用光敏玻璃制作微透镜列阵

对特种光敏玻璃及其微透镜列阵的成型机理及制作工艺进行了研究。采用六角密排结构，在远紫外线下曝光，问时进行热循环处理，成功制作出直径为４００μｍ、表面凸起高度达９．０μｍ的微透镜列阵。     

Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique

We report a simple method for fabricating a concave refractive microlens array (MLA) in solgel glass by using a proximity-effect-assisted reflow technique. The solgel concave refractive MLA that we fabricated had excellent surface smoothness; good dimensional conformity, with an 8.23% nonuniformity of the microlens elements; and structural perfection, with a biggest deviation of 1% from a perfect concave spherical crown. The relative error between the measured and the designed values of the concave MLA's focal length was only 1.83%. Compared with the conventional fabrication techniques for concave MLAs, the proposed method has significant advantages including simplicity, low cost, good element conformity, and smooth device surface.     

Fabrication and characterization of polydimethylsiloxane concave microlens array

Concave microlens array is fabricated with PDMS (polydimethylsiloxane) material. Resist thermal reflow method and reverse pattern replication method are employed to fabricate the concave microlens array. The optical performance of the PDMS concave microlens array is analyzed with ray-trace method. Profile of the PDMS concave microlens array is observed by metallographic microscope and Talystep. It is indicated by the results that the surface profile of the PDMS concave microlens array is clear and distinct. Optical properties are also tested with Beamprofiler system. The shine spots on the focal plane of the microscope objective are of highly uniformity, and essentially coincide well with the simulation result. The PDMS concave microlens array has potential application in many optoelectronic devices, such as diffusers and scanners.     

Optical interconnections using microlens arrays

Free-space interconnection of widely spaced pixels may be implemented using microlenses, rather than conventional imaging. Advantages, problems, and studies of system capacity are discussed.     

High-resolution beam steering using microlens arrays

Imaging or beam-steering systems employing a periodic array of microlenses or micromirrors suffer from diffraction problems resulting from the destructive interference of the beam segments produced by the array. Simple formulas are derived for beam steering with segmented apertures that do not suffer from diffraction problems because of the introduction of a moving linear phase shifter such as a prescan lens before the periodic structure. The technique substantially increases the resolution of imaging systems that employ microlens arrays or micromirror arrays. Theoretical, numerical, and experimental results demonstrating the high-resolution imaging concept using microlens arrays are presented.     

Liquid-crystal microlens arrays using patterned polymer networks

A real-time dynamically tunable-focus microlens array made from a polymer-liquid-crystal (LC) composite is demonstrated. The polymer was first patterned in microlens array cavities by lamination, and the LC-monomer mixture was then injected to the molded polymer cavities and finally stabilized by UV light-induced networks. Using this new fabrication method, we demonstrated a lens with a spherical shape and a glazed surface. This LC-based microlens can reach approximately 100% light efficiency for linearly polarized light. The saturation voltage of the lens is approximately 60 Vrms, and the response time is approximately 30 ms.     

Fabrication of metal nanodot arrays using a porous alumina membrane as a template

Thin nanodotstructured metal films and heterostructured nanodot arrays (metal nanodot arrays/Si) with a high density and uniform distribution for various kinds of metals (Au, Al, Ag, Pb, Cu, Sn, and Zn) were fabricated by thermal vacuum evaporation using an anodic porous alumina membrane as a template. However, for such metals as Sn, Zn, and Pb with relatively lower melting point as compared with Al it was found that heterostructured nanodot arrays were not formed by a single stage of evaporation. For these metals, we developed a new method termed “two step evaporation method”. The size and the arrays of dots were depended on the pore structure in the anodic porous alumina template. The technique demonstrated in this report is simple and suitable for the preparation of nanodot arrays in the large area for materials which could be vacuum evaporated.     

Tunable microlens arrays using polymer network liquid crystal

A tunable-focus microlens array based on polymer network liquid crystal (PNLC) is demonstrated. The PNLC was prepared using an ultraviolet (UV) light exposure through a patterned photomask. The photocurable monomer in each of the UV exposed spot forms an inhomogeneous centro-symmetrical polymer network which acts as a lens when a homogeneous electric field is applied to the cell. The focal length of the microlens arrays is tunable with the applied voltage.     

Fabrication and design of various dimensions of multi-step ashperical microlens arrays for OLED package

An optical film with aspherical microlens array (A-MLA) by using multi-step lithography process for an OLED (Organic Light-Emitting Diode) package is fabricated, by which method the luminance of OLEDs can be enhanced. The method of design and fabrication of an A-MLA is explored in this study. In the design process, various parameters of an A-MLA such as curved profiles, layout template and dimensions of microlens are analyzed and characterized. Curved profiles include hyperbola, parabola, ellipse and sphere; and layout templates include square, hexagon, triangle and tangential circle. The profile of the A-MLA was determined by using a commercial optical simulation software, FRED. Based on the simulated result, a film with an A-MLA was fabricated using the LIGA-like (Lithographie Galvanoformung Abformung, LIGA) process, including lithography, sputtering, micro-molding with PDMS (Polydimethylsiloxane) and UV (Ultraviolet)-cured technology. The major challenge to this process is to use JSR-126N negative thick photoresist to manufacture an approximate A-MLA optical film with multi-step lithography method. Finally, the films with A-MLAs are attached to an OLED to measure their optical-electric properties. The effectsof A-MLA optical films on OLED luminance are analyzed. In addition, the measured results are compared with simulated ones. They show good agreement with each other.     

Dynamic simulation using a multipolar model of particles under dielectrophoretic force

This article presents the simulation of an electrorheological (ER) fluid system by using a multipole model that includes multipolar interactions between particles. The model uses the multipole re-expansion and the method of images for calculating electric field and force. The highest order of multipoles (N_mp) and the number of iterations (N_iter) used in the method of images can be chosen for the accuracy of the force approximation and the simulation time required. Study of a two-particle configuration shows that the force does not increase linearly with increasing N_mp and N_iter. The specific case N_mp=4 and N_iter=2 is chosen for dynamic simulation. We have performed the simulation of a system of 20 particles, and compared the formulation of particle chains with that obtained using the dipole model. The results imply that the response time for the change in viscosity of real-ER fluids is significantly shorter than that predicted by the dipole model.     

Rigorous electromagnetic analysis of dual-closed-surface microlens arrays

In this paper, we investigated the focal performance of the dual-closed-surface microlens arrays (DCSMAs) based on rigorous electromagnetic theory and boundary element method (BEM) in the case of TE polarization. The DCSMAs are designed with different substrate thickness and different distance between microlenses. DCSMAs designed according to different wavelengths are surveyed. The DCSMAs with different incident angles are also studied. Several focusing performance measures, such as the focal spot size, the focal position on the preset focal plane, the diffraction efficiency and the normalized transmitted power, are presented. Numerical results indicate the DCSMAs with different parameters can implement focusing beams and the focal performance of DCSMAs is easily influenced by the substrate thickness and the incident wavelength. Furthermore, the optimal thickness for the maximal diffraction efficiency of the DCSMAs is given. It is expected that the DCSMAs may be used as a parallel processing device in micro-optics systems.     

Magnetic particle separation using controllable magnetic force switches

Magnetic particle separation is very important in biomedical applications. In this study, a magnetic particle microseparator is proposed that uses micro magnets to produce open/closed magnetic flux for switching on/off the separation. When all magnets are magnetized in the same direction, the magnetic force switch for separation is on; almost all magnetic particles are trapped in the channel side walls and the separation rate can reach 95%. When the magnetization directions of adjacent magnets are opposite, the magnetic force switch for separation is off, and most magnetic particles pass through the microchannel without being trapped. For the separation of multi-sized magnetic particles, the proposed microseparator is numerically demonstrated to have high separation rate.     

Fabrication of tin monosulfide nanosheet arrays using laser ablation

We demonstrate the non-catalytic, low-temperature (∼200°C) synthesis of two-dimensional (2D) tin monosulfide (SnS) nanosheet arrays vertically aligned on the substrate by means of pulsed laser ablation (PLD) process. The prepared nanosheets were characterized using X-ray diffraction, Raman spectroscopy, field-emission electron microscopy, electron probe micro-analysis, and transmission electron microscopy (HRTEM). The growth mechanism of 2D morphological feature, which is widespread but very slim (∼10 nm), is further investigated in detail from the crystallographic point of view by observing highly-resolved lattice images taken from plane-normal and in-plane directions using focused ion-beam manipulation and high-resolution transmission microscopy.     

Fabrication of polymer compound microlens by lens-on-lens microstructures

We proposed a novel method for fabricating polymer compound microlenses (PCMLs) using micro-inkjet technique and subsequent curing process. Two different types of PCMLs with sandwich microstructure (PDMS-Glycerol-PDMS), concave and convex PCMLs, have been designed and fabricated in experiments. Convex PCML has two real images and two foci. The concave PCML has one real and one virtual focal planes, which can generate one real image and one virtual image respectively. Moreover, the diameter of concave PCML can be controlled by adjusting the curing time and temperature. The proposed method is simple, efficient and suitable for realizing large-scale high numerical aperture PCMLs array, which has potential applications in diverse optical systems such as optical storage and three-dimensional imaging.     

Design and fabrication of long focal length microlens arrays

In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper.     

一种可控纳米柱阵列的研制

在一次阳极氧化法制备多孔氧化铝(anodized aluminum oxide,AAO)的基础上,进行了二次、三次、四次氧化制备AAO,并对多次氧化制备多孔AAO的电流变化曲线和模板表面的形貌特点等进行了比较分析.二次、三次、四次氧化制备的AAO纳米孔孔径依次增大、孔间距减小,而模板表面的纳米孔有序性分布没有明显变化.控制一次氧化AAO模板的除膜时间,～10 min即可得到孔径规则、高度有序的AAO膜.最后,利用所制备的不同孔深和孔径的AAO为模板,通过热纳米压印复制技术制备了长度和直径等性质可控的PMMA纳米柱阵列. 关键词： 纳米柱阵列 聚甲基丙烯酸甲酯 多孔氧化铝模板 多次氧化法     

Cavity resonances and mutual coupling in concave waveguide arrays

A method is presented for the mutual coupling analysis of concave, circular cylindrical or spherical waveguide arrays. The array is considered as a set of waveguides that are coupled through a prefectly conducting, lossless cavity, which leads to an equivalent multiport network. The corresponding scattering matrix is obtained by matching the cavity and waveguide fields over the guide apertures and solving the resulting equation by Galerkin's method. In particular the complications are discussed, which arise from the possibly large number of degenerate, resonant cavity modes. A result obtained is the general condition that at a resonance the total aperture field (for all waveguide apertures) must be orthogonal to the set of degenerate, resonant cavity modes. This leads, with certain exceptions, to zero coupling between the guides whenever the total number of aperture modes (for all waveguides) is less than or equal to the number of resonant cavity modes.     

Effect of dielectrophoretic force in the self-assembly process of electrosprayed nanoparticles

In this work the effect of the dielectrophoretic force (DEP) in the self-assembly process of nanoparticles electrosprayed onto a substrate, is examined. DEP force is originated by the electric field created by the electrospray gun and by the distortion of the field created by the effective dipole of each nanoparticle. It is also shown that the modulus of this force is large when the distance between particles is few times its diameter, provided the medium is wet and the electric field is not switched off.The directional nature of DEP In this wet phase, is shown to chain nanoparticles aligned with the main electric field direction. Although there is a repulsive force between chains in the orthogonal direction to the field, it is minimum when the beads align with the voids in the nearby chains.DEP is a dominant force in the close distances of nanoparticles compared to double layer, van der Waals, electrophoretic retardation, weight and buoyancy.