同步对称双栅InGaZnO薄膜晶体管电势模型研究

研究了同步对称双栅氧化铟镓锌薄膜晶体管(InGaZnO thin film transistors,IGZO TFTs)的沟道电势,利用表面电势边界方程联合Lambert函数推导得到了器件沟道电势的解析模型.该模型考虑了IGZO薄膜中存在深能态及带尾态等缺陷态密度,能够同时精确地描述器件在亚阈区(sub-threshold)与开启区(above threshold)的电势分布.基于所提出的双栅IGZO TFT模型,讨论了不同厚度的栅介质层和有源层时,栅-源电压对双栅IGZO TFT的表面势以及中心势的调制效应.对比分析了该模型的计算值与数值模拟值,结果表明二者具有较高的符合程度.     

Extraction of density-of-states in amorphous InGaZnO thin-film transistors from temperature stress studies

The instability of amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) with different active layer thicknesses under temperature stress has been investigated through using the density-of-states (DOS). Interestingly, the a-IGZO TFT with 22 nm active layer thickness showed a better stability than the others, which was observed from the decrease of interfacial and semiconductor bulk trap densities. The DOS was calculated based on the experimentally-obtained activation energy (E_A), which can explain the experimental observations. We developed the high-performance Al₂O₃ TFT with 22 nm IGZO channel layer (a high mobility of 7.4 cm²/V, a small threshold voltage of 2.8 V, a high I_on/I_off 1.8 × 10⁷, and a small SS of 0.16 V/dec), which can be used as driving devices in the next-generation flat panel displays.     

Effects of active layer thickness on performance and stability of dual-active-layer amorphous InGaZnO thin-film transistors

Dual-active-layer(DAL) amorphous InGaZnO(IGZO) thin-film transistors(TFTs) are fabricated at low temperature without post-annealing. A bottom low-resistance(low-R) IGZO layer and a top high-resistance(high-R) IGZO layer constitute the DAL homojunction with smooth and high-quality interface by in situ modulation of oxygen composition. The performance of the DAL TFT is significantly improved when compared to that of a single-active-layer TFT. A detailed investigation was carried out regarding the effects of the thickness of both layers on the electrical properties and gate bias stress stabilities. It is found that the low-R layer improves the mobility, ON/OFF ratio, threshold voltage and hysteresis voltage by passivating the defects and providing a smooth interface. The high-R IGZO layer has a great impact on the hysteresis, which changes from clockwise to counterclockwise. The best TFT shows a mobility of 5.41 cm~2/V·s, a subthreshold swing of 95.0 mV/dec, an ON/OFF ratio of 6.70 × 10~7, a threshold voltage of 0.24 V, and a hysteresis voltage of 0.13 V. The value of threshold voltage shifts under positive gate bias stress decreases when increasing the thickness of both layers.     

Surface modified polymeric gate insulators for pentacene organic thin-film transistors

This paper demonstrates effects of a surface modification of polymeric gate insulators on a performance of organic thin-film transistor (OTFT). Pentacene OTFTs were fabricated with three types of polymer gate insulators—poly(4-vinylphenol) (PVP, G1) with comparably high dielectric constant, polyimide (PI, G2) with n-octadecyl (C₁₈) side chain, which resulted in hydrophobicity and low dielectric constant, and surface modified PVP(G3). The G3 was prepared by a spin-coating the solution of G2 onto the G1 film. We found that the n-octadecyl group of the G3 protruded from the surface and made the PVP surface more hydrophobic. The less polar surface strongly improved the device performance. Subthreshold slope (s.s.) of the OTFT with G3 as the gate insulator decreased significantly to 2.7 V/dec, which was much smaller than that of OTFTs fabricated with G1 (4.0 V/dec). That is, thin layer with fewer C₁₈ group in contact with pentacene induced a good electrical property like lower s.s. Further the higher dielectric constant of the underlying layer resulted in higher mobility of the device. The mobility (0.50 cm² V⁻¹ s⁻¹) of the OTFT with G3 as the gate insulator showed a higher value compared to that (0.25 cm² V⁻¹ s⁻¹) of the OTFT with G2.     

Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition

Ta₂O₅/Al₂O₃ stacked thin film was fabricated as the gate dielectric for low-voltage-driven amorphous indium–gallium–zinc-oxide (IGZO) thin film transistors (TFTs). The Ta₂O₅/Al₂O₃ stacked thin film exhibits a combination of the advantages of Al₂O₃ and Ta₂O₅. The IGZO TFT with Ta₂O₅/Al₂O₃ stack exhibits good performance with large saturation mobility of 26.66 cm² V⁻¹ s⁻¹, high on/off current ratio of 8 × 10⁷, and an ultra-small subthreshold swing (SS) of 78 mV/decade. Such small SS value is even comparable with that of submicrometer single-crystalline Si MOSFET.     

Dynamic analytical model for charge transport in octithiophene thin film transistors

In this paper, we develop a device model of an organic thin film transistor (OTFTs) in which the active layers are made of octithiophene. This model is based on variable range hopping theory, i.e., a carrier may either hop over a small distance with a high activation energy or hop over a long distance with a low activation energy. The model takes into account all the operating regimes in direct current and transient mode; the transistor symmetry is also considered. The model has been developed using a physical basis where the model parameters can easily be extracted. The current–voltage characteristics of short-channel organic TFTs have been calculated starting from the solution of the drain current equation for an enhancement mode p-channel MOSFET. A good agreement between theory model and experimental results is obtained. Different transport parameters are extracted by using a fitting method. We have extracted the mobility of charge in saturation regime using differential method. Based on first and second derivative of transfer characteristic we extracted a serial resistance, intrinsic mobility and threshold voltage. The mobility in saturation regime is reproduced using the VRH model. Finally, we give a simple small-signal equivalent circuit.     

Organic passivation layers for pentacene organic thin-film transistors

We studied the passivation layers for pentacene organic thin-film transistors (OTFTs) that were used to drive the active-matrix organic-light-emitting-diodes (AMOLEDs) fabricated by inkjet process. Conventional polyvinyl acetate (PVA) passivation layer could not protect OTFT channel from poly(3,4-ethylenedioxythiophene):poly(styrene sulfonic acid) (PEDOT:PSS) inkjet process so that the performance was degraded critically after the process. By applying PVA/PVA/photoacryl (PA) multi-passivation layers, we could get OTFT arrays with switching ratio over 10⁶ even after PEDOT:PSS process. Using these OTFTs, we could drive AMOLEDs made by inkjet process.     

Polymer thin-film transistors with high dielectric constant gate insulators

Field-effect transistors consisting of poly(3-hexylthiophene) have been fabricated with high dielectric constant SrBi₂Ta₂O₉ films working as the gate insulator. Significantly enhanced gate effects were observed in these devices compared to similar transistors with conventional SiO₂ gate dielectric. Our devices exhibited operating voltages around 10 V, as compared to about 100 V for devices employing SiO₂ as the gate dielectric. Moreover, inverters based on such polymer transistors were demonstrated with nice input–output characteristics. PACS 82.35.Cd     

Laser forward transfer of silver electrodes for organic thin-film transistors

Organic thin-film transistors (OTFTs) with top- and bottom-contact configurations were fabricated using silver nano-inks printed by laser forward transfer for the gate and source/drain electrodes with pentacene and poly-4-vinylphenol as the organic semiconductor and dielectric layers, respectively. The volume of the laser-printed Ag pixels was typically in the subpicoliter (0.2–0.4 pl) range. The top-contact OTFTs resulted in lower contact resistance compared to those obtained from the bottom-contact OTFTs, and showed improved overall device performance. The top-contact OTFTs exhibited field-effect mobilities of ∼0.16 cm² V⁻¹ s⁻¹ and on/off current ratios of ∼10⁵.     

Optimization of pulsed laser deposited ZnO thin-film growth parameters for thin-film transistors (TFT) application

In this work we present the optimization of zinc oxide (ZnO) film properties for a thin-film transistor (TFT) application. Thin films, 50±10 nm, of ZnO were deposited by Pulsed Laser Deposition (PLD) under a variety of growth conditions. The oxygen pressure, laser fluence, substrate temperature and annealing conditions were varied as a part of this study. Mobility and carrier concentration were the focus of the optimization. While room-temperature ZnO growths followed by air and oxygen annealing showed improvement in the (002) phase formation with a carrier concentration in the order of 10¹⁷–10¹⁸/cm³ with low mobility in the range of 0.01–0.1 cm²/V?s, a Hall mobility of 8 cm²/V?s and a carrier concentration of 5×10¹⁴/cm³ have been achieved on a relatively low temperature growth (250 °C) of ZnO. The low carrier concentration indicates that the number of defects have been reduced by a magnitude of nearly a 1000 as compared to the room-temperature annealed growths. Also, it was very clearly seen that for the (002) oriented films of ZnO a high mobility film is achieved.     

Room-temperature fabrication of ultra-thin ZrOx dielectric for high-performance InTiZnO thin-film transistors

In this letter, indium–titanium–zinc–oxide thin-film transistors with zirconium oxide (ZrO_x) gate dielectric were fabricated at room temperature. In the devices, an ultra-thin ZrO_x layer was formed as the gate dielectric by sol–gel process followed by ultraviolet (UV) irradiation. The devices can be operated under a voltage of 4 V. Enhancement mode operations with a high field-effect mobility of 48.9 cm²/V s, a threshold voltage of 1.4 V, a subthreshold swing of 0.2 V/decade, and an on/off current ratio of 10⁶ were realized. Our results demonstrate that UV-irradiated ZrO_x dielectric is a promising gate dielectric candidate for high-performance oxide devices.     

A photosensitive copolymer for the gate insulator of organic thin-film transistors

A novel cross-linkable copolymer for the gate insulators of organic thin-film transistors (OTFTs) was synthesized by free radical copolymerization with methyl methacrylate and ethylene methylacrylate cinnamoylate. Copolymers of molecular weights (Mn: 109200–160000 g mol⁻¹) and polydispersities (1.59–2.24) were characterized by FTIR and NMR. Spin-coated thin films had smooth surfaces with the root-mean-square (RMS) surface roughness of 0.23 nm, 0.41 nm, respectively, before and after UV irradiation. Exposure of the copolymers to UV light produced cross-linking of the polymeric chains that could be confirmed by comparing the FTIR and UV spectra recorded prior and after irradiation. Moreover, the vanadyl-phthalocyanine (VOPc) OTFTs with the photosensitive copolymer as gate insulator were fabricated and found to exhibit a carrier mobility of 0.25 cm²/V s, an on/off ratio of 10⁴.     

Tuning the contact resistance in organic thin-film transistors with an organic-inorganic hybrid interlayer

We demonstrated the tunable contact resistance in pentacene thin film transistor (TFT) by inserting an organic-inorganic hybrid interlayer between Au electrode and pentacene layer. The contact resistance of pentacene-TFT varies with concentration of pentacene-TFT varies with concentration of MoO_x in organic-inorganic hybrid interlayer. MoO_x in organic-inorganic hybrid interlayer. The contact resistance of the device with 55 wt% MoO_x doped pentacene interlayer is about 7.8 times smaller than that of device without interlayer at the gate voltage of −20 V. Comparing the properties of pentacene-TFT without interlayer, the performance of the pentacene-TFT with 55 wt% MoO_x doped pentacene was significantly improved: saturation mobility increased from 0.39 to 0.87 cm²/V s, threshold voltage reduced from −21.3 to −7.2 V, and threshold swing varied from 3.75 to 1.39 V/dec. Our results indicated that the organic-inorganic hybrid interlayer is an effective way to improve the performance of p-channel OTFTs.     

A dynamic rheological model for thin-film lubrication

In this study, the effects of the non-Newtonian rheological properties of the lubricant in a thin-film lubrication regime between smooth surfaces were investigated. The thin-film lubrication regime typically appears in Stribeck curves with a clearly observable minimum coefficient of friction (COF) and a low-COF region, which is desired for its lower energy dissipation. A dynamic rheology of the lubricant from the hydrodynamic lubrication regime to the thin-film lubrication regime was proposed based on the convected Maxwell constitutive equation. This rheology model includes the increased relaxation time and the yield stress of the confined lubricant thin film, as well as their dependences on the lubricant film thickness. The Deborah number (De number) was adopted to describe the liquid-solid transition of the confined lubricant thin film under shearing. Then a series of Stribeck curves were calculated based on Tichy's extended lubrication equations with a perturbation of the De number. The results show that the minimum COF points in the Stribeck curve correspond to a critical De number of 1.0, indicating a liquid-to-solid transition of the confined lubricant film. Furthermore, the two proposed parameters in the dynamic rheological model, namely negative slipping length b (indicating the lubricant interfacial effect) and the characteristic relaxation time λ 0 , were found to determine the minimum COF and the width of the low-COF region, both of which were required to optimize the shape of the Stribeck curve. The developed dynamic rheological model interprets the correlation between the rheological and interfacial properties of lubricant and its lubrication behavior in the thin-film regime.     

Characterization of magnesium oxide gate insulators grown using RF sputtering for ZnO thin-film transistors

A ZnO thin-film transistor (TFT) with an MgO insulator was fabricated on a silicon (100) substrate using a radiofrequency magnetron sputtering system. The MgO insulator was deposited using the same deposition system; the total pressure during the deposition process was maintained at 5 mTorr, and the oxygen percentage of O₂/(Ar + O₂) was set at 30%, 50%, or 70%. The process temperature was maintained at below 300 °C. The dielectric constant of the MgO thin layer was approximately 11.35 with an oxygen percentage of 70%. This ZnO TFT displayed enhanced transistor properties, with a field-effect mobility of 0.0235 cm² V⁻¹ s⁻¹, an I_ON/I_OFF ratio of ∼10⁵, and an SS value of 1.18 V decade⁻¹; these properties were superior to those measured for the MgO insulators synthesized using oxygen percentages of 30% and 50%.     

Degradation mechanisms for a-InGaZnO thin-film transistors functioning under simultaneous DC gate and drain biases

Degradation of a-InGaZnO thin-film transistors working under simultaneous DC gate and drain bias stress is investigated, and the corresponding degradation mechanism is proposed and verified. The maximum degradation occurs under the bias stress condition that makes the electric field and electron concentration relatively high at the same time. Trapping of hot electrons in the etching-stop layer under the extended drain electrode is proven to be the underlying mechanism. The observed degradation phenomena, including distortion in the transfer curve on a logarithmic scale and two-slope dependence on gate bias on a linear scale, current crowding in the output curve, and smaller degradation in transfer curves measured under large drain bias, can all be well explained with the proposed degradation mechanism.     

Modeling of polycrystalline ZnO thin-film transistors with a consideration of the deep and tail states

We report a model of the carrier transport and the subgap density of states in a polycrystalline ZnO film for simulating a polycrystalline ZnO thin film transistor. This simple model considering the deep and the band tail states reproduces well the characteristics of polycrystalline ZnO thin film transistors. Furthermore, using the developed model, we study the effects of defect parameters on the electrical performances of the polycrystalline ZnO thin film transistors.