Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

Demolding, the process to separate stamp from molded resist, is most critical to the success of ultraviolet nanoimprint lithography (UV-NIL). In the present study we investigated adhesion and demolding force in UV-NIL for different compositions of a model UV-curable resist system containing a base (either tripropyleneglycol diacrylate with shorter oligomer length or polypropyleneglycol diacrylate with longer oligomer length), a cross-linking agent (trimethylolpropane triacrylate) and a photoinitiator (Irgacure 651). The demolding force was measured using a tensile test machine with homemade fixtures after imprinting the UV resist on a silicon stamp. While decreasing the cross-linking agent content from 49 to 0 wt% has little effect on the resist surface energy, it reduces the resist's elastic modulus drastically. The decrease in elastic modulus results in a decreased adhesion force at the resist/stamp interface thereby facilitating the demolding. The decrease in elastic modulus and, therefore, demolding force by lowering the cross-linking agent content was markedly less pronounced in tripropyleneglycol diacrylate-based resists due to its shorter oligomer length. These general findings will be useful in designing new resists for UV-NIL process.     

Organic-inorganic materials for fabrication of integrated optical circuits

In the last few years, ORganically MOdified SIlicates (ORMOSILS) [R_xSi(OR)_4−x] prepared by sol-gel process were particularly attractive for integrated optics fabrication. A composition based on 3-(trimethoxysilyl)propylmethacrylate (MAPTMS) has already allowed the industrial fabrication of optical integrated devices. For this kind of materials, the polymerization of the organic network is typical of free radical curing.In this work, we try to obtain waveguides with another hybrid precursor [2-(3,4-epoxycyclohexylethyltrimethoxysilane)] using cationic polymerization. The main advantage of cationic polymerization is its ability to allow spontaneous cure reaction in presence of oxygen, in contrast with radical polymerization. We choose cycloaliphatic compounds because of their well-known high polymerization rates. The polymerization of the organic network of this hybrid material requires a cationic photoinitiator.The purpose of this paper is dedicated to the inorganic part of the material. Hydrolysis and polycondensation are followed by ²⁹Si NMR. The main objective is to obtain the highest reactive multifunctional oligomer with the lowest OH groups content.Based on our results, we obtained 3D waveguides with a cross-section of 5 μm × 5 μm.     

High performance of gated-mode single-photon detector at 1.55 μm

High performances of single-photon detection at 1.55 μm were achieved by operating InGaAs/InP avalanche photodiodes in the gated mode at the optimized temperature. As short pulses used in the gated-mode detection produce strong spikes, a transformer-based method was invented to cancel the spikes, which makes it possible to reduce the dark counts by using short-gate pulse durations, and to discriminate the avalanche signals at low thresholds. The spike-cancellation single-photon detection at the optimized temperature produced a detection efficiency of 20% with a dark-count probability of 3.4 × 10⁻⁷ per pulse. With such a single-photon detector, a stable single-photon routing was realized in 155 km optical fibers with the average photon number 〈n〉 = 0.1 per pulse, exhibiting a fringe contrast of 87%.     

Swelling assisted photografting of itaconic acid onto sodium alginate membranes

Grafting of itaconic acid (IA) was achieved onto sodium alginate (NaAlg) membranes by using UV-radiation. Process was performed under nitrogen atmosphere and benzophenone (BP) was used as a photoinitiator. Membranes were preswelled before the polymerization process and ethanol was determined as the best swelling agent among the studied solvents. The effect of polymerization time, initiator and monomer concentrations on the grafting efficiency were investigated. The best conditions for optimum grafting were obtained with IA concentration of 1.0 M, a BP concentration of 0.1 M and a reaction time of 4 h at 25 °C. Under these conditions grafting efficiency for NaAlg-g-IA membranes was found to be 14% (w/w). To obtain further increase in grafting efficiency membranes were also preswelled in IA and BP solutions and polymerization was carried out at different temperatures after UV polymerization. Grafted membranes were characterized by using Fourier transform infrared spectroscopy (FTIR), differential scanning calorimetry (DSC) and scanning electron microscopy (SEM). Effect of grafting on membrane properties such as intrinsic viscosity and swelling percentage were also determined.     

Preparation, characterization, and heat resistance studies of a holographic photopolymer based on SU-8 epoxy resin

A holographic photopolymer based on SU-8 epoxy resin as the binder and trimethylolpropane ethoxylate triacrylate as the monomer with an iodonium salt photoinitiator was studied. A diffraction efficiency of 93% and a refractive index modulation (Delta n) of 1.3 x 10(-2) were obtained from a 16 microm thick sample with write beam intensities of 50 mW/cm(2) at a wavelength of 514.5 nm, an exposure time of 60 s, and a postbaking at 65 degrees C for 1 h. The material exhibits good heat resistance in the range from 40 degrees C to 160 degrees C and long projected life.     

The controlled excitation of forbidden transitions in the two-photon spectrum of strontium by using collisions and electric fields

We present experimental results involving controlled configuration mixing in two-photon spectroscopy of highly-excited states by exploiting a weak external electric field and collisions. The method has allowed new extensions to high members of the two-photon forbidden J = 3 odd-parity 5snf ¹F₃ and the J = 0, even-parity 5sns ¹S₀ Rydberg series of neutral strontium to be observed. We achieve resonant two-photon transverse excitation of a high density atomic jet by using a narrow bandwidth tunable dye laser in a heat pipe setup with sensitive ionization detection. Experimental term values are extended for the 5sns ¹S₀ series up to n = 46. By suitable exploitation of the composition and pressure of the buffer gases in conjunction with the electric field strength in the excitation region and the exciting laser beam intensity we have also extended observations up to n = 44 for the 5snf ¹F₃ series and up to n = 46 for the 5snp ¹P₁ series. Our results demonstrate a novel and remarkably simple experimental method to access high Rydberg states to which transitions are forbidden from the ground state by parity and other selection rules.     

Electric field induced anomalies in frequency shift and collisional perturbations in the 5snd D2 Rydberg series of strontium in a heatpipe setup with ionization detection

We have examined the effect of weak DC electric field (2-20 V/cm) complimented by foreign gas collisions on the bound J = 2 even-parity 5snd ¹D₂ Rydberg states of neutral strontium. We use resonant two-photon transverse excitation, employing a narrow bandwidth tunable dye laser and an atomic jet in a heatpipe setup with ionization detection. In this paper we report certain anomalies in the observed spectra covering principal quantum number range n = 27-42 indicating a frequency shift reversal with nearly quadratic dependence on the field strength above an anti-resonance region. Furthermore, we have observed the emergence of highly localized doubly-excited 4d² states, including a remarkably broad perturber with large angular momentum, uncovering orbital contraction effect. This non-Rydberg excitation, which intrudes upon the two-photon spectrum with large energy overlap is due to single-photon excitations from the 5s5p ¹P₁ resonance level following molecular dissociation of the Sr₂ dimers suitably governed by binary atomic collisions. Our study which involves laser excitation complimented by electric field and collisions using inexpensive home-made setup opens up the possibilities for a new class of experiments, with considerable simplicity in the choice of excitation schemes for both Rydberg and non-Rydberg transitions, to reach states lying at high energies which cannot otherwise be accessed from the ground state due to parity and selection rules, while allowing one to probe localization properties of atomic wave functions.     

High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions

Secondary ions emitted from Si targets were measured with a quadrupole mass spectrometer under large Ar cluster and monomer ion bombardment. Incident ion beams with energies from 7.5 to 25 keV were used and the mean size of the Ar cluster ion was about 1000 atoms/cluster. Si_n⁺ ions with n values up to n = 8 were detected under Ar cluster ion bombardment, whereas Si cluster ions were scarcely detected under Ar monomer ion bombardment. These cluster ion yields showed the power law dependence on the cluster size.     

FWM in silicon nanocrystal-based sandwiched slot waveguides

The observation of four-wave mixing in a 6 mm long sandwiched slot waveguide filled with Si-nc/SiO₂ is reported for optical powers usually employed in telecommunication systems. A −47 dB conversion efficiency is measured in fabricated waveguides for input signal powers around 12 dBm on chip and a waveguide length of 6 mm. Furthermore, the calculated non-linear coefficient is found to be n₂ = 2.67 × 10⁻¹⁷ m²/W. It is also expected that, by using longer waveguides, it would be possible to achieve wavelength conversion.     

Two-photon excitation properties of a class of novel organic dye chloride

We present the two-photon excited (TPE) upconverted fluorescence and lasing efficiencies of a class of new pyridinium chloride having donor-π-acceptor (D-π-A) structure. Based on the excitation upon 40 ps laser pulses at 1064 nm, the experimental results showed that: the red-shift of TPE fluorescence emission peaks and the TPE fluorescence lifetime were gradually increased with the enhancement of electron-donating capability of the donor. To a certain extent, the enhanced donor would increase the two-photon pumped (TPP) upconversion lasing efficiencies, but the overlong alkyl chains would result in decreased lasing efficiencies. We could obtain TPE fluorescence lifetime of 754 ps, TPP upconversion lasing efficiency of ∼8.4%, and TPA cross-section of 6.14 × 10⁻⁴⁹cm⁴s/photon in these compounds.     

The research on beat length of polarization maintaining optical fiber with external pressure

Based on the coupled mode equations and elastic optic effect theory, the relationship between polarization maintaining fiber (PMF) beat length and external pressure was analyzed. Moreover, the beat length variation with different external pressure values F as well as angles θ between the pressure direction and PMF's x-axis was calculated numerically. The results demonstrated that the beat length variation was determined both by F and θ simultaneously. When F was a constant, the beat length was changed periodically in π cycle sinusoidal form with θ variation. Then, the minimum and maximum values of beat length would be obtained when θ were even and odd multiples of π/2, respectively. Meanwhile, the beat length variation was linear with F as θ was fixed. In this situation and with F increasing, if θ ∈ (kπ + π/4, kπ + 3π/4) (k ∈ Z), the beat length would increase linearly; otherwise, the beat length variation would be in the opposite direction while θ ∈ (kπ − π/4, kπ + π/4) (k ∈ Z); however, it remained almost unchanged in the case of θ = kπ ± π/4 (k ∈ Z). Finally, the beat length was measured with different pressure values F and angles θ based on a Sagnac interferometer system, and the results shown a great agreement with the theoretical analysis and simulation.     

Two-photon recording of microholograms in photopolymer materials with new cationic thioxanthone photoinitiators

We have demonstrated two-photon induced recording of the microholograms at an arbitrary point within thick (∼100 μm) photopolymer material using photoinitiators on a basis of new cationic thioxanthone derivatives. Such material provides high values of refractive index change Δn = 4.8 × 10⁻³, and holographic recording sensitivity S = 1.2 cm/J. A nanosecond laser pulse at a wavelength of 532 nm was used for recording. For the selective on the depth reading of the microholograms the method of collinear heterodyning was applied.     

Electro-optic polymer assisted optical switch based on silicon slot structure

One kind of electro-optic polymer assisted Mach-Zehnder optical switch based on silicon slot structure is presented in this paper. The interference arms of the switch are slot structures instead of regular single-mode waveguides. By filling electro-optic material in the void slot of the arms, direct electro-optic modulation can be introduced. Theoretical model and detailed analysis are given in this paper. The length-independent product V_πL is about 74 mV cm when slot width is 100 nm, and 37 mV cm when slot width is 50 nm, when the polymer with a electro-optical coefficient of γ₃₃ = 130 pm/V is assisted. An ultralow energy consumption of only 37 fJ/bit is achievable, and the turn-on time of the switch is less than 1.5 ps.     

Tunable polymer waveguide Bragg filter fabricated by direct patterning of UV-curable polymer

Tunable polymer wavelength filters are demonstrated using a silicon-nitride grating which gives high refractive index contrast with polymers. The polymer waveguides are defined using direct patterning of a liquid-state UV-curable polymer by proximate-contact lithography technique. The wavelength filter exhibits a narrow bandwidth of less than 1.0 nm and a transmission dip of more than −15 dB. The peak wavelength is shifted over 10 nm in the temperature range of 25-70 °C and the thermal tuning efficiency is −0.212 nm/°C.     

Laser polymerization-based novel lift-off technique

The fabrication of microstructures by two-photon polymerization has been widely reported as a means of directly writing three-dimensional nanoscale structures. In the majority of cases a single point serial writing technique is used to form a polymer model. Single layer writing can also be used to fabricate two-dimensional patterns and we report an extension of this capability by using two-photon polymerization to form a template that can be used as a sacrificial layer for a novel lift-off process.A Ti:sapphire laser, with wavelength 795 nm, 80 MHz repetition rate, 100 fs pulse duration and an average power of 700 mW, was used to write 2D grid patterns with pitches of 0.8 and 1.0 μm in a urethane acrylate resin that was spun on to a lift-off base layer. This was overcoated with gold and the grid lifted away to leave an array of gold islands.The optical transmission properties of the gold arrays were measured and found to be in agreement with a rigorous coupled-wave analysis simulation.     

Preparation and the optical nonlinearity of surface chemistry improved titania nanoparticles in poly(methyl methacrylate)-titania hybrid thin films

With 800-nm, 120-fs laser pulses, optical nonlinearity has been studied in a series of thin films containing poly(methyl methacrylate) (PMMA), filled with surfactant acetylacetone (Acac) capped TiO₂ nanoparticles, which were synthesized by a simple in situ sol-gel/polymerization process, assisted by spin coating and multi-step baking. The resulting nanohybrid thin films have highly optical transparency and demonstrate a unique nonlinear optical (NLO) response. The highest nonlinear refractive index (n₂) is observed up to 6.55 × 10⁻² cm² GW⁻¹ in the nanohybrid thin film of 60 wt% Ti(OBu)₄ in PMMA, with a negligible two-photon absorption (TPA), as confirmed by the Z-scan technique. The titanium precursor loading combined with the nature of the capping molecules are used to influence the ability of nanoparticles to nonlinear optical response. Indeed, the ligands at the nanoparticles’ surface can not only control the extent of the interaction between the organic molecules and the embedded nanoparticles but also influence the optical nonlinearities of nanoparticles.     

Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator

In experiment, characteristics of silicon microring/racetrack resonators in submicron rib waveguides have been systematically investigated. It is demonstrated that only a transverse-electric mode is guided for a ratio of slab height to rib height h/H = 0.5. Thus, these microring/racetrack resonators can only function for quasi-transverse-electric mode, while they get rid of transverse-magnetic polarization. Electron beam lithography and inductively coupled plasma etching were employed and improved to reduce sidewall roughness for low propagation loss and high performance resonators. Then, the effects of waveguide dimensions, coupling region design, waveguide roughness, and oxide cladding for the resonators have been considered and analyzed.     

Nonlinear optical properties of periodic gold nanoparticle arrays

Periodic Au nanoparticle arrays were fabricated on silica substrates using nanosphere lithography. The identical single-layer masks were prepared by self-assembly of polystyrene nanospheres with radius R = 350 nm. The structural characterization of nanosphere masks and periodic particle arrays was investigated by atomic force microscopy. The nonlinear optical properties of the Au nanoparticle arrays were determined using a single beam z-scan method at a wavelength of 532 nm with laser duration of 55 ps. The results show that periodic Au nanoparticle arrays exhibit a fast third-order nonlinear optical response with the nonlinear refractive index and nonlinear absorption coefficient being n₂ = 6.09 × 10⁻⁶ cm²/kW and β = −1.87 × 10⁻⁶ m/W, respectively.     

Periodic dielectric waveguide-based cross- and T-connections with a resonant cavity at the junctions

We propose a cross-connection and a T-connection in periodic dielectric waveguides (PDWs) with ultrasmall size and high transmission efficiency at λ = 1.55 μm. The cross-connection was formed by introducing a 3 × 3 square dielectric resonant cavity at the cross-junction with a crosstalk of less than 0.8% (about − 21 dB) and a transmission of larger than 93% at the desired output port. The T-connection was formed by introducing a 3 × 5 dielectric resonant cavity with modifications at the T-junction. The total transmission is up to 95%. In addition, different power splitting ratios were also achieved by moving the input waveguide of the T-connection with different displacements.     

Structural and electrochemical properties of polythiophene

Polythiophenes (PTs) were prepared by chemical oxidative polymerization method in presence and absence of three different (cationic - CTAB, anionic - SDS and non-ionic - Triton X-100) surfactants using FeCl₃ as oxidant. The prepared PTs were characterized by FT-IR, UV-Vis, XRD, SEM and cyclic voltammetry studies. The FT-IR spectra inferred the polymerization of thiophene and elucidate the corresponding functional groups of PTs. Our results on the UV-Vis spectra demonstrate the n−π* electronic transition of the conjugated molecules. Further the red shift in the absorption peak confirms the longer conjugation length of PTs. The amorphous nature of the PTs was inferred from the XRD pattern. The PTs prepared with surfactant exhibited different morphology compared to PT prepared without surfactant. The specific capacitances (SC) of the prepared PTs were calculated using cyclic voltammetry technique, the PT prepared with TRITRON X-100 exhibited higher SC of 117 F/g compared to SC of surfactant free PT (78 F/g). Hence, the PTs prepared with surfactants were found to be suitable electrode materials for redox supercapacitors.