Nonlinear dynamic behavior of a microbeam array subject to parametric actuation at low,medium and large DC-voltages

The dynamic response of parametrically excited microbeam arrays is governed by nonlinear effects which directly influence their performance. To date, most widely used theoretical approaches, although opposite extremes with respect to complexity, are nonlinear lumped-mass and finite-element models. While a lumped-mass approach is useful for a qualitative understanding of the system response it does not resolve the spatio-temporal interaction of the individual elements in the array. Finite-element simulations, on the other hand, are adequate for static analysis, but inadequate for dynamic simulations. A third approach is that of a reduced-order modeling which has gained significant attention for single-element micro-electromechanical systems (MEMS), yet leaves an open amount of fundamental questions when applied to MEMS arrays. In this work, we employ a nonlinear continuum-based model to investigate the dynamic behavior of an array of N nonlinearly coupled microbeams. Investigations focus on the array’s behavior in regions of its internal one-to-one, parametric, and several internal three-to-one and combination resonances, which correspond to low, medium and large DC-voltage inputs, respectively. The nonlinear equations of motion for a two-element system are solved using the asymptotic multiple-scales method for the weakly nonlinear system in the afore mentioned resonance regions, respectively. Analytically obtained results of a two-element system are verified numerically and complemented by a numerical analysis of a three-beam array. The dynamic behavior of the two- and three-beam systems reveal several in- and out-of-phase co-existing periodic and aperiodic solutions. Stability analysis of such co-existing solutions enables construction of a detailed bifurcation structure. This study of small-size microbeam arrays serves for design purposes and the understanding of nonlinear nearest-neighbor interactions of medium- and large-size arrays. Furthermore, the results of this present work motivate future experimental work and can serve as a guideline to investigate the feasibility of new MEMS array applications.     

Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam

On the basis of the Euler-Bernoulli hypothesis, nonlinear static and dynamic responses of a viscoelastic microbeam under two kinds of electric forces [a purely direct current （DC） and a combined current composed of a DC and an alternating current] are studied. By using Taylor series expansion, a governing equation of nonlinear integro-differential type is derived, and numerical analyses are performed. When a purely DC is applied, there exist an instantaneous pull-in voltage and a durable pull-in voltage of which the physical meanings are also given, whereas under an applied combined current, the effect of the element relaxation coefficient on the dynamic pull-in phenomenon is observed where the largest Lyapunov exponent is taken as a criterion for the dynamic pull-in instability of viscoelastic microbeams.     

含尺度效应的功能梯度三明治微梁振动、弯曲与屈曲特性研究

基于修正的应变梯度理论和精化的高阶剪切变形理论,提出了一种含尺度效应的功能梯度三明治微梁模型。功能梯度材料的等效弹性参数由Mori-Tanaka均匀化方法描述。针对微梁的高阶边值问题,融合微分求积和Gauss-Lobatto求积准则,建立了一种2节点18自由度的微分求积有限元。通过对比性研究,验证了理论及数值模型的有效性。最后,讨论了边界条件、材料尺度参数、功能梯度指数、长细比、各层厚度比等对功能梯度三明治微梁静动态特性的影响。结果表明,功能梯度三明治微梁的静力响应、振动频率、屈曲荷载以及模态均呈现出显著的尺度效应,所得结果有望为微机电系统中承载器件的设计提供数据积累和方法依据。     

Modeling size-dependent thermo-mechanical behaviors of shape memory polymer Bernoulli-Euler microbeam

The objective of this paper is to model the size-dependent thermo-mechanical behaviors of a shape memory polymer(SMP) microbeam. Size-dependent constitutive equations, which can capture the size effect of the SMP, are proposed based on the modified couple stress theory(MCST). The deformation energy expression of the SMP microbeam is obtained by employing the proposed size-dependent constitutive equation and Bernoulli-Euler beam theory. An SMP microbeam model, which includes the formulations of deflection, strain, curvature, stress and couple stress, is developed by using the principle of minimum potential energy and the separation of variables together. The sizedependent thermo-mechanical and shape memory behaviors of the SMP microbeam and the influence of the Poisson ratio are numerically investigated according to the developed SMP microbeam model. Results show that the size effects of the SMP microbeam are significant when the dimensionless height is small enough. However, they are too slight to be necessarily considered when the dimensionless height is large enough. The bending flexibility and stress level of the SMP microbeam rise with the increasing dimensionless height, while the couple stress level declines with the increasing dimensionless height.The larger the dimensionless height is, the more obvious the viscous property and shape memory effect of the SMP microbeam are. The Poisson ratio has obvious influence on the size-dependent behaviors of the SMP microbeam. The paper provides a theoretical basis and a quantitatively analyzing tool for the design and analysis of SMP micro-structures in the field of biological medicine, microelectronic devices and micro-electro-mechanical system(MEMS) self-assembling.     

Reduced-Order Models for MEMS Applications

We review the development of reduced-order models for MEMS devices. Based on their implementation procedures, we classify these reduced-order models into two broad categories: node and domain methods. Node methods use lower-order approximations of the system matrices found by evaluating the system equations at each node in the discretization mesh. Domain-based methods rely on modal analysis and the Galerkin method to rewrite the system equations in terms of domain-wide modes (eigenfunctions). We summarize the major contributions in the field and discuss the advantages and disadvantages of each implementation. We then present reduced-order models for microbeams and rectangular and circular microplates. Finally, we present reduced-order approaches to model squeeze-film and thermoelastic damping in MEMS and present analytical expressions for the damping coefficients. We validate these models by comparing their results with available theoretical and experimental results.     

An investigation into the effects of electrostatic and squeeze-film non-linearities on the shock spectrum of microstructures

We present an investigation into the effects of some of the common microelectromechanical systems (MEMS) non-linearities on their shock response and shock spectrum. As a case study, a capacitive accelerometer is selected to investigate theoretically and experimentally the effect of non-linearities due to squeeze film damping (SQFD) and electrostatic actuation. For the theoretical investigation, a non-linear single-degree-of-freedom model is used to simulate the response of the device. It is shown that, in the case of light damping, the electrostatic forces soften the microstructure and raise its deflection significantly. Dynamic pull-in instability is predicted near the dynamic range zone of the shock spectrum. On the other hand, SQFD is found to highly suppress the deflection of the microstructure in the dynamic range, while it is of less effect in the quasi-static range. Experimentally, the capacitive accelerometer is powered with a DC load and then subjected to acceleration pulses generated by a shaker. Tests are conducted while the accelerometer is operated in air, where the squeeze film effect is significant, and while placed inside a vacuum chamber. Simulation results are compared to experimental data showing excellent agreement.     

Electromechanical coupled nonlinear dynamics for microbeams

In this paper, an electromechanical coupled nonlinear dynamic equation of a microbeam under an electrostatic force is presented. Using the nonlinear dynamic equations and perturbation method, we investigated nonlinear free vibrations, forced responses far from and near to natural frequency, respectively. Nonlinear natural frequencies and vibrating amplitudes of the electromechanical coupled microbeam are dependent on the mechanical and electric parameters. Compared with linear forced responses, the obvious shift of the mean dynamic response occurs. Under certain condition, the jump phenomenon will occur. The studies can be used to design parameters of the microbeam and remove undesirable dynamic behavior such as jump phenomenon, etc.     

Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model

A size-dependent model for electrostatically actuated microbeam-based MEMS (micro-electro-mechanical systems) with piezoelectric layers attached is developed based on a modified couple stress theory. By using Hamilton's principle, the nonlinear differential governing equation and boundary conditions of the MEM structure are derived. In the newly developed model, the residual stresses, fringing-field and axial stress effects are considered for the fixed–fixed microbeam with piezoelectric layers. The results of the present model are compared with those from the classical model. The results show the size effect becomes prominent if the beam dimension is comparable to the material length scale parameter (MLSP). The effects of MLSP, the residual stresses and axial stress on the pull-in voltage are also studied. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.     

Suppression of pull-in in a microstructure actuated by mechanical shocks and electrostatic forces

This work investigates the effect of a high-frequency voltage (HFV) on the pull-in instability in a microstructure actuated by mechanical shocks and electrostatic forces. The microstructure is modelled as a single-degree-of-freedom mass-spring-damper system. The method of direct partition of motion is used to split the fast and slow dynamics. Analysis of steady-state solutions of the slow dynamic allows the investigation of the influence of the HFV on the pull-in. The results show that adding HFV rigidifies the system, creates new stable equilibria and suppresses the pull-in instability for adequate high-frequency voltages. To illustrate the applicability of the result, a specific capacitive microelectromechanical system consisting of a clamped-clamped microbeam is considered.     

Mechanics of energy transfer and failure of ductile microscale beams subjected to dynamic loading

The mechanical response of microelectromechanical systems (MEMS) under impulse loading conditions has not been thoroughly studied to date, partially because of the lack of means to provide such extreme loading rates to miniature devices. However, the increasing use of MEMS-based sensors and actuators in adverse environments, which include extreme strain rate loading, has motivated the investigation of the response of MEMS components under these conditions. In this work, basic and mostly commonly employed Au MEMS components were subjected to impulse loads of 40 ns in duration, which were generated by a high power pulsed laser in order to achieve acceleration levels on the order of 10⁹g. This allowed for the microdevice mechanical/structural response to be investigated at time scales that were of the order of wave transit times in the substrate and the devices. Basic microscale structures, such as cantilevers and fixed-fixed beams of uniform cross-section, were employed to facilitate comparisons with companion finite element simulations in order to gain insight into the mechanisms responsible for impulsive deformation at the microscale. The simulations investigated the effect of loading rate, boundary conditions, beam length, material constitutive response, and damping on the final deformed shapes of the beams. It was found that contact and momentum transfer mechanisms were responsible for the large permanent beam deflections which were measured postmortem. Additionally, the effects of both damping and material property rate dependence were found to be dominant in determining the final deformed shape of the beams. In fact, our observations suggest that the contributions of material rate dependence and damping are not simply additive, but rather involve a coupling between them that affects the final structure response.     

Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on quasi-static behaviors and transition mechanism of nonlinear jumping phenomena. The static and dynamic behaviors of a doubly clamped viscoelastic microbeam actuated by one sided electrode are investigated in detail, based on a modified couple stress theory. The governing equation of motion is introduced here, which is essentially nonlinear due to its midplane stretching effect and electrostatic force. Through quasi-static analysis, the equilibrium position, pull-in voltage and pull-in location of the system are obtained with differential quadrature method and finite element method. The equivalent geometric nonlinear parameter is presented to explain the influence of the scale effect on the pull-in location. Different from elastic material, there are two kinds of pull-in voltages called as instantaneous pull-in voltage and the durable pull-in voltage in viscoelastic system. Then, Galerkin discretization and the method of multiple scales are applied to determine the response and stability of the system for small vibration amplitude. A new perturbation method to deal with viscoelastic term is presented. Theoretical expressions about the parameter spaces of linear-like vibration, hardening-type vibration and softening-type vibration are then deduced. The influence of viscoelasticity and scale effect on nonlinear dynamic behavior is studied. Results show that the viscoelasticity can reduce the effective elastic modulus and make the system tend to softening-type vibration; the scale effect can increase effective elastic modulus and make the system tend to hardening-type vibration. And most of all, simulation results of case studies are used to realize parameter optimization. Then parameter conditions of linear-like vibration, which is desired for many applications, are obtained. In this paper, the results of multi-physical field coupling simulation are used to verify the theoretical analysis.     

参数激励下静电驱动微机电系统动力特性研究

充分考虑压膜阻尼效应的影响,提出参数激励下时变电容式静电驱动微机电系统的动力学模型,采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性,探讨不同控制电压和频率比对系统幅频响应的影响,分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性,结果表明,微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为,压膜阻尼效应对系统动力特性的影响不可忽视.      

Self-Excited Oscillations of Structures by Particle Emission

This paper studies the self-excited oscillations of structures by alphaparticle emission. Alpha particles emitting from a source exert a smallmechanical force on the structure. This force is analogous to theso-called follower force which is known to cause structure flutter andcould be used as a source of mechanical power in MEMS devices. Wedevelop a dynamic model for the structure and study the stability of thestructure. The bifurcation analysis renders information about thepossible steady-states for different values of parameters. Depending onthe parameters, the structure can have stable buckled as well asunbuckled equilibria. Moreover, the model predicts stable limit cycleswhich correspond to stable flutter of the structure. Although it isdifficult to achieve the required mechanical force using alpha particleemission, the concept of generating mechanical oscillations throughejecting streams of gaseous or liquid jets is feasible.     

A micro scale geometrically non-linear Timoshenko beam model based on strain gradient elasticity theory

In this study, a micro scale non-linear Timoshenko beam model based on a general form of strain gradient elasticity theory is developed. The von Karman strain tensor is used to capture the geometric non-linearity. Governing equations of motion and boundary conditions are derived using Hamilton's principle. For some specific values of the gradient-based material parameters, the general beam formulation can be specialized to those based on simple forms of strain gradient elasticity. Accordingly, a simple form of the microbeam formulation is introduced. In order to investigate the behavior of the beam formulation, the problem of non-linear free vibration of a simply-supported microbeam is solved. It is shown that both strain gradient effect and that of geometric non-linearity increase the beam natural frequency. Numerical results reveal that for a microbeam with a thickness comparable to its material length scale parameter, the effect of strain gradient is higher than that of the geometric non-linearity. However, as the beam thickness increases, the difference between the results of the classical beam formulation and those of the gradient-based formulations become negligible. In other words, geometric non-linearity plays the essential role on increasing the natural frequency of a microbeam having a large thickness-to-length parameter ratio. In addition, it is shown that for some microbeams, both geometric non-linearity and size effect have significant contributions on increasing the natural frequency of non-linear vibrations.     

An alternative reduced order model for electrically actuated micro-beams under mechanical shock

This study focuses on the effect of mechanical shock on dynamic pull-in instability of eclectically actuated micro-beams through an alternative reduced order model (ROM). The model's predictions for dynamic pull-in voltages are compared with available finite element (FE) results and six modes Galerkin approximations in the literature. It is shown that present results for high shock accelerations agree with FE predictions better than those obtained using six modes approximations. Furthermore, the present model can remove the limitation of previous methods in capturing dynamic pull-in instability for cases under enormous shock accelerations.     

A nonlinear microbeam model based on strain gradient elasticity theory with surface energy

A microscale nonlinear Bernoulli–Euler beam model on the basis of strain gradient elasticity with surface energy is presented. The von Karman strain tensor is used to capture the effect of geometric nonlinearity. Governing equations of motion and boundary conditions are obtained using Hamilton’s principle. In particular, the developed beam model is applicable for the nonlinear vibration analysis of microbeams. By employing a global Galerkin procedure, the ordinary differential equation corresponding to the first mode of nonlinear vibration for a simply supported microbeam is obtained. Numerical investigations show that in a microbeam having a thickness comparable with its material length scale parameter, the strain gradient effect on increasing the beam natural frequency is higher than that of the geometric nonlinearity. By increasing the beam thickness, the strain gradient effect decreases or even diminishes. In this case, geometric nonlinearity plays the main role on increasing the natural frequency of vibration. In addition, it is shown that for beams with some specific thickness-to-length parameter ratios, both geometric nonlinearity and size effect have significant role on increasing the frequency of nonlinear vibration.     

Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation

In this study, nonlinear static and dynamic responses of a microcantilever with a T-shaped tip mass excited by electrostatic actuations are investigated. The electrostatic force is generated by applying an electric voltage between the horizontal part of T-shaped tip mass and an opposite electrode plate. The cantilever microbeam is modeled as an Euler–Bernoulli beam. The T-shaped tip mass is assumed to be a rigid body and the nonlinear effect of electrostatic force is considered. An equation of motion and its associated boundary conditions are derived by the aid of combining the Hamilton principle and Newton's method.An exact solution is obtained for static deflection and mode shape of vibration around the static position. The differential equation of nonlinear vibration around the static position is discretized using the Galerkin method. The system mode shapes are used as its related comparison functions. The discretized equations are solved by the perturbation theory in the neighborhood of primary and subharmonic resonances.In addition, effects of mass inertia, mass moment of inertia as well as rotation of the T-shaped mass, which were ignored in previous works, are considered in the analysis. It is shown that by increasing the length of the horizontal part of the T-shaped mass, the amount of static deflection increases,natural frequency decreases and nonlinear shift of the resonance frequency increases. It is concluded that attaching an electrode plate with a T-shaped configuration to the end of the cantilever microbeam results in a configuration with larger pull-in voltage and smaller nonlinear shift of the reso-nance frequency compared to the configuration in which the electrode plate is directly attached to it.     

A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation

An investigation into the response of a resonant microbeam to anelectric actuation is presented. A nonlinear model is used to accountfor the mid-plane stretching, a DC electrostatic force, and an ACharmonic force. Design parameters are included in the model by lumpingthem into nondimensional parameters. A perturbation method, the methodof multiple scales, is used to obtain two first-order nonlinearordinary-differential equations that describe the modulation of theamplitude and phase of the response and its stability. The model and theresults obtained by the perturbation analysis are validated by comparingthem with published experimental results. The case of three-to-oneinternal resonance is treated.The effect of the design parameters on the dynamic responses isdiscussed. The results show that increasing the axial force improves thelinear characteristics of the resonance frequency and decreases theundesirable frequency shift produced by the nonlinearities. In contrast,increasing the mid-plane stretching has the reverse effect. Moreover,the DC electrostatic load is found to affect the qualitative andquantitative nature of the frequency-response curves, resulting ineither a softening or a hardening behavior. The results also show thatan inaccurate representation of the system nonlinearities may lead to anerroneous prediction of the frequency response.     

基于有限差分法薄板激光冲击响应的数值模拟

在激光冲击载荷作用下, 薄板变形速度快, 诱导产生的应力波的传播过程较为复杂. 传统的测量工具难以对薄板变形过程中的动态响应进行有效的测量. 本文采用理论与实验相结合的方法, 构建了薄板在激光冲击下二维轴对称平面模型, 建立其拉格朗日运动方程, 利用有限差分法求其显式解, 分析薄板在激光冲击载荷作用下薄板的变形过程和应力波的传播过程, 并研究不同工艺参数对薄板动态响应特性的影响. 结果表明, 薄板变形初期的速度为振荡式增加, 在快速的拉胀式变形过程中会出现明显的回弹现象, 在光斑边界处产生向内和向外传播的应力波, 载荷的压力-空间分布以及边界约束条件也对薄板的动态响应结果有显著的影响. 激光冲击实验得到的结果与数值结果和预测结果基本吻合. 研究方法与所得结论可为薄板激光冲击成形过程中的参数优化提供参考.      

微机械杠杆力放大效果的计算和提高

硅微谐振式加速度计是一种高精度的惯性传感器,它通过谐振梁刚度随惯性力的变化检测输入加速度的大小。为了得到较高的标度因数,国内外的研究机构普遍使用微机械杠杆机构来放大惯性力,但实验中微机械杠杆往往达不到理想的放大倍数,尤其是多级杠杆对力的放大作用非常有限。结合国内加工条件,微机械杠杆力放大机构的模型被合理简化,使用有限元分析运动模态的方法,分别计算微机械杠杆、检测质量支撑梁以及谐振梁的刚度,并按此仿真计算结果估算微机械杠杆的力放大倍数。通过理论推导、ANSYS仿真和对微机械杠杆实验的结果验证了这种方法的正确性。为分析微机械杠杆实际的力放大效果提供了一种实用方法,并基于此方法提出通过提高输出刚度来提高微机械杠杆力放大倍数的方法。通过对杠杆结构的优化,可将原有3.9倍的杠杆放大倍数提高到7.0倍。