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1.
An X-ray preionised ArF and KrF excimer laser has been studied with three different spiker-sustainer excitation circuits. We observed large differences in the laser performance, when the preionisation delay timing was varied on a nanosecond timescale. The behaviour of both lasers was found to be equivalent. The observations can be understood by considering the effect of the discharge excitation technique on the preionisation process. An excitation mode with a prepulse well above the steady-state voltage VSS with a subsequent reversed overshoot voltage for initiating the discharge, in combination with a well-timed preionisation pulse is found to give the best results. Optimum output energies of 50 mJ with ArF and 175 mJ with KrF were obtained from an active volume of 60×1.5×1.2 cm in the so-called swing mode, with the preionisation applied 60 ns before the discharge breakdown. Received: 23 February 1999 / Revised version: 4 June 1999 / Published online: 16 September 1999  相似文献   

2.
The enhanced efficiency, almost by a factor of 9, of preionisation when the laser is self-switched by a mutually coupled parallel spark preioniser as against its conventional operation with inductively ballasted preioniser, has been demonstrated in the operation of a TEA CO2 laser. The increased preionisation peak current due to the near ballast free operation of the mutually coupled parallel spark channels is shown to be responsible for the observed behavior.  相似文献   

3.
The construction and performance of an X-ray preionised XeCl discharge laser is described. The laser gives an output energy of up to 4.65 J with a pulse duration ?140 ns and a beam cross-section of 4.2 x 3.0 cm2. Electrical efficiencies of up to 3.2% have been obtained without the use of an external prepulse circuit. This is 90% of the efficiency which is predicted to be possible using such a circuit in this laser system.  相似文献   

4.
6 shots, the X-ray dose, uniformity, and ionisation rate values guarantee an effective preionisation of excimer laser discharges. Owing to both the long lifetime and the substantial absence of maintenance, this X-ray diode seems suitable to preionise commercial gas lasers, such as excimer and TEA CO2 lasers. Received: 28 August 1998 / Revised version: 16 November 1998 / Published online: 24 February 1999  相似文献   

5.
The influence of the preioniser and main discharge circuit parameters on the performance of a high pressure UV preionised KrF laser using NF3 as the fluorine donor has been investigated. Output laser energy densities of 1.7J·1−1 based on the mode volume have been obtained under optimised conditions.  相似文献   

6.
The wavelength tuning characteristics of a compact uv preionised CO2 laser operating at pressures in the range 8–12 atmospheres are reported. This laser, with a gain length of 16 cm, is demonstrated to have a continuous tuning range of 17 cm-1 in the 10.4 μm P-branch and 12 cm-1 in the R branch at 10 atmospheres.  相似文献   

7.
We report here the reliable and efficient operation of a mini-TEA CO2 laser utilizing uniform field electrodes wherein the parallel spark channels of the preioniser, an integral part of the laser, functioned as a switch as well as a source of UV photons. The operation of the laser has been realized up to a maximum energy loading of ∼197 J/l atm under widely varying gas composition including helium lean as well as helium-free gas mixtures. Under most optimized conditions the laser operated with an efficiency of ∼7.1%. The spatially symmetric nature of the emission from the laser in spite of the one sided preionisation points to the effectiveness of the excitation circuit employed here to energise the laser.  相似文献   

8.
The voltage-current characteristics of a UV preionised CO2 laser operating at pressures ?13 atmospheres have been investigated and the quasi-steady glow and breakdown fields measured. The discharge resistivity has been found to be a function of the applied excitation field and a simple model has been developed to explain the results obtained.  相似文献   

9.
Performance of an X-ray preionised XeCl excimer laser is presented, a maximum output of 30 W (1.2 J/25 Hz) has been obtained. This laser was applied in laser semiconductor processing, laser deposition and laser photolithography.  相似文献   

10.
1 Introduction The investigation of supersonic radiation wave transporting in low density foam pro-duced by thermal radiation is of crucial importance in inertial confinement fusion (ICF) research[1]. When the intense radiation flux is incident in the media, first, a supersonic heat wave is formed which propagates into the undisturbed material. In time, due to the increasing mass of heated material, it slows down and is overtaken by a shock wave,thus becoming of the ablative type. Normally, …  相似文献   

11.
3 , has been performed in Ne/SF6/H2 and Ne/SF6/C2H6 mixtures. Parameters involved have been the storage line capacitance and the circuit inductance, the capacitors charging voltage, the RH-molecule type and partial pressure, and the X-ray dose for the preionization. High laser performance has been achieved with C2H6: an output energy up to 3 J corresponding to a specific energy of 9.6 J/l at an efficiency of 4.7%, which strengthens the advantage of the photo-triggering technique to energize high-power HF lasers. However the optimum performance achieved with H2, 5.75 J/l and 3.5%, are lower. It is shown, through a time-resolved study of the electrical discharge and spatial dynamics correlated to laser power and energy measurements, that discharge instabilities are responsible for the poor laser performance of the mixture with H2. These instabilities, which lead to arc development, are characteristics of the discharge in Ne/SF6. It is demonstrated for the first time that addition of a heavy hydrocarbon, such as C2H6, to that mixture induces the discharge stabilization so that the laser emission arises in a homogeneous active medium. This effect allows us to achieve better laser performance than with H2. Received: 17 March 1998/Revised version: 13 July 1998  相似文献   

12.
ZnO thin films were prepared on soda-lime glass from a single spin-coating deposition of a sol-gel prepared with anhydrous zinc acetate [Zn(C2H3O2)2], monoethanolamine [H2NC2H4OH] and isopropanol. The deposited films were dried at 50 and 300 °C. X-ray analysis showed that the films were amorphous. Laser annealing was performed using an excimer laser. The laser pulse repetition rate was 25 Hz with a pulse energy of 5.9 mJ, giving a fluence of 225 mJ cm−2 on the ZnO film. Typically, five laser pulses per unit area of the film were used. After laser processing, the hexagonal wurtzite phase of zinc oxide was observed from X-ray diffraction pattern analysis. The thin films had a transparency of greater than 70% in the visible region. The optical band-gap energy was 3.454 eV. Scanning electron microscopy and profilometry analysis highlighted the change in morphology that occurred as a result of laser processing. This comparative study shows that our sol-gel processing route differs significantly from ZnO sol-gel films prepared by conventional furnace annealing which requires temperatures above 450 °C for the formation of crystalline ZnO.  相似文献   

13.
Laser alloying of Ni–P electroless deposited layer with aluminum substrate was carried out by Nd–YAG pulsed laser. The phase composition and microstructure of the alloyed layers produced by different laser power densities were identified by X-ray diffractionary (XRD), scanning electron microscope (SEM) accompanied by energy dispersion X-ray analysis (EDS) and transmission electron microscope (TEM). Furthermore, the surface roughness of the alloyed layers was characterised by confocal laser scanning microscope (CLSM). The results showed that the characteristic dendritic or lamellar microstructures were observed in the alloyed layers. The phase constituents of the alloyed zones were intermetallic compounds of nickel–aluminum NiAl, Al3Ni and Al3Ni2, as well as some non-equilibrium phases and amorphous phases depending on the employed laser power density. As a result, the microhardness of the alloyed layer with Ni–P amorphous phases formed at laser power density 5.36×109 W/m2 reached to HV0.1 390.  相似文献   

14.
《Current Applied Physics》2010,10(2):565-569
The polycrystalline Cu2ZnSnS4 (CZTS) thin films have been prepared by pulsed laser deposition (PLD) method at room temperature. The laser incident energy was varied from 1.0 at the interval of 0.5–3.0 J/cm2. The effect of laser incident energy on the structural, morphological and optical properties of CZTS thin films was studied by means of X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and optical absorption. The studies reveal that an improvement in the structural, morphological and optical properties of CZTS thin films with increasing laser incident energy up to 2.5 J/cm2. However, when the laser incident energy was further increased to 3.0 J/cm2, leads to degrade the structural, morphological and optical properties of the CZTS thin films.  相似文献   

15.
Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 μm YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO2 cryogenic target. Soft X-ray spectra from the CO2 cryogenic target are obtained. Experimental results of debris measurement from both CO2 cryogenic and Cu targets demonstrate that the light source based on the CO2 cryogenic target shows great improvement over conventional metal targets in debris reduction.  相似文献   

16.
In this work, the evidence of SF6 gas decomposition at the vicinity of SiO2 glass has been investigated using various laser wavelengths: at 193, 248, 532 and 1064 nm. It was shown that SiF4 gas and S2F10 clusters were simultaneously created during ArF excimer laser irradiation, while no by-products were seen in the irradiation cell using Q-switched Nd:YAG laser. The gas content analysis was carried out using laser breakdown spectroscopy (LIBS) and Fourier transform IR spectroscopy (FTIR). Moreover, the fluorine penetration into the glass surface was studied by energy dispersive X-ray (EDX) microanalysis and wavelength dispersive X-ray (WDX) mapping to support the suggested mechanisms.  相似文献   

17.
Tungsten oxide nanoparticles were fabricated by a pulsed laser ablation method in deionized water using the first harmonic of a Nd:YAG laser (λ=1064 nm) at three different laser pulse energies (E1 =160, E2 =370 and E3 =500 mJ/pulse), respectively. The aim is to investigate the effect of laser pulse energy on the size distribution and gasochromic property of colloidal nanoparticles. The products were characterized by dynamic light scattering (DLS), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and UV-Vis spectroscopy. The results indicated that WO3 nanoparticles were formed. After ablation, a 0.2 g/l PdCl2 solution was added to activate the solution against hydrogen gas. In this process Pd2+ ions were reduced to deposit fine metallic Pd particles on the surface of tungsten oxide nanoparticles. The gasochromic response was measured by H2 and O2 gases bubbling into the produced colloidal Pd–WO3. The results indicate that the number of unreduced ions (Pd2+) decreases with increasing laser pulse energy; therefore, for colloidal nanoparticles synthesized at the highest laser pulse energy approximately all Pd2+ ions have been reduced. Hence, the gasochromic response for this sample is nearly reversible in all cycles, whereas those due to other samples are not reversible in the first cycle.  相似文献   

18.
The interaction of ultrashort laser pulses with solid state targets is studied concerning the production of short X-ray pulses with photon energies up to about 10 keV. The influence of various parameters such as pulse energy, repetition rate of the laser system, focusing conditions, the application of prepulses, and the chirp of the laser pulses on the efficiency of this highly nonlinear process is examined. In order to increase the X-ray flux, the laser pulse energy is increased by a 2nd multipass amplifier from 750 μJ to 5 mJ. By applying up to 4 mJ of the pulse energy a X-ray flux of 4×1010 Fe K α photons/s or 2.75×1010 Cu K α photons/s are generated. The energy conversion efficiency is therefore calculated to η Fe≈1.4×10−5 and η Cu≈1.0×10−5. The X-ray source size is determined to 15×25 μm2. By focusing the produced X-rays using a toroidally bent crystal a quasi-monochromatic X-ray point source with a diameter of 56 μm×70μm is produced containing ≈104 Fe K α1 photons/s which permits the investigation of lattice dynamics on a picosecond or even sub-picosecond time scale. The lattice movement of a GaAs(111) crystal is shown as a typical application.  相似文献   

19.
Luminescent properties of PbI2 and PbI2: 0.5 mol % MnCl2 crystals under X-ray or N2-laser excitation are studied experimentally. The measurements are performed at temperatures ranging from 85 to 295 K. For PbI2 crystals under laser excitation, spectral bands with peaks near 495 and 512 nm, respectively, are observed at 85 K. With X-ray excitation at the same temperature, luminescence is observed in the 515-and 715-nm bands. The doping decreases the intensity in the 515-nm band, increases it for longer wavelengths, and shifts the highest peak to 700 nm. At 85 K, the doping has an insignificant effect on the excitation energy accumulated by trapped electrons. Certain PbI2 crystals also exhibit a peak in a region of 580–595 nm. This peak becomes much higher if the crystal is treated with an N2 laser at room temperature or if it is heated to 450–485 K. As the measurement temperature rises from 85 to 295 K, luminescence intensity decreases considerably. With X-ray excitation at room temperature, the yield of PbI2: Mn luminescence peaked at 660 nm for doped crystals is about three times larger than the yield peaked at 555 nm for nondoped crystals. The spectral curves and underlying radiative processes are discussed.  相似文献   

20.
Thin films of a-SiOx (0 < x < 2) were prepared by reactive r.f. magnetron sputtering from a polycrystalline-silicon target in an Ar/O2 gas mixture. The oxygen partial pressure in the deposition chamber was varied so as to obtain films with different values of x. The plasma was monitored, during depositions, by optical emission spectroscopy (OES) system. Energy dispersive X-ray (EDX) measurements and infra-red (IR) spectroscopy were used to study the compositional and structural properties of the deposited layers.Structural modifications of SiOx thin films have been induced by UV photons’ bombardment (wavelength of 248 nm) using a pulsed laser. IR spectroscopy and X-ray photoemission spectroscopy (XPS) were used to investigate the structural changes as a function of x value and incident energy. SiOx phase separation by spinodal decomposition was revealed. The IR peak position shifted towards high wavenumber values when the laser energy is increased. Values corresponding to the SiO2 material (only Si4+) have been found for laser irradiated samples, independently on the original x value. The phase separation process has a threshold energy that is in agreement with theoretical values calculated for the dissociation energy of the investigated material.For high values of the laser energy, crystalline silicon embedded in oxygen-rich silicon oxide was revealed by Raman spectroscopy.  相似文献   

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