Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna

Uniformity of inductively coupled plasma （ICP） is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.     

放电功率变化对电磁波在电感耦合闭式等离子体中的衰减特性

射频电感耦合等离子体(ICP)放电方式能够在较宽的压强范围内产生大面积、密度高的等离子体,在对电磁波衰减应用中具有较大优势。通过研究ICP等离子体与电磁波相互作用的过程,改进闭式等离子体模型,建立电磁波在非均匀等离子体中传播的分层计算模型,对实测诊断分布情形下等离子体与电磁波的相互作用进行研究,得到不同功率条件下电磁波衰减的变化情况;提出射频电感耦合闭式等离子体用于电磁波衰减的方法并实验验证,基于等离子体覆盖金属平板的测量模型,在实验室内搭建了以金属板为衬底的弓形微波反射测试系统,研究了闭式等离子体对4～8 GHz频段范围内微波反射的作用特性,以及不同射频功率对微波反射的影响规律,并将实验测量与计算结果进行对比分析。实验表明,通过功率调节,电感耦合闭式等离子体对5.92～6.8 GHz频带电磁波具有明显的衰减作用。     

电磁波在非磁化等离子体中衰减效应的实验研究

针对等离子体隐身技术在航空航天领域的良好应用前景, 开展垂直入射到具有金属衬底的非磁化等离子体中电磁波衰减特性的理论与实验研究. 利用WKB方法对电磁波衰减随等离子体参数的变化规律进行了理论分析. 利用射频电感耦合放电方式产生稳定的大面积等离子体层, 搭建了等离子体反射率弓形测试系统, 进行了电磁波在非磁化等离子体中衰减效应的实验研究. 利用微波相位法和光谱诊断法, 得到不同放电功率下的等离子体电子密度, 其范围为8.17×10⁹–7.61× 10¹⁰ cm^-3. 本实验获得的等离子体可以使2.7 GHz 和10.1 GHz电磁波分别得到一定的衰减, 且电磁波衰减的理论与实验结果符合较好. 结果表明, 提高等离子体电子密度和覆盖均匀性有利于增强等离子体对电磁波的衰减效果.     

Discharge impedance of solenoidal inductively coupled plasma discharge

The discharge impedance is calculated for a solenoidal inductively coupled plasma (ICP) discharge, which is one of the important sources for plasma processing. To calculate this impedance, the electromagnetic field quantities are obtained by solving the two-dimensional Maxwell equations in a realistic geometry. Also considered in the calculation is the anomalous skin effect which is regarded as a collisionless heating mechanism of ICP discharge. The results show that the discharge impedance is a function of various discharge parameters, such as plasma density, electron temperature, antenna position, collision frequency, excitation frequency, and chamber geometry.     

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为了更好地提高引出离子束的均匀性,对离子束刻蚀用矩形射频电感耦合等离子体(ICP)离子束源提出了三种线圈的设计方法,并对这三种线圈激发的电场进行了数值计算和比较。结果表明,直线段式不等距天线和并联多螺旋不等距天线线圈能够产生均匀性良好的电场,且其耦合效率高。     

基于等离子体的定向天线阵理论与实验研究

当前国内学者对等离子体天线的研究主要集中于柱状天线和反射面天线, 而在国外已有学者以等离子体阵列结构设计了功能多样的智能天线系统. 为了较系统地了解这一新的设计思路, 基于等离子体散射理论对中心单元激励的圆形定向天线阵进行了理论和实验研究. 设计了一个16元等离子体无源振子的圆形天线阵, 实现了天线电磁波单波束和多波束的定向辐射. 通过理论计算和分析, 阐述了天线电磁波单波束和多波束辐射的原理. 通过建立实验系统, 测试了圆形天线阵的定向辐射特性. 实验结果和理论值接近, 说明该等离子体圆形天线阵可以实现天线电磁波的定向辐射和多波束辐射. 另外, 该天线阵还具有快速切换辐射方向、参数快速重构、雷达隐身性良好的优点. 关键词： 等离子体 定向天线阵 单波束 多波束     

磁窗减缓等离子体对天线性能的影响

飞行器以高超声速再入大气层返回地球时,飞行器周围形成等离子体鞘套,等离子体会影响电磁波的传播特性,严重时通信甚至完全中断。从理论上分析了外加磁场时电磁波与等离子体的相互作用机理,提出了利用永磁体和螺旋天线一体式的设计方式,即磁窗天线,并研究了在等离子体环境中螺旋天线和磁窗天线的性能,仿真结果表明,利用永磁体和螺旋天线一体式设计的磁窗天线,可以减弱等离子体对天线性能的影响,这为解决飞行器再入通信中断问题提供了一种有效途径。     

磁窗减缓等离子体对天线性能的影响

飞行器以高超声速再入大气层返回地球时,飞行器周围形成等离子体鞘套,等离子体会影响电磁波的传播特性,严重时通信甚至完全中断。从理论上分析了外加磁场时电磁波与等离子体的相互作用机理,提出了利用永磁体和螺旋天线一体式的设计方式,即磁窗天线,并研究了在等离子体环境中螺旋天线和磁窗天线的性能,仿真结果表明,利用永磁体和螺旋天线一体式设计的磁窗天线,可以减弱等离子体对天线性能的影响,这为解决飞行器再入通信中断问题提供了一种有效途径。     

基于COMSOL 的感应耦合等离子体炬多物理场研究

为了优化锂微粉等离子体球化的工艺,对感应耦合等离子体炬进行二维建模,将电磁场计算域扩展到等离子体放电区域之外的空气区域,利用COMSOL 软件进行多物理场模拟。得到了等离子体的电磁场、温度和速度分布,并对分布形成的物理机制进行分析。模拟发现等离子体区域线圈段存在上下两组对称的回流涡,线圈段中部靠近约束管处等离子体速度分布杂乱,有激烈的径向打壁现象,乱流预计会对约束管壁相应位置造成一条环状的破裂效果。基于模拟结果,提出在采用感应耦合等离子体球化锂微粉的工艺工程中,可以将注粉口下移,绕开上回流涡。     

Transport and photoinduced properties in highly Sr-deficient manganite films

We used the method of finite-difference time domain (FDTD) to study the characteristics of the patch antenna based on a novel periodic structure, and the theory of photonic crystal structure (also photonic band gap [PBG]) structure was introduced. The results obtained show that the surface waves propagating along the substrate surface can be suppressed by the periodic structure due to the influence of its forbidden band, and the energy of the electromagnetic waves is concentrated mainly in the substrate. As a result, the patch antenna based on the periodic structure has a wider bandwidth in comparison with the conventional patch antennae; and a higher gain is reached, so the patch antenna’s performance is improved. Due to such the advantages, the application of patch antennae can be extended in such fields as mobile communication, satellite communication, aviation, etc.     

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In order to optimize the process of plasma spheroidization of the lithium micro-powder, a 2-D model of inductively coupled thermal plasma torch is presented. The calculating domain of the electromagnetic field is extended to the air region outside the plasma discharge region and multi-physics coupling calculation was performed by using COMSOL software. The plasma electromagnetic field, temperature and velocity distributions are obtained. The physical mechanism of distributions is analyzed. The simulation found that there are two sets of symmetrical reflux vortices in the coil section of the plasma region. The velocity distribution which locates in the center of coil section and closes to the wall of confinement tube is in disorder. The plasma particles hit the wall along the radial direction. Disorderly flow may cause a rupture area along the circular tube wall. Based on the simulation results, it is proposed that in the process of inductively coupled plasma spheroidization, powder injection port can be moved down to avoid the upper reflux vortex.     

Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching

A simple, economical and reliable technique is proposed for fabricating a spiral phase plate （SPP） in a quartz substrate to generate optical vortex with a unit topological charge at the wavelengths of 632.8nm. The spiral phase plate is first formed in the photoresist by direct laser writing lithography and then transferred into the quartz substrate by inductively coupled plasma etching. The performance of the fabricated SPP is verified by using beam intensity distribution, which is in agreement with the theoretical calculation result. The interference measurement suggests that we have succeeded to generate optical vortex with a unit topological charge with the fabricated SPP.     

Determination of arsenic species in mainstream cigarette smoke based on inductively coupled plasma mass spectrometry

In this work, arsenic species in mainstream cigarette smoke condensates was systemically studied with inductively coupled plasma mass spectrometry. A single particle inductively coupled plasma mass spectrometry was utilized for analysis of the physical forms of arsenic, and no particle arsenic was observed in mainstream cigarette smoke condensates. The solvent extraction experiments proved that the water-soluble arsenic was the main species in mainstream cigarette smoke condensates, which was consistent with the result of single particle inductively coupled plasma mass spectrometry. Furthermore, speciation of arsenite, arsenate, monomethylarsonic acid, and dimethylarsinic acid was investigated using high performance weak anion exchange chromatography coupled with inductively coupled plasma mass spectrometry detection. The developed high performance liquid chromatography coupled inductively coupled plasma mass spectrometry method was successfully applied to the determination of arsenic species in mainstream cigarette smoke condensates with satisfactory recoveries. Four arsenic species were detected in the mainstream cigarette smoke condensates from four brands of commercial available cigarettes, and there was a great difference between the arsenic content and composition among the different brands of cigarettes. It is found that arsenate was the main species in all tested cigarette samples.     

加载电磁带隙结构的平切圆锥等角螺旋天线

加载电磁带隙的平切圆锥等角螺旋（EAS-EBG)天线可以在很宽的频带范围内提高辐射增益。建立了平切等角螺旋锥体（EAS）天线的基本模型,并用HFSS对其进行了仿真。研究了一种加载电磁带隙结构的平切圆锥等角螺旋锥体天线。该天线是在保持原平切等角螺旋锥体天线外形不变的情况下,加载了小型化的电磁带隙结构,以提高增益并保持共形化。仿真结果表明:加载电磁带隙结构的模型增益在5～12 GHz带宽下可以提高1～3 dB,并且轴比特性基本不变。     

Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications

Two classic radio-frequency (RF) plasmas, i.e., the capacitively and the inductively coupled plasmas (CCP and ICP), are widely employed in material processing, e.g., etching and thin film deposition, etc. Since RF plasmas are usually operated in particular circumstances, e.g., low pressures (mTorr-Torr), high-frequency electric field (13.56 MHz-200 MHz), reactive feedstock gases, diverse reactor configurations, etc., a variety of physical phenomena, e.g., electron resonance heating, discharge mode transitions, striated structures, standing wave effects, etc., arise. These physical effects could significantly influence plasma-based material processing. Therefore, understanding the fundamental processes of RF plasma is not only of fundamental interest, but also of practical significance for the improvement of the performance of the plasma sources. In this article, we review the major progresses that have been achieved in the fundamental study on the RF plasmas, and the topics include 1) electron heating mechanism, 2) plasma operation mode, 3) pulse modulated plasma, and 4) electromagnetic effects. These topics cover the typical issues in RF plasma field, ranging from fundamental to application.     

Two-dimensional simulation of inductive plasma sources withself-consistent power deposition

A time averaged two-dimensional fluid model including an electromagnetic module with self-consistent power deposition was developed to simulate the transport of a low pressure radio frequency inductively coupled plasma source. Comparisons with experiment and previous simulation results show that the fluid model is feasible in a certain range of gas pressure. In addition, the effects of gas pressure and power input have been discussed     

外加电磁窗减缓再入飞行器的通信中断

为解决再入过程中的黑障问题,在前期磁窗天线增强等离子体透波特性研究基础上,开展了外加电磁窗影响研究,磁体为钕铁硼,外加电压为100 V。利用不同飞行高度下的流场数据,对不加电磁场、外加磁场和外加正交电场与磁场影响下的流场进行数值模拟,对比不同参数设置下天线窗口处的电子密度和电磁波衰减常数,分析了再入飞行器的飞行高度、天线窗位置、电磁波频率、电子密度和碰撞频率等参数对电磁窗天线性能的影响。从分析结果可以看出,外加正交电场与磁场对于减缓再入过程中黑障的效果优于仅外加磁场,通过合理选择电磁窗的工作状态和参数可以改变等离子体的分布特性和介电参数,能够有效地增强电磁波在等离子体鞘套中的传输,为解决和减缓通信中断问题提供了一种可能的途径。     

Characteristics of a dual‐radio‐frequency cylindrical inductively coupled plasma

The plasma parameters such as electron density, effective electron temperature, plasma potential, and uniformity are investigated in a new dual‐frequency cylindrical inductively coupled plasma (ICP) source operating at two frequencies (2 and 13.56 MHz) and two antennas (a two‐turn high‐frequency antenna and a six‐turn low‐frequency (LF) antenna). It is found that the electron density increases with 2 MHz power, whereas the electron temperature and plasma potential decrease with 2 MHz power at a fixed 13.56 MHz power. Moreover, the plasma uniformity can be improved by adjusting the LF power. These results indicate that a dual‐frequency synergistic discharge in a cylindrical ICP can produce a high‐density, low‐potential, low‐effective‐electron‐temperature, and uniform plasma.     

车载单极天线的电磁脉冲响应特性

针对车载系统中使用广泛的短波/超短波单极天线,利用CST仿真分析了高空核电磁脉冲对单极天线的耦合响应特性。计算了天线端接的50 Ω负载对电磁脉冲的时频域感应电压信号,研究了电压信号随不同的脉冲入射角、不同车顶面积以及天线不同位置的变化规律。仿真结果表明：馈电点响应电压峰值随着入射脉冲电场矢量与水平夹角的增大而增大,随着车顶对入射脉冲的有效反射面积增大而增大。仿真结果对车辆天线布局方案的定制及天线系统电磁脉冲防护器件的选择具有重要的指导意义。     

悬浮液雾化进样感耦等离子体基本参数研究——Ⅱ等离子体电子密度测定

研究了悬浮液雾化进样感耦等离子体原子发射光谱基本参数-等离子体电子密度的测定。实验使用Stark效应常用的谱线H_β线来计算等离子体电子密度。测定结果表明悬浮液雾化进样同水溶液雾化进样感耦等离子体原子发射光谱时等离子体电子密度没有发生显著的变化,数值基本上为1015数量级。固含量高达10％ TiO₂悬浮液雾化进样等离子体原子发射光谱,电子密度测定结果仅有微小的降低。高固含量悬浮液雾化进样等离子体原子发射光谱没有显著地影响等离子体电子密度,有助于使用高固含量悬浮液雾化进样等离子体原子发射光谱来进行痕量元素分析测定。