Enhancing the adhesion strength of micro electroforming layer by ultrasonic agitation method and the application

Micro electroforming is widely used for fabricating micro metal devices in Micro Electro Mechanism System (MEMS). However, there is the problem of poor adhesion strength between micro electroforming layer and substrate. This dramatically influences the dimensional accuracy of the device. To solve this problem, ultrasonic agitation method is applied during the micro electroforming process. To explore the effect of the ultrasonic agitation on the adhesion strength, micro electroforming experiments were carried out under different ultrasonic power (0 W, 100 W, 150 W, 200 W, 250 W) and different ultrasonic frequencies (0 kHz, 40 kHz, 80 kHz, 120 kHz, 200 kHz). The effects of the ultrasonic power and the ultrasonic frequency on the micro electroforming process were investigated by polarization method and alternating current (a.c.) impedance method. The adhesion strength between the electroforming layer and the substrate was measured by scratch test. The compressive stress of the electroforming layer was measured by X-ray Diffraction (XRD) method. The crystallite size of the electroforming layer was measured by Transmission Electron Microscopy (TEM) method. The internal contact surface area of the electroforming layer was measured by cyclic voltammetry (CV) method. The experimental results indicate that the ultrasonic agitation can decrease the polarization overpotential and increase the charge transfer process. Generally, the internal contact surface area is increased and the compressive stress is reduced. And then the adhesion strength is enhanced. Due to the different depolarization effects of the ultrasonic power and the ultrasonic frequency, the effects on strengthening the adhesion strength are different. When the ultrasonic agitation is 200 W and 40 kHz, the effect on strengthening the adhesion strength is the best. In order to prove the effect which the ultrasonic agitation can improve the adhesion strength of the micro devices, micro pillar arrays were fabricated under ultrasonic agitation (200 W, 40 kHz). The experimental results show that the residual rate of the micro pillar arrays is increased about 17% by ultrasonic agitation method. This work contributes to fabricating the electroforming layer with large adhesion strength.     

超声电铸提高金属微流控芯片模具的均匀性

利用微电铸技术制作的微流控芯片模具往往存在沉积厚度不均匀的缺陷,这种缺陷会影响模具的尺寸精度及使用性能,并增加模具的制作成本。为了制得厚度均匀的微流控芯片模具,研究了超声电铸对模具均匀性的影响。首先,采用有限元软件COMSOL Multiphysics建立微流控芯片模具的微电铸模型,分析电铸2 h后的模具的厚度分布。并根据该仿真结果,设计掩模版。然后,在自主搭建的超声电铸装置中进行一系列电铸实验,来研究超声搅拌对模具均匀性的影响。实验结果表明:电铸过程中添加超声搅拌可以改善微流控芯片模具的均匀性。超声功率为200 W时,超声频率改善模具均匀性的程度为200 kHz＞80 kHz＞120 kHz。超声频率为200 kHz时,超声功率改善模具均匀性的程度为500 W＞200 W＞100 W。当超声的频率和功率分别为200 kHz和500 W时,与无超声电铸相比,模具的均匀性提高约30%。     

Effects of ultrasonic agitation on adhesion strength of micro electroforming Ni layer on Cu substrate

Micro electroforming is an important technology, which is widely used for fabricating micro metal devices in MEMS. The micro metal devices have the problem of poor adhesion strength, which has dramatically influenced the dimensional accuracy of the devices and seriously limited the development of the micro electroforming technology. In order to improve the adhesion strength, ultrasonic agitation method is applied during the micro electroforming process in this paper. To explore the effect of the ultrasonic agitation, micro electroforming experiments were carried out under ultrasonic and ultrasonic-free conditions. The effects of the ultrasonic agitation on the micro electroforming process were investigated by polarization and alternating current (a.c.) impedance methods. The real surface area of the electroforming layer was measured by cyclic voltammetry method. The compressive stress and the crystallite size of the electroforming layer were measured by X-ray Diffraction (XRD) method. The adhesion strength of the electroforming layer was measured by scratch test. The experimental results show that the imposition of the ultrasonic agitation decreases the polarization overpotential and increases the charge transfer process at the electrode–electrolyte interface during the electroforming process. The ultrasonic agitation increases the crystallite size and the real surface area, and reduces the compressive stress. Then the adhesion strength is improved about 47% by the ultrasonic agitation in average. In addition, mechanisms of the ultrasonic agitation improving the adhesion strength are originally explored in this paper. The mechanisms are that the ultrasonic agitation increases the crystallite size, which reduces the compressive stress. The lower the compressive stress is, the larger the adhesion strength is. Furthermore, the ultrasonic agitation increases the real surface area, enhances the mechanical interlocking strength and consequently increases the adhesion strength. This work contributes to fabricating the electroforming layer with large adhesion strength.     

Mass transfer enhancement in supercritical fluids extraction by means of power ultrasound

The use of high-intensity ultrasound represents an efficient manner of producing small scale agitation, enhancing mass transfer on supercritical fluids (SF) extraction processes. In this way, a supercritical CO(2) extraction of oil from particulate almonds using power ultrasound was studied. To examine the effect of the acoustic waves all experiments were performed with and without ultrasound. A power ultrasonic transducer for a working frequency of about 20 kHz was constructed and installed inside a high-pressure 5 l SF extractor. The experimental tests were carried out with CO(2) at 280 bar and 55 degrees C. Grounded almonds with an oil content of about 55%, in an amount of 1500 g were deposited inside the SF reactor where the solvent was introduced at a flow rate of 20 kg/h. The results show that the kinetics and the extraction yield of the oil were enhanced by 30% and 20% respectively, when a power of about 50 W was applied to the transducer. The average time of each extraction process was of about 8 h and 30 min. In addition, the transducer was also used as a sensitive probe capable to detect the phase behavior of supercritical fluids when it was driven with low power signals.     

Influence of ultrasonic in low thermal expansion Fe-Ni electrodeposition process for micro-electroforming

The electrochemical mechanism of Fe-Ni electrodeposition under ultrasonic was investigated by electrochemistry methods. Linear scanning voltammetry and cyclic voltammetry were used to show that the deposition process changed from the diffusion control under static conditions to an electrochemical control under ultrasonic conditions. Chronoamperometry curves showed that the Fe-Ni deposit occurred by a mechanism that instantaneous nucleation is followed by three-dimensional growth under charge transfer control. Chronopotentiogram indicated that because of the intensity of the ultrasound stripping effect, high ultrasonic power is unsuitable for electroforming Fe-Ni alloy, and a high current density is also not appropriate. Thus, the optimum parameters for Fe-Ni electrodeposition under ultrasonic conditions are ultrasonic power between 80 and 100 W (power density 0.28–0.35 W/cm²), and a current density lower than 10 mA/cm² with temperature 323 K and pH 3. Experiments were performed to verify that the Fe-Ni masks prepared by ultrasonic-assisted electroforming had a good surface quality. The increase in ultrasonic power can obtain a larger grain size, thus got a low thermal expansion coefficient and a high hardness. Therefore, ultrasonic-assisted electrodeposition technology provides an effective and practically feasible manufacturing method for OLED Fe-Ni mask preparation.     

超声辅助提取微藻油脂机理及工艺参数的研究*

对微藻细胞壁进行破碎是提高微藻油脂提取率的重要手段,超声振动破碎是一种有效的细胞破碎方法。建立基于声冲流、声辐射力、声空化的传质动力学的经验模型,运用传输矩阵法设计用于微藻细胞破碎的超声振动子,搭建了实验平台,并设置不同超声振动工艺参数对微藻细胞的破碎率进行了实验研究。结果表明:超声振动子,在工具头浸入微藻二分之一总溶液深度、工作时间30 min、功率225 W、纵振频率25 kHz的条件下,超声振动破碎的效果最佳,采用氯仿试剂对破碎液进行油脂提取,效果最好。     

Reducing the residual stress in micro electroforming layer by megasonic agitation

In order to reduce the large residual stress in micro elelctroforming layer, megasonic assisted electroforming is proposed here. Micro electroforming experiments were performed with and without megasonic agitation, respectively. Four different megasonic power densities were applied to investigate the influence of megasonic agitation on reducing the residual stress. The residual stress was measured by X-ray diffraction (XRD) method. Experiment results show that the residual stresses fabricated with megasonic agitation are less than that fabricated without megasonic. When the megasonic power density is 2 W/cm², the residual stress can be the minimum value of −125.7 MPa, reduced by 60% in comparison with the value of −315.1 MPa electroformed without megasonic agitation. For exploring the mechanism of megasonic agitation on reducing the residual stress, the dislocation density and crystal orientation were calculated by the single-line Voigt profile analysis and Relative Texture Coefficient (RTC) method, respectively. The diameters and distributions of pits on the surface of electroforming layer were observed by the STM-6 tool microscope and counted by the Image-Pro Plus software. It reveals that one hand of the mechanism is the acoustic streaming produced by megasonic can strengthen the motion of dislocation in crystal lattice and makes the crystal lattices grow towards the equilibrium shape, which is benefit to crystallization with low residual stress. When the megasonic power density is 2 W/cm², the dislocation density increases to be the maximum value of 8.09 × 10¹⁵ m⁻² and the difference between RTC_{(1 1 1)} and RTC_{(2 0 0)} decreases to be zero, which is consistent with the residual stress results. The other hand is that the stable cavitation produced by megasonic can provide residual stress release points during the electroforming process.     

Adsorption kinetics of 4-chlorophenol onto granular activated carbon in the presence of high frequency ultrasound

This work describes the results of investigations carried out to examine the adsorption kinetics of 4-chlorophenol (4-CP) from aqueous solution containing tert-butyl alcohol (10%, v/v) onto granular activated carbon (GAC) in the presence of ultrasound of different high frequencies (516, 800 and 1660 kHz) and acoustic powers (15.2, 21.5, 31.1 and 38.3 W). The main objective of this study is to describe the mechanism of ultrasound-assisted adsorption rather than the enhancement of adsorption capacity. Sonochemical degradation of 4-CP was studied in the absence and presence of tert-butyl alcohol. The sonolysis of 4-CP is effectively inhibited by the addition of tert-butyl alcohol (10%, v/v) and very little 4-CP degradation occurs, indicating that little or no pyrolysis of the compound occurs. Without addition of tert-butyl alcohol, after 300 min and at 1660 kHz, the removal of 4-CP in the presence of ultrasound for an acoustic power of 38.3 W was nearly total (99%), but in the conventional method only 60% was eliminated. In this case, the removal of 4-CP by GAC in the ultrasound-assisted technique is due to both adsorption and ultrasonic degradation, but the removal by simple stirring is only due to adsorption, which makes a direct comparison unacceptable. In order to distinguish sonochemical degradation and adsorption of 4-CP onto GAC and to make an exact and practical comparison of the adsorption in the absence and presence of ultrasound, kinetic adsorption experiments were conducted using aqueous solution containing 10% (v/v) tert-butyl alcohol. The obtained results show that both adsorption rate and adsorbed amount were significantly enhanced and improved in the presence of ultrasound for all the studied frequencies and powers. The enhancement of adsorption is favored by increasing ultrasonic power. Adsorption kinetic data were modeled using the liquid-film mass transfer equation and intraparticle diffusion model. The values of the intraparticle diffusion coefficient obtained in the presence of ultrasound are greater than that obtained in the absence of ultrasound. In the initial period of adsorption, where external mass transfer is assumed to predominate, liquid-film mass transfer coefficients significantly increased by the assistance of ultrasound. These results indicate that ultrasound enhances the mass transport in the pores as well as across the boundary layer. This effect increased with increasing ultrasonic power for the three studied frequencies. The average order for the studied ultrasonic waves according to the initial adsorption rate, the intraparticle diffusion coefficient and the liquid-film mass transfer coefficient is 516 kHz>800 kHz>1660 kHz.     

High-speed imaging of ultrasound driven cavitation bubbles in blind and through holes

The interest in application of ultrasonic cavitation for cleaning and surface treatment processes has increased greatly in the last decades. However, not much is known about the behavior of cavitation bubbles inside the microstructural features of the solid substrates. Here we report on an experimental study on dynamics of acoustically driven (38.5 kHz) cavitation bubbles inside the blind and through holes of PMMA plates by using high-speed imaging. Various diameters of blind (150, 200, 250 and 1000 µm) and through holes (200 and 1000 µm) were investigated. Gas bubbles are usually trapped in the holes during substrate immersion in the liquid thus preventing their complete wetting. We demonstrate that trapped gas can be successfully removed from the holes under ultrasound agitation. Besides the primary Bjerknes force and acoustic streaming, the shape oscillations of the trapped gas bubble seem to be a driving force for bubble removal out of the holes. We further discuss the bubble dynamics inside microholes for water and Cu²⁺ salt solution. It is found that the hole diameter and partly the type of liquid media influences the number, size and dynamics of the cavitation bubbles. The experiments also showed that a large amount of the liquid volume inside the holes can be displaced within one acoustic cycle by the expansion of the cavitation bubbles. This confirmed that ultrasound is a very effective tool to intensify liquid exchange processes, and it might significantly improve micro mixing in small structures. The investigation of the effect of ultrasound power on the bubble density distribution revealed the possibility to control the cavitation bubble distribution inside the microholes. At a high ultrasound power (31.5 W) we observed the highest bubble density at the hole entrances, while reducing the ultrasound power by a factor of ten shifted the bubble locations to the inner end of the blind holes or to the middle of the through holes.     

超声空化及其声流结构实验研究*

超声空化及其声流效应在医学、化工和能源等领域得到广泛应用。本文采用高速摄像和粒子图像测速系统分别研究了超声场下的空化形态和声流场结构的时空演化规律。实验研究了50W,100W,200W和250W等四种不同输入功率对18kHz的超声变幅杆附近空化及其声流场的影响。研究结果表明：（1）在变幅杆下端面处观察到由大量空化气泡均匀分布组成的倒置锥形空泡结构,并且锥形空泡结构为稳态流动结构。（2）在超声变幅杆附近产生了两种不同的声流形式,第一种是变幅杆底端的射流型声流,第二种是变幅杆两侧的回旋流。此外,通过研究空泡与声流场中最大速度点之间的空间对应关系,发现声流是因为空泡流动带动而产生的。（3）空间位置和输入功率能显著影响射流型声流的流场结构,但是对回旋流的影响十分微弱。     

Ultrasonic drying of foodstuff in a fluidized bed: Parametric study

The application of high power ultrasound for dehydration of porous materials may be very effective in processes in which heat-sensitive materials such as foodstuffs have to be treated. In fact, high-intensity ultrasonic vibrations are capable of increasing heat and mass transfer processes in materials. The application of ultrasonic energy can be made alone or in combination with other kind of energy such as hot-air. In this case, ultrasound helps in reducing temperature or treatment time. The aim of this work is to study the effect of air flow rate, ultrasonic power and mass loading on hot-air drying assisted by a new power ultrasonic system. The drying chamber is an aluminium vibrating cylinder, which is able to create a high intensity ultrasonic field in the gas medium. To that purpose the chamber is driven at its centre by a power ultrasonic vibrator at 21.8 kHz. Drying kinetics of carrot cubes and lemon peel cylinders were carried out at 40 degrees C for different air velocities, with and without ultrasound. The results show that the effect of ultrasound on drying rate is affected by air flow rate, ultrasonic power and mass loading. In fact, at high air velocities the acoustic field inside the chamber is disturbed and the effect of ultrasound on drying kinetics diminishes.     

超声纵波在孔隙砂岩中的传播特性实验*

为了深入研究不同入射频率下超声波纵波在砂岩中的传播特性,以灰、红、褐砂岩为研究对象,开展了基于50 k Hz、100 kHz、200 kHz、500 kHz和1000 kHz入射频率的超声波纵波测试。提取纵波波速、幅值衰减系数、主频幅值、波形能量这些声学参数,结合入射频率和砂岩孔隙率进行传播特性的相关性分析。结果表明,在3种砂岩中,纵波波速随入射频率增大呈非线性增长趋势,砂岩种类不同,波速增长规律也不同;波形能量和主频幅值随入射频率呈指数关系降低;灰、红砂岩纵波波速随孔隙率越大,下降速率越大,褐砂岩在同级孔隙率下波速差异性明显。建立了基于3种砂岩的入射频率和幅值衰减系数的回归方程;基于200 kHz的入射频率,建立了砂岩孔隙率于波形能量的回归方程,实际测试中建议采用200 kHz作为入射频率,可较好兼顾检测的灵敏度和探测距离。研究成果为建立声学参数与砂岩抗压强度之间的内在联系提供了更多数据支撑,为实际物探测试中超声波入射频率的选择提供参考。     

Effects of ultrasound on the electrochemical cementation of cadmium by zinc powder

This work is devoted to a kinetics study of cadmium electrochemical cementation on zinc powder under ultrasonic low-frequency field (20 kHz). Compared to mechanical stirring with a Rushton turbine and for the same suspension quality, ultrasound lead to a lower kinetics during the major part of the reaction but to final conversion rate near 100%. Pointing out a thermal modification in the deposit morphology due to acoustic cavitation, gives explanation to these processes changes. Besides several acting parameter effects, such as temperature, metallic ion concentrations or ultrasonic power have been observed and analysed.     

Ultrasound-assisted regeneration of zeolite/water adsorption pair

The use of ultrasound to enhance the regeneration of zeolite 13X for efficient utilization of thermal energy was investigated as a substitute to conventional heating methods. The effects of ultrasonic power and frequency on the desorption of water from zeolite 13X were analyzed to optimize the desorption efficiency. To determine and justify the effectiveness of incorporating ultrasound from an energy-savings point of view, an approach of constant overall input power of 20 or 25 W was adopted. To measure the extent of the effectiveness of using ultrasound, the ultrasonic-power-to-total power ratios of 0.2, 0.25, 0.4 and 0.5 were investigated and the results compared with those of no-ultrasound (heat only) at the same total power. To analyze the effect of ultrasonic frequency, identical experiments were performed at three nominal ultrasonic frequencies of ~28, 40 and 80 kHz. The experimental results showed that using ultrasound enhances the regeneration of zeolite 13X at all the aforementioned power ratios and frequencies without increasing the total input power. With regard to energy consumption, the highest energy-savings power ratio (0.25) resulted in a 24% reduction in required input energy and with an increase in ultrasonic power, i.e. an increase in acoustic-to-total power ratio, the effectiveness of applying ultrasound decreased drastically. At a power ratio of 0.2, the time required for regeneration was reduced by 23.8% compared to the heat-only process under the same experimental conditions. In terms of ultrasonic frequency, lower frequencies resulted in higher efficiency and energy savings, and it was concluded that the effect of ultrasonic radiation becomes more significant at lower ultrasonic frequencies. The observed inverse proportionality between the frequency and ultrasound-assisted desorption enhancement suggests that acoustic dissipation is not a significant mechanism to enhance mass transfer, but rather other mechanisms must be considered.     

Ultrasonic cavitation at liquid/solid interface in a thin Ga–In liquid layer with free surface

Cavitation in thin layer of liquid metal has potential applications in chemical reaction, soldering, extraction, and therapeutic equipment. In this work, the cavitation characteristics and acoustic pressure of a thin liquid Ga–In alloy were studied by high speed photography, numerical simulation, and bubble dynamics calculation. A self-made ultrasonic system with a TC4 sonotrode, was operated at a frequency of 20 kHz and a max output power of 1000 W during the cavitation recording experiment. The pressure field characteristic inside the thin liquid layer and its influence on the intensity, types, dimensions, and life cycles of cavitation bubbles and on the cavitation evolution process against experimental parameters were systematically studied. The results showed that acoustic pressure inside the thin liquid layer presented alternating positive and negative characteristics within 1 acoustic period (T). Cavitation bubbles nucleated and grew during the negative-pressure stage and shrank and collapsed during the positive-pressure stage. A high bubble growth speed of 16.8 m/s was obtained and evidenced by bubble dynamics calculation. The maximum absolute pressure was obtained at the bottom of the thin liquid layer and resulted in the strongest cavitation. Cavitation was divided into violent and weak stages. The violent cavitation stage lasted several hundreds of acoustic periods and had higher bubble intensity than the weak cavitation stage. Cavitation cloud preferentially appeared during the violent cavitation stage and had a life of several acoustic periods. Tiny cavitation bubbles with life cycles shorter than 1 T dominated the cavitation field. High cavitation intensities were observed at high ultrasonication power and when Q235B alloy was used because such conditions lead to high amplitudes on the substrate and further high acoustic pressure inside the liquid.     

Influence of ultrasonic frequency on multibubble sonoluminescence

Computer simulations of bubble oscillations are performed under conditions of multibubble sonoluminescence (MBSL) in water for various ultrasonic frequencies. The range of the ambient bubble radius for sonoluminescing bubbles narrows as the ultrasonic frequency increases; at 20 kHz it is 0.1-100 microm while at 1 MHz it is 0.1-3 microm. At 1 MHz, any sonoluminescing bubble disintegrates into a mass of smaller bubbles in a few or a few tens of acoustic cycles, while at 20 kHz and 140 kHz some sonoluminescing bubbles are shape stable. The mechanism of the light emission also depends on the ultrasonic frequency. As the ultrasonic frequency increases, the amount of water vapor trapped inside bubbles at the collapse decreases. As a result, MBSL originates mainly in plasma emissions at 1 MHz while it originates in chemiluminescence of OH radicals and plasma emissions at 20 kHz.     

Experimental investigation of conical bubble structure and acoustic flow structure in ultrasonic field

The objective of this paper is to investigate the transient conical bubble structure (CBS) and acoustic flow structure in ultrasonic field. In the experiment, the high-speed video and particle image velocimetry (PIV) techniques are used to measure the acoustic cavitation patterns, as well as the flow velocity and vorticity fields. Results are presented for a high power ultrasound with a frequency of 18 kHz, and the range of the input power is from 50 W to 250 W. The results of the experiment show the input power significantly affects the structures of CBS, with the increase of input power, the cavity region of CBS and the velocity of bubbles increase evidently. For the transient motion of bubbles on radiating surface, two different types could be classified, namely the formation, aggregation and coalescence of cavitation bubbles, and the aggregation, shrink, expansion and collapse of bubble cluster. Furthermore, the thickness of turbulent boundary layer near the sonotrode region is found to be much thicker, and the turbulent intensities are much higher for relatively higher input power. The vorticity distribution is prominently affected by the spatial position and input power.     

Frequency and power dependence of ultrasonic degassing

We investigated the time variation of ultrasonic degassing for air-saturated water and degassed water with a sample volume of 100 mL at frequencies of 22, 43, 129, 209, 305, 400, 514, 1018, and 1960 kHz and ultrasonic power of 15 W. Ultrasonic degassing was evaluated by dissolved oxygen concentration. Ultrasonic degassing was also investigated at a frequency of 1018 kHz and ultrasonic powers of 5, 10, 15, and 20 W. The dissolved oxygen concentration varied with the ultrasonic irradiation time and became constant after prolonged ultrasonic irradiation. The constant dissolved oxygen concentration value depended on the frequency and ultrasonic power but not the initial dissolved oxygen concentration. The degassing rate at 101.3 kPa was higher in the frequency range of 200 kHz to 1 MHz. The frequency dependence of the degassing rate was almost the same as that of the sonochemical efficiency obtained by the potassium iodide (KI) method. Ultrasonic degassing in the frequency range of 22–1960 kHz was also investigated under reduced pressure of 5 kPa. Degassing was accelerated when ultrasonic irradiation was applied under reduced pressure. However, under a reduced pressure of 5 kPa, the lower the frequencies, the higher is the degassing rate. The sonochemical reaction rate was examined by the KI method for varying dissolved air concentrations before ultrasonic irradiation. Cavitation did not occur when the initial dissolved oxygen concentration was less than 2 mg·L⁻¹. Therefore, the lower limit of ultrasonic degassing under 101.3 kPa equals 2 mg·L⁻¹ dissolved oxygen concentration. A model equation for the time variation of dissolved oxygen concentration due to ultrasonic irradiation was developed, and the degassing mechanism was discussed.     

Comparison of ultrasound effects in different reactors at 20 kHz

To compare the performances of three power ultrasonic devices at 20 kHz: a horn, a cup horn and a tube, the local intensity distributions of local effects of cavitation have been investigated. The sensor is an electrochemical probe, measuring the solid-liquid mass transfer rate, related to the cavitation intensity. The axial and radial profiles of mass transfer coefficients have been investigated in three devices, at various power inputs. In all these equipments very strong heterogeneities have been characterized, whether a standing wave appears or not.     

A fundamental study on the degradation of paracetamol under single- and dual-frequency ultrasound

The degradation of paracetamol, a widely found emerging pharmaceutical contaminant, was investigated under a wide range of single-frequency and dual-frequency ultrasonic irradiations. For single-frequency ultrasonic irradiation, plate transducers of 22, 98, 200, 300, 400, 500, 760, 850, 1000, and 2000 kHz were employed and for dual-frequency ultrasonic irradiation, the plate transducers were coupled with a 20 kHz ultrasonic horn in opposing configuration. The sonochemical activity was quantified using two dosimetry methods to measure the yield of HO• and H₂O₂ separately, as well as sonochemiluminescence measurement. Moreover, the severity of the bubble collapses as well as the spatial and size distribution of the cavitation bubbles were evaluated via sonoluminescence measurement. The paracetamol degradation rate was maximised at 850 kHz, in both single and dual-frequency ultrasonic irradiation. A synergistic index higher than 1 was observed for all degrading frequencies (200 – 1000 kHz) under dual-frequency ultrasound irradiation, showing the capability of dual-frequency system for enhancing pollutant degradation. A comparison of the results of degradation, dosimetry, and sonoluminescence intensity measurement revealed the stronger dependency of the degradation on the yield of HO• for both single and dual-frequency systems, which confirms degradation by HO• as the main removal mechanism. However, an enhanced degradation for frequencies higher than 500 kHz was observed despite a lower HO• yield, which could be attributed to the improved mass transfer of hydrophilic compounds at higher frequencies. The sonoluminescence intensity measurements showed that applying dual-frequency ultrasonic irradiation for 200 and 400 kHz made the bubbles larger and less uniform in size, with a portion of which not contributing to the yield of reactive oxidant species, whereas for the rest of the frequencies, dual-frequency ultrasound irradiation made the cavitation bubbles smaller and more uniform, resulting in a linear correlation between the overall sonoluminescence intensity and the yield of reactive oxidant species.