for designs and applications in g-C_3N_4 quantum devices.