Mechanism of the rf sputtering of mixed oxides

New experimental data on the growth mechanisms of multicomponent Pb(Zr,Ti)O₃, (Ba,Sr)TiO₃, and Y-Ba-Cu-O films in an rf discharge plasma are presented. An investigation of the spatial distribution of the radiated intensity of the sputtered particles in the rf plasma during the deposition of films of these mixed oxides in the epitaxial state reveals general laws governing their transport from the target to the substrate, which are stipulated by features of the negative glow of the rf discharge. The roles of external and internal parameters are examined from the standpoint of describing the mechanisms of the heteroepitaxial growth of mixed oxides. Zh. Tekh. Fiz. 68, 99–103 (September 1998)     

Features of the α-γ transition in a low-pressure rf argon discharge

It is found that the region for the stable existence of the aregime of a radio-frequency (rf) discharge is bounded not only on the moderate-pressure side, but also on the low-pressure side. One feature of the α-γ transition in a low-pressure rf discharge is that the criterion for breakdown of the electrode sheath is not satisfied. It is shown that at low pressures the α-γ transition of an rf argon discharge takes place abruptly and exhibits hysteresis. At intermediate pressures the α-γ transition is continuous and lacks jumps; negative differential conductivity appears, double layers form, and nonmonotonic behavior of the plasma density is observed at the center of the discharge. The role of stochastic (collisionless) electron heating in sustaining an rf discharge at intermediate gas pressures is discussed. Zh. Tekh. Fiz. 68, 52–60 (May 1998)     

Linear intermode conversion of electromagnetic wave energy in a magnetically soft gyrotropic material

The excitation of axial radio-frequency (rf) magnetic induction by an axial rf current is observed in a conductor with circular magnetic anisotropy when a weak magnetizing field is applied. The conductor is an amorphous cobalt-based wire, which exhibits azimuthal magnetic anisotropy. It serves as the central conductor in a coaxial line. The axial rf magnetic induction produces an emf in an induction coil coaxial to the conductor. The induction coil is part of a matched receiving circuit. The power conversion coefficient is as high as tens of percent. The measurements demonstrate the high sensitivity of the conversion coefficient to an external field. The theory of ferromagnetic resonance faithfully describes the results of the observations. Zh. Tekh. Fiz. 69, 58–63 (March 1999)     

On the role of strong turbulence in low-pressure rf discharges in a magnetic field

The results of an experimental and theoretical investigation of strong turbulence produced by an external rf field in the plasma of a beam-plasma discharge are presented. The modulation instability of a rf electric field, perpendicular to a constant magnetic field, in the frequency range between the lower-hybrid and ionic Langmuir frequencies, has been investigated. It is shown that the low-frequency fields can be used to control beam relaxation. Pis’ma Zh. éksp. Teor. Fiz. 64, No. 9, 608–612 (10 November 1996)     

Ion bombardment of amorphous silicon films during plasma-enhanced chemical vapor deposition in an rf discharge

The characteristics of ion and electron fluxes to the surface of a growing silicon film are investigated in various rf discharge regimes in silane at frequencies of 13.56 MHz and 58 MHz in plasma-enhanced chemical vapor-deposition (PECVD) apparatus. The energy spectra of the ions and electrons bombarding the growing film are measured. The electronic properties of films grown under various degrees of ion bombardment are studied. The correlation of these properties with the ion parameters in the rf discharge plasma during film growth is discussed. Zh. Tekh. Fiz. 68, 52–59 (February 1998)     

Regulation of the output energy of a backward-wave linear accelerator by the duration of the rf power pulse

The problems of regulating the output energy of the accelerated beam of a backward-wave linear proton accelerator over a wide range without altering the beam intensity are investigated. The proton energy is regulated by adjusting the duration of the rf power pulse delivered to the accelerator and by regulating the delay time between the instant of injection and the instant at which the leading edge of the rf pulse arrives at the output end of the accelerator. The method is tested on the interdigital-type accelerating section of length 1.25 m of a linear proton accelerator. It is shown experimentally that the electron beam energy at the accelerator output can be varied approximately threefold without any appreciable sacrifice of the beam intensity by varying the duration of the rf pulse in the given accelerator section. Zh. Tekh. Fiz. 68, 135–137 (May 1998)     

NMR spectra under skin-effect conditions at ultralow temperatures

An investigation based on the coupled Maxwell-Bloch equations for a system of equivalent exchange-coupled spins is performed in order to explain a number of features of NMR spectra obtained in metals by Fourier-transforming of the free-induction decay at ultralow temperatures. Small angles of tilting of the nuclear magnetization by the exciting rf field are considered. It is shown that the free precession inherits the nonuniformity in the distribution of the rf field and the magnetization produced at the excitation stage inside the sample on account of the skin effect. As a result, the NMR spectrum is found to consist of a set of peaks—signals due to standing spin waves. However, such a spectrum can be observed only when the detuning of the exciting rf field is sufficiently large relative to the Larmor frequency of the spins. Otherwise, the rf field does not penetrate into the sample because of strong absorption by the spins. If the detuning is large, the dispersion signal and part of the NMR absorption signal are proportional to the equilibrium magnetization to the power 3/2. Such behavior is expected at low temperatures so that the coupling of the magnetization with the rf field is strong. The results obtained qualitatively explain the experimentally observed characteristics of the NMR spectra: the presence of kinks and structure of the NMR lines, the dependence of the shape and intensity of the spectrum on the detuning of the exciting rf field, and the nonlinear dependence of the nuclear susceptibility on the reciprocal of the sample temperature. Zh. éksp. Teor. Fiz. 114, 1836–1847 (November 1998)     

Heteroepitaxial growth of complex-oxide films from a self-organized system formed in a gas-discharge plasma

New experimental data on the characteristic features of the synthesis and crystallization of films of solid solutions of lead zirconate-titanate, deposited by means of rf diode sputtering of ceramic targets, are presented. Such a deposition system possesses threshold states, transition through which leads to a qualitative change in the processes occurring in the system and to the appearance of self-organization effects. The basic feature of this change is determined by the appearance of a new structured system, consisting of the sputtered particles and particles formed in the plasma, in the plasma of an rf discharge. Zh. Tekh. Fiz. 69, 87–91 (December 1999)     

Coherent repopulation of the components of a three-level quantum system in the field of a pulsed bichromatic radio frequency wave

The coherent repopulation of a quantum system consisting of three nonequidistant levels in the field of a resonant bichromatic rf wave is studied. The atoms are assumed to have an impulsive interaction with the rf wave in which the pulse duration is less than any of the relaxation times. The hyperfine structure of gas atoms and a system of atomic oscillator levels in a magnetic trap are considered as examples of such a quantum system. It is shown that in the second case, the coherent repopulation effect can be used to cool neutral atoms in magnetic traps. Zh. éksp. Teor. Fiz. 113, 1181–1192 (April 1998)     

Equivalent parameters of a Josephson junction in a microwave SQUID structure

The equivalent parameters of a Josephson junction in a microwave SQUID structure are calculated on the basis of relations obtained as a result of an analysis of the operation of an rf SQUID. This analysis is based on the sawtooth variation of the voltage on the resonator as a function of the constant flux bias. The quantitative characteristics permit regarding the Josephson junction as a linear impedance in the rf or microwave circuit, whose real and imaginary parts are controlled by the constant magnetic flux passing through the SQUID loop. Zh. Tekh. Fiz. 69, 106–112 (November 1999)     

Radio frequency pulse shaping system using a switchable cavity

An analysis is made of an rf pulse shaping system containing a storage cavity and an extraction system which can be switched from antiresonant to resonant operation. Relations are given for the pulse shape, gain, and efficiency. Zh. Tekh. Fiz. 67, 139–141 (November 1997)     

Superradiance by a system of highly polarized exchange-coupled nonequivalent spins

We propose a model of radiofrequency (rf) superradiance by a system of interacting nonequivalent spins in a point specimen. In contrast to the rf superradiance observed and described earlier, here spin-spin coupling acts as the interaction with the cavity. To be definite, we examine the spins of two isotopes of a metal that are coupled by the Ruderman-Kittel interaction. The analysis of such a system when the magnetization of one spin species is inverted shows that the system can have one resonance frequency and two different decay times, instead of two resonance frequencies and one decay time in the usual situation. When such “repulsion” of decay times occurs and the absolute values of the spin polarizations are large, transverse magnetization increases and exhibits features characteristic of superradiance. Finally, we calculate the parameters of this superradiance: the voltage across the terminals of an rf pickup coil, the pulse length, the delay time, and the superradiant intensity. Zh. éksp. Teor. Fiz. 112, 551–563 (August 1997)     

Intrinsic and mutual inductance of apertures in parallel superconducting films

Analytic expressions are derived to calculate the inductance of apertures in parallel superconducting films using the current distribution along the edge of the aperture in the film. The relations obtained show good agreement with the experimental results and can be used to model rf squids. Zh. Tekh. Fiz. 68, 75–79 (December 1998)     

Extracting microwave energy from a cavity by mode conversion at a coupling window

A study is made of the production of high power nanosecond rf pulses by extracting microwave energy from an oversized cavity by means of conversion, at a coupling window, of the high-Q working mode to an auxiliary mode which is strongly coupled to an external load. It is shown that microwave rf pulse compressors with copper storage cavities and energy extraction by mode conversion at a coupling window can provide gains of 5–13 dB with output signal durations of 20–150 ns and peak powers of 5–10 MW in the 3-cm band and 50–100 MW in the 10-cm band. Rf pulses lasting 30 ns with peak powers of 0.5 MW have been obtained experimentally at a frequency of 9.4 GHz with a gain of 9 dB. Zh. Tekh. Fiz. 68, 92–96 (July 1998)     

Parametric excitation of oscillations of charged particle bunches in a Penning trap

A self-similar solution is obtained for the self-consistent hydrodynamic equations describing the motion of an ellipsoid of charged particles in a Penning trap and in an rf trap. The conditions are determined for which a small periodic variation of the confining magnetic field in the Penning trap drives oscillations of the bunch. Zh. Tekh. Fiz. 67, 27–29 (January 1997)     

Unusual electromechanical effects in glycine

Unusual piezoresponse signals have been observed in glycine aminoacid powder at a frequency near 10 MHz, which exhibited a regular pattern in time determined by a periodic phase variation in the elastic vibrations of individual powder particles. This phenomenon results from the formation of spatial structures in glycine powder under the action of a strong rf field. Fiz. Tverd. Tela (St. Petersburg) 40, 1086–1089 (June 1998)     

Electron paramagnetic resonance in a subsystem of structural defects as a factor in the plasticization of NaCl crystals

A change in the macroplastic deformation rate and an increase in the travel distances of edge dislocations are observed in NaCl single crystals placed in crossed dc and rf magnetic fields. The magnetic-field frequencies at which softening maxima are observed correspond to the resonance frequencies of transitions between Zeeman sublevels in paramagnetic complexes of structural defects. Pis’ma Zh. éksp. Teor. Fiz. 68, No. 5, 400–405 (10 September 1998)     

Ion flux's pressure dependence in an asymmetric capacitively coupled rf discharge in NF<Subscript>3</Subscript>

Starting from an analytical macroscopic/phenomenological model yielding the self-bias voltage as a function of the absorbed radio-frequency (rf) power of an asymmetric capacitively coupled discharge in NF₃ this paper studies the dependence of the ion flux onto the powered electrode on the gas pressure. An essential feature of the model is the assumption that the ions' drift velocity in the sheath near the powered electrode is proportional to E ^α, where E=−ΔU (U being the self-bias potential), and α is a coefficient depending on the gas pressure and cross section of elastic ion-neutral collisions. The model also considers the role of γ-electrons, stochastic heating as well as the contribution of the active electron current to the global discharge power balance. Numerically solving the model's basic equations one can extract the magnitude of the ion flux (at three different gas pressures) in a technological etching device (Alcatel GIR 220) by using easily measurable quantities, notably the self-bias voltage and absorbed rf power.     

Frequency dependence of the radio frequency collapse effect

A systematic study of the dependence of the radio frequency (rf) collapse effect on the frequency of the rf field which induces the fast relaxation of the hyperfine field was performed for Permalloy and amorphous Fe₄₅Ni₃₀Si₁₀B₁₅ alloy. The rf collapse was studied for the frequency range of 12 MHz to 64 MHz. The results show that the rf collapse appears gradually in both materials as the rf field frequency exceeds the Larmor frequency what is in agreement with the model predictions.