Design method of soft X-ray and vacuum ultraviolet optical system based on plane-symmetric aberration theory

Optical Review - Soft X-ray and vacuum ultraviolet optical system has the imaging performance of plane-symmetric optical system, this paper propose a design method of this kind of optical systems...     

左手性介质透镜系统的赛德尔像差特性研究

根据初级像差理论，系统研究了由左手性介质构造的透镜系统的赛德尔像差特性.分析了左手性介质单折射曲面的赛德尔像差特性，发现其消初级球差的曲面类型比普通介质更为灵活且可用于实成像系统.依据薄透镜赛德尔和数公式，分析和设计了三种只有左手性介质才具备的可消部分赛德尔像差的薄透镜结构参数，提出了几种能同时消除全部五种赛德尔像差的由左手性介质构造的透镜组合系统.研究表明左手性介质相对于普通介质在消像差方面存在较大优势，在光学设计时可以采用更少的折射表面个数或更简单的表面形状即可到达同等的成像性能.     

Measurement of lens aberration based on vector imaging theory

Current aerial image based aberration measurement methods are all derived from the scalar imaging theory which is not applicable to hyper-NA lithography. Here we propose an aberration measurement method for the lithography system with an arbitrary NA based on the rigorous vector imaging theory. The retrieval error of the proposed method is clearly demonstrated by comparing with the method based on the scalar imaging theory for an immersion NA 1.35 projector using numerical results. The results show that the maximal retrieval error of our method is below 0:5mλ, while that of previous method is above 4mλ. In addition, the effect of practical aerial image metrology accuracy on the retrieval accuracy of proposed technique is analyzed. The results obtained demonstrate that the retrieval accuracy of our method is greatly improved, and the proposed technique is applicable to the retrieval of the wavefront aberration of a projector with hyper-NA.     

基于自洽输运理论的介观体系动态电导的研究

基于介观体系电子动态输运的自洽理论,讨论了介观结构的动态电导.作为该理论的应用,采用一介观相干平行板电容器模型来进行研究. 结果表明:体系的动态电导与外场频率和体系费米能有关,为一复数且有有限虚部. 当外场频率较小时,动态电导随费米能的变化所呈现的特性和直流情形非常相似,但是随着外场频率的增加,两者差异就变得非常明显,体系动态电导随外场频率的变化呈现一些峰值结构. 在给定体系费米能时,动态电导随着外场频率的变化而产生振荡,并且出现了负的电导虚部,电导虚部的正负表明了体系的电容特性和电感特性. 关键词： 自洽输运理论 相干平行板电容器 电导 介观体系     

应用波像差理论计算Kirkpatrick-Baez系统的调制传递函数

调制传递函数（modulation transfer function,MTF）曲线可以客观地评价光学系统的成像性能。基于平面对称光学系统的波像差理论,给出了Kirkpatrick-Baez（KB）显微镜光学系统主要像差的波像差计算表达式,采用自相关法,通过Gauss-Legendre数值积分求解并绘制了KB系统的MTF曲线,且与光学分析软件的MTF曲线进行对比。结果表明:应用波像差理论计算调制传递函数不仅可以定量直观地分析KB系统的成像性能,而且能进一步解析光学系统的单项像差分布情况,提供更具针对性的系统优化方案。     

后向动态光散射系统的像差分析与校正

针对后向动态光散射颗粒测量系统信噪比较低的问题,从光学系统的像差入手,采用Zemax对其进行了仿真和分析,并提出了校正方案。首先介绍了后向动态光散射颗粒测量系统的基本原理和光学系统,从校正像差的角度出发,采用Zemax对后向动态光散射系统进行仿真,并对其像差进行分析。然后根据仿真结果,提出了校正方案,采用Ze-max设计了方案中的参数,得出了理论上的校正结果。最后采用优化好的结果进行后向动态光实验,得到了实验数据。均值误差和重复性误差分别达到了1.52%和1.24%。满足国标均值误差和重复性误差小于2%的要求。     

基于矢量波像差理论的两反光学系统装调研究

 为了实现对两反光学系统的精密装调,提出一种基于矢量波像差理论和波像差检测技术对失调量精确求解的装调方法。使用矢量波像差理论,将已设计的两反光学系统参数、失调量和失调光学系统的波像差之间建立方程;然后通过干涉测量法得到某一个视场的干涉图,利用条纹分析软件得到表征失调系统三阶彗差和三阶像散的泽尼克项系数,将泽尼克项系数代入方程从而求解出失调量。运用此方法对4 m口径RITCHEY-CHR-TIEN结构的天文望远镜进行模拟装调,最终求解的失调量与引入的失调量结果相互吻合,说明该装调方法正确。     

基于像差特征分析的变焦光学系统装调

提出了一种基于像差特征分析的变焦系统共轴性装调方法。针对某型20倍变焦光学系统的装调,在分析变焦光学系统装调要求的基础上,通过采用光学定心加工技术,提高变焦系统各镜组内光学元件的同轴度;采用Zygo干涉仪,检测变焦系统在长短焦位置的像差特性分布;借助CodeV软件仿真计算各光学元件在系统中的公差灵敏度分布,并确定产生像差影响的敏感光学元件;在中心偏测量仪上,完成最终光学系统像质的调整。此外,还设计了一种变焦光学系统各动组间同轴度调试装置,对变焦相机主镜筒机械内孔轴线与直线导轨的平行性进行了精确测量,保证了动组组元光轴的同轴精度。装调结果表明:变焦系统成像质量有明显改善,像面一致性得到保证,长短焦轴上传递函数值分别优于技术要求值0.45和0.55,长短焦轴外0.7视场传递函数值优于0.25和0.35,实现了高精度装调,验证了该方法的可靠性。     

基于STM32大气动态雾霾检测系统的设计

大气的质量直接关系到人们的生存环境,衡量大气污染的程度和对身体健康造成的伤害,都离不开对大气的检测。如何进行检测,用什么方法来评判,本文提出一种方法来实时检测大气雾霾的状况,尤其是PM2.5(空气动力学当量直径小于等于2.5微米的颗粒物)被认为是造成雾霾天气的“元凶。大气雾霾监测系统利用雾霾检测器和GPRS传导,将所在地雾霾情况实时监测传输给手机APP终端,手机接收之后将数据整合显示给使用者,达到雾霾监测和提前应对恶劣天气的作用。     

Optimizing match on optical aperture and wave aberration in a small aberration system

Some formulae on correlative match of both optical aperture and wave aberration to determine image quality are derived in this paper. The optimizing match zone on optical aperture and wave aberration were found both theoretically and experimentally. The results are importantly different from traditional criteria for image quality.     

First-order aberration of a misfocused self-imaging system

We analyze the characteristics of a self-imaging system that appear across a misfocused image plane. We approach this problem from the point of view of aberration theory. First, we derive the aberration functions (corresponding to several self-imaging rays of different orders) which are linear in a small shift of focus, and then we examine their roles in the amplitude spectra of misfocused self-images. We show that the aberration of the mth-order self-imaging ray is responsible for a lateral shift of the image amplitude component of frequency m/Mp, where M is the magnification of the system and p is the fundamental period of an object grating. We also analyze the role of wavefront aberrations in the image irradiance as an observable quantity. We then show that the theoretical estimation of irradiance of the aberrated image is in good agreement with the experiment and the focus-shift aberration can exert a severe effect on the irradiance spectrum of image in a complicated way.     

An electret model based on the two-level system theory

On the basis of the concept of a two-line density matrix and considering the tunneling effect a set of simultaneous differential equations is derived relating all its components. An equation is obtained describing the polarization vector relaxation in an electret. The relaxation parameter corresponding to the polarization vector total relaxation time is calculated microscopically. A system of differential equations allowing for the effect on the atoms of a strongly oscillating classical electric field is proposed. An analytical formula for thermal current in an electret is obtained and the behavior of two-level systems in a high-frequency electric field is analyzed.     

The aberration theory of a combined electron focusing–deflection system with a rotating deflection field following the rotation of the electrons

A new type of combined magnetic focusing–electrostatic deflection systems whose orientation of deflection field is rotated synchronously with the beam electrons is proposed. This rotation deflection field can be formed by twistification of tube wall electrode (TWE) deflectors. Formulae are derived for the first-order optical properties, third-order geometrical aberrations and first-order chromatic aberrations of this system. A program was written in FORTRAN for numerical computation. An example is given; the computation results show that compared to the conventional systems, the proposed new system has lower deflection aberration coefficients.     

渐进多焦点镜片波前像差的扩束测量方法

利用波前传感器测量自由曲面镜片时,由于自由曲面镜片的直径通常大于波前传感器的接收孔径,主要采用子孔径拼接技术测量镜片的波前像差。针对子孔径拼接技术测量中存在着操作繁琐、数据处理量大等问题,提出渐进多焦点镜片波前像差的扩束测量方法,得到渐进多焦点镜片中央直径为22 mm圆形区域内的波前像差。为了验证试验的可靠性,将测量得到的波前像差泽尼克表述中的离焦项转换为球镜度,与条纹偏折法测量得到镜片的球镜度进行对比实验,实验结果证明了渐进多焦点镜片波前像差的扩束测量方法可以用于渐进多焦点镜片波前像差的检测。     

Optical system aberration effect on the second harmonic generation

The results of observation of the aberration effect representation by the focusing optical system in the angular structure of the frequency-transformed radiation are presented. The experiments have been performed on lithium iodate crystals.     

Individual eye model based on wavefront aberration

Based on the widely used Gullstrand-Le Grand eye model, the individual human eye model has been established here, which has individual corneal data, anterior chamber depth and the eyeball depth. Furthermore, the foremost thing is that the wavefront aberration calculated from the individual eye model is equal to the eye's wavefront aberration measured with the Hartmann-shack wavefront sensor. There are four main steps to build the model. Firstly, the corneal topography instrument was used to measure the corneal surfaces and depth. And in order to input cornea into the optical model, high-order aspheric surface-Zernike Fringe Sag surface was chosen to fit the corneal surfaces. Secondly, the Hartmann-shack wavefront sensor, which can offer the Zernike polynomials to describe the wavefront aberration, was built to measure the wavefront aberration of the eye. Thirdly, the eye's axial lengths among every part were measured with A-ultrasonic technology. Then the data were input into the optical design software–ZEMAX and the crystalline lens's shapes were optimized with the aberration as the merit function. The individual eye model, which has the same wavefront aberrations with the real eye, is established.     

基于X86系统的便携式数据采集系统设计

为了提高在野外环境下使用的数据采集系统的便携性和可靠性,文中提出了基于X86系统的设计方案,并结合系统功能特点确定了总体设计框架,简要介绍了数据采集模块、激励源模块、GPS模块、触发模块、结构设计、软件设计等多个模块的设计思路。设计人员开发研制了相关产品,并通过了多发战斗部冲击波超压、破片速度等参数的测试验证,该数据采集系统和过去同类型产品相比,使用更加便携,抗振性、防尘性、可靠性等指标更高,满足在战斗部爆炸类试验野外长时间条件下使用的特殊需求。     

Integrated analysis on static/dynamic aeroelasticity of curved panels based on a modified local piston theory

A flow field modified local piston theory, which is applied to the integrated analysis on static/dynamic aeroelastic behaviors of curved panels, is proposed in this paper. The local flow field parameters used in the modification are obtained by CFD technique which has the advantage to simulate the steady flow field accurately. This flow field modified local piston theory for aerodynamic loading is applied to the analysis of static aeroelastic deformation and flutter stabilities of curved panels in hypersonic flow. In addition, comparisons are made between results obtained by using the present method and curvature modified method. It shows that when the curvature of the curved panel is relatively small, the static aeroelastic deformations and flutter stability boundaries obtained by these two methods have little difference, while for curved panels with larger curvatures, the static aeroelastic deformation obtained by the present method is larger and the flutter stability boundary is smaller compared with those obtained by the curvature modified method, and the discrepancy increases with the increasing of curvature of panels. Therefore, the existing curvature modified method is non-conservative compared to the proposed flow field modified method based on the consideration of hypersonic flight vehicle safety, and the proposed flow field modified local piston theory for curved panels enlarges the application range of piston theory.     

Skew aberration: a form of polarization aberration

We define a new class of aberration, skew aberration, which is a component of polarization aberration. Skew aberration is an intrinsic rotation of polarization states due to the geometric transformation of local coordinates, independent of coatings and interface polarization. Skew aberration in a radially symmetric system has the form of a circular retardance tilt plus coma aberration. Skew aberration causes undesired polarization distribution in the exit pupil. We demonstrate statistics on skew aberration of 2383 optical systems described in Code V's U.S. patent library [Code V Version 10.3 (Synopsys, 2011), pp. 22-24]; the mean skew aberration is 0.89° and the standard deviation is 1.37°. The maximum skew aberration found is 17.45° and the minimum is -11.33°. U.S. patent 2,896,506, which has ±7.01° of skew aberration, is analyzed in detail. Skew aberration should be of concern in microlithography optics and other high NA and large field of view optical systems.