Formation of blazed holographic gratings

Various methods for the recording of blazed holographic diffraction gratings are presented and the regions in the wavelength-groove density plane for which they can be used are shown. The gratings are made in the positive photoresist Shipley AZ-1350. The diffraction efficiency for s and p polarization was measured as a function of wavelength and angle of incidence. An absolute efficiency of 80% was achieved.     

Diffraction efficiency of holographic blazed diffraction gratings

Holographic blazed diffraction grating is analysed as a periodic relief of an inclined sinusoidal curve in the shallow profile approximation. Under the condition that the rate of the development is a linear function of the development dose the evolution of the relief during the development is discussed. Theoretical curves of diffraction efficiency are compared with measurements on gratings made by direct holographic method for uv spectral region.     

High spectroscopic qualities in blazed ion-etched holographic gratings

Blazed ion-etched holographic gratings with a high absolute diffraction efficiency, good diffracted wavefront, high resolution, and low stray light have been produced. The performances were proved to be the same as, or superior to, commercially available blazed gratings produced by a ruling technique.     

软X射线自支撑闪耀透射光栅

软X射线自支撑闪耀透射光栅或临界角透射光栅是美国麻省理工学院为满足国际X射线天文台X射线光栅谱仪的科学要求而提出的一种新型衍射光栅,它集中了透射和反射光栅的优点,同时避免它们的缺点.文章对软X射线自支撑闪耀透射光栅的概念、基本原理、制作工艺进行了综述,介绍了美国麻省理工学院的光栅研制工作进展和文章作者的初步研究结果.     

用三角形闪耀光栅实现分束器

用闪耀光栅实现了光栅分束器。给出了该分束器衍射光强分布的解析表达,讨论了影响分束性能的各种因素,并把复杂的优化设计问题转变为简单的求条件极值问题,使编程简单,计算速度快。数值模拟表明,当分别扇出2束和4束光时,衍射效率可分别达到92.50%和95.75%,扇出光束能量均匀,各级衍射效率的方差分别在10-5和10-6的数量级。与其它分束器进行了比较。     

制造全息光栅的新装置

本文报道一种利用洛埃镜原理制造全息光栅的新装置及其调整方法.该装置具有光学系统简单,干涉条纹定位精度高和调整方便等优点,可制造性能良好的全息光栅.     

亚波长闪耀光栅矢量衍射效率计算

将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。     

Period interaction on diffraction efficiency of blazed transmission gratings

The period interaction on diffraction of the blazed transmission gratings is analyzed with a modified extended scalar theory. For one certain period, the lights reflected from the neighboring structures can be refracted by the grating facets and form two extra fields on the bottom facet of blazed transmission gratings. The effects of this period interaction versus several diffraction orders for a fixed fabrication error of blazed transmission gratings with intermediate structures are discussed for both TE and TM polarizations. The results have been compared with those obtained with finite-difference time-domain method.     

Fabrication of blazed gratings by area-coded effective medium structures

Area-coded effective medium structures (ACES) are a recently presented novel type of diffractive structure. Because of their higher stability compared to 2D binary blazed gratings, they have the potential of a broader use in micro-optics applications. The first fabrication with electron-beam lithography validate the theoretical model of blazed ACES. The measured diffraction efficiencies are in very good agreement with the values obtained from rigorous electromagnetic analysis.     

Ultra-high efficiency multilayer blazed gratings through deposition kinetic control

Diffraction efficiency of multilayer-coated blazed gratings (MBG) strongly depends on the perfection of the sawtooth-shaped layers in the overall composite structure. Growth of multilayers on sawtooth substrates should be carefully optimized to reduce groove profile distortion and, at the same time, to avoid significant roughening of multilayer interfaces. In this work, we report on a way to optimize growth of sputter-deposited Mo/Si multilayers on sawtooth substrates through variation of the sputtering gas pressure. We believe a new record for diffraction efficiency of 44% was achieved for an optimized MBG with groove density of 5250 lines/mm at the wavelength of 13.1 nm.     

严格耦合波法计算闪耀光栅衍射效率

针对一般标量近似算法精度不高的问题,提出采用S矩阵的严格耦合波的方法计算光栅衍射效率.通过建立完整的闪耀光栅理论模型,对各分层电磁场进行傅里叶级数展开,采用散射矩阵方法求解各谐波系数,完成衍射效率计算.该方法已应用到红外光栅TE和TM 2种模式衍射效率的计算.分析了散射矩阵解决数值运算不稳定的原因,通过与标量近似计算方法进行比较,说明红外光栅衍射偏振特性.     

高质量全息光栅的制作

全息光栅由感光版记录高斯光束干涉条纹制得 ,干涉条纹的不等宽性降低了光栅品质。制取高质量全息光栅的关键是要用均匀平面波作光源。在分析干涉区内光强分布的基础上 ,给出了制作等周期正弦全息光栅的两种方法 :限制曝光区大小的方法和高斯光束强度均匀化的方法。     

丙烯酰胺基光致聚合物全息光栅的动力学研究

研究了光致聚合物的光化学反应和单体扩散反应的理论模型及动力学参数. 合成了以聚乙烯醇为粘结剂,三乙醇胺为引发剂,藻红B敏化的丙烯酰胺基光致聚合物全息存储材料,通过对测定的透过率和衍射效率进行曲线拟合,分析了染料浓度对光致聚合物的摩尔吸收系数ε、量子产率Φ和光化漂白速率常数k等光化动力学参数的影响规律,以及曝光强度对聚合反应速率k₀、扩散时间常数τ_D和最大折射率调制度Δn等扩散动力 关键词： 光致聚合物 透过率 衍射效率 动力学参数     

扫描平场全息凹面光栅

从全息凹面光栅像差理论出发,考虑到扫描平场光谱仪的结构特点,推广全息凹面光栅优化设计的基本方程使之适用于扫描平场全息凹面光栅(SFHCG),且用在光栅扫描角范围内和在谱面上取点求和来代替复杂的积分运算,简化设计程序。给出一消像散SFHCG的设计实例和用这块光栅所做的实验结果。     

Profile formation in holographic diffraction gratings

A theoretical method is outlined for the calculation of the profiles of holographic diffraction gratings produced in photo-resist. This method is shown to give results in agreement with all experimental observations of such profiles. Consideration is then given to the flexibility of arrangements for the formation of holographic gratings and an experimental system is discussed which fully utilizes this flexibility. The wide range of profiles which may be generated with such a system is demonstrated. Finally a theoretical programme of investigation is suggested which may well make possible the formation of holographic gratings of greatly improved spectral performance.     

Artificial polarization anomalies from holographic gratings

An aluminum reflection grating made holographically was found to display polarization anomalies when illuminated with p-polarized light. Additional anomalies were detected for both p- and s-polarizations after the grating was coated with a layer of dielectric (410 nm of photoresist). These new anomalies have been interpreted in terms of the optical guided modes of a thin film dielectric waveguide bounded on one side by metal and on the other by vacuum.     

Light diffraction on acoustophotorefractive holographic gratings

The intermediate regime of light diffraction on acoustophotorefractive holographic gratings written in cubic photorefractive crystals according to the synchronous-detection mechanism is studied. It is shown that the diffraction efficiency in sillenite-type gyrotropic crystals only slightly depends on the incident light polarization and the external electric field. The highest diffraction efficiency in nongyrotropic crystals was achieved for p-polarized writing and reading light and at a considerable external electric field strength.     

摆动刻蚀法制作高衍射效率凸面闪耀光栅

通过摆动离子束刻蚀方法,制作了用于短波红外高光谱成像光谱仪的凸面闪耀光栅。该方法通过在光栅子午方向上进行摆动刻蚀,解决了凸面光栅子午方向的闪耀角一致性问题。建立了摆动刻蚀模型来分析摆动速度、束缝宽度等工艺参数对槽型演化的影响,并计算了优化的刻蚀工艺参数。制备了基底尺寸为67 mm,曲率半径为156.88 mm,刻线密度为45.5 gr/mm,闪耀角为2.2°的凸面闪耀光栅,并对其表面形貌及衍射效率进行了测量。实验结果表明,摆动刻蚀法能够制作出闪耀角一致性好、衍射效率高的小闪耀角凸面光栅,满足成像光谱仪对光谱分辨率和便携性的使用要求。     

Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime

Improving the efficiency of soft X-ray and extreme ultraviolet (EUV) gratings by way of multilayer reflection coatings has been under investigation for many years. Here we present the fabrication and characterization of binary blazed gratings designed to operate in the 14 nm wavelength region. These binary gratings are stepped approximations to the ideal sawtooth blazed-grating profile and are fabricated directly into a layer of photoresist. Normal-incidence reflection efficiencies as high as 25% into the first-diffracted order have been demonstrated.