Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.     

A novel laser transfer process for direct writing of electronic and sensor materials

MAPLE direct write (MAPLE DW) is a new laser-based direct-write technique which combines the basic approach employed in laser-induced forward transfer (LIFT) with the unique advantages of matrix-assisted pulsed-laser evaporation (MAPLE). MAPLE DW utilizes an optically transparent substrate coated on one side with a matrix consisting of the material to be transferred mixed with a polymer or organic binder. As in LIFT, the laser is focused through the transparent substrate onto the matrix. When a laser pulse strikes the matrix, the binder decomposes and aids the transfer of the material of interest to an acceptor substrate placed parallel to the matrix surface. MAPLE DW is a maskless deposition process which operates in air and at room temperature. Powders of Ag, BaTiO₃, SrTiO₃, and Y₃Fe₅O₁₂ with average diameters of 1 7m were transferred onto the surfaces of alumina, glass, silicon, and printed circuit board substrates. Parallel-plate and interdigitated capacitors and flat inductors were produced by MAPLE DW over Rogers RO4003 substrates. MAPLE DW was also used to transfer polymer composites for the fabrication of gas sensor chemoresistors. One such composite chemoresistor fabricated with polyepichlorohydrin/graphite was used to detect organic vapors with a sensitivity of parts per million.     

Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

基于PDMS基片的可变焦柱透镜

设计并制作了一种基于聚二甲基硅氧烷（Polydimethylsiloxane,PDMS）基片的可变焦微型柱透镜。这种柱透镜主要由一根埋入PDMS基片中的玻璃毛细管构成,通过选择毛细管内液体的折射率实现变焦功能。液体折射率为1.451 8～1.550 2时,柱透镜焦距可由21.369 mm减小到3.362 mm,变焦倍数达到6.4倍。用散射光成像方法观察并拍摄了平行光通过这种可变焦柱透镜后的光线轨迹图;用ZEMAX光学设计软件摸拟了成像过程,模拟结果和实验图像相符;用高斯光学的逐次成像方法推导出了这种柱透镜的焦距公式,焦距的计算结果和实验以及模拟结果吻合。PDMS基片中可变焦微型柱透镜的成功制作,为＂芯片上的实验室＂提供了一种重要的光学成像元件。     

Fabrication of optical devices in poly(dimethylsiloxane) by proton microbeam

Optical diffraction grating and micro Fresnel zone plate type structures were fabricated in relatively thin poly(dimethylsiloxane) (PDMS) layers using proton beam writing technique and the performance of these optical devices was tested. PDMS is a commonly used silicon-based organic polymer, optically clear, generally considered to be inert, non-toxic and biocompatible. PDMS has been used as a resist material for direct-write techniques only in very few cases. In this work, PDMS was used as a resist material; the structures were irradiated directly into the polymer. We were looking for a biocompatible, micropatternable polymer in which the chemical structure changes significantly due to proton beam exposure making the polymer capable of proton beam writing. We demonstrated that the change in the structure of the polymer is so significant that there is no need to perform any development processes. The proton irradiation causes refractive index change in the polymer, so diffraction gratings and other optical devices like Fresnel zone plates can be fabricated in this way. The observed high order diffraction patterns prove the high quality of the created optical devices.     

基于太赫兹超材料的微流体折射率传感器

太赫兹生物医学是目前光谱研究领域的热点,其主要难点在于如何有效避免水分的干扰,进行液相环境下样本的灵敏分析与检测。超材料太赫兹传感器由于具有高灵敏、快速检测、痕量分析等优势,而成为太赫兹生物医学传感领域的重要研究方法。设计加工了一种基于单开口谐振环超材料的太赫兹液相传感芯片,为了有效克服水对太赫兹波的强烈吸收,利用微纳加工技术刻蚀深度为50 μm的流体通道。传感芯片整合了超材料基底与PDMS流道,在THz频段有两个位于0.771和2.129 THz的谐振峰。以水、无水乙醇作为常见化学溶剂进行传感实验,相对于空白传感器本身的THz时域谱而言,液体的加入导致时域峰的相位延迟和幅度减小。同时,由于水的折射率大于乙醇,THz透射频谱结果显示为水的频移改变量大于乙醇,且峰2大于等于峰1。上述结果表明,构建的超材料液相传感芯片是一个灵敏的折射率传感器,也证明了该传感器在测量液态样品方面的可行性。此外,利用该芯片研究了不同浓度的PBS溶液,发现水溶液中加入离子会导致谐振频率红移（以水为参考）,随着离子浓度增加,谐振频率改变量依次增加,10X PBS红移量最大,峰1为22.9 GHz,峰2为30.5 GHz。比较两个谐振峰的传感性能,峰2的传感能力更好,但是峰1对低浓度的离子溶液更加敏感。因此,构建的微流体传感器及检测体系作为一个灵敏的折射率传感器,可开发一个灵敏的无标记THz传感平台,为太赫兹生物医学研究提供新思路。     

Laser-induced forward transfer of single-walled carbon nanotubes

The objective of this work is the application of laser-induced forward transfer (LIFT) for the fabrication of chemiresistor sensors. The receiver substrate is an array with metal electrodes and the active materials placed by LIFT are single-walled carbon nanotubes (SWCNT). The functionality of such sensors depends on the geometry of the active material onto the metallic electrodes. First the best geometry for the sensing materials and electrodes was determined, including the optimization of the process parameters for printing uniform pixels of SWCNT onto the sensor electrodes. The sensors were characterized in terms of their sensing characteristics, i.e., upon exposure to ammonia, proving the feasibility of LIFT.     

The effect of melting-induced volumetric expansion on initiation of laser-induced forward transfer

A numerical model was developed to investigate thermal processes that initiate laser-induced forward transfer (LIFT). The model included laser absorption, conduction, melting, and volumetric expansion in a thin film. The model was used to investigate the role of volumetric expansion associated with the melting process and was used to help explain surface deformations observed in previous studies of LIFT. The results of the model indicated that volumetric expansion initiated fluid motion that was directed away from the substrate, and the fluid motion was sufficient to induce surface deformations that remained after solidification. The resulting textured surface was similar to that observed experimentally below the droplet expulsion threshold. The fluid motion away from the substrate may explain the mechanism by which droplet formation occurs.     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

Study of the laser-induced forward transfer of liquids for laser bioprinting

Laser-induced forward transfer (LIFT) is a direct-writing technique that allows printing patterns of diverse materials with a high degree of spatial resolution. In conventional LIFT a small fraction of a solid thin film is vaporized by means of a laser pulse focused on the film through its transparent holder, and the resulting material recondenses on the receptor substrate. It has been recently shown that LIFT can also be used to transfer materials from liquid films. This widened its field of application to biosensors manufacturing, where small amounts of biomolecules-containing solutions have to be deposited with high precision on the sensing elements. However, there is still little knowledge on the physical processes and parameters determining the characteristics of the transfers.In this work, different parameters and their effects upon the transferred material were studied. It was found that the deposited material corresponds to liquid droplets which volume depends linearly on the laser pulse energy, and that a minimum threshold energy has to be overcome for transfer to occur. The liquid film thickness was varied and droplets as small as 10 μm in diameter were obtained. Finally, the effects of the variation of the film to substrate distance were also studied and it was found that there exists a wide range of distances where the morphology of the transferred droplets is independent of this parameter, what provides LIFT with a high degree of flexibility.     

Development of an ultraviolet imprinting process for integrating a microlens array onto an image sensor

We analyzed the feasibility of using a UV imprinting process to integrate a microlens array onto an image sensor. A simulated wafer-scale image sensor chip array was fabricated for the implementation. A microlens array with a side length of 4.63 microm, a sag height of 1.416 microm, and a residual-layer thickness of 1.15 microm was integrated onto the simulated image sensor. The standard deviations of the sag height and the residual-layer thickness were less than 0.038 microm and less than 0.164 microm, respectively, in whole-wafer-scale samples. The measured beam spot size (FWHM) at the imaging plane was 1.19 microm, with a uniform intensity distribution and pitch in the array.     

产生量子点的一种新方法(英文)

我们提出并试验了一种制备量子点阵的新方法。利用二步法制备的阳极氧化铝上规则排列纳米洞为模板,以紫外脉冲激光(2 48nm)溅射方法将氧化物经过带纳米洞的模板溅射到单晶Si的衬底上。以荧光材料La0 .95Eu0 .0 5BaB9O16 为靶材,初步获得了Si衬底上荧光材料的点阵。     

Liquids microprinting through laser-induced forward transfer

Laser-induced forward transfer (LIFT) is a direct-writing technique which allows the deposition of tiny amounts of material from a donor thin film onto a receptor substrate. When LIFT is applied to liquid donor films, the laser radiation affects only a localized fraction of the liquid, thereby impelling the unaffected portion towards the receptor substrate. Thus, transfer takes place with no melting or vaporization of the deposited fraction and, in this way, LIFT can be used to successfully print complex materials like inorganic inks and pastes, biomolecules in solution, and even living cells and microorganisms. In addition, and for a wide range of liquid rheologies, the material can be deposited in the form of circular microdroplets; this provides LIFT with a high degree of spatial resolution leading to feature sizes below 10 μm, and making it competitive in front of conventional printing techniques. In this work, a revision of the main achievements of the LIFT of liquids is carried out, correlating the morphological characteristics of the generated features with the results of the study of the transfer process. Special emphasis is put on the characterization of the dynamics of liquid ejection, which has provided valuable information for the understanding of microdroplets deposition. Thus, new time-resolved imaging analyses have shown a material release behavior which contrasts with most of the previously made assumptions, and that allows clarifying some of the questions open during the study of the LIFT technique.     

Atom-optical elements on micro chips

We describe the realization of atom-optical elements as magnetic waveguide potentials, beam splitters and gravitational traps on a microchip. The microchip was produced by electroplating gold conductors on an aluminium-oxide substrate. The conductors are 30–150 μm wide and allow for the generation of waveguides at large distances to the chip surface, where surface effects are negligible. We show that these elements can be integrated on a single chip to achieve complex atom-optical circuits.     

微流芯片中消逝波激励的荧光辐射特性研究

将石英裸光纤植入聚二甲基硅氧烷基片的微流道中,采用沿光纤轴向光抽运、消逝场激励染料分子的方式,在基片微流道中获得均匀的荧光辐射.实验发现,荧光辐射的强度随光纤轴向距离的增加而衰减,光纤包层溶液折射率越大,荧光沿光纤轴向的衰减越突出;包层溶液中染料浓度越大,荧光沿光纤轴向的衰减也越突出;通过选择适当的包层溶液折射率以及染料浓度可以获得沿光纤轴向接近均匀的荧光辐射.用消逝波激励荧光的辐射理论计算了荧光光强沿光纤轴向的变化,计算结果与实验符合较好.在此基础上,设计并制作了一种具有三个通道的聚二甲基硅氧烷基片,通过在三个微流道中分别注入染料浓度均为0.1 mmol的罗丹明640、罗丹明B及罗丹明6 G的乙醇染料溶液,采用沿光纤轴向消逝波光激励方式,在一块聚二甲基硅氧烷基片上同时实现了三个不同波段的荧光辐射.     

3D integration of microcomponents in a single glass chip by femtosecond laser direct writing for biochemical analysis

3D integration of microcomponents in a single glass chip by femtosecond laser direct writing followed by post annealing and successive wet etching is described for application to biochemical analysis. Integration of microfluidics and microoptics realized some functional microdevices like a μ-fluidic dye laser and a biosensor. As one of practical applications, we demonstrate inspection of living microorganisms using the microchip with 3D microfluidic structures fabricated by the present technique.     

Electrooptic sensor module fabrication for near-field intrabody communication

In this paper, we describe how to obtain a low cost electrooptic (EO) sensor module for the mass production of near-field intrabody communication devices. In our previous study, we used a bulk cleavage technique to fabricate EO modulators without the need for any optical polishing or washing processes. In this study, we fabricated EO modulators as a miniaturized chip sensor without a base portion, and clarified the feasibility of assembling optical components by only a passive alignment technique with a compact housing.     

Jet formation in the laser forward transfer of liquids

The dynamics of the laser-induced forward transfer (LIFT) of an aqueous solution is investigated through time-resolved imaging. The experiment is carried out at conditions under which droplets are deposited on a receptor substrate. The obtained images reveal that after an initial balloon-like stage, a uniform jet with a very long length and high aspect ratio is formed, which advances at constant speed until it finally becomes unstable and breaks into several droplets. This dynamics demonstrates that the deposition process of well-defined droplets through LIFT results from the contact of the liquid jet with the receptor substrate, and not from a flying droplet.     

Low-voltage soft robots based on carbon nanotube/polymer electrothermal composites

Nowadays, soft robots have become a research hot spot due to high degree of freedom, adaptability to the environment and safer interaction with humans. The carbon nanotube (CNT)/polydimethylsiloxane (PDMS) electrothermal composites have attracted wide attention in the field of flexible actuations due to large deformation at low voltages. Here, the preparation process of CNT/PDMS composites was designed and optimized, and electrothermal actuators (ETAs) were fabricated by cutting the CNT/PDMS composite films into a "U" shape and coating conductive adhesive. The deformation performance of the ETAs with different thicknesses at different voltages was studied. At a low voltage of about 7 V, the ETA has a deformation rate of up to 93%. Finally, two kinds of electrothermal soft robots (ETSRs) with four-legged and three-legged structures were fabricated, and their inchworm-like motion characteristics were studied. The ETSR2 has the best motion performance due to the moderate thickness and three-legged electrode structure.     

Electroluminescence from Si quantum dots/SiO2 multilayers with ultrathin oxide layers due to bipolar injection

Si quantum dots/SiO₂ multilayers with ultrathin oxide layers (2.4 nm) were fabricated on a p-type Si substrate in order to enhance the hole injection. Besides the luminescence band at 900 nm which was also shown in photoluminescence spectra, another strong luminescence band near the infrared region (1200 nm) can be observed in electroluminescence spectra. It can be assigned to the band-edge emission from the quasi 2-dimensional potential well in the Si substrate. Moreover, it is interesting to find the reduction of photoluminescence intensity under biased conditions which can be attributed to the occurrence of non-radiative Auger recombination process in charged Si quantum dots.