Atomic layer deposition of TiO2 from TiI4 and H2O onto SiO2 surfaces: ab initio calculations of the initial reaction mechanisms

The initial surface reactions involved in the atomic layer deposition (ALD) of TiO2 from TiI4 and H2O onto a SiO2 substrate have been investigated using electronic structure calculations based on cluster models. The detailed atomic growth mechanisms on different types of functionalities on the SiO2 substrate have been proposed. The effects of quantum tunneling and hindered rotations of adsorbates on the rate of surface reactions have been investigated. The effects of tunneling were found to be negligible for all reactions, because typical ALD temperatures range from 150 to 450 degrees C. However, the rotational contributions to the rate constants must be taken into account in certain cases. All of the three surface functionalities investigated exhibit high chemical reactivity toward TiI4 precursors at typical ALD temperatures. The rate constants of the second half-reactions between Ti intermediates and H2O are 5-8 orders of magnitude smaller than the first half-reactions between TiI4 and the surface functionalities. Although the iodine release reaction has been used to explain previous experimental measurements, it is predicted to be unfavorable (kinetically and thermodynamically) and is unlikely to occur at typical ALD temperatures. Substitution of TiI4 with TiCl4 as the metal precursor can increase the binding energies of the absorbates onto the surface due to the high electronegativity of the Cl ligands. However, the activation barriers are not significantly different between these two metal precursors. More importantly, our calculations predict that TiI4 precursors tend to produce TiO2 films with fewer impurities than the TiCl4 precursors.     

Atomistic kinetic Monte Carlo study of atomic layer deposition derived from density functional theory

To describe the atomic layer deposition (ALD) reactions of HfO₂ from Hf(N(CH₃)₂)₄ and H₂O, a three‐dimensional on‐lattice kinetic Monte‐Carlo model is developed. In this model, all atomistic reaction pathways in density functional theory (DFT) are implemented as reaction events on the lattice. This contains all steps, from the early stage of adsorption of each ALD precursor, kinetics of the surface protons, interaction between the remaining precursors (steric effect), influence of remaining fragments on adsorption sites (blocking), densification of each ALD precursor, migration of each ALD precursors, and cooperation between the remaining precursors to adsorb H₂O (cooperative effect). The essential chemistry of the ALD reactions depends on the local environment at the surface. The coordination number and a neighbor list are used to implement the dependencies. The validity and necessity of the proposed reaction pathways are statistically established at the mesoscale. The formation of one monolayer of precursor fragments is shown at the end of the metal pulse. Adsorption and dissociation of the H₂O precursor onto that layer is described, leading to the delivery of oxygen and protons to the surface during the H₂O pulse. Through these processes, the remaining precursor fragments desorb from the surface, leaving the surface with bulk‐like and OH‐terminated HfO₂, ready for the next cycle. The migration of the low coordinated remaining precursor fragments is also proposed. This process introduces a slow reordering motion (crawling) at the mesoscale, leading to the smooth and conformal thin film that is characteristic of ALD. © 2013 Wiley Periodicals, Inc.     

ZnS薄膜原子层沉积机理的密度泛函理论研究

使用密度泛函方法研究了以二乙基锌(DEZn)和H2S作为前驱体在硅表面原子层沉积ZnS的初始反应机理.ZnS薄膜的原子层沉积包括2个连续的"半反应":即DEZn与H2S"半反应".研究显示:DEZn与H2S"半反应"都经历了一个C2H6消去过程.通过对比在单硫氢基及双硫氢基硅表面上的反应,发现邻位硫氢基的存在有利于前驱体分子的吸附并能够降低反应活化能,这意味着双硫氢基硅表面上的反应是能量上更有利的反应.另外,也发现DEZn"半反应"比H2S"半反应"更容易进行.     

Role of water in the atomic layer deposition of TiO(2) on SiO(2)

Atomic layer deposition (ALD) of TiO(2) on SiO(2) powder using sequential addition of TiCl(4) and H(2)O vapors has been investigated by infrared spectroscopy. In the first cycle, TiCl(4) reacts monofunctionally or bifunctionally with surface silanols forming (Si-O-)(n)Ti-Cl(4)(-)(n) (n = 1, 2) species. Subsequent addition of water vapor leads to the hydrolysis of the (Si-O-)(n)Ti-Cl(4)(-)(n) to form a Ti-O-Ti network, and at the same time, some cleavage of Si-O-Ti bonds occurs, regenerating Si-OH in the process. It is shown that the species formed on the surface in the first TiCl(4) dose are temperature dependent. However, after addition of H(2)O vapor, the amount of TiO(2) deposited in the first complete cycle is independent of reaction temperature. In the second and above cycles, the amount of TiO(2) deposited as a function of ALD cycles strongly correlates with the amount of water on the surface. This, in turn, led to a temperature dependence of the growth rate of the TiO(2) per cycle.     

Formation of stacking defects at surfaces: From atomistic simulations to density functional theory calculations

We have performed electronic structure calculations to study the evolution of the stacking fault energy at (111) surfaces of metals. We first apply an sp–d tight-binding model and then increase the accuracy on the electronic structure by using density functional theory (DFT) calculations. We show in this way the relative importance of sp–d hybridization both in the formation of defects at the surface of metals and in reconstruction phenomena as a function of band filling especially at the end of transition metal series. Comparing our results with atomistic simulations it is concluded that although atomistic calculations are powerful tools to investigate relaxation mechanisms at surfaces, a higher degree of accuracy on electronic structure is necessary to quantify the energy of some defects at surfaces like stacking faults. In particular long range interactions associated to less localized sp electrons are playing a rather important role in reconstruction phenomena for metals like platinum and gold. These results are backed up by DFT calculations applied to iridium, platinum and gold (111) surfaces.     

In situ auger electron spectroscopy study of atomic layer deposition: growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces

Growth initiation and film nucleation in atomic layer deposition (ALD) is important for controlling interface composition and achieving atomic-scale films with well-defined composition. Ruthenium ALD is studied here using ruthenocene and oxygen as reactants, and growth initiation and nucleation are characterized on several different growth surfaces, including SiO2, HfO2, and hydrogen terminated silicon, using on-line Auger electron spectroscopy and ex-situ X-ray photoelectron spectroscopy. The time needed to reach the full growth rate (typically approximately 1 A per deposition cycle) is found to increase as the surface energy of the starting surface (determined from contact angle measurements) decreased. Growth starts more readily on HfO2 than on SiO2 or Si-H surfaces, and Auger analysis indicates distinct differences in surface reactions on the various surfaces during film nucleation. Specifically, surface oxygen is consumed during ruthenocene exposure, so the nucleation rate will depend on the availability of oxygen and the energetics of surface oxygen bonding on the starting substrate surface.     

Adsorption and desorption of toluene on nanoporous TiO2/SiO2 prepared by atomic layer deposition (ALD): influence of TiO2 thin film thickness and humidity

Adsorption and desorption of toluene on bare and TiO₂-coated silica with a mean pore size of 15 nm under dry and humid conditions were studied using toluene breakthrough curves and temperature programmed desorption (TPD) of toluene and CO₂. Two TiO₂/silica samples (either partially or fully covered with TiO₂) were prepared with 50 and 200 cycles of TiO₂ atomic layer deposition (ALD), respectively. The capacity of silica to adsorb toluene improved significantly with TiO₂-thin film coating under dry conditions. However, toluene desorption from the surface due to displacement by water was more pronounced for TiO₂-coated samples than bare samples under humid conditions. In TPD experiments, silica with a thinner TiO₂ film (50-ALD cycled) had the highest reactivity for toluene oxidation to CO₂ both in the absence and presence of water. Toluene adsorption and oxidation reactivity of silica can be controlled by modifying the silica surface with small amount of TiO₂ using ALD.     

Time-dependent density functional theory benchmarking for the calculations of atomic spectra: efficiency of exc-ETDZ basis set

We present a time-dependent density functional theory (TD-DFT) benchmarking of recently constructed basis set, namely exc-ETDZ (Guevara et al. in J Chem Phys 131: 064104, 2009) for predicting the atomic spectra of the first-row atoms. A systematic testing with 31 density functional methods has been performed to see whether convincing performance of this basis set carries over the TD-DFT formalism. The efficiency of exc-ETDZ basis set for reproducing atomic spectra has been compared with Pople- and Dunning-style basis sets. We focused on the atomic low-lying valence excited states with single excitation character for our benchmarking, and the calculated excitation energies were compared to experimental data. On average, the functionals providing the best match with exc-ETDZ basis are BMK, BH&HLYP and ωB97. Moreover, on the basis of comparison between the results of these superior functionals with CIS(D) estimates, it turned out that TD-DFT and CIS(D) errors are of the same order of magnitude, once the exc-ETDZ basis set is used. Finally, the results of present study indicate that different functionals show results that are highly dependent on the atomic configuration as well as the basis set.     

Scanning tunneling microscopy and density functional theory combined studies of rutile TiO2(1 1 0) surface chemistry: Watch surface processes at the atomic scale

TiO₂ has attracted great interest in chemical and physical sciences, partially due to its potential applications in catalysis. This article provides a brief review on recent progresses of joint scanning tunneling microscopy and density functional theory investigations on the electronic structure of reduced rutile TiO₂(1 1 0) surface and the adsorption and reaction of oxygen, carbon monoxide, carbon dioxide, methanol, and ethanol on the surface. © 2012 Wiley Periodicals, Inc.     

An atomic scale mechanism for the antimalarial action of chloroquine from density functional theory calculations

The X-ray crystal structures of complexes between the antimalarial drugs quinine, quinidine and halofantrine and their biological target, iron(III) ferriprotoporphyrin IX (FePPIX), have been reported in the literature (de Villiers et al. in ACS Chem Biol 7:666, 2012; J Inorg Biochem 102:1660, 2008) and show that all three drugs utilize their zwitterionic alkoxide forms to coordinate to the iron atom via Fe–O bonds. In this work, density functional theory calculations with implicit solvent corrections have been used to model the energetics of formation of these complexes. It is found that the cost of formation of the active zwitterionic form of each drug is more than offset by the energy of its binding to FePPIX, such that the overall energies for complexation of all three drugs with FePPIX are moderately favourable in water, and rather more favourable in n-octanol as solvent. The calculations have been extended to develop an analogous model for the complex between FePPIX and chloroquine, whose structure is not presently known from experiment.     

On the 1,3-dipolar cycloaddition reactions of indenone with N-N-C dipoles: density functional theory calculations

Density functional theory (DFT) calculations at the B3LYP/6-311G* theoretical level have been performed to study the 1,3-dipolar cycloaddition (1,3-DC) reactions between indenone (1) and different 1,3-dipoles (diazomethane and N-methyl C-methoxy carbonyl nitrilimine, compounds 2 and 3, respectively). The geometrical and energetic properties were analysed for the different reactives, transition states and cycloadducts formed (compounds 4-11). The reactions proceed in the gas-phase by an asynchronous concerted mechanism, yielding different regiochemistry dependent on the 1,3-dipole chosen, although with dipole 3 some degree of synchrony was found in the formation of cycloadduct 5. The 1,3-DC between 1 and 3 was regioselective, being the cycloadduct 11 favoured against 9. The NMR chemical shift parameters (GIAO method) were also calculated for the reactives and cycloadducts.     

Density functional theory calculations of dense TiO2 polymorphs: implication for visible-light-responsive photocatalysts

Structural parameters and electronic band gaps of dense TiO(2) polymorphs, i.e., alpha-PbO(2), baddeleyite, fluorite, and cotunnite types of structures, were calculated using a first-principles density functional method with local-density approximation. The ambient phases, i.e., rutile and anatase, with known theoretical and experimental data were used to ensure the validity of the calculations. The fluorite-type TiO(2) turned out to have the narrowest band gap, 1.08 or 2.18 eV after applying a very approximate band gap correction, due to highly symmetrical TiO(8) polyhedra with Ti(3d) and O(2p) orbitals in the most mixed state. Ti with eight coordinated oxygens, as feasible under high pressure or residual stress, may have potential applications as a visible-light-responsive photocatalyst.     

Photocatalytic patterning of monolayers for the site-selective deposition of quantum dots onto TiO2 surfaces

A novel photochemical mechanism is reported for the site-selective deposition of quantum dots onto nanocrystalline TiO2 films. The patterning mechanism involves the combination of surfactant-mediated self-assembly and monolayer photolithography. In the self-assembly process, CdS and CdSe quantum dots were attached to TiO2 surfaces through bifunctional mercaptoalkanoic acid (MAA) linkers. MAAs were adsorbed to the TiO2 surface as the deprotonated carboxylates, primarily through monodentate coordination to Ti4+ sites. CdSe quantum dots were bound to the terminal thiol groups of surface-adsorbed MAAs, with a surface adduct formation constant, Kad, of (2.1 +/- 0.7) x 104 M-1. The color and optical density of the quantum dot-functionalized TiO2 films were tunable. Monolayer photopatterning involved the TiO2-catalyzed oxidative degradation of surface-adsorbed mercaptohexadecanoic acid (MHDA). A mechanism is proposed wherein MHDA degradation occurs through both oxidative decarboxylation and the formation of interchain disulfides. These MHDA photodegradation processes regulate the extent to which CdSe quantum dots adsorb onto the TiO2 surface. Illumination through a photomask yielded optically patterned, quantum dot-functionalized TiO2 films that were characterized by scanning electron microscopy and energy-dispersive X-ray analysis.     

Some estimates of the surface tension of curved surfaces using density functional theory

Density functional theory is used to calculate the surface tension of planar and slightly curved surfaces, which can be written as gamma(R)=gamma(infinity)(1-2delta(infinity)R), where R is the radius of curvature of the surface. Calculations are performed for a Lennard-Jones fluid, split into a hard-sphere repulsive potential and an attractive part. The repulsive part is treated using the local density approximation. The attractive part is treated using a high temperature approximation (HTA) in which the pair correlation function is approximated by the Percus-Yevick pair correlation function of a uniform hard-sphere fluid evaluated at a position-dependent average density. An expression relating the Tolman length delta(infinity) to the density profile of the planar surface is derived. Numerical results are presented for the planar surface tension gamma(infinity) and for delta(infinity) and are compared with those using mean field theory (MFT) and with those using the square-gradient approximation. Values for gamma(infinity) using the HTA are 30%-40% higher than those using MFT. Values for delta(infinity) using the HTA are around -0.1 (in units of the Lennard-Jones parameter sigma) and only weakly dependent on temperature. These values are less negative than the values from MFT. The square-gradient approximation gives reasonable estimates of the more accurate nonlocal results for both the MFT and the HTA.     

A high-performing nanostructured TiO2 filter for volatile organic compounds using atomic layer deposition

Novel nanostructured gas filtering systems with TiO(2) thin films using atomic layer deposition (ALD) were developed for volatile organic compounds. A superior toluene adsorption efficiency was found for the nanostructured TiO(2) thin films.     

Derivation of force field parameters for SnO2-H2O surface systems from plane-wave density functional theory calculations

Plane-wave density functional theory (DFT-PW) calculations were performed on bulk SnO2 (cassiterite) and the (100), (110), (001), and (101) surfaces with and without H2O present. A classical interatomic force field has been developed to describe bulk SnO2 and SnO2-H2O surface interactions. Periodic density functional theory calculations using the program VASP (Kresse et al., 1996) and molecular cluster calculations using Gaussian 03 (Frisch et al., 2003) were used to derive the parametrization of the force field. The program GULP (Gale, 1997) was used to optimize parameters to reproduce experimental and ab initio results. The experimental crystal structure and elastic constants of SnO2 are reproduced reasonably well with the force field. Furthermore, surface atom relaxations and structures of adsorbed H2O molecules agree well between the ab initio and force field predictions. H2O addition above that required to form a monolayer results in consistent structures between the DFT-PW and classical force field results as well.     

CO2 adsorption on TiO2(110) rutile: insight from dispersion-corrected density functional theory calculations and scanning tunneling microscopy experiments

Adsorption of CO(2) on the rutile(110) surface was investigated using dispersion-corrected density functional theory and scanning tunneling microscopy (STM). On the oxidized surface the CO(2) molecules are found to bind most strongly at the five-fold coordinated Ti sites adopting tilted or flat configurations. The presence of bridging oxygen defects introduces two new adsorption structures, the most stable of which involves CO(2) molecules bound in tilted configurations at the defect sites. Inclusion of dispersion corrections in the density functional theory calculations leads to large increases in the calculated adsorption energies bringing these quantities into good agreement with experimental data. The STM measurements confirm two of the calculated adsorption configurations.     

Studies of iridium nanoparticles using density functional theory calculations

The energetics and the electronic and magnetic properties of iridium nanoparticles in the range of 2-64 atoms were investigated using density functional theory calculations. A variety of different geometric configurations were studied, including planar, three-dimensional, nanowire, and single-walled nanotube. The binding energy per atom increases with size and dimensionality from 2.53 eV/atom for the iridium dimer to 6.09 eV/atom for the 64-atom cluster. The most stable geometry is planar until four atoms are reached and three-dimensional thereafter. The simple cubic structure is the most stable geometric building block until a strikingly large 48-atom cluster, when the most stable geometry transitions to face-centered cubic, as found in the bulk metal. The strong preference for cubic structure among small clusters demonstrates their rigidity. This result indicates that iridium nanoparticles intrinsically do not favor the coalescence process. Nanowires formed from linear atomic chains of up to 4-atom rings were studied, and the wires formed from 4-atom rings were extremely stable. Single-walled nanotubes were also studied. These nanotubes were formed by stacking 5- and 6-atom rings to form a tube. The ring stacking with each atom directly above the previous atom is more stable than if the alternate rings are rotated.     

Recent applications of density functional theory calculations to biomolecules

The purpose of this overview is to highlight the broad scope and utility of current applications of density functional theory (DFT) methods for the study of the properties and reactions of biomolecules. This is illustrated using examples selected from research carried out within our research group and in collaboration with others. The examples include the hyperfine coupling constants of amino acid radicals, the use of an amino acid as a chiral catalyst for the formation of carbon–carbon bonds in the aldol reaction, hydrogen-bond mediated catalysis of an aminolysis reaction, radiation-induced protein–DNA cross-links, and the mechanism by which an antitumor drug cleaves DNA. We demonstrate that DFT-based methods can be applied successfully to a broad range of problems that remain beyond the scope of conventional electron-correlation methods. Furthermore, we show that contemporary computational quantum chemistry complements experiment in the study of biological systems. Received: 19 December 2001 / Accepted: 8 April 2002 / Published online: 4 July 2002     

Methylation of zebularine investigated using density functional theory calculations

Deoxyribonucleic acid (DNA) methylation is an epigenetic phenomenon, which adds methyl groups into DNA. This study reveals methylation of a nucleoside antibiotic drug 1‐(β‐D ‐ribofuranosyl)‐2‐pyrimidinone (zebularine or zeb) with respect to its methylated analog, 1‐(β‐D ‐ribofuranosyl)‐5‐methyl‐2‐pyrimidinone (d5) using density functional theory calculations in valence electronic space. Very similar infrared spectra suggest that zeb and d5 do not differ by types of the chemical bonds, but distinctly different Raman spectra of the nucleoside pair reveal that the impact caused by methylation of zeb can be significant. Further valence orbital‐based information details on valence electronic structural changes caused by methylation of zebularine. Frontier orbitals in momentum space and position space of the molecules respond differently to methylation. Based on the additional methyl electron density concentration in d5, orbitals affected by the methyl moiety are classified into primary and secondary contributors. Primary methyl contributions include MO8 (57a), MO18 (47a), and MO37 (28a) of d5, which concentrates on methyl and the base moieties, suggest certain connection to their Frontier orbitals. The primary and secondary methyl affected orbitals provide useful information on chemical bonding mechanism of the methylation in zebularine. © 2011 Wiley Periodicals, Inc. J Comput Chem, 2011