纳米金刚石的变温场发射

研究了温度变化对沉积在钛基底上的纳米金刚石的场发射特性的影响,发现纳米金刚石场发射电流随温度和电场的升高而增大,场发射特性偏离了传统的Fowler-Nordheim理论,场发射电流的稳定性基本没有变化.分析了场发射电流增大的机理,表明是由于纳米金刚石的尺度效应以及外电场下金刚石产生了大量的热载流子共同作用的结果.研究还表明基底钛在温度升高到一定程度后,在外加电场下会有较大的电流产生,对场发射造成较大的影响,表明基底钛具有一定的温度敏感性和电压敏感性.     

钛基底的纳米金刚石掺混纳米碳管的场发射特性

在纳米金刚石场发射的基础上, 研究了纳米金刚石掺混纳米碳管的场发射特性。采用电泳沉积法形成了纳米金刚石与纳米碳管的复合涂层, 经热处理后制备出阴极样品, 然后进行微观表征, 再进行场发射特性测试与发光测试。结果表明, 与未掺混的纳米金刚石阴极样品相比, 复合涂层阴极样品的场发射开启电场明显减小, 场发射电流提高, 在较低的电场下阳极表面荧光粉就可以发光, 但发光不均匀, 出现了"边沿发光"的现象。分析了纳米金刚石掺混纳米碳管场发射性能提高的机理, 是由于纳米碳管掺入之后, 涂层的电子输运能力得到增强, 涂层中有效发射体的数目增加。最后, 解释了"边沿发光"现象的成因。     

热处理对纳米金刚石涂层场发射性能的影响

用旋涂法在金属钛衬底上涂敷纳米金刚石,经过适当的热处理形成金刚石涂层与金属钛衬底的化学键合,即形成衬底与涂层之间的过渡层,从而为纳米金刚石颗粒提供电子,使其成为有效的发射体。用扫描电镜、原子力显微镜、X射线衍射和拉曼散射等手段分析了温度对键合效果以及场发射性能的影响,温度过高或过低都不利于提高纳米金刚石涂层的场发射性能,只有在700℃左右对样品进行热处理,才能得到较好的键合状态。改变涂膜时旋涂的次数以获得不同涂层厚度的样品,对其在700℃的相同温度下进行热处理,发现涂层过厚或过薄都不利于样品发射性能的提高。旋涂9次并于700℃热处理的样品具有较好的场发射性能,其发射阈值场强可达4.6V/μm,而15.3V/μm场强下的电流密度为59.7μA/cm2。     

纳米金刚石掺混纳米氧化锌的场发射特性

利用水热法制备了菊花状的氧化锌纳米棒,并进行表征,将纳米氧化锌掺入纳米金刚石中配制成电泳液,超声分散后电泳沉积到钛衬底上,再经热处理后进行场发射特性的测试.结果表明:未掺混的金刚石阴极样品的开启电场为7.3V/μm,在20V/μm的电场下,场发射电流密度为81μA/cm2;掺混后阴极样品的场发射开启电场降低到4.7~6.0V/μm,在20V/μm电场下,场发射电流密度提高到140~158μA/cm2.原因是纳米ZnO掺入后,增强了涂层的电子输运能力、增加了有效发射体数目,提高了场增强因子β,而金刚石保证了热处理后涂层与衬底的良好键合,形成了欧姆接触,降低了场发射电流的热效应.场发射电流的稳定性随掺混ZnO量的增加而下降,要兼顾场发射电流密度及其稳定性,适量掺入ZnO可有效提高纳米金刚石的场发射性能.     

钛基纳米金刚石涂层场发射阴极

设计了一种新的金刚石场发射阴极工艺.用旋涂法在金属钛片上涂覆纳米金刚石涂层，经过适当条件的真空热处理，实现钛与金刚石之间的化学键合即欧姆接触，从而形成以金属钛为衬底，碳化钛键合层为过渡层，金刚石纳米颗粒为场发射体的场发射阴极.样品的阈值场强可达6.3V/μm，场发射电流密度在21 V/μm场强下可达到60.7 μA/cm2.提出了样品的结构模型,并分析了其电子输运方式.样品的Fowler-Nordheim曲线基本为一直线，根据经典场发射理论，可以证实其电子发射机制为场发射.观察到在获得稳定的场发射性能之前存在激发过程，并对其作了简单解释.     

后处理工艺对钛基纳米金刚石涂层场发射特性的影响

采用胶带粘贴、金相砂纸摩擦、射频氢等离子体工艺对钛基纳米金刚石涂层进行了处理,分析了它们对样品的微观表征、场发射性能、发光效果的影响。首先通过电泳法将金刚石粉末移植到金属钛片上,然后经过真空热处理、表面后处理工艺形成了场发射阴极涂层,最后对样品进行了微观表征、场发射特性与发光测试。结果表明,胶带处理在场强达到10 V/μm时,场发射电流密度从50μA/cm~2增j加到72μA/cm~2;金相砂纸处理在10 V/μm场强下的场发射电流由48μA/cm~2提高到82μA/cm~2;适当的氢等离子体处理有助于降低表面功函数,使得金刚石表面的悬键被氢原子饱和,在其表面形成C—H键,进一步降低了电子亲和势,从而提高了样品的场发射性能和发光均匀性。     

金刚石薄膜场发射进展

评述了国际上金刚石薄膜场发射的研究进展和存在的问题，主要包括金刚石薄膜场发射现象，场发射的可能机制和改善场发射的措施。     

电化学方法制备ZnO纳米颗粒掺杂类金刚石薄膜及其场发射性能研究

采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜, 研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响. 利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、 微观结构和表面形貌进行了表征. 结果表明: 薄膜中的ZnO纳米颗粒具有纤锌矿结构, 其含量随着电解液中Zn源的增加而增加. ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度. 场发射测试表明, ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能, 其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm². 薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.     

金刚石粉末淀积层的场发射特性研究

采用电镀方法和直接刷涂的方法在钨针衬底和硅衬底上沉积高压合成的金刚石粉末形成冷阴极。将这种冷阴极与荧光阳极组成真空二极管结构。通过该结构电流-电压特性的测量和发光特性的观察研究了金刚石粉末冷阴极的电子场发射性能。实验显示,这些冷阴极都具有很高的电子发射能力,最低开启场强达到3．25V／μm。用热电正反馈和电导调制效应解释厂电子场发射点呈随机分布的现象。     

Effect of metal nanoparticle doping concentration on surface morphology and field emission properties of nano-diamond films

Nano-diamond particles are co-deposited on Ti substrates with metal (Ti/Ni) nanoparticles (NPs) by the electrophoretic deposition (EPD) method combined with a furnace annealing at 800℃ under N₂ atmosphere. Modifications of structural and electron field emission (EFE) properties of the metal-doped films are investigated with different metal NPs concentrations. Our results show that the surface characteristics and EFE performances of the samples are first enhanced and then reduced with metal NPs concentration increasing. Both the Ti-doped and Ni-doped nano-diamond composite films exhibit optimal EFE and microstructural performances when the doping quantity is 5 mg. Remarkably enhanced EFE properties with a low turn-on field of 1.38 V/μm and a high current density of 1.32 mA/cm² at an applied field of 2.94 V/μm are achieved for Ni-doped nano-diamond films, and are superior to those for Ti-doped ones. The enhancement of the EFE properties for the Ti-doped films results from the formation of the TiC-network after annealing. However, the doping of electron-rich Ni NPs and formation of high conductive graphitic phase are considered to be the factor, which results in marvelous EFE properties for these Ni-doped nano-diamond films.     

场致发射的温度效应对微波管爆炸电子发射的影响

为研究场致发射的温度效应对微波管中爆炸电子发射过程的影响,在对比分析低温条件下的场致发射电流密度Fowler-Nordheim（FN）和一般的电子发射电流密度积分公式的基础上,利用细长圆柱形微凸起模型,重点考虑焦耳加热和热传导两个因素,编程计算得到了微凸起内部的温度分布和不同位置处温度随时间的变化。结果表明:场致发射的温度效应是一个重要影响因素,考虑温度对场致发射的影响后,微凸起内部各点的温度随时间呈非线性增长,且增长速率越来越大;在微波电场强度较弱时,若不考虑场致发射的温度效应而直接用FN公式表示的电流密度代入计算,会使爆炸发射延迟时间变短;当微波电场很强时,温度效应对爆炸发射延迟时间的影响则较小。     

三维热场致发射模型的数值模拟与研究

研究了场致发射与热电子发射的基本理论, 得出热场致发射的适用公式, 探讨了其粒子的初始分布和初始动量, 并在FDTD-PIC原理的基础上编写了软件, 分别实现了场致发射模型, 热电子发射模型和热场致发射模型, 通过分别对一个长楔形阴极器件的数值模拟, 从发射电流特性, 电子初始能量分布等方面验证了其正确性.     

空间电荷效应对热场致发射中诺廷汉效应的影响

热场致发射阴极所产生的强流电子束具有很强的空间电荷效应,为研究该效应对热场致发射过程中诺廷汉（Nottingham）效应的影响机理,在理论分析的基础上,用数值方法研究了不同逸出功和多个外加电场条件下考虑空间电荷效应对诺廷汉效应结果的影响,并与不考虑空间电荷效应时的情形进行了对比. 结果表明：空间电荷效应的强弱会显著影响到阴极表面的稳态电场,进而对诺廷汉效应产生不可忽略的影响;当逸出功在3.0–4.52 eV、外加电场在3×10⁹–9×10⁹ V/m范围内时,考虑空间电荷效应的影响后,热场致发射电子所带走的平均能量较不考虑空间电荷效应时增加0–2.5 eV,且温度越高或外加电场越大时,该增加值越大;考虑空间电荷效应对诺廷汉效应的影响后,热场致发射电子从阴极带走的平均能量随外加电场的增加呈非线性下降规律;当阴极表面温度较高时,诺廷汉效应中的冷却效应随二极管间隙距离的变大而增强. 关键词： 热场致发射 诺廷汉效应 空间电荷效应 阴极表面电场     

碳纳米管场致电子发射新机制

基于对长达 1μm的 (5 ,5 )碳纳米管的量子力学计算 ,作者发现使碳纳米管具有优异场致电子发射特性的因素除了人们预期的尖端场增强之外 ,电荷在纳米管尖端的积累造成有效功函数 (真空势垒 )的非线性下降也起了非常重要的作用 .对外加电场Vappl=10— 14V/ μm下的碳纳米管进行了计算 ,得到与实验结果相近的发射电流     

超短沟道绝缘层上硅平面场效应晶体管中热载流子注入应力导致的退化对沟道长度的依赖性

随着场效应晶体管(MOSFET)器件尺寸的进一步缩小和器件新结构的引入, 学术界和工业界对器件中热载流子注入(hot carrier injections, HCI)所引起的可靠性问题日益关注. 本文研究了超短沟道长度(L=30–150 nm)绝缘层上硅(silicon on insulator, SOI)场效应晶体管在HCI应力下的电学性能退化机理. 研究结果表明, 在超短沟道情况下, HCI 应力导致的退化随着沟道长度变小而减轻. 通过研究不同栅长器件的恢复特性可以看出, 该现象是由于随着沟道长度的减小, HCI应力下偏压温度不稳定性效应所占比例变大而导致的. 此外, 本文关于SOI器件中HCI应力导致的退化和器件栅长关系的结果与最近报道的鳍式场效晶体管(FinFET)中的结果相反. 因此, 在超短沟道情况下, SOI平面MOSFET器件有可能具有比FinFET器件更好的HCI可靠性.     

Mechanism of field electron emission from carbon nanotubes

Field electron emission (FE) is a quantum tunneling process in which electrons are injected from materials (usually metals) into a vacuum under the influence of an applied electric field. In order to obtain usable electron current, the conventional way is to increase the local field at the surface of an emitter. For a plane metal emitter with a typical work function of 5 eV, an applied field of over 1 000 V/μm is needed to obtain a significant current. The high working field (and/or the voltage between the electrodes) has been the bottleneck for many applications of the FE technique. Since the 1960s, enormous effort has been devoted to reduce the working macroscopic field (voltage). A widely adopted idea is to sharpen the emitters to get a large surface field enhancement. The materials of emitters should have good electronic conductivity, high melting points, good chemical inertness, and high mechanical stiffness. Carbon nanotubes (CNTs) are built with such needed properties. As a quasi-one-dimensional material, the CNT is expected to have a large surface field enhancement factor. The experiments have proved the excellent FE performance of CNTs. The turn-on field (the macroscopic field for obtaining a density of 10 μA/cm²) of CNT based emitters can be as low as 1 V/μm. However, this turn-on field is too good to be explained by conventional theory. There are other observations, such as the non-linear Fowler-Nordheim plot and multi-peaks field emission energy distribution spectra, indicating that the field enhancement is not the only story in the FE of CNTs. Since the discovery of CNTs, people have employed more serious quantum mechanical methods, including the electronic band theory, tight-binding theory, scattering theory and density function theory, to investigate FE of CNTs. A few theoretical models have been developed at the same time. The multi-walled carbon nanotubes (MWCNTs) should be assembled with a sharp metal needle of nano-scale radius, for which the FE mechanism is more or less clear. Although MWCNTs are more common in present FE applications, the single-walled carbon nanotubes (SWCNTs) are more interesting in the theoretical point of view since the SWCNTs have unique atomic structures and electronic properties. It would be very interesting if people can predict the behavior of the well-defined SWCNTs quantitatively (for MWCNTs, this is currently impossible). The FE as a tunneling process is sensitive to the apex-vacuum potential barrier of CNTs. On the other hand, the barrier could be significantly altered by the redistribution of excessive charges in the micrometer long SWCNTs, which have only one layer of carbon atoms. Therefore, the conventional theories based upon the hypothesis of fixed potential (work function) would not be valid in this quasi-one-dimensional system. In this review, we shall focus on the mechanism that would be responsible for the superior field emission characteristics of CNTs. We shall introduce a multi-scale simulation algorithm that deals with the entire carbon nanotube as well as the substrate as a whole. The simulation for (5, 5) capped SWCNTs with lengths in the order of micrometers is given as an example. The results show that the field dependence of the apex-vacuum electron potential barrier of a long carbon nanotube is a more pronounced effect, besides the local field enhancement phenomenon.     

薄膜场发射开启电场的小波神经网络预测模型研究

关键词：