薄膜系列实验的教学研究

从薄膜制备、生长过程动态分析以及形貌表征3方面设计了薄膜系列实验.用离子束溅射制备金属薄膜,研究了制备条件对溅射速率的影响,测量了薄膜生长过程中电阻的变化,用扫描隧道显微镜或原子力显微镜观测薄膜的表面形貌,并分析不同制备条件得到的薄膜的表面形貌特征.     

Electron impinging on metallic thin film targets

Based on the Vicanek and Urbassek theory [M. Vicanek, H.M. Urbassek, Phys. Rev. B 44 (1991) 7234] combined to a home-made Monte Carlo simulation, the present work deals with backscattering coefficients, mean penetration depths and stopping profiles for 1-4 keV electrons normally incident impinging on Al and Cu thin film targets. The cross-sections used to describe the electron transport are calculated via the appropriate analytical expression given by Jablonski [A. Jablonski, Phys. Rev. B 58 (1998) 16470] whose new improved version has been recently given [Z. Rouabah, N. Bouarissa, C. Champion, N. Bouaouadja, Appl. Surf. Sci. 255 (2009) 6217]. The behavior of the backscattering coefficient, mean penetration depth and stopping profiles versus the metallic film thickness at the nanometric scale and beyond is here analyzed and discussed.     

Plasmonic interactions between a metallic nanotube array and a thin metallic film

Using the finite difference time domain (FDTD) method, we numerically simulate the plasmonic interactions and the optical properties of a metallic nanotube array near a thin metallic film. We show that the energies and intensities of the plasmon resonances depend strongly on the aspect ratio (the ratio of the inner to outer radius) of the nanotube, the separation between the center of the nanotube and the upper surface of the metallic film and the thickness of the film. In the thin film limit, the high-energy localized tube-related plasmons can induce their images on both sides of the metallic film, so the degeneracy state splits into two modes. Based on the nature of the field distribution, we also show clearly the plasmon resonant characteristics that the electromagnetic fields decay away from the surface of the nanotubes and both sides of the metallic film.     

Surface-plasmon-mediated single-molecule fluorescence through a thin metallic film

We demonstrate that fluorescence of single molecules in the nanometric vicinity of a thin gold film can be effectively excited and detected through the film with an epi-illumination scanning confocal microscope. A full theoretical treatment of the fluorescence signal indicates that both excitation and emission are surface-plasmon mediated. Remarkably, the number of photons detectable from chromophores perpendicular to the interface is enhanced by the presence of the metal.     

Controlled decoherence in multiple beam Ramsey interference

We have scattered photons from an interfering path of a multiple beam Ramsey interference experiment realized with a cesium atomic beam. It is demonstrated that in multiple beam interference the decoherence from photon scattering cannot only lead to a decrease but, under certain conditions, also to an increase of the Michelson fringe contrast. In all cases, the atomic quantum state loses information with photon scattering, as "which-path" information is carried away by the photon field. We outline an approach to quantify this which-path information from observed fringe signals, which allows for an appropriate measure of decoherence in multiple path interference.     

Induced electric fields and plasmonic interactions between a metallic nanotube and a thin metallic film

We have numerically simulated the induced electric fields and the plasmonic interactions of a metallic nanotube near a thin metallic film. Our study shows that the energies and intensities of the plasmon resonances depend strongly on the aspect ratio (the ratio of the inner to outer radius) of the nanotube as well as the separation between the center of the nanotube and the upper surface of the metallic film and the thickness of the film. The enhancement of the induced electric field of this system reaches ...     

Modeling of the fringe shift in multiple beam interference for glass fibers

A quadratic model is suggested to describe the fringe shift occurred due to the phase variations of uncladded glass fiber introduced between the two plates of the liquid wedge interferometer. The fringe shift of the phase object is represented in the harmonic term which appears in the denominator of the Airy distribution formula of Fabry-Perot’s interferometer. A computer program is written to plot the computed fringe shifts of the described model. An experiment is conducted using liquid wedge interferometer where the fiber of a nearly quadratic thickness variation is introduced between the two plates of the interferometer. The obtained fringe shift shows a good agreement with the proposed quadratic model. Also, it is compared with the previous theoretical shift based on ray optics of semi-circular shape.      

Analysis of metallic nanoparticles embedded in thin film semiconductors for optoelectronic applications

This paper reports about a study of the local plasmonic resonance (LSPR) produced by metal nanoparticles embedded in a dielectric or semiconductor matrix. It is presented an analysis of the LSPR for different nanoparticle metals, shapes, and embedding media composition. Metals of interest for nanoparticle composition are Aluminum and Gold. Shapes of interest are nanospheres and nanotriangles. We study in this work the optical properties of metal nanoparticles diluted in water or embedded in amorphous silicon, ITO and ZnO as a function of size, aspect-ratio and metal type. Following the analysis based on the exact solution of the Mie theory and DDSCAT numerical simulations, it is presented a comparison with experimental measurements realized with arrays of metal nanospheres. Simulations are also compared with the LSPR produced by gold nanotriangles (Au NTs) that were chemically produced and characterized by microscope and optical measurements.     

Characteristics of indirect laser-induced plasma from a thin film of oil on a metallic substrate

Optical emissions from the major and trace elements embodied in a transparent gel prepared from cooking oil were detected after the gel was spread in a thin film on a metallic substrate. Such emissions are due to the indirect breakdown of the coating layer. The generated plasma, a mixture of substances from the substrate, the layer, and the ambient gas, was characterized using emission spectroscopy. The characteristics of the plasma formed on the metal with and without the coating layer were investigated. The results showed that Al emission induced from the aluminum substrates coated with oil films extends away from the target surface to ablate the oil film. This finally formed a bifurcating circulation of aluminum vapor against a spherical confinement wall in the front of the plume, which differed from the evolution of the plasma induced from the uncoated aluminum target. The strongest emissions of elements from the oil films can be observed at 2 mm above the target after a detection delay of 1.0 μs. A high temperature zone has been observed in the plasma after the delay of 1.0 μs for the plasma induced from the coated metal. This higher temperature determined in the plasma allows the consideration of the sensitive detection of trace elements in liquids, gels, biological samples, or thin films.     

Formation of metallic nanoislands in the process of electron irradiation of a thin gold film on glass

Technical Physics - It has been demonstrated experimentally that the local irradiation of a thin gold film on glass with electrons with an energy of 5 keV led to an increase in the thickness of the...     

Laser interference metallurgy: A new method for periodic surface microstructure design on multilayered metallic thin films

Methods for micro- and nanostructuring are essential for functionalization of materials surfaces. In particular, photon-assisted methods for synthesis of functional surfaces have been intensively investigated in the last years. In this study, a new method for surface modification and production of long-range order periodical structures called “laser interference metallurgy” is explored. A metallic thin film sample consisting of three layers composed of Fe, Cu and Al (from top to bottom) on a glass substrate was irradiated with an interference pattern using a Nd:YAG laser (wavelength of 355 nm, 10 ns of pulse duration). For the interference pattern, a configuration producing a line-type energy distribution was chosen. The laser fluence was high enough to melt the aluminium and copper layers at the interference maxima but the iron layer remained in the solid state. Thus, diffusive and convective exchange occurred between aluminium and copper at the energy maxima positions leading to periodical alloy formation with a long-range order. Because it remained in solid state, the iron layer at the top acted as a protective layer effectively preventing removal of the molten layers. The interaction of the different layers was characterized using FIB, TEM and EDX in STEM mode.     

Combinatorial arc plasma deposition search for Ru-based thin film metallic glass

We have discovered a novel Ru-based thin film metallic glass (TFMG) using combinatorial arc plasma deposition (CAPD). To search for Ru-based TFMG, alloy systems of Ru-Zr-Al, Ru-Zr-Fe and Ru-Zr-Mo were investigated by making libraries. Each library consisted of 1089 CAPD samples deposited on a substrate by CAPD. Composition of each sample is different with each other.The composition and phases of the CAPD samples were measured by energy dispersive X-ray fluorescence spectrometry and X-ray diffractometry, respectively. Results showed the amorphous regions depended on the additive elements Al, Fe or Mo. Compared with the addition of Al, the addition of Fe or Mo exhibited high amorphous forming ability.To evaluate the mechanical properties, the glass transition temperature T_g and the crystallization temperature T_x of the amorphous samples in each Ru-Zr-X alloy, larger samples having the same compositions as the typical amorphous CAPD samples were reproduced by sputtering because the CAPD samples were too small to measure the mechanical properties, T_g and T_x.Ru₆₅Zr₃₀Al₅ and Ru₆₇Zr₂₅Al₈ samples were found to exhibit the better fracture stress and elastic limit than conventional TFMGs, while Ru-Zr-Fe and Ru-Zr-Mo samples were found to be brittle. DSC revealed that the Ru₆₅Zr₃₀Al₅ sample was a TFMG, with a T_g of 902 K and T_x of 973 K.     

Characteristic improvements of thin film AlGaInP red light emitting diodes on a metallic substrate

We report a type of thin film Al Ga In P red light emitting diode(RLED) on a metallic substrate by electroplating copper(Cu) to eliminate the absorption of Ga As grown substrate.The fabrication of the thin film RLED is presented in detail.Almost no degradations of epilayers properties are observed after this substrate transferred process.Photoluminescence and electroluminescence are measured to investigate the luminous characteristics.The thin film RLED shows a significant enhancement of light output power(LOP) by improving the injection efficiency and light extraction efficiency compared with the reference RLED on the Ga As parent substrate.The LOPs are specifically enhanced by 73.5% and 142% at typical injections of 2 A/cm~2 and 35 A/cm~2 respectively from electroluminescence.Moreover,reduced forward voltages,stable peak wavelengths and full widths at half maximum are obtained with the injected current increasing.These characteristic improvements are due to the Cu substrate with great current spreading and the back reflection by bottom electrodes.The substrate transferred technology based on electroplating provides an optional way to prepare high-performance optoelectronic devices,especially for thin film types.     

Advanced ion beam technology for versatile oxide thin film formation

Various oxide films, such as SnO₂, In₂O₃, Al₂O₃, SiO₂, ZnO, and Sn-doped In₂O₃ (ITO) have been deposited on glass and polymer substrates by advanced ion beam technologies including ion-assisted deposition (IAD), hybrid ion beam, ion beam sputter deposition (IBSD), and ion-assisted reaction (IAR). Physical and chemical properties of the oxide films and adhesion between films and substrates were improved significantly by these technologies. By using the IAD method, non-stoichiometry, crystallinity, and microstructure of the films were controlled by changing assisted oxygen ion energy and arrival ratio of assisted oxygen ion to evaporated atoms. IBSD method has been carried out for understanding the growth mode of the films on glass and polymer substrate. Relationships between microstructure and electrical properties in ITO films on polymer and glass substrates were intensively investigated by changing ion energy, reactive gas environment, substrate temperature, etc. Smooth-surface ITO films (R_rms ⩽ 1 nm and R_p−v ⩽ 10 nm) for organic light-emitting diodes were developed with a combination of deposition conditions with controlling microstructure of a seed layer on glass. IAR surface treatment enormously enhanced the adhesion of oxide films to polymer substrate. In the case of Al₂O₃ and SiO₂ films, the oxygen and moisture barrier properties were also improved by IAR surface treatment. The experimental results of the oxide films prepared by the ion beam technologies and its applications will be represented in detail.     

Effects of pinhole diameters on beam characteristics for silicon thin film optical inspection

Peak power density stability and beam-wander precision of probe laser are important factors affecting the inspection results in the precision thin film optical measurements. Pinhole is frequently used as a spatial filter in the optical inspection system. In this work, four different diameters of pinhole are investigated experimentally. It is found that pinhole diameter of 0.3 mm is considered to be a promising candidate for mounting in front of probe laser for silicon thin film optical inspection due to better peak power density stability and better beam-wander precision.     

Ion beam induced reactions in Fe-PVC thin film structures

Films of⁵⁷Fe, 50–100 Å thick, were evaporated onto PVC substrates. Samples were irradiated with 48 McV Br⁸⁺ ions. Recoiling target atoms, ejected from the sample, were collected in a time of flight-energy detector telescope to monitor effects induced by the impinging Br ions. Conversion electron Mössbauer spectra were recorded before and after ion irradiation. Substantial radiation induced alterations were observed both in recoil and Mössbauer spectra.     

多层介质膜光谱调制反射镜的反应离子束刻蚀误差容限

 在千焦拍瓦高功率放大系统设计中,激光脉冲的时空和光谱整形技术一直受到人们的广泛关注。利用反应离子束刻蚀等微纳超精细加工而成的多层电介质结构反射镜可在高功率条件下实现啁啾脉冲的光谱整形。在光谱整形介质结构反射镜的设计与制造中,需要根据要求的反射率来合理提出反应离子束刻蚀误差容限指标。推导出反应离子束刻蚀误差容限的解析表达式。针对神光Ⅱ千焦拍瓦高功率放大系统设计中提出的多层介质光谱调制反射镜,分析了调制结构反射镜各层加工的容许误差,确定了反应离子束刻蚀误差容限指标。研究表明：刻蚀高折射率介质的加工误差容限为35 nm;刻蚀低折射率介质的加工误差容限为62 nm。此外,还从使用需要和加工难易的角度,对刻蚀方案进行了讨论。就加工难易程度而言,优选反应离子束刻蚀方案,且采用刻蚀并残留低折射率介质的方案更容易实现。     

Sub-micron ablation of metallic thin film by femtosecond pulse laser

The ability to machine very small features in a material has a wide range of applications in industry. We ablated holes into thin film of 100 nm thickness made from various metals by femtosecond pulsed laser ablation. Using a Ti:Sapphire laser which supplies a laser pulse of 150 fs duration at central spectrum wavelength of 400 nm, we have produced a series sub-micron holes, whose diameters are less than 200 nm with a focused laser spot of 1.7 μm. We found that the material damage threshold has a great influence on the quality of the produced features. Experimental results shows that the heat-affected zone and the degree of being affected reduce with the increase of threshold value.