Phase-shifting shearing interferometer

A single-element phase-shifting interferometer has been developed based on the lateral shearing interferometer. This new interferometer requires no precise alignment, and the phase is continuously varied by changes in the voltage across a commercially available liquid-crystal phase retarder.     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

Digital phase-shifting interferometer with an electrically addressed liquid-crystal spatial light modulator

A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for pi/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.     

基于波长移相剪切干涉的准直波前重构技术

为了实现干涉仪出射准直波前的重构,提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射,通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响,推导相对剪切比和其影响因素间的关系公式,给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前,波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置,提高了测量精度,特别适合于测量波长移相干涉仪的出射波前。     

Spatially incoherent Fourier digital holography by four-step phase-shifting rotational shearing interferometer and its image quality

Spatially incoherent Fourier digital holography using a rotational shearing interferometer for four-step phase-shifting method is proposed. The previous incoherent Fourier holography using a rotational shearing interferometer [Watanabe and Nomura (Appl. Opt. 54:A18, 2015)] employs the two-step phase-shifting method in the vertical and horizontal polarizations. The reconstructed image contains a large bias term. This paper proposes introduction of two kinds of wave plates in one path of a rotational shearing interferometer for a four-step phase-shifting method. A Fourier hologram is obtained from the four recorded holograms for eliminating the bias term and the twin image. The numerical simulation and the optical experiment demonstrate improvement of the image quality of reconstructed image by the twin image and bias level reduction. Furthermore, the effect of the size of an image sensor on the image quality in rotational shearing interferometer is also investigated by the numerical simulations.     

A single-shot pixellated phase-shifting interferometer utilizing a liquid-crystal spatial light modulator

We introduce a novel phase-shifting pixellated interferometer based on a liquid-crystal spatial light modulator and simulate the expected performance. The phase-shifted frames are captured simultaneously, which reduces problems arising from vibrations and air turbulence. The liquid-crystal spatial light modulator is flexible and can be configured to provide a large number of phase-shift levels and geometries to reduce measurement error.     

Phase-shifting lateral shearing interferometer with two pairs of wedge plates

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.     

Polarization phase-shifting lateral shearing interferometer with two polarization beam splitter plates

We proposed a compact and simple polarization phase-shifting lateral shearing interferometer using two polarization beam splitter plates (PBSP). This interferometer is composed of two PBSP, a quarter-wave plate, an analyzer and a CCD camera. With the two PBSP positioned in appropriate spatial positions, optical path difference compensation is achieved, which allows for the implement of aplanatic and common-path shearing interferometer. Therefore, the system possesses significant advantages of simple structure, compact and strong anti-interference ability. The effectiveness of the interferometer is demonstrated by simulations and experiments.     

Simple phase-shifting lateral shearing interferometer

A phase-shifting electronic speckle pattern shearing interferometer with a very simple shearing device is proposed. Two partially reflective glass plates are used to introduce the shear in this new interferometer. The reflection coefficients of the coatings on the two plates are 0.3 and 0.7. The distance between the two glass plates controls the size of the shear. The proposed new interferometric system is simple, flexible, and low cost.     

菲索干涉仪中精确移相的实现

为了实现移相式菲索干涉仪对光学元件面形的高精度测量,建立了干涉仪同步采集移相系统,并对精确移相方法进行了研究。介绍了移相系统的构成和工作原理,计算了测量过程中移相器的速度。针对PZT移相器在移相过程中会引入离焦误差,并存在加速段和减速段的问题,详细设计了移相器的行进过程。最后,对移相器的性能进行了标定。在改造后的干涉仪上开展了重复性验证实验,结果表明：干涉仪可以获得λ/11 340的RMS测量重复性。对改造后干涉仪与Zygo公司生产的Verifire XP/D干涉仪的测量精度做了比对实验,结果显示：相同元件下两者测量结果的面形RMS之差约为0.9 nm,表明提出的移相系统及移相方法在重复性和准确度方面都能满足纳米级面形测量的要求,为研制高精度移相干涉仪奠定了基础。     

马赫-曾德尔型相移矢量剪切干涉仪

为了实现对激光波面的等光程测试,设计了一个新颖的相移矢量剪切干涉仪。该干涉仪以马赫曾德尔结构为基础,为等光程干涉仪。通过在相干的两路光束中分别插入楔角方向正交放置的楔板实现矢量剪切;其中一块楔板分成两块(平板部分和楔板部分),楔板部分沿平板部分的表面移动,通过改变光程差来实现相移,2π相移所需的移动距离为几毫米的量级,该相移方法在相移精度控制上比较简单。文中还对楔板引入的横向剪切误差和相移误差进行了分析,最后给出了实验所得的一组相移干涉图。     

Experimental validation of closed-loop adaptive optics based on a self-referencing interferometer wavefront sensor and a liquid-crystal spatial light modulator

A closed-loop adaptive optics system based on a self-referencing interferometer wavefront sensor (SRI WFS) using phase-shifting point-diffraction technique and an electrically addressed phase-only liquid-crystal spatial light modulator (LC SLM) is built and validated experimentally. The wavefront aberration of incoming beam is directly measured by analyzing four frames phase-shifted interferograms captured by a single CCD camera in two camera shots, and then by loading the conjugate function onto the SLM the wavefront aberration is corrected. The proposed scheme does not rely on any complicated control algorithm or wavefront-reconstruction algorithm and can achieve high-resolution and high-accuracy correction. Closed-loop correction results of single order Zernike aberrations and a Kolmogorov turbulence phase screen show that considerable improvements in the Strehl ratio (of greater than 0.94) is achieved.     

Four-step spatial phase-shifting shearing interferometry from moiré configuration by triple gratings

A spatial phase-shifting shearing interferometry is presented in this paper. The whole optical configuration is simple and consists of three Ronchi gratings. Four phase-shifted shearing interferograms can be obtained simultaneously. The explicit intensity distributions of shearing interferograms are given and a corresponding four-step spatial phase-shifting algorithm is proposed to extract phase information from the new interferometry. This spatial phase-shifting configuration is applied to extract phase projection of a propane flame and a mathematical error analysis is presented.     

干涉仪自适应抗振的空间移相术

根据时域移相算法的概念,提出了一种空间移相术,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化.运用这种技术在TwymanGreen移相式干涉仪中建立了一套自适应抗振系统,它可以实时测量振动引起的相位变化大小,并通过反馈器件PZT实时校正干涉条纹的相位,使得干涉条纹稳定以保证光学测量的正常进行,与此同时PZT还作为移相器件.     

Phase-shifting interferometric profilometry with a wavelength-tunable diode source

A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carré algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.     

Mirau相移干涉法测量微透镜阵列面形

基于Mirau相移干涉法,在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源,干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器,通过5步相移法计算待测表面形貌.实验结果表明,基于Mirau相移干涉法对微透镜阵列面形的测量,水平分辨率达到1.1 μm,垂直测量准确度达到6.33 nm,垂直测量范围为5 μm.对于微透镜阵列的面形测量,通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5 μm,然后辅以精密平移机构进行若干次5步相移法测量局部面形,再利用相位重建所得的数据进行拼接和3D轮廓重建,最终得到整个微透镜阵列的精确微表面形貌.     

偏转平台剪切电子散斑干涉相移技术研究

在沃拉斯顿棱镜作为剪切器件的传统剪切散斑干涉术中,由于错位的二物光束同光路传播,很难通过将它们分开来引入附加相位的方法实现相移。本文提出的偏转平台法是利用平台上物体的偏转来引入附加相位的,从而可以实现剪切电子散斑干涉的相移。理论分析证明,物体的偏转可以引入稳定、线性的附加相位,并给出了物体偏转角度与附加相位之间的关系式;利用周边固定、中心加载圆盘进行了典型实验,给出了实验结果,证明偏转平台相移技术能够有效地从干涉条纹中提取位移导数信息。     

空域移相偏振点衍射波前检测技术

点衍射干涉仪结构简单、共光路、测量精度高, 空域移相干涉仪抗振性能优越, 两者在波前检测领域获得了广泛的应用. 本文采用激光打孔技术, 通过在金属纳米线栅偏振片上制备小孔, 制作了偏振点衍射板; 结合分光结构的空域移相技术, 搭建了空域移相偏振点衍射干涉仪, 并对一焦距为550 mm, F_#10的平行光管准直物镜透射波前进行测量, 与法国Phasics公司生产的商业化波前传感器SID4的测量结果相比较, 两者峰谷值相差0.09λ, 均方根值相差0.012λ ; 利用35项Zernike多项式拟合两者的测量结果, 将拟合得到的系数在同一坐标轴下绘制成两条曲线, 两者基本重合, 从而验证了所搭建的空域移相偏振点衍射波前检测装置的测试精度. 从而在传统点衍射干涉仪的基础上引入了空域移相技术, 实现了波前的高分辨率、高精度、实时检测, 并且提高了对振动、气流等环境因素的抗干扰能力.     

Beam-focus shaping by use of programmable phase-only filters: application to an ultralong focal line

We have developed a high-resolution programmable adaptive-optic device based on an optically addressed liquid-crystal electro-optic valve controlled by an achromatic three-wave lateral shearing interferometer. We apply this phase-only filter and loop to shape the far-field pattern of laser beams. As a first application, we theoretically compute and experimentally verify the focus along a line longer than tens of Rayleigh ranges.     

Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer

The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm.