象限探测器非均匀性的影响分析及软校正算法

定量分析了四象限探测器用于目标跟踪时,其光电响应不均匀性对输出特性线性度及跟踪定位准确度的影响,给出了不均匀性校正的下限.提出了一种综合补偿光分布、探测器暗电流、通道增益的多元软校正方法.该方法将非线性误差控制在5%,跟踪定位准确度2%.与补偿增益的硬件校正和不消除暗电流的软校正方法相比,非线性误差减小2%,定位准确度提高了近3%.     

合成孔径激光成像雷达中非线性啁啾补偿算法的误差分析

可调谐激光器产生的非线性啁啾相位误差会降低合成孔径激光成像雷达(SAIL)的距离向分辨率。已有的补偿算法中使用的相移公式存在估算误差,外差脉冲补偿方法也存在补偿误差。由理论推导得到适合于实际有限数据的相移公式,对理想相移公式产生估算误差的物理原因进行了分析。建立了条带扫描模式下星载SAIL的计算机仿真模型,并对两个相移公式的估算误差、整体补偿和逐一扫描滤波补偿两种方法的补偿误差进行了模拟。仿真结果验证了理论推导结论。最后,给出了减少SAIL非线性啁啾补偿算法中估算误差和补偿误差的方法。     

几种任意步距步进相移算法的误差分析与对比

介绍了到目前为止的几种任意步距步进相移算法,并针对相移干涉仪的两种主要误差———移相误差和探测器非线性误差进行了计算仿真,进而比较分析了它们对这这些误差的抑制能力,其结果可为实际应用合理地选择算法提供理论依据。     

基于扩展平均的多步相移算法及误差抑制特性比较

为满足移相干涉测量中纳米甚至亚纳米高准确度检测要求,需采用对误差敏感度更低的相移算法.基于扩展平均技术,在传统4步和3步算法的基础上分别推导了A类和B类5~13步相移算法公式,以5、6、7和13步算法为例,通过仿真及数值计算,比较了两类算法对相移器移相误差及CCD非线性误差的抑制特性.结果表明:同类算法下,步数越多的算法,对这两项误差的抑制效果越好,但达到一定步数后对测量的影响可以忽略;B类算法具有增强的移相误差抑制能力,在相移不准情况下可优先选用B类算法;A类算法对CCD非线性误差几乎完全免疫,而B类算法受一定CCD非线性误差影响,但对大多数高准确度CCD来说,其在常规检测中的影响可以忽略;由相移噪音引入的随机性测量误差的极大值要略大于相移噪音本身,且不同算法对相移噪音的抑制效果差别不大,因此相移噪音对测量的影响不可忽略.文中给出了不同误差影响下各算法引入波面检测误差的比较数据,研究结果可为实际干涉测量中最适相移算法的使用和选用提供理论指导及数据参考.     

基于概率密度函数的彩色相位测量轮廓术校正

在彩色相位测量轮廓术中,光电器件多个光通道之间的颜色串扰、强度响应不均等因素的影响,使得所获取的相移条纹图像失真,因此采用传统的相位技术求解相位会产生极大的相位误差。从彩色条纹图像的数学模型出发,分析了彩色成像器件所获取的红绿蓝三通道条纹图像特性,提出一种两步校正方法：第一步是基于三通道均值及标准差实现对各颜色通道图像强度的归一化处理;第二步是使用概率密度函数曲线搜索失真后的实际相移量,抑制相移量不准确对测量结果的影响。所提方法不需要对系统的耦合系数和相移偏移量进行预校正,可实现简便、快速的相位误差补偿。模拟及实验结果验证了该方法的有效性。     

相位测量轮廓术(PMP)中光场非线性误差分析

在相位测量轮廓术( PMP)中,探测器的非线性响应是导致测量误差的重要因素.对该误差进行了理论分析和计算机模拟,比较了几种相移算法对这一误差的抑制能力,模拟结果与理论分析的结果一致.提出一种存在非线性误差时光强函数的几何描述方法,采用帕斯卡蜗线描述二阶非线性光强函数,这是一种用角度射线与帕斯卡蜗线交点在横轴上的投影长来表示相对光强的几何模型,形象地表示了探测光强与光栅移动角度的关系,以及非线性误差存在和不存在时的光强变化.同样,文中采用准卡西尼卵形线蜗线描述三阶非线性光强函数,用同样的方法形象地表示了在存在三阶非线性时探测光强与光栅移动角度的关系,以及非线性误差存在和不存在时的光强变化,可为实际应用中合理地选择算法和直观的评估非线性导致的光强变化提供帮助.     

用待定系数法设计误差补偿相移算法

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法,该方法首先在算法表达式中引入一系列待定参数,根据对误差补偿的要求提供约束方程,从而解出这些未知参数.待定系数法使得算法设计和误差分析是同时进行的,改变了以往先设计算法再进行误差分析和评价的过程,由待定系数法导出的相移算法对算法设计中所考虑的误差源具有良好的补偿性能.     

任意相移阴影叠栅相位解调技术的研究

结合时域和频域干涉图分析方法,提出一种任意相移阴影叠栅条纹图相位解调技术,降低了干涉图在采样过程中对相移量的严格标定要求,补偿了相移阴影叠栅技术固有的相移不匀误差。使用空域技术确定采样干涉图的正交信号,进而得到了采样干涉图的相移量,然后运用任意相移相位提取算法搜索测量相位信息。实验证明此方法简单方便、求解迅速,且优于典型的相移算法,其测量误差的标准差不超过3×10-3 mm,该方法为提高相移阴影叠栅技术的测量精度提供了有效手段。     

提高多频条纹投影相位提取精度的反向误差补偿法

为了减小光栅投影三维测量系统中数字投影仪的非线性响应引起的相位误差,提出了一种提高物体相位测量精度和速度的多频条纹反向相位误差补偿方法。该方法通过投影与最高频率相同且具有特定相移量的补偿相移条纹图,获取相位误差大小相等,符号相反的两幅主值相位图,二者运算后误差得以抵消,与多频法相结合从而得到精确的绝对相位值。采用标准平面对提出的方法进行实验验证,并与最近提出的希尔伯特变换补偿方法以及典型相位补偿方法进行比较。实验结果表明,所提方法能有效提高相位测量的精度和速度。通过对自由曲面以及表面不连续物体进行相位误差补偿,进一步验证了该方法的可行性和有效性。     

相移阴影莫尔基于迭代LSM拟合

相移阴影莫尔技术相位高度存在着非线性关系,无法在全场获得均匀相移,因而致使经典的相移算法不能得到精确解.对此,提出了一种基于最小方差迭代的相移阴影莫尔技术,该技术通过垂直光栅面等间距移动光栅来产生相移,但光栅移动距离可不采用固定值,所以相移过程灵活|使用在高度解调过程中确定的逐点相移增量来抽取精确的测量相位,实现了相移阴影莫尔技术中固有的相位高度非线性误差补偿.结果表明,该方法可通过干涉图计算光栅的移动量,具有相移器的自标定特性.     

Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer

The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm.     

消除移相干涉测量中线性移相误差的五帧算法

在移相干涉测量中存在着移相器的移相误差,这对测量结果的精度有很大的影响。提出了消除移相器线性误差的五帧算法,使用该算法对五帧干涉图像进行处理。使用MATLAB软件针对移相干涉测量过程进行了模拟仿真。仿真结果表明,该算法在相位提取过程中可以消除移相器的线性误差因子,并对于常见的高斯噪声影响不敏感,从而提高了表面形貌测量精度。     

The fluctuating phase error analysis in the digital grating phase-shifting profilometry

The nonlinear response of the experimental system and the saturation of fringe patterns can induce the fluctuating phase error in the projection grating phase-shifting profilometry. Two major factors of the fluctuating phase error are discussed by simulation. The fluctuating phase error caused by the nonlinear response of the system is four times the frequency of the fringe pattern when the conventional four-frame phase extracting algorithm is used. However, such error can be decreased by five-frame algorithm. On the other hand, the fluctuating phase error caused by the fringe saturation is five times the frequency of the fringe pattern by using conventional five-frame phase extracting algorithm. A novel phase recovering algorithm is used to decrease the phase error caused by the saturation. Furthermore, the applicability range of the proposed phase recovering algorithm is analyzed by simulation and experiments with different saturation degree of the fringe pattern and nonlinearity of the measurement system.     

移相干涉术的一种新算法：重叠四步平均法

提出了一种能大大地减小由于移相器的位移误差而引起相位复原误差的新方法，即重叠四步平均法（Ｏｖｅｒｌａｐｐｉｎｇ Ａｖｅｒａｇｉｎｇ ４－Ｆｒａｍｅ （ＯＡＦ） Ａｌｇｏｒｉｔｈｍ）。给出了这种方法的盯们复原精度与移相器的位移误差之间的关系式，从关系式中可见，ＯＡＦ算法大大地减小由于移相器的位移误差而引起相位复原误差，通过计算机模拟，得到了各种算法的相位复原精度与移相器的位移误差之间的关系曲线，分析     

Multi-step phase-shifting algorithms insensitive to linear phase shift errors

We describe and analyse a group of multi-step phase calculation algorithms for evaluation of interferometric measurements using the phase-shifting technique. Phase-shifting algorithms are proposed, with a constant but arbitrary phase shift between captured frames of the irradiance of the interference field. The algorithms are similarly derived as so called Carré algorithm. The phase evaluation process is not dependent on linear phase shift errors. An advantage of the described algorithms is their ability to determine the phase shift value at every point of the detector plane. Moreover, a complex error analysis of proposed algorithms is performed and the algorithms are compared to several common error compensating phase stepping algorithms.     

Error-Compensating Phase Measuring Algorithms in a Fizeau Inter ferometer

In phase-shifting Fizeau interferometers, nonlinear motion of the phase shifter and multiple-beam interference are the most common sources of systematic errors affecting high-precision phase measurement. A new class of algorithms with extended compensating capability for these errors is proposed. Measurement errors for the new algorithms and two groups of conventional algorithms: discrete Fourier algorithms and the Schwider-Larkin-Hibino algorithms are estimated as a function of the number of sampled images when these systematic error sources are equally dominant. It is shown that the conventional phase-measuring algorithms produce significant errors when the reflectivity of the testing surface exceeds ten percent. Also, these algorithms have an optimum number of samples at around seven with which the residual errors become minimum. The new class of algorithms shows a substantial reduction of the residual errors when the number of samples exceeds ten. There is no optimum number of samples for the new algorithms. For fewer than six samples, discrete Fourier algorithms which have no error-compensating capability for the nonlinearity of phase modulation give a minimum error.     

Uncertainty analysis of temporal phase-stepping algorithms for interferometry

We have addressed the problem of the uncertainty evaluation of phase values rendered by two popular algorithms: the N-bucket and the (N + 1)-bucket, both used to exploit temporal phase-stepping techniques. These algorithms, are mainly affected by errors in the calibration of the piezoelectric transducers used to achieve the phase shift, external vibration and optical noise. We have characterized and compared the influences of these errors on the phase uncertainty. We applied a Monte Carlo-based technique of uncertainty propagation that allowed us to consider in the uncertainty evaluation the simultaneous contributions of different error sources. The uncertainty evaluation was performed for phase values in the range (0, 2π), with different values of N and assuming that the phase was calculated from fringe patterns generated by using either Moiré interferometry or electronic speckle-pattern interferometry. We found that the uncertainties associated with the phases rendered by both algorithms are similar and they can be significantly affected by the optical noise and the value of N.     

高灵敏度表面光学非线性测量法

提出了一种测量非透明材料表面光学非线性的新方法:挡板反射4F测量法。该方法在反射4F相位相干成像系统的基础上,在4F系统的像平面放置一个与系统入射面光阑相匹配的不透明挡板,通过测量不同情况下的反射率,实现对材料光学非线性的测量。详细介绍了该方法的基本原理,并通过数值模拟计算了入射角对测量灵敏度的影响。该方法具有单脉冲测量,可同时得到材料的非线性吸收与折射系数等特点。结果表明,在相同条件下挡板反射4F测量法的灵敏度比反射Z扫描方法高2个数量级。