水浴温度对CdS薄膜性能的影响

采用化学水浴法,以不同水浴温度在玻璃衬底上沉积CdS薄膜并制备CIGS薄膜太阳能电池,研究了水浴温度对CdS薄膜和CIGS太阳能电池性能的影响.结果表明:水浴温度对CdS薄膜的致密性、沉积速率、透过率和成分比率都有影响.在65-80℃之间制备的CdS薄膜均匀致密且透过率高,可作为CIGS太阳能电池的缓冲层;另外,CdS缓冲层的厚度对CIGS电池的性能影响显著,较薄的CdS缓冲层能够增加CIGS电池在400-500 nm波段对光线的吸收,提高CIGS电池的短路电流.     

一步蒸发法制备CIGS薄膜的晶体结构研究

采用一步蒸发法分别在钠钙硅玻璃基底、Mo基底上制备Cu(In,Ga) Se2(CIGS)薄膜,通过改变基底温度研究了玻璃和钼基底下CIGS薄膜晶体结构随温度变化情况,采用XRD、SEM、XRF及UV-vis对CIGS薄膜组成、结构及性能进行了表征.结果表明:在玻璃和Mo基底下制备的CIGS薄膜具有均匀一致的化学计量比组成,不同基底温度下,薄膜呈片状和柱状两种结构,片状结构的光吸收系数和禁带宽度高于柱状结构的光吸收系数和禁带宽度.     

Cu(In,Ga)Se2薄膜太阳电池二极管特性的研究

本文采用线性拟合光态和暗态J-V(电流-电压)曲线的方法计算了不同效率的Cu(In,Ga)Se2(CIGS)薄膜太阳电池的二极管性能参数.在一定范围内,CIGS薄膜电池的二极管品质因子A和反向饱和电流J0值越小,电池的转换效率越高,这说明CIGS电池的复合主要发生在PN结区内.量子效率分析表明,不同效率的CIGS电池在短波区(λ<520 nm)的光谱响应相差不大,而在长波区(520～1100 nm),低效率电池存在很大的吸收,这是由低质量的CIGS吸收层造成的.这进一步验证了光-暗态J-V曲线的分析结果,即高质量的吸收层是制备CIGS电池的关键.     

镓(Ga)的含量及分布对CIGS薄膜电池量子效率的影响

采用两步法制备CuGaxIn1-xSe2薄膜,Cu-In-Ga金属预制层采用铜镓合金靶及铟靶通过磁控溅射方法沉积而成,采用固态源硒化法在硒蒸气密闭环境中硒化,通过调整镓(Ga)比例及分布控制CIGS薄膜的带隙,采用镓元素梯度分布,使CIGS薄膜带隙呈现抛物线状分布,电池的量子效率得到明显提高,制备出的CIGS薄膜电池开路电压与转换效率都得到很大程度的改善,电池最高转换效率已达9.4;.     

Cu(In,Ga)Se2薄膜电沉积制备及性能研究

采用Mo/钠钙玻璃衬底作为阴极,饱和甘汞电极(SCE)为参比电极,大面积的铂网电极作为阳极的三电极体系,以氯化铜,三氯化铟,三氯化镓和亚硒酸的水溶液为电解液,利用电沉积技术制备出黄铜矿结构Cu(In,Ga)Se2多晶薄膜.研究了不同热处理温度对CIGS多晶薄膜材料的组成、结构和表面形貌的影响以及薄膜的光电学性能.实验结果表明当热处理温度为450℃时,所制备的Cu(In,Ga)Se2薄膜的化学组成接近理想的化学计量比,薄膜具有黄铜矿结构,颗粒均匀,致密性较好,在室温下禁带宽度为1.43 eV,具有高的吸收系数.     

VHF-PECVD制备微晶硅薄膜及其微结构表征研究

采用VHF-PECVD技术制备了系列不同衬底温度的硅薄膜.运用微区拉曼散射(Micro-Raman)和X射线衍射(XRD)对薄膜进行了结构方面的测试分析.Micro-Raman测试结果表明:随衬底温度的升高,薄膜逐渐由非晶向微晶过渡,晶化率(Xc)逐渐增大.XRD的结果显示样品的择优取向随衬底温度的升高而变化,(220)方向计算得出样品的晶粒尺寸逐渐变大.     

Ga源温度对共蒸发三步法制备Cu(In,Ga)Se2太阳电池的影响

利用共蒸发三步法制备了Cu(In,Ga)Se2(CIGS)薄膜,并通过调整制备工艺中的一、三步的金属镓(Ga)的温度,改变Ga含量的梯度分布,研究不同梯度分布对CIGS薄膜及电池性能的影响.从而优化了电池带隙梯度分布,使电池的开路电压Voc在提高的同时,最大程度的减小了Jsc的损失.优化后薄膜表面的结晶情况得到改善,电池的结界面和二极管特性也得到相应的提高.量子效率测试发现,优化后的CIGS太阳电池在较长波段中(520～1100nm)的光子吸收损失大大减小.     

基于柔性玻璃衬底ZnO∶B薄膜的非晶硅太阳能电池的制备及其光电性能研究

采用低压化学气相沉积法(LPCVD)在大面积(40 cm ×40 cm)超薄柔性玻璃和硬质玻璃衬底上分别制备了B掺杂的ZnO(BZO)透明导电薄膜及非晶硅薄膜太阳能电池,对比了两种衬底上BZO薄膜的形貌、光学和导电性能及其非晶硅薄膜电池的性能.结果表明,在相同LPCVD工艺下,超薄柔性玻璃衬底上BZO薄膜的生长速率相对减小;当生长相同厚度BZO薄膜时,超薄柔性玻璃衬底的透光率相对于硬质玻璃衬底提高约2;,同时并具有相同的导电能力.在柔性玻璃衬底上制备的非晶硅薄膜电池的初始和稳定转化效率也相对提高,分别达到9.16;和7.82;.     

衬底温度对磁控溅射法制备掺Ta氧化锌薄膜性能的影响

采用射频磁控溅射法,在不同的衬底温度下制备了钽(Ta)掺杂的氧化锌(ZnO)薄膜,采用X射线能谱(EDS)、X射线衍射(XRD)、扫描电镜(SEM)、紫外-可见分光光度计和光致发光(PL)光谱研究了衬底温度对制备的Ta掺杂ZnO薄膜的组分、微观结构、形貌和光学特性的影响.EDS的检测结果表明,Ta元素成功掺入到了ZnO薄膜;XRD图谱表明,掺入的Ta杂质是替代式杂质,没有破坏ZnO的六方晶格结构,随着衬底温度的升高,(002)衍射峰的强度先增大后降低,在400℃时达到最大;SEM测试表明当衬底温度较高时(400℃和500℃),Ta掺杂ZnO薄膜的晶粒明显变大;紫外-可见透过光谱显示,在可见光范围,Ta掺杂ZnO薄膜的平均透光率均高于80;,衬底不加热时制备的Ta掺杂ZnO的透光率最高;制备的Ta掺杂ZnO薄膜的禁带宽度范围为3.34~3.37eV,衬底温度为500℃时制备的Ta掺杂ZnO薄膜的禁带宽度最小,为3.34eV.PL光谱表明衬底温度为500℃时制备的Ta掺杂ZnO薄膜中缺陷较多,这也是造成薄膜禁带宽度变小的原因.     

铌酸锂衬底上磁控溅射ITO薄膜及其光电性质研究

在铌酸锂(LN)晶体衬底上磁控溅射铟锡氧化物(ITO)薄膜,研究了射频磁控溅射制备ITO/LN薄膜的最佳工艺.采用原子力显微镜(AFM)和X射线衍射(XRD)分析了透明导电ITO膜的制备工艺参数对薄膜表面形貌和晶体结构的影响,同时应用四探针电阻率测量和紫外可见光谱测量技术对所研制的ITO/LN膜的光电性质进行了研究.结果表明,衬底温度为320℃,溅射时间50 min时制备的ITO/LN薄膜具有最佳光电性质,在该条件制备出薄膜的电阻率为3.41×10-4Ω·cm,ITO/LN平均可见光透光率可达74.38;,平均透光率比LN衬底提高了1.1;.应用该溅射条件制备了泰伯效应位相阵列器,其近场衍射成像的相对光强可达0.67.     

衬底温度对碲化镉薄膜结构及光学性能的影响

碲化镉(CdTe)因具有良好的光电性能和吸收性能经常被作为太阳电池的吸收层材料.以纯度为99.99;的CdTe陶瓷靶为靶材在玻璃衬底上采用射频磁控溅射的方法制备了一系列的CdTe薄膜,研究了衬底温度对样品薄膜的厚度、结构和光学性能的影响.结果表明:随着衬底温度的增加薄膜的厚度在逐渐地减少;制备的薄膜都是立方闪锌矿结构且具有高度的(111)面择优取向;薄膜对可见光有较好的吸收性能,随衬底温度的增加而减小.     

Preparation of indium tin oxide thin films without external heating for application in solar cells

Indium tin oxide (ITO) films were grown without external heating in an ambient of pure argon by RF-magnetron sputtering method. The influence of argon ambient pressure on the electro-optical properties of as-deposited ITO films was investigated. The morphology, structural and optical properties of ITO films were examined and characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and UV–VIS transmission spectroscopy. The deposited ITO films with a thickness of 300 nm show a high transparency between 80% and 90% in the visible spectrum and 14–120 Ω/□ sheet resistance under different conditions. The ITO films deposited in the optimum argon ambient pressure were used as transparent electrical contacts for thin film Cu(In,Ga)Se₂ (CIGS) solar cells. CIGS solar cells with efficiencies of the order of 7.0% were produced without antireflective films. The results have demonstrated that the developed ITO deposition technology has potential applications in thin film solar cells.     

Cu(In,Ga)Se_2薄膜表面镓(Ga)含量分布对太阳电池性能的影响

本文利用三步法共蒸发制备Cu(In,Ga)Se_2多晶薄膜吸收层,通过改变第三步Ga的蒸发温度控制薄膜表面Ga的含量及其分布.随着吸收层表面Ga含量的增大,空间电荷区带隙变宽,电池的开路电压V_(oc)明显增大.同时,Ga的梯度分布有效地扩宽了吸收层的光谱响应范围,减小了由于禁带宽度增大所引起的短路电流J_(sc)的损失,从而有效地提高了电池的转换效率.     

Influence of substrate temperature on microcrystalline structure and optical properties of ZnTe thin films

ZnTe thin films were deposited onto well‐cleaned glass substrates kept at different temperatures (Ts = 303, 373 and 423 K), by vacuum evaporation method under the pressure of 10^–5 Torr. The thickness of the film was measured by quartz crystal monitor and verified by the multiple beam interferometer method. The structural characterization was made using X‐ray diffractometer with filtered CuKα radiation. The grain sizes of the microcrystallines in films increases with increase in substrate temperature. The strain (ε), grain size (D) and dislocation density (δ) was calculated and results are discussed based on substrate temperature. Optical behaviour of the film was analyzed from transmittance spectra in the visible region (400–800 nm). The optical transition in ZnTe films is direct and allowed type. The optical band gap energy shows an inverse dependence on substrate temperature and thickness. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

衬底温度对氧化锌薄膜微结构及光学性能的影响

衬底温度是磁控溅射法制备氧化锌薄膜中一个非常重要的工艺指标,探索衬底温度对氧化锌薄膜微结构及光学性能的影响对制备环保型高质量氧化锌紫外屏蔽材料具有重要意义。以质量分数99.99%的氧化锌陶瓷靶为溅射源,利用射频磁控溅射技术在石英衬底上沉积了氧化锌紫外屏蔽薄膜,通过X射线衍射仪、薄膜测厚仪、紫外-可见分光光度计、荧光分光光度计进行测试和表征,研究了不同衬底温度对ZnO薄膜微结构及光学性能的影响。实验结果表明:制备所得薄膜均为六角纤锌矿结构,具有沿(002)晶面择优取向生长的特点,其晶格常数、晶粒尺寸、透过率、光学能隙、可见荧光、结晶质量等都与衬底温度密切相关,当衬底温度为250 ℃,溅射功率160 W,氩气压强0.5 Pa,氩气流速8.3 mL/min,沉积时间60 min时,所得氧化锌薄膜样品取向性最好,晶粒尺寸最大,薄膜结构致密,具有良好的光学性能和结晶质量。     

Characterization of in‐plane structures of vapor deposited thin‐films of distyryl‐oligothiophenes by grazing incidence x‐ray diffractometry

The in‐plane structures of vapor deposited ultrathin films of distyryl‐oligothiophenes (DS‐2T) on SiO₂ substrate were characterized by grazing incidence x‐ray diffractometry (GIXD). Two polymorphs, low‐temperature and high‐temperature phases, were identified, and the two dimensional unit cell parameters were determined for each polymorph. The polymorphism depends on substrate temperature and film thickness. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

磁控溅射Cu薄膜的光电性能研究

利用磁控溅射技术,通过正交试验设计方法,在K9光学玻璃基底上制备了Cu薄膜,研究了溅射时间、基底温度和氩气流量对Cu薄膜光电性能的影响.研究表明:Cu薄膜的透射谱在紫外波段362 nm处有明显吸收峰,但在可见光波段吸收强度较弱,说明Cu膜在可见波段有较高的透光性;膜厚度增加则光学透射率降低.电阻率随膜厚的增大,大体上呈逐渐减小的趋势;1100 nm 为临界尺寸,Cu膜厚度<1100 nm时,电阻率值变化较快;Cu薄膜厚度>1100 nm时,电阻率变化缓慢至定值.当溅射时间为25 min、基底温度为300 ℃、氩气流量为6.9 sccm时所得样品在紫外-可见光区没有吸收,且导电性好.     

The growth of gallium arsenide films from a thin solution layer between substrates

The method of GaAs film growth from a solution between two substrates was considered. The calculated thickness as a function of growth temperature and distance between substrates was in a good agreement with experimental results. The investigation of the film roughness as a function of cooling rate, distance between substrates and their orientations was fulfilled. Electrical properties of the films as a function of substrate orientations in the interval (100)–(111)–(011) were demonstrated. The possibility of application of this method for the investigation of film doping as a function of temperature and growth rate was shown.     

Modelling of Cu thin film growth by MOCVD process in a vertical reactor

Transport phenomena in a vertical reactor for metalorganic chemical vapor deposition (MOCVD) of copper thin films have been analyzed by numerical simulation of the process. The equations of the mathematical model were solved numerically using the Galerkin finite element method, Newton-Raphson iterations and the frontal algorithm for the gas flow structure, temperature distribution and concentration distribution of the reacting species. Deposition rates of copper thin films using Cu(hfac)VTMS as a precursor were estimated from numerical solutions. Standard process conditions were selected as: a reactor pressure of 1 Torr, a substrate temperature and inlet gas temperature of 200°C and 70°C, respectively, and an inlet gas flow rate of 50 sccm. Under standard conditions, the deposition rates of copper were in the range of 160–230 Å/min. The effects of the process conditions, reactor geometry and shower head structure on the deposition rate and thickness uniformity were examined. It has been demonstrated that numerical simulation can be used for improving the film thickness uniformity and the utilization of source gas.