Growth and optical characterization of dense arrays of site-controlled quantum dots grown in inverted pyramids

We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on {1 1 1}B GaAs substrate pre-patterned using electron beam lithography and wet chemical etching. The growth conditions such as deoxidation and growth temperatures, growth rates, and V/III ratio, had to be chosen quite differently from those employed with micron-size pyramids. Low-temperature micro-photoluminescence and cathodoluminescence spectra of the samples show distinct luminescence from the QDs with a linewidth of less than 1 meV and uniform emission energy for an ensemble of 900 QDs. The possibility of incorporating such QD arrays inside optical microcavity structures is also discussed.     

Spontaneous one-dimensional lateral alignment of multistacked InGaAs quantum dots on GaAs (n 1 1)B substrates

In_0.45Ga_0.55As/GaAs multistacking quantum dot (QD) structures were fabricated on a GaAs (n 1 1)B (n=2–4) substrate by metalorganic vapor-phase epitaxy. QDs spontaneously aligned in the [0 1 1] direction were observed on stacked QDs, whereas QDs were randomly distributed in the initial In_0.45Ga_0.55As layer growth. The formation mechanism of this self-alignment was studied by changing the number of In_0.45Ga_0.55As/GaAs multilayers and crystallographic arrangement. Photoluminescence spectra showing clear polarization dependence indicate carrier coupling in the QD arrays. This growth technique results in spontaneously aligned InGaAs QDs without any preprocessing technique prior to growth.     

Emission and strain in InGaAs/GaAs quantum wells with InAs quantum dots obtained at different temperatures

The photoluminescence (PL), its temperature dependence and X ray diffraction (XRD) have been studied in the symmetric In_0.15Ga_0.85As/GaAs quantum wells (QWs) with embedded InAs quantum dots (QDs), obtained with the variation of QD growth temperatures (470–535 °C). The increase of QD growth temperatures is accompanied by the enlargement of QD lateral sizes (from 12 up to 28 nm) and by the shift non monotonously of PL peak positions. The fitting procedure has been applied for the analysis of the temperature dependence of PL peaks. The obtained fitting parameters testify that in studied QD structures the process of In/Ga interdiffusion between QDs and capping/buffer layers takes place partially. However this process cannot explain the difference in PL peak positions.     

Micro-photoluminescence spectroscopy of hierarchically self-assembled quantum dots

Novel, self-assembled quantum dot (QD) structures suitable for single-dot optical spectroscopy are fabricated by combining III–V molecular beam epitaxy and in situ, atomic layer precise etching. Several growth and etching steps are used to produce lateral InAs/GaAs QD bimolecules and unstrained GaAs/AlGaAs QDs with low surface density . Micro-photoluminescence is used to investigate the ensemble and single-QD properties of GaAs QDs. Single-QD spectra show resolution-limited sharp lines at low excitation and broad “shell-structures” at high excitation intensity.     

Optical and structural characterization of a self-aligned single electron transitor structure by cathodoluminescence microscopy

We report about optical and structural investigations of a self-aligned single electron transistor (SET) structure using cathodoluminescence-(CL) and transmission electron microscopy (TEM). The SET structures were fabricated by MBE growth of GaAs/AlAs on different prepatterned GaAs (1 0 0) substrates. This technique for the in situ formation of nanoscopic semiconductor heterostructures is presently a widely used and promising approach for the fabrication of low-dimensional systems like quantum wires and quantum dots (QD). The active region of the SET structure consists of a GaAs/AlGaAs-QD formed by thickness modulation of a single quantum well (SQW) during the MBE growth. The position and the size of the QD is defined by the design of the substrate pattern. The thickness modulation of the GaAs-SQW is evidenced by TEM investigations. The lateral confinement potential given by the thickness modulation of GaAs-SQW is directly imaged by CL microscopy.     

Reasons of emission inhomogeneity in InAs quantum dot structures

The photoluminescence (PL) inhomogeneity has been studied in InAs quantum dots (QDs) embedded in the symmetric In_0.15Ga_0.85As/GaAs quantum wells (QWs) with QDs grown at different temperatures. It was shown that three reasons are responsible for the emission inhomogeneity in studied QD structures: (i) the high concentration of nonradiative recombination centers in the capping In_0.15Ga_0.85As layer at low QD growth temperatures, (ii) the QD density and size distributions for the structure with QD grown at 510 ^°C, (iii) the high concentration of nonradiative recombination centers in the GaAs barrier at higher QD growth temperatures.     

Self-assembled GaAs/AlGaAs quantum dots by molecular beam epitaxy and in situ AsBr3 etching

We report on a new method to produce self-assembled, unstrained, GaAs/AlGaAs quantum dots (QDs) with large confinement energy. First we create nanoholes on a GaAs surface by growing InAs islands on GaAs(0 0 1), overgrowing them with GaAs and etching the surface in situ with AsBr₃ gas. Then we transfer the holes to an AlGaAs surface, fill them with GaAs and overgrow them with AlGaAs. In this way we obtain GaAs inclusions in an AlGaAs matrix. We investigate the optical properties of such QDs by photoluminescence spectroscopy and their morphology by atomic force microscopy. We show that the QD size can be tuned and emission with inhomogeneous broadening down to 8.9 meV can be achieved.     

半导体自组织量子点量子发光机理与器件

介绍了自组织量子点单光子发光机理及器件研究进展.主要内容包括：半导体液滴自催化外延GaAs纳米线中InAs量子点和GaAs量子点的单光子发光效应、自组织InAs/GaAs量子点与分布布拉格平面微腔耦合结构的单光子发光效应和器件制备,单量子点发光的共振荧光测量方法、量子点单光子参量下转换实现的纠缠光子发射、单光子的量子存储效应以及量子点单光子发光的光纤耦合输出芯片制备等.     

InAs/AlAs quantum dots with InGaAs insertion layer: dependence of the indium composition and the thickness

We have systematically studied the effect of an In_xGa_1−xAs insertion layer (IL) on the optical and structural properties of InAs quantum dot (QD) structures. A high density of 9.6×10¹⁰ cm⁻² of InAs QDs with an In_0.3Ga_0.7As IL has been achieved on a GaAs (1 0 0) substrate by metal organic chemical vapor deposition. A photoluminescence line width of 25 meV from these QDs has been obtained. We attribute the high density and high uniformity of these QDs to the use of the IL. Our results show that the InGaAs IL is useful for obtaining high-quality InAs QD structures for devices with a 1.3 μm operation.     

One-dimensional single (In,Ga)As quantum dot arrays formed by self-organized anisotropic strain engineering

Well-defined one-dimensional single (In,Ga)As quantum dot (QD) arrays have been successfully formed on planar singular GaAs (1 0 0) in molecular beam epitaxy by self-organized anisotropic strain engineering of an (In,Ga)As/GaAs quantum wire (QWR) superlattice (SL) template. The distinct stages of template formation, which govern the uniformity of the QD arrays, are directly imaged by atomic force microscopy (AFM). The AFM results reveal that excess strain accumulation causes fluctuations of the QWR template and the QD arrays. By reducing the amount of (In,Ga)As and increasing the GaAs separation layer thickness in each SL period, the uniformity of the QD arrays dramatically improves. The single QD arrays are straight over more than 1 μm and extended to 10 μm length. Capped QD arrays show clear photoluminescence emission up to room temperature.     

Formation of InAs quantum dots and wetting layers in GaAs and AlAs analyzed by cross-sectional scanning tunneling microscopy

We have used cross-sectional scanning-tunneling microscopy (X-STM) to compare the formation of self-assembled InAs quantum dots (QDs) and wetting layers on AlAs (1 0 0) and GaAs (1 0 0) surfaces. On AlAs we find a larger QD density and smaller QD size than for QDs grown on GaAs under the same growth conditions (500 °C substrate temperature and 1.9 ML indium deposition). The QDs grown on GaAs show both a normal and a lateral gradient in the indium distribution whereas the QDs grown on AlAs show only a normal gradient. The wetting layers on GaAs and AlAs do not show significant differences in their composition profiles. We suggest that the segregation of the wetting layer is mainly strain-driven, whereas the formation of the QDs is also determined by growth kinetics. We have determined the indium composition of the QDs by fitting it to the measured outward relaxation and lattice constant profile of the cleaved surface using a three-dimensional finite element calculation based on elasticity theory.     

Temperature dependent growth of InGaN/GaN single quantum well

InGaN/GaN single quantum well (SQW) structures under various InGaN growth temperatures have been grown by metal organic chemical vapor deposition (MOCVD), the surface morphologies and optical properties are investigated. The radius of the typical V-pits on the SQW surface is affected by the InGaN well-temperature, and the surface roughness decreased as the well-temperature reduced. Room-temperature photoluminescence (PL) and cathode luminescence (CL) shows the quantum well and quantum dot (QD)-like localized state light emission of the SQWs grown at 700 and 690 °C, respectively, whereas the samples grown at 670 and 650 °C present hybrid emission peaks. Excitation power dependent PL spectra indicates the QD-like localized state emission dominates at low excitation power and the quantum well emission starts to take over at high excitation power.     

Tuning of long-wavelength emission in InxGa1−xAs quantum dot structures

This work explores the conditions to obtain the extension of the PL emission beyond 1.3 μm in InGaAs quantum dot (QD) structures growth by MOCVD. We found that, by controlling the In incorporation in the barrier embedding the QDs, the wavelength emission can be continuously tuned from 1.25 μm up to 1.4 μm at room temperature. However, the increase in the overall strain of the structures limits the possibility to increase the maximum gain in the QD active device, where an optical density as high as possible is required. By exploring the kinetics of QD surface reconstruction during the GaAs overgrowth, we are able to obtain, for the first time, emission beyond 1.3 μm from InGaAs QDs grown on GaAs matrix. The wavelength is tuned from 1.26 μm up to 1.33 μm and significant improvements in terms of line shape narrowing and room temperature efficiency are obtained. The temperature-dependent quenching of the emission efficiency is reduced down to a factor of 3, the best value ever reported for QD structures emitting at 1.3 μm.     

Control of unpolarized emission in closely stacked InAs quantum dot structure

In this work, we studied the effect of some growth parameters on the polarization behavior of InAs/GaAs closely stacked quantum dot (CSQDs). In particular, we focused on the surface reconstruction time of GaAs spacer, its thickness and the number of QD layers. We found that the most effective parameter to enhance the TM/TE intensity ratio is the surface reconstruction time of the GaAs spacer before the subsequent QD deposition. By varying this parameter between 20 s and 120 s, a TM/TE ratio as high as 0.86 has been achieved. A further fine tuning of GaAs spacer thickness and QD layer number increased this ratio up to a value of 0.92 in structures containing only 3 QD layers.     

Formation of nanoscale heterointerfaces by selective area metalorganic vapor-phase epitaxy and their applications

We describe fabrication methods of GaAs and InAs quantum dot (QD) structures and related semiconductor nanostructures having nanoscale heterointerfaces grown by the selective area metalorganic vapor-phase epitaxial (SA-MOVPE) method on partially masked GaAs substrates. GaAs QD arrays and wire–dot coupled structures having strong lateral confinement were fabricated on appropriately designed masked substrates. InAs QDs were also formed on various kinds of GaAs pyramidal and wire structures, where site-selective formation is demonstrated by the combination of self-assembling growth mode and selective area growth. The application of QDs to single-electron transistors using SA-MOVPE is also described.     

Sb/As intermixing in self-assembled GaSb/GaAs type II quantum dot systems and control of their photoluminescence spectra

The intermixing of Sb and As atoms induced by rapid thermal annealing (RTA) was investigated for type II GaSb/GaAs self-assembled quantum dots (QD) formed by molecular beam epitaxy growth. Just as in InAs/GaAs QD systems, the intermixing induces a remarkable blueshift of the photoluminescence (PL) peak of QDs and reduces the inhomogeneous broadening of PL peaks for both QD ensemble and wetting layer (WL) as consequences of the weakening of quantum confinement. Contrary to InAs/GaAs QDs systems, however, the intermixing has led to a pronounced exponential increase in PL intensity for GaSb QDs with annealing temperature up to 875 °C. By analyzing the temperature dependence of PL for QDs annealed at 700, 750 and 800 °C, activation energies of PL quenching from QDs at high temperatures are 176.4, 146 and 73.9 meV. The decrease of QD activation energy with annealing temperatures indicates the reduction of hole localization energy in type II QDs due to the Sb/As intermixing. The activation energy for the WL PL was found to drastically decrease when annealed at 800 °C where the QD PL intensity surpassed WL.     

Bevel fabrication for depth resolved studies of multiple quantum well structures

Beveled cross-sections of semiconductors with inclination angles down to 0.25 min of arc have been produced with a special ion beam etching process. We applied this technique to the depth resolved characterization of GaAs/GaAlAs multiple quantum well structures by photoluminescence spectroscopy. The depth dependent incorporation of impurities during the growth of the first quantum well layers is clearly revealed.     

Optical characterization of individual quantum dots

Optical characterization of single quantum dots (QDs) by means of micro-photoluminescence (μPL) will be reviewed. Both QDs formed in the Stranski–Krastanov mode as well as dots in the apex of pyramidal structures will be presented. For InGaAs/GaAs dots, several excitonic features with different charge states will be demonstrated. By varying the magnitude of an external electric or magnetic field and/or the temperature, it has been demonstrated that the transportation of carriers is affected and accordingly the charge state of a single QD can be tuned. In addition, we have shown that the charge state of the QD can be controlled also by pure optical means, i.e. by altering the photo excitation conditions. Based on the experience of the developed InAs/GaAs QD system, similar methods have been applied on the InGaN/GaN QD system.     

Formation of three‐dimensional GaAs microstructures by combination of wet and metal‐assisted chemical etching

Previously, plasma‐enhanced dry etching has been used to generate three‐dimensional GaAs semiconductor structures, however, dry etching induces surface damages that degrade optical properties. Here, we demonstrate the fabrication method forming various types of GaAs microstructures through the combination etching process using the wet‐chemical solution. In this method, a gold (Au)‐pattern is employed as an etching mask to facilitate not only the typical wet etching but also the metal‐assisted chemical etching (MacEtch). High‐aspect‐ratio, tapered GaAs micropillars are produced by using [HF]:[H₂O₂]:[EtOH] as an etching solution, and their taper angle can be tuned by changing the molar ratio of the etching solution. In addition, GaAs microholes are formed when UV light is illuminated during the etching process. Since the wet etching process is free of the surface damage compared to the dry etching process, the GaAs microstructures demonstrated to be well formed here are promising for the applications of III–V optoelectronic devices such as solar cells, laser diodes, and photonic crystal devices. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

InAs quantum dot field effect transistors

We have studied single electron and hole storage in self-assembled InAs quantum dots (QDs) embedded in GaAs/n-AlGaAs field effect transistors (QD-FETs). We prepared two types of QD-FETs. A single electron and a photo-generated single hole can be stored in each QD in Type 1. In the new Type II, single-electron discharge processes can be controlled by a surface gate voltage (V_g) as well as single-electron storage processes. We demonstrate possible application to novel photo devices and quantum dot memory devices.