云纹干涉反转倍增法及其在微电子组件变形场测量中应用

本文提出并介绍了云纹干涉反转倍增法，该方法将光学载波、反转剪切、富立叶变换倍增技术巧妙地结合于云纹干涉光路中。利用载波频率，把带载波的云纹干涉变形图在富立叶变换系统中进行条纹倍增，而试样变形信息也倍增了相同倍数，将云纹干涉的测量灵敏度又提高了一个数量级。在实验中实现了１６倍倍增，即位移测量灵敏度由０．４μｍ提高到０．０２５μｍ（虚栅频率１／２４００）。将这一方法用于测量热载下金属Ｎｉ膜／ＺｒＯ２陶瓷基界面裂纹尖端面内位移场，分析裂尖位移奇异性。实验表明：热载作用下，膜／基组件界面裂纹尖端的位移奇异性具有指数奇异特性，其奇异性指数与膜／基材料，界面层特性等有关     

云纹干涉条纹倍增方法研究

本文将云纹干涉法与载波法、倍增技术相结合,提出一种位移场和应变场云纹干涉条纹倍增方法,该方法使得云纹干涉法测量灵敏度提高四倍以上。文中对该方法给出了严格的理论推导和实验验证。     

断裂测试系列讲座 第二讲 云纹法及其在断裂力学中的应用

1.云纹法(Moire Method) 由粘牢于试件(模型或构件)表面并可随其一起变形的栅片和栅板重迭(图1),栅线间因几何干涉而产生条纹(图2),这种干涉条纹称为云纹。云纹法就是根据这类云纹测定和分析试件的位移场或应变场的实验应力分析方法。     

CCD云纹方法的光学放大作用分析及其在干涉测量中的应用

几何云纹由于对栅线变形具有光学放大作用,常被用于高密度栅线的微小变形测量。但是其需要分别设置参考栅和试件栅,实验布置复杂。当使用数字相机直接拍摄试件栅时也会形成与几何云纹相似的CCD云纹,但是基于此原理发展的变形分析方法是否可以应用于高密度栅线变形分析还缺乏相关的研究。本文基于CCD云纹的形成机理和周期公式,分析并确认了其与几何云纹一样具有光学放大作用,因此可以将其应用于高密度栅线/干涉条纹的解析。利用此优势,实现了对高密度干涉条纹间距的解析,实现了两个相干点光源距离和迈克尔逊干涉实验转动角度的精密测量。本研究为干涉实验中高密度条纹分析提供了一种新的手段,可以解决实验中条纹过密无法解析的问题。     

大电流快速加热条件下LY12铝板动态变形的云纹干涉法实验研究

本文研究了中间带孔受拉铝板在大电流热冲击条件下的动态变形测试．在试件表面制作高温高频光栅，预加机械载荷后放入双光束云纹干涉光路中，用大电流加热器对试件进行快速加热，利用高速摄影机拍摄记录试件表面圆孔附近区域干涉条纹的变化情况，同时利用测温系统对试件的温度变化情况进行了测试记录．实验结果表明，用高速拍摄方法摄影热冲击条件下的云纹干涉条纹变化是可行的．     

相移数字云纹测量系统

介绍了一种相位移数字云纹变形测量系统．测试系统采用ＣＣＤ摄像系统记录光栅图像，控制采样的空间频率大约为光栅线密度的整数倍，对试件栅进行采样后用数字信号处理的方法，实现空间相位移及进行实时数字云纹条纹显示，并对相移误差及光栅信号的高阶谐波的影响进行了校正     

用云纹干涉法测复合材料的固化残余应变

云纹干涉法是研究复合材料变形的一种有效方法.本文讨论了用云纹干涉法测量复合材料的固化残余应变,获得了试件表面的位移条纹图,并用电测方法加以验证。     

云纹干涉法现场测量中的变形试件栅复制技术

本文研究了云纹干涉法的现场测量技术.该方法在现场测量过程中复制变形的试件栅.试件栅上保留了载荷引起的变形信息,通过云纹干涉法可以得到这些变形信息.该方法不但具有云纹干涉法的所有优点,并且使云纹干涉法可以在光学实验室以外场合中应用.     

离面位移场测量的相加云纹干涉法

本文采用两束准直相干光对称入射-高频试件光栅,并辅之以一沿试件栅法向传播的平面参考光波。通过调节入射光的入射角而对正、负一级衍射波引入适当载波,在试件栅变形前后,正、负一级衍射波与参考平面光波同时对记录底版两次曝光而将试件栅的变形信息记录下来。通过对记录底版的滤波处理而分离出实时或差载的离面位移场条纹图。这一方法使得离面位移场测量的灵敏度达到四分之一波长.文中给出了严格的理论推导和条纹对比度极好的实验验证.     

折射率介质在制栅和云纹干涉法中的应用

本文在已有的高折射率介质制栅方法的基础上提出了一种新的制作超高频全息光栅的方法,该方法制栅准确、简单、方便,其特点是所制光栅的频率与激光波长及介质的折射率无直接关系,而是等于制栅光路所得频率与两倍母栅频率之和.该制栅原理同时被推广应用于云纹干涉法中.     

Automatic order-determination of transient in-plane displacement moire patterns

This paper presents a fringe-carrier method that eliminates sign ambiguity of transient moire fringes which can be used to automatically determine the relative orders. A fringe carrier is preset in the static state of the specimen and the dynamic in-plane displacements are recorded as the modulation to the frequency of the carrier fringes when the specimen is loaded by impact. According to a modulating criterion developed from the modulation degree, the fringes of the transient moire patterns keep monotonical in orders so that they can be automatically encoded in grey levels by a digital image system. The moire orders purely caused by dynamic loadings are evaluated by subtracting the grey-value of the unmodulated carrier image from that of the modulated carrier images encoded by their orders. With the subtracted moire orders the strain components can be obtained, and, correspondingly, the histograms of dynamic displacement moire images are shown with order variation by image-difference. The project supported by Alexander von Humboldt Foundation of Germany and the National Natural Science Foundation of China     

贴片云纹干涉法

将全息胶片粘贴到测试表面,利用全息干涉两次曝光法,获得高灵敏度二维云纹;曲于实现了制栅和测试过程的合一,胶片与试件分离后处理,本方法具有简易、省时、灵活,试验费用低,适用面广,可用于现场在位测试等优点。     

倍增云纹的显微测量及密集云纹场的应变测算

为了提高云纹法的准确度,文中提出了使倍增后的云纹宽度变细并进行显微测量的技术,以及由密集云纹场测算应变的条纹间距插值和小间距均匀法。给出了估计由此法算得的应变的误差及其修正方法。所做的曲杆实验其数据与理论值符合得很好。文中还将云纹法中闪耀光栅与振幅栅相匹配的光学空间滤波系统改进为实时系统,导出其条纹倍增率及云纹图的最佳对比度条件。     

2D PHASE SHIFTING AND LOGICAL MOIRE USED IN FRINGES ANALYSIS

Phase Shifting And Logical Moire (PSALM) is a kind of computer imageprocessing method which can be used in phase measurement and to obtain the shape,deformation and strain distribution of an object.This paper presents the structure andworking procedure of a 2D phase measurement PSALM2D program and its application.When analyzing moire interferometric fringes,we can obtain 2D distribution ofdisplacement and strain.When it is used in reflection moire we can measure the slopeof a specimen.Satisfactory visualization and quantitative results are given byPSALM2D.     

High-sensitivity moiré interferometry—A simplified approach

High-quality moire-interferometry patterns were obtained with the following conditions: specimen of graphite-polyimide composite material; reflective cross-line specimen grating of 600 ?/mm (15,000 ?/in.); virtual reference grating of 1200 ?/mm (30,000 ?/in); fringe-multiplication factor of 2; carrier pattern of 10 fringes/mm (250/in.); carrier eliminated by optical filtering. The phase-type specimen grating was cast onto the composite material with silicone rubber, using a ‘homemade’ mold. The virtual grating was formed with a plane mirror in a collimated field. Precision-quality optical elements are not required.     

三维位移场(U,V,W)实时观测的云纹干涉法

本文将一特殊布置的云纹干涉系统和一垂直入射试件栅的麦克尔逊干涉系统组和起来,利用云纹干涉系统测量两个面内位移分量U、V,垂直入射的麦克尔逊干涉系统测量离面位移分量 W。调节云纹干涉系统中入射光的入射角,使正、负一级衍涉波的传播方向偏离开试件栅法向一微小角度,从而使一级衍涉波的频谱点与麦克尔逊干涉系统中的零级衍涉波的频谱点在频谱面上分开。利用小反射镜的反射来改变一级衍射波的传播方向,从而使我们在三个彼此分开的成像面上同步实时观测到三维位移场的条纹图。文中给出了严格的理论推导和实验验证。     

Application of refractive medium in optical micromechanics

The refractive medium is used in moire interferometry and holographic grating fabrication technique. The sensitivity of traditional interferometry and the frequency of grating are enhanced effectively. These two novel techniques extend the application scope of the moire interferometry and facilitate the realization of superlattice method in micromechanics study. The project supported by the National Natural Science Foundation of China     

High resolution, high sensitivity moire method

Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patterns are produced by the superposition of two high frequency gratings through a microscope system. Compared with other grating-based photo-mechanics methods, microscopic moire method could provide whole-field moire patterns of both high spatial resolution and high sensitivity. The frequency of specimen and reference gratings used in this method can be from 1 line/mm to 10000 lines/mm. Additionally, a 4F optical filter system is used to enhance the contrast of microscopic moire patterns effectively. The project supported by the National Natural Science Foundation of China     

Slope-contour fringe multiplication by Fresnel diffraction

Coherent collimated monochromatic light emitted from a He?Ne laser was used to illuminate a transparent sheet specimen in plane stress. The light emerging from the specimen was concentrated by a thin positive lens on a coarse amplitude grating placed at the vicinity of the focus of the lens and projected on a ground-glass screen. The strongly coherent light of the laser was diffracted at the coarse grating. The deformed lateral surfaces of the loaded specimen worked as a thin lens of continuously variable focal length, which was interposed in the path of the beam and distorted the diffraction image. The pattern yielded the partialslope contours of the thickness variation in a direction normal to the rulings of the grating. Positioning the grating within the focal distance of the lens resulted in a predominant Fresnel diffraction of the opaque strips of the grating. Placing the grating beyond the focal plane created a Fresnel diffraction of the open slits. Both diffraction patterns yielded a high multiplication of fringes which increased considerably the accuracy of the experimental results.     

Measuring displacement fields of curved surface by moire interferometry of partial coherent light

This paper presents a method to measure the in-plane displacement fields of curved surface by moire interferometry of partial coherent light. The method has the following advantages: simple optical system, no requirement on vibration isolation, high sensitivity, large measuring range, high contrast of interference fringes and availability to in situ structural testing. the present paper also gives theoretical analysis of the method and the formulas of light intensity and displacement field, and introduces a replication technique to form a high frequency reflectance grating on the curved surface. The expriments achieved the measurement of the surface displacement field of a cylindrical shell— the simultaneous circumferential, axial and 45° displacement fields. The torsional test data for surface displacement of a circular bar agree well with the theoretical result. The project supported by National Natural Science Foundation of China.