Emission characteristics of a glow discharge in a mixture of heavy inert gases with iodine vapor

The results of a systematic investigation of the emission characteristics of a low-pressure UV excimer-halogen lamp pumped by a longitudinal dc glow discharge are presented. The discharge was initiated in mixtures of heavy inert gases with iodine vapor at a total pressure of 100–2000 Pa and a power deposited into the plasma of 10–100 W. Current-voltage characteristics of the glow discharge and emission spectra of the plasma in the region of 190–360 nm are studied. The radiation intensity at the resonance line of the iodine atom (206.2 nm) and the intensity at the peaks of the XeI(B-X) (253 nm) and I₂(B-X) (342 nm) emission bands are analyzed as functions of the pressure and partial composition of the mixtures of Ar, Kr, and Xe with iodine vapor, as well as the electric power of the glow discharge. The most efficient gas mixtures are determined for an electric-discharge UV iodine vapor lamp with continuous-wave emission and a long service life before a change of the mixture is required.     

Emission characteristics and parameters of gas-discharge plasma in mixtures of heavy inert gases with chlorine

The ultraviolet (UV) radiation from longitudinal glow-discharge plasma in three- and four-component mixtures of argon, krypton, and xenon with chlorine has been investigated. The total radiation of Ar, Kr, and Xe monochlorides and chlorine molecules in the spectral range 170–310 nm has been optimized with respect to the composition and the pressure of gas mixtures, as well as the discharge current. The mean output power, the electric power of discharge, and the efficiency of a broadband low-pressure exciplex halogen lamp have been determined. Parameters of the glow discharge in Ar-Kr-Cl₂ and Kr-Xe-Cl₂ mixtures have been simulated numerically. The electron energy distribution functions have been determined through the solution of the Boltzmann kinetic equation. These functions have been used to calculate the plasma parameters, namely, electron transfer characteristics, specific losses of discharge power for electronic processes, and ionization and attachment coefficients.     

Emission characteristics of a glow discharge plasma based on a mixture of helium with chlorine molecules

We present the results of a study of the emission characteristics of a longitudinal glow discharge based on a mixture of helium and chlorine. Study of the emission characteristics of the discharge showed that it emits most efficiently in the bands of the chlorine molecule with maxima at 200 nm and 258 nm in an He-Cl₂ mixture (P = 0.2–0.3 kPa). We present the optimization of the average emission power of a UV emitter as a function of the glow discharge parameters, the pressure, and the composition of the working gas mixture. Based on solution of the Boltzmann equation for the electron energy distribution function in a discharge based on the optimal mixture (according to experimental data), we calculated the power losses per unit pressure going toward elementary processes, the electron transport characteristics, the ionization and attachment coefficients as a function of the parameter E/P. The calculated parameters of the plasma for the UV emitter allowed us to provide a basis for the qualitative pattern of physicochemical processes in the studied plasma. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 1, pp. 121–124, January–February, 2008.     

Formation of monochlorides of heavy inert gases in a high-frequency transverse discharge plasma

Emission characteristics of a high-frequency transverse discharge plasma in mixtures of argon and xenon with chlorine molecules are presented. It is shown that the discharge in xenon-chlorine mixtures is a source of broadband radiation in the spectral region 220–450 nm, while in argon-chlorine mixtures, it emits in the region 150–270 nm. Double mixtures with a partial pressure of inert gases ranging within 300–400 Pa and a chlorine partial pressure of 30-40 Pa are found to be optimal. The mean output discharge power ranges within 15–50 W.     

Emission characteristics of a high-power glow discharge plasma in a mixture of inert gases with bromine and iodine vapor

The results of an investigation of the UV radiation from the plasma of a dc glow discharge in mixtures of inert gases with bromine and iodine molecules are presented. The current-voltage and spectral characteristics of a longitudinal glow discharge with a power of 10–250 W are studied. The power and the efficiency of the total UV radiation of the plasma, as well as the power of radiation at the spectral line of the iodine atom at 206.2 nm, are optimized as functions of the power deposited into the plasma and the composition of the gas mixture. In active media based on Kr-Br₂ mixtures, the molecular emission of the plasma was represented by bands at 207 (KrBr(B-X)) and 289 nm (Br ₂ ^* ), while, in He-Xe-I₂ mixtures, it was represented by bands at 253 (XeI(B-X)) and 342 nm (I₂).     

Optical characteristics of a transverse volume discharge in a helium-hydrogen chloride mixture

The emission characteristics of a transverse volume discharge in a He: HCl = 10: 1 mixture at a total pressure of 1–8 kPa were investigated. The plasma volume was 18 × 2.2 × 1 cm³, the interelectrode distance was d=2.2 cm, and the charging voltage of the main storage capacitor was 5–10 kV. The emission characteristics of the discharge were studied in the spectral range of 500–1000 nm. This type of discharge can be used in pulsed dry-etching plasmochemical reactors. The density of atomic chlorine radicals in the plasma was optimized in terms of the pressure of the initial working He-HCl mixture by measuring the relative radiation intensity of the Cl 837(5)-nm spectral line. The density of molecular radicals can be monitored indirectly by recording radiation from the excited chlorine-free decomposition products of HCl molecules (the H_α 656-nm line).     

Simulation of the positive column of a glow discharge in an inert gas-chorine mixture with allowance for the dissociation of chlorine molecules

A model is developed that makes it possible to calculate the concentration of excimer molecules, halogenides of inert gases, in the positive column of a glow discharge initiated in a chlorine-containing gas mixture. Using this model, one can quantitatively reproduce experimental dependences of the excimer UV power on the discharge current in wide ranges of the gas mixture compositions and pressures, provide satisfactory quantitative agreement between calculated and experimental radial distributions of the electron and excimer molecule concentrations, and give a physical explanation for the experimental dependences. To this end, this model, unlike other available ones, allows for the electron-impact dissociation of chlorine molecules, the radial nonuniformity of dissociation, and the radial nonuniformity of the gas temperature.     

Emission characteristics of plasma of a transverse volume discharge in mixtures of helium, argon, and krypton with sulfur hexafluoride

The emission characteristics of the plasma of repetitively pulsed spontaneous UV-VUV radiation sources on the basis of ArF* (193 nm) and KrF* (249 nm) molecules, and the products of decomposition of sulfur hexafluoride molecules pumped by a transverse volume discharge in a mixture of inert gases with sulfur hexafluoride molecules have been investigated. The discharge emission spectra in the range of 190–780 nm at the low-current and high-current stages of the transverse discharge, the time characteristics of the voltage across the electrodes, the pump current, and the emission of excimer molecules and the products of decomposition of sulfur hexafluoride have been studied. It is shown that, in the gas-static operation mode of the radiator at the number of discharge pulses smaller than 10³, the 193-nm ArF* and 249-nm KrF* bands are main in the emission spectrum. Upon further operation of the radiator, a spectral continuum is formed on the basis of sulfur molecular bands in the range 260–550 nm.     

Distribution function of electrons and kinetic coefficients in cesium-argon mixture discharge

The distribution function of electrons in a cesium-argon mixture discharge is found in the present paper by solving Boltzmann's equation. The elastic and inelastic electron-atom collisions and electron-electron collisions are taken into consideration.The influence of the addition of cesium vapours to argon on the quantities characterizing the discharge plasma is explained. From the electron distribution function are calculated: the drift velocity, the mean energy, the ratio of the diffusion and mobility coefficients and the electron energy losses for individual elementary processes as functions of the electric field and the concentration of the neutral gas components.     

Radiative characteristics of nitrogen upon excitation by volume discharge initiated by runaway electron beam

The amplitude, time, spectral, and energetic characteristics of a volume (diffuse) discharge at an elevated pressure (up to 5 atm) in a gap with an inhomogeneous electric field without an additional preionization source are studied. The concentration and temperature of electrons in the discharge plasma are mea-sured by spectral methods. The effective lifetime of the C ³Π _u state of the nitrogen molecule at the trailing edge of the radiation pulse is shown to be determined by radiative and collisional quenchings. For transitions of the second positive system of nitrogen, a plasma discharge radiation power into the complete solid angle is obtained to be ～120 kW, with a specific radiation power of up to ～50 kW/cm³.     

Pulsed lasers operating by the atomic transitions of inert gases on pumping by a self-sustained transverse discharge

This paper presents the results of experimental studies of lasing by the atomic transitions of inert gases in mixtures ofHe−NF ₃ (λ=706.5 nm),Ne−NF ₃ (585.3 nm), andAr−NF ₃ (750.4 nm). It has been shown that when an inert-gas-halide mixture is excited by a self-sustained discharge, the electronegative gas provides depopulation of the lower laser level and simultaneously increases the pumping efficiency. Based on investigations of the spontaneous emission and lasing, on measurements of the density and temperature of the gas-discharge plasma electrons, and on an analysis of the process rates, it is concluded that the processes of electron excitation play a dominant role in the population of the upper laser level. Institute of High-Current Electronics, Siberian Division of the Russian Academy of Sciences. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 60–63, April, 2000.     

VUV lamp based on mixtures of inert gases with water molecules pumped by a pulsed-periodic capacitive discharge

The spectral characteristics of the emission in the 140-315 nm range from pulsed-periodic capacitive discharges in mixtures of water vapor and helium and argon are described. In the VUV the most intense bands have maxima at λ = 156.0, 180.3, and 186.0 nm, and in the region of 300–315 nm, at λ = 312.1 and 313.4 nm. The brightness of the emission from the capacitive discharge plasma is optimized with respect to the partial pressures of helium, argon, and water vapor. The electron kinetic coefficients of discharges in argon and water vapor mixtures are calculated for E/N = 1–1000 Td.     

Emission characteristics and parameters of a glow discharge in an argon-xenon-chlorine mixture

We present the results of a study of the emission characteristics of a low-pressure longitudinal glow discharge in an Ar-Xe-Cl₂ mixture (p = 0.5–6.0 kPa) and numerical modeling of its plasma parameters as a function of the parameter E/P. We optimized the average emission power of the discharge in the spectral range 160–310 nm as a function of the discharge current, the pressure and composition of the gas mixture. The plasma parameters were calculated for the optimal mixture (according to experimental data) and included obtaining the dependences of the electron transport and energy characteristics, the power losses per unit pressure in the discharge going toward elementary electron processes in the plasma, and also the ionization and attachment coefficients as a function of the parameter E/P. The results of numerical modeling of the glow discharge parameters allow us to provide a qualitative basis for the emission distribution in the spectrum of a plasma based on an Ar-Xe-Cl₂ mixture. __________ Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 4, pp. 563–567, July–August, 2008.     

Optical characteristics of the plasma of a transverse volume discharge in Cl2 and He/Cl2 mixtures

Results are presented from a study of UV and VUV emission from the plasma of a transverse volume discharge in chlorine and a He/Cl₂ mixture. In the wavelength range Δλ=140–300 nm, the Cl₂(D′-A′) band with an edge at 258 nm and the Cl ₂ ^* band with edge at λ=195 nm are found to be dominant. It is shown that, in the pressure range [Cl₂]=0.1–2.0 kPa, the intensity of emission with λ≤195 nm is higher than the intensity of the Cl₂(D′-A′) band. At [Cl₂]≥2 kPa, emission in the 258-nm band is dominant.     

Study of the glow discharge in inert gases with water vapor

The behavior of the water vapor concentrations and fragments in wet plasma is studied. The results of plasma-chemical modeling are compared with the results of direct measurements of water molecule dissociation in plasma.     

Emission characteristics of a barrier discharge in an Ar-H2O mixture

We have experimentally studied the UV radiation of a low-temperature barrier discharge plasma in an Ar-H₂O mixture. The spectral interval 300–400 nm has been examined in detail. Addition of argon with a pressure of 24 kPa to a barrier discharge in water vapor at a pressure of ～0.1 kPa leads to a ninefold increase in the UV radiation power of excited hydroxyl molecules. An increase in the duration of the UV radiation pulse of the mixture in the longitudinal discharge decay has been achieved for the first time, which may be direct evidence of energy transfer from metastable argon atoms to water molecules. An estimate of the upper boundary of the dissociative excitation rate constant of hydroxyl molecules OH*(A ²Σ⁺) upon interaction of metastable argon atoms with water molecules has been obtained.     

Emission characteristics of a discharge iodine vapor plasma in the spectral region of the main absorption maximum of DNA molecules

Radiation of glow and capacitive discharges in inert gas-iodine vapor mixtures is studied in the spectral range 150–210 nm, which coincides with the main absorption maximum of the DNA molecules. Iodine atomic spectral lines at 150.7, 161.8, 170.2, 183.0, and 206.2 nm are observed in the spectra. The emission intensity of the iodine spectral lines is optimized by varying the glow discharge current, capacitive discharge frequency, as well as pressure and composition of the gas mixtures. The glow and capacitive discharges are ignited in cylindrical quartz tubes with interelectrode gaps of 10 and 6 cm. Helium and neon are found to be the most effective buffer gases. The optimum partial pressures of the light inert gases and iodine vapor in the glow discharge are within 0.4–0.6 kPa and 100–150 Pa, respectively. In the capacitive discharge in He(Ne)-I₂ mixtures, the optimum partial helium, neon, and iodine vapor pressures are within 0.8–2.0 kPa, 0.5–1.0 kPa, and ≤ 60 Pa, respectively. It is demonstrated that pulsed bactericidal radiation sources with light pulse lengths of 400–500 ns and continuous radiation sources emitting within the spectral range 150–207 nm can be designed on the basis of low-density iodine vapor plasma.