共查询到17条相似文献,搜索用时 156 毫秒
1.
基于半经典理论,建立了中性原子与激光驻波场相互作用的模型,分析了中性原子在激光驻波场沟道效应作用下运动轨迹及沉积特性,探讨了球差、色差和原子束发散角对沉积条纹的影响. 得到了上述三种影响因素下纳米光栅的半高宽分别为0.532,12.16,96.70 nm. 仿真结果表明,随着原子束发散角度的增加,沉积条纹的对比度将会下降,当原子束发散角分别为0.1 mard时,其对比度为85.2:1,发散角为0.3 mrad时,条纹对比度为5.33:1,而当发散角增加至0.5 mrad以上时,沉积条纹将会出现分裂现象,导致条纹的恶化.
关键词:
激光驻波场
纳米光栅
沟道效应 相似文献
2.
利用近共振激光驻波场操纵中性原子实现纳米光栅的沉积是一种新型的研制纳米结构方法,处于激光驻波场中的原子运动速度特性对最终纳米光栅的沉积特性有着重要的影响.利用半经典理论,基于4阶Runge-Kutta算法进行了不同铬原子纵向和横向运动速度条件下纳米光栅结构沉积的仿真研究.研究表明,铬原子纵向速度为最大概率速度960 m/s时,所形成的纳米光栅的半高宽为1.49 nm,对比度为62.1 ∶1,当铬原子的纵向速度为半最大概率速度480 m/s时,纳米光栅的半高宽为5.35 nm,对比度下降为25.6 ∶1.同
关键词:
原子光刻
纳米计量
激光驻波场
纳米光栅结构 相似文献
3.
基于半经典理论,分析了中性钠原子在激光驻波场中的受力特征,以此为基础分别对不同纵向运动速度和横向运动速度条件下中性钠原子的运动轨迹进行了仿真运算,得到了不同速度条件下中性钠原子的运动轨迹特征,基于累计算法进一步对不同速度条件下中性钠原子的沉积特性进行了仿真,当钠原子的纵向运动速度符合最可及速度(740 m/s)时,纳米沉积条纹的半高宽为2.78 nm,条纹对比度为38.5 ∶1,当纵向运动速度偏离最可及速度(350 m/s)时,纳米沉积条纹的半高宽为29.1 nm,其对比度下降为15 ∶1.而当中性钠原子
关键词:
原子光刻
激光驻波场
条纹半高宽
条纹对比度 相似文献
4.
利用近共振激光驻波场操纵中性原子实现纳米级条纹沉积技术是一种新型的研制纳米结构长度标准传递的方法.分析了Cr原子在椭圆型激光驻波场作用下的沉积特性,分别对不同椭圆激光驻波场功率下Cr原子的沉积条纹及不同y平面上沉积条纹特性进行了模拟和分析.同时针对椭圆激光驻波场作用下Cr原子发散角对沉积条纹特性的影响进行了模拟计算,比较了不同发散角条件下沉积条纹的对比度和半高宽.
关键词:
原子光刻
椭圆激光驻波场
Cr原子 相似文献
5.
利用近共振激光驻波场操纵中性原子实现纳米量级条纹沉积技术是一种新型的研制纳米结构长度传递标准的方法,采用了一种新颖的方法,通过预准直孔的设定,将原子束在空间分成三部分,利用中间部分的原子束和近共振激光驻波场相互作用,在激光驻波场辐射压力作用下使原子按照特定周期沉积在基板上,从而实现纳米条纹的制作.利用两侧部分的原子束与探测激光束相互作用,通过其感生荧光来监测中间部分原子束沉积过程中的准直效果,从而为原子的沉积过程提供实时的原子束特性监测.最后对纳米沉积条纹在经由三狭缝预准直结构作用前后的效果进行了三维仿真,结果表明,未采用该三狭缝预准直结构时,纳米沉积条纹的半高宽为32nm,对比度为8∶1,而采用该三狭缝预准直结构之后,纳米沉积条纹的半高宽为6.2nm,对比度为28∶1,大大提高了纳米沉积条纹的质量. 相似文献
6.
利用近共振激光驻波场操纵中性原子实现纳米级条纹沉积是一种新型的研制纳米结构长度标准传递方法。在会聚原子过程中,由于沉积基片的存在,激光驻波场内会产生直边衍射现象,从而影响原子的运动轨迹及沉积光栅。建立了直边衍射扰动下激光驻波场模型,通过四阶龙格-库塔法,对铬原子的三维运动轨迹及沉积效果进行仿真。考虑到激光功率与失谐量的影响,从半峰全宽(FWHM)和对比度入手,对铬原子运动轨迹及沉积条纹特性进行分析。结果表明,当激光功率为3.93mW,失谐量为200 MHz时,原子沉积光栅的FWHM为6.043nm,对比度为0.863,原子沉积光栅的质量最佳。与经典模型相比,该模型考虑了驻波场中直边衍射的影响,所得模拟结果更接近实际,对实验有理论指导意义。 相似文献
7.
《光学学报》2017,(6)
利用近共振激光驻波场操纵中性原子实现纳米级条纹沉积是一种新型的研制纳米结构长度标准传递方法。在会聚原子过程中,由于沉积基片的存在,激光驻波场内会产生直边衍射现象,从而影响原子的运动轨迹及沉积光栅。建立了直边衍射扰动下激光驻波场模型,通过四阶龙格-库塔法,对铬原子的三维运动轨迹及沉积效果进行仿真。考虑到激光功率与失谐量的影响,从半峰全宽(FWHM)和对比度入手,对铬原子运动轨迹及沉积条纹特性进行分析。结果表明,当激光功率为3.93mW,失谐量为200 MHz时,原子沉积光栅的FWHM为6.043nm,对比度为0.863,原子沉积光栅的质量最佳。与经典模型相比,该模型考虑了驻波场中直边衍射的影响,所得模拟结果更接近实际,对实验有理论指导意义。 相似文献
8.
9.
10.
利用激光驻波场会聚原子沉积纳米结构的技术可以用来研制纳米结构长度传递标准.当激光驻波场的频率大于原子的共振频率时,原子由于受到偶极力的作用将被会聚到驻波的波节处.采用了一种新的技术方案减小了实验对大的激光功率的要求.利用激光驻波场会聚准直性较好的Cr原子,并使其沉积在硅基片上形成纳米光栅结构.经原子力显微镜测试表明纳米光栅的周期为215 nm.
关键词:
激光偶极力
纳米计量
原子沉积
蓝失谐 相似文献
11.
The influence of divergence angle on the deposition of neutral chromium atoms using a laser standing wave
下载免费PDF全文
![点击此处可从《中国物理 B》网站下载免费的PDF全文](/ch/ext_images/free.gif)
The characteristics of neutral chromium atoms in the standing wave field are discussed.Based on a semi-classical model,the motion equation of neutral atoms in the laser standing wave field is analyzed,and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam.The simulation results show that the full width at half maximum(FWHM) of the stripe is 2.75 nm and the contrast is 38.5:1 when the divergence angle equals 0 mrad,the FWHM is 24.1 nm and the contrast is 6.8:1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm,and the contrasts are 3.3:1 and 1.6:1 when the divergence angles equal 0.5 and 1.0 mrad,respectively. 相似文献
12.
One-dimensional deposition of collimated Cr atomic beam focused by a near-resonant Gaussian standing-laser field with wavelength
of 425.55 nm is examined from particle-optics approach by using an adaptive step size, fourth-order Runge-Kutta type algorithm.
The influence of laser power on deposition of atoms in laser standing wave is discussed and the simulative result shows that
the FWHM of nanometer stripe is 102 nm and contrast is 2:1 with laser power equal to 3 mW, the FWHM is 1.2 nm and contrast
is 32:1 with laser power equal to 16 mW, but with laser power increase, equal to 50 mW, the nonmeter structure forms the multi-crests
and exacerbates.
Supported by the Science Foundation of Guangxi Education Department (Grant No. 200807MS006) 相似文献
13.
Simulation of Chromium Atom Deposition Pattern in a Gaussain Laser Standing Wave with Different Laser Power
下载免费PDF全文
![点击此处可从《中国物理快报》网站下载免费的PDF全文](/ch/ext_images/free.gif)
One-dimensional deposition of a neutral chromium atomic beam focused by a near-resonant Gaussian standing- laser field is discussed by using a fourth-order Runge-Kutta type algorithm. The deposition pattern of neutral chromium atoms in a laser standing wave with different laser power is discussed and the simulation result shows that the full width at half maximum (FWHM) of a nanometer stripe is 115nm and the contrast is 2.5:1 with laser power 3.93mW; the FWHM is 0.8nm and the contrast is 27:1 with laser power 16mW, the optimal laser power; but with laser power increasing to 50mW, the nanometer structure forms multi-crests and the quality worsens quickly with increasing laser power. 相似文献
14.
15.
16.
The scattering of atoms and molecules by the force of stimulated light pressure appearing in a standing wave is considered. It is shown that short (10-8s) light pulses of tunable lasers can deviate resonance atoms through an angle of about 5°. A high selectivity of scattering is retained in a standing wave even in conditions of great saturation. Therefore the considered effect can be used for the separation of isotopes. 相似文献
17.
Ming-Liang Liao 《Applied Physics A: Materials Science & Processing》2014,117(3):1109-1118
This paper used molecular dynamics simulations to investigate buckling behaviors of open-tip carbon nanocones (CNCs) at elevated temperatures ranging from 300 to 700 K. Influences of cone height and apex angle on the buckling behaviors were examined. Some interesting findings, especially on the change in buckling mode shapes of the CNCs, were observed in the study. For the CNCs having an apex angle of 19.2°, the one with a lower cone height exhibited a shrinking/swelling buckling mode shape even at the higher temperature 700 K. However, as the cone height increased, the CNC displayed a deflective buckling mode shape at 300 K, but changed to a shrinking/swelling buckling mode shape when the temperature grew to 500 K. Regarding the influences of apex angle, the CNCs presented a deflective buckling mode shape even at 700 K as the apex angle expanded. This is opposite to the shrinking/swelling buckling mode shape of the CNC having the smallest apex angle of 19.2°. 相似文献