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Received: 21 May 1997/Accepted: 4 July 1997  相似文献   

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3 by short ultraviolet laser pulses (0.5 ps, 248 nm) is presented. Gratings with a period of 360 nm and a modulation depth of 80 nm are fabricated on the sample surface by single-laser-shot exposure. The structures are projection imaged by a Schwarzschild objective in air. The modulation depth can be varied by applying multiple-pulse exposure. Received: 18 July 1997/Accepted: 5 August 1997  相似文献   

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2 . Received: 20 January 1997/Accepted: 23 June 1997  相似文献   

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Received: 21 April 1997/Revised version: 15 June 1997  相似文献   

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Received: 25 February 1997/Revised version: 20 June 1997  相似文献   

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