Lasers for materials processing: specifications and trends

An overview is given of the types of lasers dominating the field of laser materials processing. The most prominent lasers in this field are the CO₂ and the Nd: YAG laser. The domain of CO₂ lasers is applications which demand high laser powers (up to 30 kW are available at present), whereas the domain of Nd:YAG lasers is micro-machining applications. In the kilowatt range of laser output power, the two types of lasers are in competition. New diffusion-cooled CO₂ laser systems are capable of output laser powers of several kilowatts, with good beam qualities, while still being quite compact. The output power and beam quality of Nd:YAG lasers has been improved in recent years, so that Nd:YAG lasers are now an alternative to CO₂ lasers even in the kilowatt range. This is especially true for applications that demand optical fibre transmission of the laser beam, which is possible with Nd:YAG laser light but not with the longerwavelength light emitted by CO₂ lasers. The main problem in solid-state lasers such as Nd:YAG is the thermal lensing effect and damage due to thermal stresses. In order to reduce thermal loading, cooling has to be enhanced. Several alternative geometries have been proposed to reduce thermal loading and, by this, thermal lensing effects. There are now slab and tube geometries which allow much higher output powers than the conventionally used laser rods. A very new scheme proposes a thin slab whose cooled side is also used as one of the laser mirrors, so that thermal gradients occur mainly in the direction of the beam propagation and not perpendicular to it, as is the case in the other geometries. As well as CO₂ and Nd:YAG lasers, semiconductor laser diodes are very promising for direct use of the emitted light or as pump sources for Nd:YAG and other solid-state lasers. When packaging together thousands of single laser diodes, output powers of several kilowatts can be realized. Major problems are collimation of the highly divergent laser beams and cooling of the laser diode bars.     

Manufacturing of Nd:Gd3Ga5O12 ridge waveguide lasers by pulsed laser deposition and ultrafast laser micromachining

Laser radiation is used both for the deposition of the laser active thin films and for the micro structuring to define wave guiding structures for the fabrication of waveguide lasers. Thin films of crystalline and amorphous neodymium doped Gd₃Ga₅O₁₂ are grown on single crystal yttrium aluminium garnet by pulsed laser deposition using excimer laser radiation.Manufacturing of the laser active waveguides by micro structuring is done using femtosecond laser ablation of the deposited films. The structural and optical properties of the films and the morphology of the structured waveguides are determined in view of the design and the fabrication of compact and efficient diode pumped waveguide lasers. The resulting waveguides are polished, provided with resonator mirrors, pumped using diode lasers and the waveguide lasers are characterized. The spectroscopic properties of the amorphous waveguide are investigated and an infrared waveguide laser is demonstrated. To our knowledge, there have been no reports by other groups of the successful operation of a structured waveguide laser fabricated by this technique or of a waveguide laser made from amorphous neodymium doped Gd₃Ga₅O₁₂.     

Continuous wave diode pumped Yb:LLF and Yb:NYF lasers

Experimental and theoretical results of investigation of CW Yb:LiLuF₄ (Yb:LLF) and Yb:Na₄Y₆F₂₂ (Yb:NYF) lasers under longitudinal diode laser pump are reported. Slope efficiencies of 41%, 58% with 0.21, 0.53 W of output powers were obtained for the Yb:LLF and Yb:NYF lasers, correspondingly. The Yb:NYF laser demonstrated tunability in the region from 1005 to 1061 nm. The mathematical modelling of CW laser operation predicts under optimized laser parameters optical to optical efficiencies of about 55% and 51% for Yb:LLF and Yb:NYF lasers, respectively.     

Theoretical prediction on the wavelength-temperature shift in pulsed TE CO2 lasers

The wavelength-temperature shift observed in pulsed TE CO₂ lasers is discussed theoretically by means of Six-temperature model rate equations for tunable TE CO₂ lasers. Numerical calculations of the temperature-wavelength shift in a pulsed TE CO₂ laser with a simple plano-concave stable resonator, whether excited by conventional low-inductance fast-discharge scheme or by a long-pulse Pulser/sustainer discharge scheme, show that the laser output wavelengths are within the 10P branch as the ambient temperature varies from 228 to 338 K, but will change as the ambient temperature varies. The laser output wavelengths will move to the transition lines with longer wavelengths in the 10P branch as the ambient temperature increases and vice versa. The calculated results also illustrate that near the ambient temperature of 310 K, the laser is more likely to operate on multi-transition lines. Considering this wavelength-temperature shift, the chilling device adopted in high-power high repetition rate TE CO₂ lasers is important in maintaining a stable laser output spectra as well as a stable laser output power. The numerical results also suggest that a frequency agile resonator is highly recommended if stable laser output spectra are required in TE CO₂ lasers.     

Diffusion of excited state molecules in FIR- and CO2-lasers

Both standing waves in laser oscillators and spatially inhomogenous cross sections of laser beam and pumprate cause a non-uniform distribution of excited state molecules in longitudinal and transversal direction, respectively. This spatial hole burning however is smoothed by diffusion of the excited molecules. The effect of diffusion is investigated theoretically for an optically pumped far infrared laser as well as the corresponding CO₂ pump laser. It is found, that the remaining spatial hole burning in the direction of wave propagation is negligible within CO₂ lasers but not within FIR lasers. Concerning the transversal direction it can be shown that in the FIR laser diffusion takes no effect, whereas the transversal distribution of the excited molecules in the CO₂ laser is significantly influenced by diffusion.FIR ring lasers avoid longitudinal spatial hole burning, which leads to the common assumption that they use the active medium more efficient than conventional standing wave lasers, hence delivering higher output powers. This expected advantage is levelled out to a great extent by diffusion.     

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO₂ media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO₂ laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO₂ laser employing a whole spectrum of CO₂ technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO₂ laser technology and the requirements for multi-kiloWatt CO₂ laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO₂ lasers.     

A Broadband Infrared Laser Source (2.5–17 μm) for Plasma Diagnostics

This paper presents the results of studies aimed at the creation of a hybrid laser system which is composed of a gas lasers and a nonlinear crystal and appreciably broadens and enriches the radiation spectrum of these lasers. A highly efficient conversion (37%) is attained when generating the second harmonic in a ZnGeP₂ crystal owing to an increase in the peak power of CO laser radiation in the mode locking regime. The two-cascade conversion (generation of both sum and difference frequencies) of radiation of a broadband CO laser in the single sample of such nonlinear crystals as ZnGeP₂ and AgGaSe₂ is demonstrated. In this case, the radiation spectrum is broadened by nearly a factor of two, and the number of detected spectral lines grows by a factor of four. The use of a comparatively simple laser system of gas-discharge CO and CO₂ lasers to conversion in AgGaSe₂ results in laser radiation tunable over a set of narrow spectral lines within a range from 2.5 to 16.6 μm (more than two and a half octaves).     

The thermal effect in diode-end-pumped continuous-wave 914-nm Nd:YVO4 laser

The thermal effect and the heat generation in diode-end-pumped continuous-wave 914-nm Nd:YVO₄ lasers are investigated in detail. A theoretical model of a diode end-pumped solid-state laser is constructed to analyse the influence of fractional thermal loading on the thermal effect in the Nd:YVO₄ laser based on finite element analysis. The thermal focal lengths and the end-surface deformations of laser rods in Nd:YVO₄ quasi-three-level and four-level lasers are measured and compared with the results obtained by ordinary interferometry for the demonstration of higher thermal loading in 914-nm laser. Finally the fractional thermal loading in the Nd:YVO₄ quasi-three-level laser is calculated by matching the experimental and the simulated end deformations.     

The tuning characteristics of optically pumped fir cavity laser

Based on the quantum mechanics theory of density matrix and the principle of multiple-beam interference, the tuning characteristics of optically pumped NH₃ FIR lasers were studied. A series of metallic mesh Fabry-Perot cavity lasers with sample tubes of 10cm, 20cm and 100cm in length were constructed and operated successfully, and the FIR laser spectra of the NH₃ cavity lasers pumped by a TEA-CO₂ laser were measured. Supported by the Natural Sciences Foundation of Guangdong Province, PRC     

Coupled-cavity passively Q-switched two-Stokes microchip laser

Experimental and theoretical studies of the coupled-cavity diode-pumped Nd:YAG/Cr:YAG microchip lasers with intracavity Raman conversion of laser pulses in a Ba(NO₃)₂ crystal into two Stokes pulses have been made. Two lasers with a different cavity length have been investigated. The minimal pulse durations at the 2nd Stokes wavelength were ??100 ps in the short-cavity laser at pulse energy of 5???J, and the pulse repetition rate reached 20?C24?kHz. The laser and Stokes pulse dynamics, as well as the spatial intensity distribution of the laser and the 1st Stokes beams at the output mirror have been recorded. A model describing such coupled-cavity microchip Raman lasers has been developed. The numerically simulated laser and Stokes pulse dynamics, and the calculated pulse energy, duration, and repetition rate are in good agreement with the experimental data.     

Compact Two-Color Pr3+-Doped ZBLAN Fiber Lasers

Two-color laser simultaneous oscillation in compact trivalent praseodymium ion (Pr³⁺)-doped ZrF₄-BaF₂-LaF₃-AlF₃-NaF (ZBLAN) fiber lasers is investigated. Fiber pigtails by coating high-reflective visible dielectric films are utilized as fiber mirrors (FMs) to construct compact all-fiber laser cavity. Reflectance/transmittance of FMs is intentionally designed to balance net gains and reduce gain competition of different lasable wavelengths in the constructed fiber lasers. By using two selected FMs with high reflectivity at green-light and low reflectivity at red-light, simultaneous green and red laser emission in all-fiber Pr³⁺-doped ZBLAN fiber laser is obtained. Moreover, simultaneous orange and red laser emission is also achieved with another selected FM of high reflectivity at orange-light and low reflectivity at red-light. Our work will provide an effective and easy method to construct compact special fiber (e.g.,ZBLAN fiber, chalcogenide fiber) lasers.     

Narrow bandwidth operation of high-power broad-area diode laser using cascaded phase-conjugate injection locking

A broad-area laser is injection-locked by another broad-area laser that is also injection-locked by a single-mode diode laser. Two double-phase conjugate mirrors of photorefractive BaTaO₃ are used to couple the master laser beams to the first slave laser, and the first slave laser output to the second slave laser. One of the double-phase conjugate mirrors is built up with the beams from two broad-area lasers. Two slave lasers are oscillating in single longitudinal mode at 808.5 nm and the spectral width is the same as that of the master laser. Final single-mode output power from the second slave broad-area laser is 840 mW, which is limited by the power of the injection beam. This work verifies the possibility of the multi-stage cascaded injection locking of high-power diode lasers with phase-conjugate injection. Received: 18 November 1998 / Revised version: 29 January 1999 / Published online: 7 April 1999     

Two-photon pumping of random lasers by picosecond and nanosecond lasers

We experimentally demonstrated two-photon pumping of random lasers using picosecond and nanosecond pump lasers. The picosecond laser pumping experiment was performed with 400 ps laser pulses at 770 nm, and the gain media was a Coumarin 480D dye solution doped with TiO₂ nanoparticles. Onset of laser action was observed at a pump laser pulse energy below 500 μJ. The nanosecond laser pumping experiment was performed with 7 ns laser pulses at 1064 nm, and the gain media was a Rhodamine 640 dye solution doped with TiO₂ nanoparticles. Onset of laser action was observed at a pump laser energy ∼18 mJ. Our results suggest that there exists an optimal pulse duration of the pumping laser in two-photon pumped random lasing that leads to minimum photodamage of the gain media and still keeps a high pumping efficiency. PACS 33.50.Dq; 42.55.Mv; 42.55.Zz     

Experimental study of nonlinear mode mixing in dual-wavelength semiconductor lasers

New schemes for the generation of the sum, difference, and double frequencies in dual-wavelength injection lasers, based on an intracavity nonlinear mode mixing owing to a bulk nonlinearity, are experimentally investigated. Namely, the operation of the dual-wavelength laser diodes at the TE₀ and TE₁ modes, butt-joint laser diodes, and interband cascade lasers with tunnel junction are described.     

Thermal-lens measurement in a side-pumped 1.3 μm Nd:YVO4 bounce laser

We investigated thermal-lensing effects in a side-pumped 1.3 μm Nd:YVO₄ slab laser amplifier having a bounce geometry. The thermal-lens power during 1.3 μm laser action was 1.3-times larger than that without laser action. Excited-state absorption is the main cause for increased heat loading during laser operation. The heat-loading formula in end-pumped 1.3 μm vanadate lasers having low Nd doping can be extended to account for heat generation in diode-side-pumped vanadate bounce lasers having high Nd doping.     

Deep etching of epitaxial gallium nitride film by multiwavelength excitation process using F2 and KrF excimer lasers

The deep etching of GaN(0001) thin films epitaxially grown on Al₂O₃(0001) has been investigated by laser ablation using F₂ and KrF excimer lasers. The simultaneous irradiation with F₂ and KrF excimer lasers markedly improves etching quality compared with single-KrF excimer laser ablation and provides almost the same quality as that in the case of single-F₂ laser ablation with a high etching rate. Additionally, the present method achieves the deep etching of a GaN film of more than 5 μm in depth with steep side walls at an angle of 87° by changing the laser incidence angle. PACS 52.38.Mf; 61.82.Fk; 81.65.Cf     

气体激光器中的类透镜效应分析

本文讨论了类负透镜介质一般曲面镜光学谐振腔,并用来分析气体激光器中的热透镜效应。对平凹腔连续波二氧化碳激光器进行了模式分析。结果表明,热透镜效应对输出功率和频率特性影响相当大,对基模输出激光器的影响最为突出。最后,简单地讨论了离子气体激光器和某些其它激光器中的可能热透镜效应。     

On the tunable infrared gas lasers

The high-pressure (≈ 10 atm) electrically excited molecular gas lasers with full overlapping of the rotational lines caused by high-pressure broadening are considered as a possible new type of the powerful infrared lasers with tunable frequency. For CO₂ - laser the overlapping occurs at pressures 10 ≈ 15 atm. It is experimentally shown that the transverse-excitation multiple-arc technique allows laser action at gas pressures up to 1.8 atm for CO₂ and ≈ 0.9 atm for HF-lasers.     

Study of dielectric corona pre-ionization in hybrid TEA lasers

In this paper a theoretical analysis of single mode hybrid CO₂ lasers is studied that to describe the process of the dynamic emission in this lasers types and based on the Landau – Teller six-temperature model for the CO₂-N₂-He-CO system. The main discharge region is considered as a time dependent nonlinear RLC circuit. The electric circuit equations (including the ionization rate equations), the equations of laser (including stored energy density in CO₂ modes) and equations of laser intensities are coupled and solved numerically. Then the effects of the ionizer dielectric parameters on the output laser intensity are obtained. Application of this model gives more output energy than that have obtained by the previous works.     

Design considerations and scaling laws for high power convective cooled CW CO2 lasers

Various criteria for designing high power convective cooled CO₂ lasers have been discussed. Considering the saturation intensity, optical damage threshold of the optical resonator components and the small-signal gain, the scaling laws for designing high power CW CO₂ lasers have been established. In transverse flow CO₂ lasers having discharge of square cross-section, the discharge lengthL and its widthW for a specific laser powerP (Watt) and gas flow velocityV (cm/s) can be given byL = 1.4 x 10⁴ p ^1/2 V ^-1 cms andW = 0.04P ^1/2 cms. The optimum transmitivity of the output coupler is found to be almost constant (about 60%), independent of the small signal gain and laser power. In fast axial flow CO₂ lasers the gas flow should be divided into several discharge tubes to maintain the flow velocity within sonic limit. The discharge length in this type of laser does not depend explicitly on the laser power, instead it depends on the input power density in the discharge and the gas flow velocity. Various considerations for ensuring better laser beam quality are also discussed.