Damage characteristics of laser plasma shock wave on rear surface of fused silica glass

The damage to the rear surface of fused silica under the action of high power laser is more severe than that incurred by the front surface, which hinders the improvement in the energy of the high power laser device. For optical components,the ionization breakdown by laser is a main factor causing damage, particularly with laser plasma shock waves, which can cause large-scale fracture damage in fused silica. In this study, the damage morphology is experimentally investigated, and the characteristics of the damage point are obtained. In the theoretical study, the coupling and transmission of the shock wave in glass are investigated based on the finite element method. Thus, both the magnitude and the orientation of stress are obtained. The damage mechanism of the glass can be explained based on the fracture characteristics of glass under different stresses and also on the variation of the damage zone's Raman spectrum. In addition, the influence of the glass thickness on the damage morphology is investigated. The results obtained in this study can be used as a reference in understanding the characteristics and mechanism of damage characteristics induced by laser plasma shock waves.     

纳秒激光诱导损伤熔石英玻璃的动力学过程

采用超快时间分辨阴影成像技术研究了纳秒激光诱导损伤熔石英玻璃前后表面和体内的动力学过程,对比分析了前后表面和体内的损伤差异及损伤机制。在前表面,观察了空气和材料中的等离子体和冲击波的产生与发展过程;亚纳秒激光辐照下,前表面材料内观察到三个应力波,并观察到材料体内的损伤过程。在后表面,除观察到冲击波的产生与发展过程,还观察到表面物质的烧蚀去除与喷发过程。在材料内部,损伤由自聚焦和点缺陷吸收两种机制主导,而且点缺陷吸收诱导材料体内损伤有时间先后顺序。     

The damage mechanism of fused silica surface induced by 355 nm nanosecond laser

In order to understand the physical mechanism, time-resolved dynamics of 355 nm nanosecond laser induced entrance and exit surface damage on fused silica was investigated by using shadow graphic technique. The results show that the damage mechanism is different between the entrance and exit surface during nanosecond laser interaction with fused silica. The plasma and shock waves in air is relatively higher at the entrance surface. The entrance surface damage is reduced because plasma shielding limits energy deposition. Without plasma shielding, the exit surface damage is more serious for more laser energy deposition in material. And without the stress of plasma and shock waves, the material is ejected easily at rear surface. These are confirmed by damage micrograph at the entrance and exit surface.     

355 nm纳秒紫外激光辐照下熔石英前后表面损伤的对比研究

为了理解前后表面损伤不对称性的物理内涵, 利用阴影成像技术研究了纳秒紫外激光诱使熔石英光学元件表面损伤的时间分辨动力学过程.研究表明,纳秒紫外激光与熔石英作用过程中前后表面损伤的物理机理是完全不同的.前表面处空气中等离子体和冲击波较强, 等离子体的屏蔽作用抑制了余脉冲能量的沉积, 降低了元件损伤程度.而后表面处等离子体吸收激光能量膨胀, 对后表面冲击作用更为严重, 形成的等离子体电子密度可达到10²³cm^-3以上, 反射部分激光能量与入射的激光余脉冲干涉, 使得 关键词： 熔石英 激光诱使损伤 阴影成像技术 光学元件表面     

整形脉冲驱动下透明材料离化现象

 利用成像型速度干涉仪研究了大型激光原型装置整形脉冲驱动实验中产生的预热效应。对冲击波传输过程进行了分析,发现第１和第２个冲击波的起始时刻都在胶层里面,第３个冲击波的起始时刻在熔石英窗口里面。实验发现,由于X光离化效应的影响,第１和第２个冲击波传输引起的条纹跳变并没有观察到。第２和第３个激光脉冲前半部分产生的离化效应将透明窗口完全漂白,导致成像型速度干涉仪获得的条纹图出现了间断。实验观察到了第３个激光脉冲驱动的冲击波在熔石英中产生的加速和减速过程。对整形脉冲获得的实验结果进行了初步解释,得出现有条件下整形脉冲驱动应注意的问题为：控制最高辐射温度,选用带隙大的窗口材料,尽量减小胶层的厚度。     

Acoustic emission monitoring during laser shock cleaning of silicon wafers

A laser shock cleaning is a new dry cleaning methodology for the effective removal of submicron sized particles from solid surfaces. This technique uses a plasma shock wave produced by laser-induced air breakdown, which has applied to remove nano-scale silica particles from silicon wafer surfaces in this work. In order to characterize the laser shock cleaning process, acoustic waves generated during the shock process are measured in real time by a wide-band microphone and analyzed in the change of process parameters such as laser power density and gas species. It was found that the acoustic intensity is closely correlated with the shock wave intensity. From acoustic analysis, it is seen that acoustic intensity became stronger as incident laser power density increased. In addition, Ar gas has been found to be more effective to enhance the acoustic intensity, which allows higher cleaning performance compared with air or N₂ gas.     

纳秒激光在铜靶材中诱导冲击波的实验研究

基于聚偏二氟乙烯压电传感器, 对铜靶材中纳秒激光脉冲诱导的冲击波传播过程进行了实验研究, 给出了铜靶材内冲击压强随激光脉冲能量和靶材厚度的变化规律. 实验结果表明: 500 mJ激光脉冲能量作用到2 mm厚的铜靶材产生的冲击压强达到2.1 MPa; 激光脉冲能量从200 mJ 增加到500 mJ, 在铜靶材厚度为2和4 mm条件下, 冲击压强分别增加了162%和231%; 而当铜靶材厚度从2 mm增加到6 mm时, 在400和500 mJ激光脉冲能量作用下, 铜靶材内冲击压强分别降低了32%和49%.     

强脉冲激光在AZ31B镁合金中诱导冲击波的实验研究

为了研究强脉冲激光在镁合金中诱导冲击波的衰减,采用Nd:Glass脉冲激光(1054 nm,23 ns)对AZ31B变形镁合金试样表面进行冲击,并利用响应快、测量范围大的PVDF压电膜传感器以及示波器实时测量了强脉冲激光在镁合金靶中诱导激光冲击波的相对压力.根据冲击波每次在靶材背面反射时,所经过距离的不同得到激光冲击波在镁合金中的衰减规律.结果表明,在激光能量为5J的强脉冲激光作用下,镁合金中冲击波衰减的平均速度为5.83×10³ m/s,与镁合金中应力波纵波的传播速度相符;强脉冲激光诱导冲击波在镁合金中是以指数规律衰减的.试验所得分析结果对激光冲击强化镁合金的应用具有重要意义. 关键词： 激光 镁合金 压电膜传感器 衰减规律     

熔石英光学材料紫外皮秒激光损伤的瞬态特性研究

光学元件激光损伤是限制高功率激光装置输出能力的关键因素,为了理解光学元件激光损伤过程,提高光学元件抗激光损伤性能,利用偏振阴影显微镜成像技术和光电探测技术研究了紫外皮秒激光诱使熔石英光学元件损伤的时间分辨动力学过程。结果显示了紫外皮秒激光作用过程中冲击应力波的传输特性、瞬态吸收的演变过程以及裂缝的发展过程。结果表明,冲击应力波的传输速度约为6.9μm/ns;532nm波长的激光瞬态吸收在激光作用之后2.5μs时激光吸收达到最大值,之后缓慢下降,整个持续时间可达50μs以上;损伤裂纹在7.5ns时刻就基本停止增长。研究结果对理解皮秒激光的损伤机制有重要意义。     

Spatial and temporal study of shock waves generated by laser ablation for Ti target

ＳｐａｔｉａｌａｎｄｔｅｍｐｏｒａｌｓｔｕｄｙｏｆｓｈｏｃｋｗａｖｅｓｇｅｎｅｒａｔｅｄｂｙｌａｓｅｒａｂｌａｔｉｏｎｆｏｒＴｉｔａｒｇｅｔＷＵＪｉａｄａ；ＷＵＬｉｎｇｈｕｉ；ＷＵＣｈａｎｇｚｈｅｎｇ；ＬＩＦｕｍｉｎｇ（ＳｔａｔｅＫｅｙＪｏｉｎｔＬａ...     

激光引致激波演化数值研究

在高重复频率激光推进的研究中,激波的合并是发生在激波演化后期的,同时由于脉冲间隔短,脉冲宽度对流场演化的影响也需要详细研究。考虑了激光辐照过程对流场演化的影响,通过数值计算对激波演化特性进行了研究。结果表明,初期波阵面的椭球形状逐渐转化为一个球形,球心与击穿点的距离随时间逐渐减小并最终趋于稳定。基于激波合并的应用,当激波马赫数在1~2之间时,给出了激波波阵面半径随时间的变化规律,以及激波高压区长度和波峰压强随激波波阵面半径变化规律的经验公式。     

黑体辐射法测量电介质内部被超短激光脉冲加工后的温度

黑体辐射法可用于测量电介质内部被超短脉冲激光加工后,电子和晶格的瞬时温度.当一个超短激光脉冲通过物镜聚焦到石英玻璃内部时,在焦点附近诱导出微结构.微结构中热影响区的最大宽度为16μm,热影响区发出的黑体辐射谱通过物镜、带耦合透镜的光纤、光谱仪以及ICCD组装成的系统记录.测试系统收集了电介质内部被单个激光脉冲辐照后,热影响区发射的黑体辐射谱,然后用Planck公式拟合黑体辐射谱,得到电介质温度.电介质被超短激光脉冲辐照后,首先电介质中的价带电子通过强场电离和雪崩电离跃迁到导带,高温高压的等离子体以冲击波的形式向外运动,通过对流方式传递能量,该过程发生在激光辐照石英后21 ns内.21 ns后冲击波转化为声波,中心的气态石英通过热扩散方式影响周围的固态区域,石英温度缓慢下降.在时刻t(单位ns),石英玻璃的温度为5333 exp(-t/1289)K.石英经过3.72μs将冷却到室温,因此重复频率在269 k Hz以上的激光,加工石英玻璃时具有热累积效应.     

Backside laser etching of fused silica using liquid gallium

Laser-induced backside wet etching (LIBWE) that is regularly performed with hydrocarbon solutions is demonstrated with the liquid metal gallium as a new class of absorbers for the first time. Well-contoured square etch pits in fused silica with smooth bottoms and well-defined edges were achieved already with the first pulse from a 248 nm excimer laser. The etching is characterized by a threshold fluence of 1.3 J/cm² and a straight proportional etch rate growth with the fluence up to 8.2 J/cm². In addition, the etch depth increases linearly for onward pulsed laser irradiation and gives evidence for an only marginal incubation effect. The high fluences necessary for etching originate from the high reflection losses as well as the high thermal conductivity of the metallic absorber. The suggested etch mechanism comprises the heating of the fused silica up to or beyond the fused silica melting point by the laser heated gallium and the removing of the softened or molten fraction of the material by mechanical forces from shock waves, bubbles, high pressures, or stress fields. PACS 81.65.C; 81.05.J; 79.20.D; 61.80.B; 42.55.L     

Characteristics and application of laser-generated acoustic shock waves in air

When a high-power laser beam is focused at a point, the air at the focal point is heated to temperatures of thousands of degrees within several nanoseconds and breaks down. This generates a spark that, in turn, is accompanied by an acoustic shock wave. The acoustic shock waves generated by focussing the beam from a pulsed laser with a 1064 nm wavelength and a power of 800 mJ per pulse have been measured using 1/4″ and 1/8″ B&K microphones. Nonlinear sound levels are observed up to 1.5 m from the laser-induced sparks. Beyond a certain region close to the source, levels are found to decrease in a manner consistent with spherical spreading plus nonlinear hydrodynamic losses. Analysis of the waveforms shows that the acoustic pulses associated with the laser-induced sparks are more repeatable and have higher intensity than those from an electrical spark source. Laser-generated acoustic shock waves are ideal for simulating a blast wave or a sonic boom in the laboratory and for studying the associated propagation effects. To illustrate this application, the propagation of the laser generated shock waves over a series of different hard, rough surfaces has been investigated. The results show the distinctive influences of ground roughness on the propagation of the shock wave.     

使用多光谱手段研究熔石英断裂机理

熔石英玻璃是高能激光系统中不可缺少的光学材料,其损伤问题一直是限制系统能量提升的瓶颈之一。通过纳秒激光脉冲诱导熔石英玻璃样品产生断裂,并使用多光谱手段对断裂前后样品进行检测,从而在实验和理论上了解了样品断裂形貌及内部相变结构成因,并从宏观到微观上统一解释了断裂形貌和相变结构的关系。在激光等离子冲击波作用下,熔石英发生断裂,且冲击波作用过程中在玻璃内部产生了推动裂纹扩展的尖端环向应力。在尖端环向应力作用下,不同损伤区域形成了不同扩展速度和长度的裂纹, 按照裂纹形貌特性差异可以将断裂区分为雾化区、羽毛区、镜面区三个部分。使用透射光谱、能量散射光谱检测损伤前后样品,发现裂纹的产生引起了玻璃透过率和带隙的下降,且断裂区出现氧原子游离或缺失;使用Raman光谱检测样品损伤前后不同形貌区,发现等离子冲击波使熔石英中Si-O-Si键断裂并发生重组,导致镜面区、羽毛区、雾化区三元拓扑环和四元拓扑环宏观上对应的斯石英相和柯石英相的相对含量依次升高,破坏了材料的固有原子结构特性,使材料断裂区向高密度相转变。氧游离的发生会在玻璃内部产生的大量缺陷,从而使得玻璃透过率及带隙下降,严重影响了玻璃的性能。     

酸蚀与紫外激光预处理结合提高熔石英损伤阈值

采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。     

Determination of the material properties of microstructures by laser based ultrasound

In most applications of MEMS the mechanical properties of the used materials are key parameters for the perfect working of the microsystems. Measuring bulk acoustic waves excited in MEMS structures with ultra-short laser pulses is a powerful method for the accurate and non-destructive evaluation as well as for the characterization of material properties. The pump-probe laser-based acoustic method generates bulk acoustic waves in a thermo-elastic way by absorbing the pump laser pulses. The acoustic waves are partly reflected at any discontinuity of the acoustic impedance. At the surface of the specimen the reflected acoustic pulses cause changes of the optical reflection coefficient, which are measured with the probe laser pulses. Thin membranes are part of numerous microelectromechanical systems (MEMS) like sensors, activators and bulk acoustic wave (BAW) filters for example. The described non-destructive and non-contact method is the right approach for testing such thin and brittle structures like membranes. Results of measurements on freestanding aluminium-silicon nitride multi-layer membranes with total thicknesses in the order of several hundred nanometers are presented and compared with thermo-elastic models and with measurements of the supported case. The measured results are used for the determination of the moduli of the membranes.     

基于速度干涉仪的冲击波精密调速实验技术研究

冲击波精密调速技术是惯性约束聚变研究的关键技术之一. 针对冲击波精密调速诊断技术的要求, 以神光III原型上脉宽为3 ns的两台阶整形激光脉冲为源, 用石英晶体做窗口材料, 模拟了双冲击在石英晶体中传输和追赶的过程. 利用两发典型双冲击波调速的实验数据, 验证了神光III原型具有的精密调速能力. 实验结果表明, 在驱动源、 靶和诊断系统参数一致的条件下, 两发实验获得的实验结果中两次冲击出现的时刻, 冲击波速度都很一致. 通过精细分析, 发现在两次冲击交会的时刻, 干涉条纹清晰度和完整性变化最大, 最终数据处理获得的冲击波速度偏差也最大. 同时, 在二次冲击的冲击波速度有较大增加的条件下, 并没有观察到冲击波阵面的反射率的明显增加. 本文的实验结果作为一个数据依据, 为全面开展冲击波调速实验提供了有效的方法.     

Evolution of shock waves formed by laser-induced breakdown in air

The evolution of shock waves produced by 7 ns laser pulses in air is investigated by time-resolved shadowgraph. A nodular structure of the shock wave is observed. It is found that the origin of the structure is the multi-longitudinal-microfocus caused by the astigmatism of the laser beam. The spherical shock waves formed by each microfocus expand gradually and collide with each other, resulting in the nodular structure of the shock wave.