An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure

Love mode acoustic devices are very promising as biosensors in liquid environments because of their high sensitivity. An experimental study of Love mode sensors based on ZnO/90 degrees rotated ST-cut quartz structure with different sputtering conditions to deposit ZnO films is presented. In order to achieve sensor with higher sensitivity, the effects of sputtering substrate temperatures to deposit ZnO films on the sensitivity of viscosity and conductivity were investigated. Phase velocity, sensitivity and temperature coefficient of frequency (TCF) of Love wave devices have been studied. The Love wave sensor has higher sensitivity as sputtering ZnO films on the unheated substrate than that of on the heated substrate. The maximum sensitivity up to -18.77 x 10(-8) m(2) s kg(-1) of ZnO film with thickness of 1.8 microm for a wavelength of 40 microm is much bigger than SiO(2)/quartz structure. In this research, we report ZnO/90 degrees rotated ST-cut quartz structure of Love wave sensors with high sensitivity of viscosity and conductivity in liquid circumstance and TCF of quartz is compensated by ZnO film.     

Hydrogen detection with surface acoustic transverse waves

Summary A new hydrogen sensor is here presented, based on the use of horizontally polarized surface transverse waves (STW). The use of these waves for application to chemical sensors seems attractive because of the possibility of controlling their penetration depth into the substrate and thus increasing the sensitivity of the device. Preliminary experiments, performed on a ST-cut quartz substrate, have shown how the response of the device strongly increases with the STW energy trapping in the sensitive Pd film.     

ZnO thin film with nanorod arrays applied to fluid sensor

A ZnO guiding layer with nanorod arrays grown on a 90°-rotated ST-cut (42°45) quartz substrate was used to fabricate a Love wave fluid sensor. ZnO nanorod arrays synthesized on the guiding layer enhance the sensitivity of the flow rate. ZnO thin films were deposited by radio frequency magnetron sputtering and ZnO nanorod arrays were then synthesized on the thin films via the hydrothermal method. The crystalline structure and surface morphology of ZnO thin films and nanorod arrays were examined by X-ray diffraction and scanning electron microscopy. The effects of the thickness of ZnO thin film and the surface morphology of ZnO nanorod arrays on the sensitivity of flow rate were investigated. A linear response between flow rate and the return loss of the sensor with one-port resonator type can be obtained by adjusting the thickness of ZnO thin film and the length of nanorod arrays.     

谐振式检测器指条厚度对质量型声表面波传感器灵敏度的影响

研究了谐振器指条厚度对质量型声表面波传感器灵敏度的影响.利用耦合模方程推导出耦合模参量与周期栅阵禁带边界频率的关系,结合有限元及P矩阵模型,获得了声表面波传感器灵敏度随指条厚度的变化关系。制备3种不同铝指条厚度(1600?,1900?,3100?)的声表面波谐振器,通过对其表面中心区域沉积SiO_2层验证了计算结果。结果表明:采用ST-X石英基底的声表面波谐振器对SiO_2负载检测时,传感器的灵敏度随铝指条厚度的增加先变大后减小,最优归一化指条厚度为1.9%。分析表明,指条厚度对传感器灵敏度的影响主要来自于传播速度和耦合系数的共同作用,通过优化指条厚度的方法可改善传感器的灵敏度.     

Bragg reflection during the propagation of magnetoelastic microwave pulses in a structure consisting of a ferrite thin film on a dielectric substrate

The propagation of a microwave pulse in a ferrite thin film-substrate structure in a regime of rereflections (“ringing”) of the acoustic component of the substrate is studied theoretically. It is shown that as a result of the interaction of microwave pulses with the boundaries of the substrate, propagation of a microwave excitation in this system can be regarded as a propagation of a wave packet in a periodic nonuniform medium. The basic characteristics of a propagating wave packet are obtained. Zh. Tekh. Fiz. 69, 82–86 (December 1999)     

Sensing properties of normal oscillatory modes of quartz plates

Acoustical Physics - The responses (relative velocity variations Δv/v of normal (symmetric or asymmetric) Lamb and shear-horizontal modes of ST-cut quartz plates, whose thickness is comparable...     

Two-dimensional analysis of the effect of an electrode layer on surface acoustic waves in a finite anisotropic plate

The effect of a metal layer over an elastic substrate on surface acoustic wave propagating in the structure can be evaluated precisely for semi-infinite solids and infinite plates, but there is no accurate analytical solution if the finite size of the plate has to be considered. By expanding displacements with eigensolutions of surface acoustic waves in a semi-inifite solid, a set of two-dimensional equations similar to the Mindlin plate theory are obtained. Then for a thin electrode layer, the effect is considered through the approximation of displacements in the metal layer with the ones in the substrate, and an integration over the thickness incorporated the properties of the metal layer into equations through the modification of material properties with the decaying indices of surface acoustic waves and the thickness of the metal layer. Using AT-cut quartz crystal as the substrate, we present the effect of silver electrode layers of finite thickness on the phase velocity of propagating surface acoustic waves.     

Interaction of Love waves with coupled cavity modes in a 2D holey phononic crystal

The interaction of Love waves with square array of pillars deposited on a cavity defined in a 2D holey phononic crystal is numerically investigated using Finite Element Method. First, the existence of SH surface modes is demonstrated separately for phononic crystals that consist of square arrayed holes, or rectangular arrayed Ni pillars, respectively in, or on, a SiO₂ film deposited on a ST-cut quartz substrate. The coupling between SH modes and torsional mode in pillars induces a transmission dip that occurs at a frequency located in the range of the band-gap of the holey phononic crystal. Second, a cavity is constructed by removing lines of holes in the holey phononic crystal and results in a transmission peak that matches the dip. The optimal geometrical parameters enable us to create a coupling of the cavity mode and the localized pillar mode by introducing lines of pillars into the cavity, which significantly improved the efficiency of the cavity without increasing the crystal size. The obtained results will pave the way to implement advanced designs of high-performance electroacoustic sensors based on coupling modes in phononic crystals.     

The characteristics of surface acoustic waves on AlN/LiNbO3 substrates

The characteristics of surface-acoustic-wave (SAW) devices on various substrates were measured by a network analyzer in the temperature range from 0 to 80 °C. Based on the structure of IDT/AlN/LiNbO₃, it was revealed that the magnitude of the temperature coefficient of frequency (TCF) of a SAW on a LiNbO₃ substrate was significantly decreased due to the thickness increase of AlN thin film deposited on the LiNbO₃ substrate. The TCF of a SAW on an AlN/LiNbO₃ device was measured to be about -51 ppm/°C at h/λ=0.1, where h is the thickness of the AlN film and λ is the wavelength of the SAW. This indicates that the deposition of an AlN film on a LiNbO₃ substrate could improve the temperature stability, as compared with that of a SAW on a LiNbO₃ substrate (-73 ppm/°C). The SAW device on the ST-X quartz is shown to have a positive TCF as the AlN thin film is deposited on the surface of the ST-X quartz. In addition, the phase velocity (V_p) of the SAW on an AlN/LiNbO₃ substrate was significantly increased by the increase of AlN thickness (h/λ). Received: 14 October 2002 / Accepted: 15 October 2002 / Published online: 29 January 2003 RID="*" ID="*"Corresponding author. Fax: +886-7/525-4199, E-mail: ycc@ee.nsysu.edu.tw     

A study of the galvanic replacement reaction at surfaces and the role of lateral charge propagation

The galvanic replacement of isolated nanostructures of copper and silver on conducting supports as well as continuous films of copper with gold is reported. The surface morphology was characterized by scanning electron microscopy and the replacement with gold was confirmed by EDX analysis. It was found that lateral charge propagation during the replacement reaction had a significant effect in all cases. For the isolated nanostructures the deposition of gold was observed not only at the sacrificial template but also at the surrounding unmodified areas of the conducting substrate. In the case of copper films the role of lateral charge propagation was also confirmed by connecting it to an ITO electrode through an external circuit upon which gold deposition was also observed to occur. Interestingly, by inhibiting the rate of charge propagation, through the introduction of a series resistor, the morphology of gold on the copper substrate could be changed from discrete surface decoration with cube like nanoparticles to a more porous rough surface.     

Emissivity of the pulsed capacitive discharge in helium-iodine and neon-iodine mixtures

The emission parameters of a pulsed capacitive discharge initiated in helium-iodine and neon-iodine mixtures are reported. The discharge plasma emits at wavelengths of 183.0 and 206.2 nm, which correspond to iodine atom spectral lines. The capacitive discharge is initiated in a cylindrical quartz tube with an electrode distance of 10 cm. The discharge radiation is optimized in exciting pulse repetition rate and helium and neon pressures in He(Ne)-I₂ mixtures. The optimal pressures of helium, neon, and iodine vapor fall into the ranges 0.8–2.0 kPa, 0.5–1.0 Pa, and ≤60 Pa, respectively.     

Micromotion compensation in a surface electrode trap by parametric excitation of trapped ions

We report a surface electrode trap with a relatively large trap depth (0.6–1.0?eV). The trap electrodes are formed by gold plating an alumina substrate. Calcium ions are trapped approximately 400?μm above the trap surface. We demonstrate micromotion compensation based on parametric resonance for surface electrode traps. Unlike the conventional method based on radio-frequency (rf)–photon correlation in which the wave vector of the laser beam must have a component parallel to the micromotion to be detected, the proposed method is independent of the laser propagation direction. This enables the micromotion component normal to the electrode surface to be detected without increasing the scattered light.     

Study of ferrobielastic twinning in quartz under conditions of uniaxial pressure by the compound acoustic resonator method

The compound acoustic resonator method is used to study the phenomenon of the ferrobielastic transition in single crystals of quartz subjected to uniaxial pressure. Toward this end, a layered structure consisting of an aluminum film/zinc oxide film/aluminum film sandwich was deposited on one of the surfaces of an X-cut plane-parallel quartz plate. This structure served as an electromechanical transducer in such a way that the entire system acted as a multifrequency acoustic resonator. Uniaxial pressure was applied perpendicular to the direction of propagation of the acoustic waves and caused a growth of the frequencies of the resonance peaks of the structures, indicating a change in the velocity of the acoustic waves. The ferrobielastic phase transition, which arises at some threshold pressure (the ferrobielastic switching effect), is characterized by a discontinuous drop in the frequencies of the resonance peaks. The variation of the resonator frequency both below and above the switching threshold correlates with the variation of the so-called “natural” sound velocity determined by the pressure-dependent elasticity constants of the material. The observed frequency jump of the resonance peaks is due mainly to the relatively abrupt change in the dimensions of the crystal. The results of the acoustic measurements allow reliable recording of the switching effect and a study of its properties. Fiz. Tverd. Tela (St. Petersburg) 39, 290–294 (February 1997)     

The comparison between CdS thin films grown on Si(111) substrate and quartz substrate by femtosecond pulsed laser deposition

Two kinds of cadmium sulfate (CdS) thin films have been grown at 600 °C onto Si(111) and quartz substrates using femtosecond pulsed laser deposition (PLD). The influence of substrates on the structural and optical properties of the CdS thin films grown by femtosecond pulsed laser deposition have been studied. The CdS thin films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), photoluminescence (PL) and Raman spectroscopy. Although CdS thin films deposited both on Si(111) and quartz substrates were polycrystalline and hexagonal as shown by the XRD , SEM and AFM results, the crystalline quality and optical properties were found to be different. The size of the grains for the CdS thin film grown on Si(111) substrate were observed to be larger than that of the CdS thin film grown on quartz substrate, and there is more microcrystalline perpendicularity of c-axis for the film deposited on the quartz substrate than that for the films deposited on the Si substrate. In addition, in the PL spectra, the excitonic peak is more intense and resolved for CdS film deposited on quartz than that for the CdS film deposited on Si(111) substrate. The LO and TO Raman peaks in the CdS films grown on Si(111) substrate and quartz substrate are different, which is due to higher stress and bigger grain size in the CdS film grown on Si(111) substrate, than that of the CdS film grown on the amorphous quartz substrate. All this suggests that the substrates have a significant effect on the structural and optical properties of thin CdS films. PACS 81.15.Fg; 81.05.Ea; 78.20.-e; 78.67.-n; 42.62.-b     

Y旋转切割石英基片上的准纵漏表面声波

在理论和实验上对Y旋转切割石英基片上的准纵漏表面声波(快速声表面波)的传播特性作了比较全面的研究。准纵漏表面声波的相速度可以达到6200m/s~7100m/s,是常规声表面波相速度的两倍,接近纵波速度。理论计算和实验结果均表明:在Y旋转切割石英基片的某些传播方向上,准纵漏表面声波的束偏向角和延迟温度系数均较小。例如,沿欧拉角(0°,155.25°,42°)方向的准纵漏表面声波的相速度和延迟温度系数的实验测量值分别为6201m/s和12.9 ppm/℃。实验还表明,放置于基片表面的液体对准纵漏表面声波的吸收不大,说明此种声波质点振动集中在传播方向(沿表面方向),具有纵波的性质。     

Mechanical quality factor of high-overtone bulk acoustic resonator

Mechanical quality factor Qm is a key characteristic parameter of High-overtone bulk acoustic resonator(HBAR). The effects of structure parameter(thickness) and perfor?mance parameters(characteristic impedance and mechanical attenuation factor) of substrate,piezoelectric film and electrode constituting HBAR on Qm are carried out. The relationships between Qm and these parameters are obtained by a lumped parameter equivalent circuit instead of distributed parameter equivalent circuit near the resonance frequency, and the an?alytical expressions oi Qm are given. The results show that Qm increases non-monotonically with the continuous increase of the substrate thickness for HBAR with certain piezoelectric film thickness, and it approaches to the substrate material mechanical quality factor as the substrate thickness is large. Qm decreases wavily with the continuous increase of the piezoelectric film thickness for HBAR with certain substrate thickness. Sapphire and YAG with low mechanical loss are appropriate as the substrate to get a larger Qm- The electrode loss must be considered since it can reduce Qm- Compared with Au electrode, A1 electrode with lower loss can obtain higher Qm when the appropriate electrode thickness is selected. In addition, Qm decreases with the increase of frequency. These results provide the theoretical basis for optimizing the parameters of HBAR and show that trade-oflFs between Qm and must be considered in the design because their changes are often inconsistent.     

A new type of Time-Of-Propagation (TOP) Cherenkov detector for particle identification

A new type of particle identification (PID) detector based on measurements of 1-D Time-Of-Propagation (TOP) and 1-D space information is described. Geant4 toolkit is used to simulate the propagation of Cherenkov photon in thin quartz bar radiator. Contributions to the timing uncertainty are discussed. The π/K separability (S ₀) is defined and its dependence on the particle momentum, incident angle and propagation length are studied, respectively.     

Potentiometry with the acoustic near field microscope: A new method for microscopy of surface potentials

 We used a quartz tuning fork vibrating at 30 kHz both as an acoustic near field microscope and at the same time as a microscopic Kelvin probe. One leg of the tuning fork carried a small gold electrode serving as a conducting vibrating tip. By using this instrument and the method described here it is possible to measure simultaneously both the surface topography of the sample surface and the contact potential between tip and sample. The topography is observed by operating the instrument as an acoustic near field microscope. The contact potential between the vibrating tip and the sample gives rise to a displacement current which is used here for the determination of the contact potential. In first applications of this method we demonstrate that the contact potential can be measured with a sensitivity of at least 100 mV and a local resolution of about 5 μm. It seems possible to use the microscopic method described here also for investigating local potentials at low temperatures and even in high magnetic fields. For example, the microscopic study of the Hall voltages in the quantum Hall effect might be an interesting application. Received: 22 April 1996/Accepted: 18 June 1996     

The use of the platinum electrode coated with ultrathin poly(allylamine hydrochloride)/Nafion films for selective detection of hydrogen peroxide

In this paper, a novel polyelectrolyte multilayer (PEM) film-coated platinum electrode for the selective detection of H₂O₂ was presented. The PEM film was formed by the layer-by-layer assembly technique. The quartz crystal microbalance experiments showed that the thickness of the prepared Nafion layer was about 8 nm and depended on the pH of poly(allylamine hydrochloride) solution. The combination of different polyanions and polycations layers was investigated, and it is found that ploy(allylamine hydrochloride) (PAH) and Nafion composited film functioned best as a diffusion barrier toward uric acid (UA) and ascorbic acid (AA) while allowed H₂O₂ to pass through smoothly. When the platinum electrode coated with two-bilayer film, (PAH/Nafion)₂, the amperometric responses of 0.1 mM UA and 0.1 mM AA were respectively 0.008 and 0.006 μA, which were only 0.2% or less of the response of 0.1 mM H₂O₂ (4.0 μA). The linear response range of the electrode toward H₂O₂ was from 1.0 μM to 1.0 mM, and the detection limit was 0.3 μM. The electrode also displayed high operational stability and long-term storage stability.     

Single mode ridge waveguides based on vinyltriethoxysilane hybrid sol–gel material

In this work, fabrication and characterization of a single-mode vinyltriethoxysilane (VTES) based hybrid organic–inorganic sol–gel ridge waveguide is reported. VTES based hybrid sol–gel material has been deposited by multiple spin-coating process on quartz substrate. Channel waveguides have been fabricated by UV photopolymerization followed by wet etching process. Optical guided mode was observed to ensure the single mode condition while cut-back technique was performed for loss propagation measurement. Optical propagation losses were measured to be 1.6 dB/cm at 1.31 μm wavelength. This value shows that this material is a promising choice for the development of integrated optical circuits for telecommunication field.