射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时,电子温度随N₂含量的增加而下降;当气压大于1.3 Pa时,电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针     

Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas

The nonlocality of the electron energy distribution function (EEDF) in a dc discharge in oxygen is observed experimentally. A method is developed for measuring the isotropic part of the EEDF in a low-temperature plasma of electronegative gases. The radial dependence of the EEDF and the radial distributions of the electron density, the average electron energy, and the potential are determined. Pis’ma Zh. éksp. Teor. Fiz. 63, No. 7, 511–516 (10 April 1996)     

弱电离大气等离子体电子能量分布函数的理论研究

使用球谐展开的方法求解玻尔兹曼方程,得到了弱电离大气等离子体(79％氮气和21％的氧气)的电子能量分布函数(EEDF).发现当约化电场较小时(E/N＜100 Td),EEDF在2-3 eV急剧下降,在此情况下,高能尾部比麦氏分布要小;当约化电场增加,E/N＞ 400 Td,分布函数趋近于麦氏分布;当约化电场进一步增加,E/N＞ 2000 Td,EEDF的高能尾部(超过200 eV)相对于麦氏分布增加,在高频场作用下,EEDF更倾向于麦氏分布.当ω》vm时,有效电子温度只依赖于E/ω,而与碰撞频率无关;当ω《vm时,有效电子温度只依赖于E/N,与微波频率无关.与一些单原子分子等离子体中电子-电子碰撞在电离度大于10-6时就会影响EEDF不同,空气等离子体中,只有当电离度大于0.1％时,电子-电子碰撞才会对EEDF有明显影响.     

Effect of molecular nitrogen on the electron mobility in a mixture of argon and optically excited sodium vapor

A parametric study of the electron energy distribution function (EEDF) and the electron mobility in the mixture Na + Ar + N₂ is carried out. An analysis is made of the conditions that obtain in a photoplasma when the detachment of the mean electron energy from the neutral gas temperature is due to superelastic collisions (collisions of the second kind) with excited sodium atoms. The case of low ionization of the medium at low vibrational temperatures of the ground state of the nitrogen molecules is considered. To find the EEDF a numerical solution of the Boltzmann transport equation is carried out. It is found that in the indicated mixture the presence of nitrogen leads to a depletion of the EEDF in the region of efficient vibrational excitation of the molecules and promotes the formation of inversion in the EEDF ∂f(ɛ)/∂ɛ>0 in the energy range corresponding to the Ramsauer minimum in the cross section of elastic collisions of electrons with the argon atoms. It is shown that the nonequilibrium character of the EEDF leads to a complicated dependence of the electron mobility on the partial ratios of the components of the mixture, the degree of ionization of the medium, and the population of the resonantly excited sodium atoms. Zh. Tekh. Fiz. 69, 14–19 (April 1999)     

Numerical solution of Boltzmann tranport equation for TEA CO2 laser having nitrogen-lean gas mixtures to predict laser characteristics and gas lifetime

Selective laser isotope separation by TEA CO₂ laser often needs short tail-free pulses. Using laser mixtures having very little nitrogen almost tail free laser pulses can be generated. The laser pulse characteristics and its gas lifetime is an important issue for long-term laser operation. Boltzmann transport equation is therefore solved numerically for TEA CO₂ laser gas mixtures having very little nitrogen to predict electron energy distribution function (EEDF). The distribution function is used to calculate various excitation and dissociation rate of CO₂ to predict laser pulse characteristics and laser gas lifetime, respectively.Laser rate equations have been solved with the calculated excitation rates for numerically evaluated discharge current and voltage profiles to calculate laser pulse shape. The calculated laser pulse shape and duration are in good agreement with the measured laser characteristics. The gas lifetime is estimated by integrating the equation governing the dissociation of CO₂. An experimental study of gas lifetime was carried out using quadrapole mass analyzer for such mixtures to estimate the O₂ being produced due to dissociation of CO₂ in the pulse discharge. The theoretically calculated O₂ concentration in the laser gas mixture matches with experimentally observed value. In the present TEA CO₂ laser system, for stable discharge the O₂ concentration should be below 0.2%.     

Pathways in the molecular fragmentation for the C2H5OH/He electrical discharge

ABSTRACT

This study focuses on the glow discharge generated with a gases mixture of Ethanol (C₂H₅OH) and Helium (He), at different concentrations maintained at a total pressure of 2.0 Torr. We used optical emission spectroscopy (OES) to analyze the discharge mixture at different concentrations of Helium. Single Langmuir probe data was used to determine the Electron Energy Distribution Function (EEDF). For the total C₂H₅OH/He mixture plasma concentrations, the EEDF has a Maxwellian distribution function. A decrease in He concentration results in significant changes in the EEDF, this behavior is related to the increase in the C₂H₅OH percentage must increase the energy loses of the electrons in the inelastic collision with C₂H₅OH producing a significant change in the EEDF, therefore, the EEDF pattern results in an increase of electron–molecule reaction rates. The rise in electron temperature for increasing Helium percentage is explained by the decreasing electron energy loss in the inelastic collisions with C₂H₅OH molecule. It observes a decrease of electron density ne as a function of the Helium percentage, which can be related to the ratio between ionization cross sections of Helium and C₂H₆O molecule. The active species are generated in the electron-molecule processes, which are associated with electron impact dissociation of C₂H₅OH and Helium electronic impact excitation in the gas phase. The emission optical spectra (OES) show changes in the intensity of the most important peaks of the plasma mixture, which indicates the dependence in the formation of the plasma as a function of the percentage of the gases. The changes in the intensities of the same observed species are due to different processes of excitation and ionization energies of the system, in addition to the increase of He metastable states He I. Hydrogen is the main product obtained from the decomposition of C₂H₅OH.     

Laser on nitrogen-electronegative gas mixtures, pumped by inductive energy storage generator: Experiment and theoretical model

The advantages of inductive energy storage (IES) generators for increasing the pulse energy, power, and duration for nitrogen laser pumped by self-sustained transverse discharge have been experimentally demonstrated. A theoretical model is developed and the operation of IES-pumped laser on nitrogen-electronegative gas mixtures is numerically simulated. It is shown experimentally and theoretically that, adding electronegative gases, one can control the pulse shape of lasing on the C³II _u -B³II _g transition in nitrogen. The increase in the electric field strength in the laser gap in N₂-NF₃ and N₂-SF₆ mixtures produced 337.1-nm laser pulses consisting of two spaced peaks and 40–50-ns pulses close to rectangular. The increase in the laser active volume to 6 l (discharge cross section to 6×10 cm²) in N₂–SF₆ mixtures made it possible to obtain the maximum output energy (Q=110 mJ) and UV power (P _las =6 MW). In N₂-NF₃ mixtures, the laser pulse duration was up to ∼100 ns with an energy up to Q=30 mJ.     

Effect of small admixtures of N<Subscript>2</Subscript>, H<Subscript>2</Subscript> or O<Subscript>2</Subscript> on the electron drift velocity in argon: experimental measurements and calculations

The electron drift velocity in argon with admixtures of up to 2% of nitrogen, hydrogen or oxygen is measured in a pulsed Townsend system for reduced electric fields ranging from 0.1 Td to 2.5 Td. The results are compared with those obtained by Monte Carlo simulations and from the solution of the electron Boltzmann equation using two different solution techniques: a multiterm method based on Legendre polynomial expansion of the angular dependence of the velocity distribution function and the S _n method applied to a density gradient expansion representation of the distribution function. An almost perfect agreement between the results of the three numerical methods and, in general, very good agreement between the experimental and the calculated results is obtained. Measurements in Ar-O₂ mixtures were limited by electron attachment to oxygen molecules, which contributes to the measured drift velocity. As a result of this attachment contribution, the bulk drift velocity becomes larger than the flux drift velocity if attachment is more probable for electrons with energy below the mean value and smaller in the opposite case. Attachment also contributes to the negative differential conductivity observed in Ar-O₂ mixtures.     

电负性混合气体临界电场强度的确定

本文讨论了确定电负性混合气体临界电场强度的两种方法。一是用电负性混合气体中各组成气体的预放电参数来确定按任意比例混合的气体之临界电场强度。另一是由高能脉冲激光释放电子,记录预放电电子电流波形来确定混合气体的临界电场强度。用这两种方法确定N₂和SF₆混合气体的临界电场强度,其结果十分符合。 关键词：     

射频低压等离子体电子能量分布函数的探针诊断

本文对于无内电极放电的射频低压等离子体,采用探针电流调制法,设计并建立了三探针诊断电子能量分布函数的测量系统,测量了压力在10^-3—10^-1Torr下氮气等离子体的电子能量分布函数。从理论和实验上研究了探针鞘层上射频干扰电压对测量电子能量分布函数的影响,给出了确定射频干扰值以及对射频干扰的影响进行修正的方法,并采用该方法对实验数据进行了修正,得到了正确的电子能量分布函数。根据所得到的电子能量分布函数计算的电子平均能量,与由探针伏安特性计算得到的电子平均能量相差不超过5％,该结果间接证明了本文实验测量系统的可靠性以及对射频干扰影响进行修正的正确性。     

Non-Maxwellian electron energy distribution function in He,He/Ar,He/Xe/H<Subscript>2</Subscript> and He/Xe/D<Subscript>2</Subscript> low temperature afterglow plasma

Experimental studies of the electron energy distribution function “EEDF” under well defined conditions in flowing afterglow plasma, using a Langmuir probe are reported. The EEDF is measured in He₂ ⁺ and Ar⁺ dominated plasmas and in XeH⁺ and XeD⁺ dominated recombining plasmas. He is used as a buffer gas at medium pressures in all experiments (1600 Pa, 250 K). The deviation of the measured EEDF from Maxwellian distribution is shown to depend on plasma composition and on the processes governing the plasma decay. The influence of energetic electrons produced during the plasma decay on the body and tail of the EEDF is observed. The mechanism of energy balance in afterglow plasma is discussed.     

悬浮型微波共振探针在电负性容性耦合等离子体中电子密度的测量

本文首先利用悬浮型微波共振探针测量了Ar等离子体的电子密度,并与朗缪尔双探针的测量结果进行了比较,表明了微波共振探针在低密度等离子体测量的可行性.对40.68 MHz单射频容性耦合Ar/SF₆和SF₆/O₂等离子体的测量结果表明:电负性气体SF₆掺入Ar等离子体显著降低了等离子体电子密度,但随着增加SF₆的流量,电子密度表现为缓慢下降;而O₂掺入SF₆等离子体中,电子密度则随着O₂流量的增加表现为持续的下降.另外,40.68 MHz/13.56 MHz双频激发的SF₆/O₂容性耦合离子体的电子密度并不随低频功率的变化而变化.本文对上述的实验现象进行了初步的解释.     

Validity of the two-term Boltzmann approximation employed in the fluid model for high-power microwave breakdown in gas

The electron energy distribution function （EEDF）, predicted by the Boltzmann equation solver BOLSIG＋ based on the two-term approximation, is introduced into the fluid model for simulating the high-power microwave （HPM） breakdown in argon, nitrogen, and air, and its validity is examined by comparing with the results of particle-in-cell Monte Carlo collision （PIC/MCC） simulations as well as the experimental data. Numerical results show that, the breakdown time of the fluid model with the Maxwellian EEDF matches that of the PIC/MCC simulations in nitrogen; however, in argon under high pressures, the results from the Maxwellian EEDF were poor. This is due to an overestimation of the energy tail of the Maxwellian EEDF in argon breakdown. The prediction of the fluid model with the BOLSIG＋ EEDF, however, agrees very well with the PIC/MCC prediction in nitrogen and argon over a wide range of pressures. The accuracy of the fluid model with the BOLSIG＋ EEDF is also verified by the experimental results of the air breakdown.     

确定SF6-CO2预放电参数的激光脉冲方法

在均匀电场中,用高能激光脉冲释放初始电子以研究负电性气体的电子崩的发展,决定预放电过程的基本参数(游离系数α,吸附系数η和漂移速度v等)是一个有用的方法,本文对此方法做了详细的分析。采用这种方法对SF₆-CO₂混合气体做了研究,获得了10⁸个以上的初始电子及其分布,并给出了α/P,η/P和ν与E/P(E=电场强度,P=气体压力)的关系。本文还对所用的测量系统做了讨论,提出了改进办法。 关键词：     

Floating double probe in non‐Maxwellian plasmas: Determination of the electron density and mean electron energy

A theoretical study of the floating double probe based on the Druyvesteyn theory is developed in the case of non‐Maxwellian electron energy distribution functions (EEDFs). It is used to calculate the EEDF in the electron energy range larger than –e(V_f ? V_p) from the I–V double probe characteristics. V_f and V_p are the floating and plasma potential, respectively. The analytical distribution function corresponding to the best fit of EEDF in the energy range larger than e(V_f ? V_p) allows the determination of the total electron density (n_e) and the mean electron energy (<?_e>). The method is detailed and tested in the case of a theoretical Maxwell–Boltzmann distribution function. It is applied for experiments that are performed in expanding microwave plasmas sustained in argon. Analytical EEDFs determined by this method are compared with those measured by means of single probes under the same experimental conditions. A good agreement is observed between single and double probe measurements. Results obtained under different experimental conditions are used to define the best conditions to obtain reliable results by means of the double probe technique.     

Comparison of the first negative corona current pulses in N2 + SF6 and CO2 + SF6 mixtures

The current waveforms of the first negative corona pulses in a small point-to-plane gap have been measured with a nanosecond time resolution in N₂ + SF₆ and CO₂ + SF₆ mixtures at a pressure 50 kPa for various contents of SF₆ as a function of applied gap voltages. The physical mechanism for the pulses in these mixtures with low concentration of SF₆ has been described using the streamer-based theory. The influence of changing admixtures of SF₆ in N₂ and CO₂ has been compared. Differences in the pulse waveforms observed in N₂- and CO₂-based gas mixtures are explained by differences in the first and second Townsend ionization coefficients. This work was supported by the Grant Agency VEGA from the Ministry of Education of Slovak Republic under contracts 1/1011/04 and 1/2017/05.     

A broadband excimer source of visible radiation with barrier discharge pumping

We investigate the characteristics of a broadband cylindrical excimer source of visible radiation with a surface area of 230 cm² excited by a pulse-periodic barrier discharge based on multicomponent mixtures (mercury diiodide and dibromide with helium and admixtures of molecular nitrogen and xenon). The working mixture components were excited by a pulse-periodic (pulse repetition rate 500–5000 Hz, pulse duration ～150 ns) barrier discharge. We detected radiation from excimer HgI* and HgBr* molecules, the second positive system of molecular nitrogen, and mercury and xenon atoms. The amplitude, duration, and trailing edge of the radiation pulses in the HgI₂:HgBr₂:Xe:He and HgI₂: HgBr₂:N₂:He mixtures with admixtures of xenon and molecular nitrogen were found to change compared to the HgI₂:HgBr₂:He mixture. The optimal partial pressure of helium lies within the range 162–195 kPa. The most intense radiation from HgI* and HgBr* molecules (in a ratio of more than 3: 1) is observed in the HgI₂:HgBr₂: Xe:He mixture. The mean and pulse radiation powers are 45 W and 93 kW, respectively, at a pumping pulse repetition rate of 5000 Hz and an efficiency of 30%. We discuss the spectral and temporal characteristics of the radiation source and the dependence of the radiation intensity of excimer molecules of mercury monoiodide and monobromide on the partial pressures of xenon and nitrogen. We point out that the radiation source is of considerable interest for applications in biotechnology and medicine.     

Abnormal polarity effect in nanosecond-pulse breakdown of SF6 and nitrogen

The breakdown of gas gaps in an inhomogeneous electric field at subnanosecond and nanosecond voltage pulse rise times are studied, and the famous polarity effect in point-to-plane gaps is investigated. It is shown that at a voltage pulse rise time of ∼0.5 ns, the inversion of polarity effect takes place not only in electronegative gases such as SF₆, but also occurs in electropositive nitrogen. The inversion of polarity effect is related to a delay of electron emission from the plane cathode on arrival of the ionization wave front anode to the cathode. It is found that with a voltage pulse rise time of ∼0.5 ns, the inversion of polarity effect occurs at SF₆ and SF₆–N₂ pressures of 0.25 MPa and lower, and with a voltage pulse rise time of 15 ns, at a SF₆ pressure lower than 0.12 MPa.     

An approach for unipolar corona discharge in N2/O2 gas mixture by considering townsend conditions

In this study (α/p) = f(E/p) functional relation is derived for the gas mixture of N₂/O₂ by considering Townsend approach, and formation mechanism of corona discharge is investigated for the coaxial electrode system located in this gas medium. The electron energy distribution function (EEDF) which is required for estimation of ionization coefficient, is determined by considering probability distribution function of inelastic electron collisions versus energy. An algorithm for determining ionization coefficient for binary gas mixture is presented. The development and motion of the electron avalanche in inter-electrode gap are studied by considering the effect of positive space charges. It is determined by considering the derived mathematical expressions that the formation of corona discharge is related with the variation of the current characteristics in inter-electrode gaps depending on the change of potential of central electrode.