SDS-CGE of proteins in microchannels made of SU-8 films

This work describes the SDS-CGE of proteins carried out in microchannels made of the negative photoresist EPON SU-8. Embedded electrophoretic microchannels have been fabricated with a multilayer technology based on bonding and releasing steps of stacked SU-8 films. This technology allows the monolithic integration of the electrodes in the device. A high wafer fabrication yield and mass production compatibility guarantees low costs and high reliability. A poly(methyl methacrylate) (PMMA) packaging allows an easy setup and replacement of the device for electrophoresis experiments. In addition, the wire-bonding step is avoided. The electrophoretic mobilities of four proteins have been measured in microchannels filled with polyacrylamide. Different pore sizes have been tested obtaining their Ferguson plots. Finally, a separation of two proteins (20 and 36 kDa) has been carried out confirming that this novel device is suitable for protein separation. A resolution of 2.75 is obtained. This is the first time that this SU-8 microfluidic technology has been validated for SDS-CGE of proteins. This technology offers better separation performance than glass channels, at lower costs and with an easy packaging procedure.     

Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps

This paper describes a novel fabrication process based on successive wafer-level bonding and releasing steps for stacking several patterned layers of the negative photoresist EPON SU-8. This work uses a polyimide film to enhance previous low temperature bonding technology. The film acts as a temporary substrate where the SU-8 is photopatterned. The poor adhesion between the polyimide film and SU-8 allows the film to be released after the bonding process, even though the film is still strong enough to carry out photolithography. Using this technique, successive adhesive bonding steps can be carried out to obtain complex 3-D multilayer structures. Interconnected channels with smooth vertical sidewalls and freestanding structures are fabricated. Unlike previous works, all the layers are photopatterned before the bonding process yielding sealed cavities and complex three-dimensional structures without using a sacrificial layer. Adding new SU-8 layers reduces the bonding quality because each additional layer decreases the thickness uniformity and increases the polymer crosslinking level. The effect of these parameters is quantified in this paper. This process guarantees compatibility with CMOS electronics and MEMS. Furthermore, the releasing step leaves the input and the output of the microchannels in contact with the outside world, avoiding the usual slow drilling process of a cover. Hence, in addition to the straightforward integration of electrodes on a chip, this fabrication method facilitates the packaging of these microfluidic devices.     

Fabrication and Packaging Technologies of Love-wave-based Microbalance for Fluid Analysis

Quartz crystal microbalance (QCM) based techniques have been developed for years to address various kinds of biochemical analyses in liquid media. An alternative to this approach based on guided acoustic shear waves, the socalled Love wave devices, has been proved to allow for increasing gravimetric sensitivity. However, this approach reveals more complicated to implement as the surface on which reactions are achieved is the same as the one used for electrical connection. As a consequence, a microfluidic set-up must be implemented to prevent unwanted interactions between the corresponding areas (IDTs and propagation path). The main issue when using SAW Sensors for in-liquid biochemical analyses [1-4], especially in a commercial objective, is the development of a reliable and reproducible fluidic system [5] meeting the main following requirements: i) low acoustic leakage. ii) chemically inert to biological samples. iii) reproducible fabrication at the wafer scale level.In the present work we explore the use of the SU-8 epoxy-based photoresist combined with silicon or quartz machined covers for the fabrication of this fluidic circuit. A first structure is fabricated using deep etch lithography, the cover is then glued to the remaining SU-8 structure using a thin glue layer. The packaging system prevents covering the IDTs with liquids and defines the sensing area in the region in-between the IDTs. Once the fabrication achieved, we evaluate the velocity and propagation loss using a network analyzer to measure the influence of the proposed packaging approaches on the principal wave characteristics.     

Fabrication of SU-8 based microchip electrophoresis with integrated electrochemical detection for neurotransmitters

A new SU-8 based microchip capillary electrophoresis (MCE) device has been developed for the first time with integrated electrochemical detection. Embedded electrophoretic microchannels have been fabricated with a multilayer technology based on bonding and releasing steps of stacked SU-8 films. This technology has allowed the monolithic integration in the device of the electrochemical detection system based on platinum electrodes. The fabrication of the chips presented in this work is totally compatible with reel-to-reel techniques, which guarantee a low cost and high reliability production. The influence of relevant experimental variables, such as the separation voltage and detection potential, has been studied on the SU-8 microchip with an attractive analytical performance. Thus, the effective electrical isolation of the end-channel amperometric detector has been also demonstrated. The good performance of the SU-8 device has been proven for separation and detection of the neurotransmitters, dopamine (DA) and epinephrine (EP). High efficiency (30,000-80,000 N/m), excellent precision, good detection limit (450 nM) and resolution (0.90-1.30) has been achieved on the SU-8 microchip. These SU-8 devices have shown a better performance than commercial Topas (thermoplastic olefin polymer of amorphous structure) microchips. The low cost and versatile SU-8 microchip with integrated platinum film electrochemical detector holds great promise for high-volume production of disposable microfluidic analytical devices.     

An integrated optical oxygen sensor fabricated using rapid-prototyping techniques

This paper details the design and fabrication of an integrated optical biochemical sensor using a select oxygen-sensitive fluorescent dye, tris(2,2'-bipyridyl) dichlororuthenium(ii) hexahydrate, combined with polymeric waveguides that are fabricated on a glass substrate. The sensor uses evanescent interaction of light confined within the waveguide with the dye that is immobilized on an SU-8 waveguide surface. Adhesion of the dye to the integrated waveguide surface is accomplished using a unique process of spin-coating/electrostatic layer-by-layer formation. The SU-8 waveguide was chemically modified to allow the deposition process. Exposure of the dye molecules to the analyte and subsequent chemical interaction is achieved by directly coupling the fluid channel to the integrated waveguide. The completed sensor was linear in the dissolved oxygen across a wide range of interest and had a sensitivity of 0.6 ppm. A unique fabrication aspect of this sensor is the inherent simplicity of the design, and the resulting rapidity of fabrication, while maintaining a high degree of functionality and flexibility.     

Microfluidic devices for culturing primary mammalian neurons at low densities

Microfluidic devices have been used to study high-density cultures of many cell types. Because cell-to-cell signaling is local, however, there exists a need to develop culture systems that sustain small numbers of neurons and enable analyses of the microenvironments. Such cultures are hard to maintain in stable form, and it is difficult to prevent cell death when using primary mammalian neurons. We demonstrate that postnatal primary hippocampal neurons from rat can be cultured at low densities within nanoliter-volume microdevices fabricated using polydimethylsiloxane (PDMS). Doing so requires an additional fabrication step, serial extractions/washes of PDMS with several solvents, which removes uncrosslinked oligomers, solvent and residues of the platinum catalyst used to cure the polymer. We found this step improves the biocompatibility of the PDMS devices significantly. Whereas neurons survive for > or = 7 days in open channel microdevices, the ability to culture neurons in closed-channel devices made of untreated, native PDMS is limited to < or = 2 days. When the closed-channel PDMS devices are extracted, biocompatibility improves allowing for reliable neuron cultures at low densities for > or = 7 days. Comparisons made to autoclaved PDMS and native, untreated PDMS reveal that the solvent-treated polymer is superior in sustaining low densities of primary neurons in culture. When neuronal affinity for local substrates is observed directly, we find that axons localize to channel corners and prefer PDMS surfaces to glass in hybrid devices. When perfusing the channels with media by gravity flow, cultured hippocampal neurons survive for > or = 11 days. Extracting PDMS improves biocompatibility of microfluidic devices and thus enables the study of differentiation of identifiable neurons and the characterization of local extracellular signals.     

Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry

We present a detailed optimization and characterization of the analytical performance of SU-8-based emitters for electrospray ionization mass spectrometry (ESI/MS). The improved SU-8 fabrication process presented here enhances patterning accuracy and reduces the time and cost of fabrication. All emitters are freestanding and enable sample delivery by both pressure-driven and spontaneous flows. The optimized emitter design incorporates a sharp, double-cantilevered tip implemented to the outlet of an SU-8 microchannel and provides highly sensitive ESI/MS detection. Moreover, the optimized design allows the use of relatively large microchannel dimensions (up to 200 x 50 microm(2), w x h) without sacrificing the detection sensitivity. This is advantageous with a view of preventing emitter clogging and enabling reproducible analysis. The measured limits of detection for the optimized emitter design were 1 nM for verapamil and 4 nM for Glu-fibrinopeptide B with good quantitative linearities between 1 nM and 10 microM (R(2) = 0.9998) for verapamil and between 4 nM and 3 microM (R(2) = 0.9992) for Glu-fibrinopeptide B. The measured tip-to-tip repeatability for signal intensity was 14% relative standard deviation (RSD) (n = 3; 5 microM verapamil) and run-to-run repeatability 4-11% RSD (n = 4; 5 microM verapamil) for all individual emitters tested. In addition, long-term stability of < 2% RSD was maintained for timescales of 30 min even under free flow conditions. SU-8 polymer was also shown to be chemically stable against most of the tested electrospray solvents.     

Application of magnetohydrodynamic actuation to continuous flow chemistry

Continuous flow microreactors with an annular microchannel for cyclical chemical reactions were fabricated by either bulk micromachining in silicon or by rapid prototyping using EPON SU-8. Fluid propulsion in these unusual microchannels was achieved using AC magnetohydrodynamic (MHD) actuation. This integrated micropumping mechanism obviates the use of moving parts by acting locally on the electrolyte, exploiting its inherent conductive nature. Both silicon and SU-8 microreactors were capable of MHD actuation, attaining fluid velocities of the order of 300 microm s(-1) when using a 500 mM KCl electrolyte. The polymerase chain reaction (PCR), a thermocycling process, was chosen as an illustrative example of a cyclical chemistry. Accordingly, temperature zones were provided to enable a thermal cycle during each revolution. With this approach, fluid velocity determines cycle duration. Here, we report device fabrication and performance, a model to accurately describe fluid circulation by MHD actuation, and compatibility issues relating to this approach to chemistry.     

A multielectrode microcompartment culture platform for studying signal transduction in the nervous system

This paper describes the design, fabrication, and characterization of a microfabricated compartmented culture system (micro-CCS) useful for electrophysiological signaling studies in cultured neurons. The focus of the paper is the process of interfacing the micro-CCS with cultured neurons and to demonstrate the applicability of the system for biochemical-mediated electrophysiological studies. Moreover, we show that we can record action potentials from cultured neurons through the extracellular compartmented application of elevated levels of K(+) ions. Finally, we show that we can isolate the electrophysiological effects of the sodium channel blocker tetrodotoxin in one of the compartments of a two compartment culture while recording electrophysiological data from both compartments.     

Hollow‐Shell‐Structured Nanospheres: A Recoverable Heterogeneous Catalyst for Rhodium‐Catalyzed Tandem Reduction/Lactonization of Ethyl 2‐Acylarylcarboxylates to Chiral Phthalides

Chiral organorhodium‐functionalized hollow‐shell‐structured nanospheres were prepared by immobilization of a chiral N‐sulfonylated diamine‐based organorhodium complex within an ethylene‐bridged organosilicate shell. Structural analysis and characterization reveal its well‐defined single‐site rhodium active center, and transmission electron microscopy images reveal a uniform dispersion of hollow‐shell‐structured nanospheres. As a heterogenous catalyst, it exhibits excellent catalytic activity and enantioselectivity in synthesis of chiral phthalides by a tandem reduction/lactonization of ethyl 2‐acylarylcarboxylates in aqueous medium. The high catalytic performance is attributed to the synergistic effect of the high hydrophobicity and the confined chiral organorhodium catalytic nature. The organorhodium‐functionalized nanospheres could be conveniently recovered and reused at least 10 times without loss of catalytic activity. This feature makes it an attractive catalyst in environmentally friendly organic reactions. The results of this study offer a new approach to immobilize chiral organometal functionalities within the hollow‐shell‐structured nanospheres to prepare materials with high activity in heterogeneous asymmetric catalysis.     

Polymer microcantilever biochemical sensors with integrated polymer composites for electrical detection

Micro fabricated sensors based on nanomechanical motion with piezoresistive electrical readout have become a promising biochemical sensing tool. The conventional microcantilever materials are mostly silicon-based. The sensitivity of the sensor depends on Young's modulus of the structural material, thickness of the cantilever as well as on the gauge factor of the piezoresistor. UV patternable polymers such as SU-8 have a very low Young's modulus compared to the silicon-based materials. Polymer cantilevers with a piezoresistive material having a large gauge factor and a lower Young's modulus are therefore highly suited for sensing applications. In this work, a spin coatable and photopatternable mixture of carbon black (CB) and SU-8, with proper dispersion characteristics, has been demonstrated as a piezoresistive thin film for polymer microcantilevers. Results on percolation experiments of SU-8/CB composite and fabrication of piezoresistive SU-8 microcantilevers using this composite are presented. With our controlled dispersion experiments, we could get a uniform piezoresistive thin film of thickness less than 1.2 μm and resistivity of 2.7 Ω cm using 10 wt% of CB in SU-8. The overall thickness of the SU-8/composite/SU-8 is approximately 3 μm. We further present results on the electromechanical characterization and biofunctionalization of the cantilever structures for biochemical sensing applications. These cantilevers show a deflection sensitivity of 0.55 ppm/nm. Since the surface stress sensitivity is 4.1 × 10⁻³ [N/m]⁻¹, these cantilevers can well be used for detection of protein markers for pathological applications.     

Multi‐Anion Intercalated Layered Double Hydroxide Nanosheet‐Assembled Hollow Nanoprisms with Improved Pseudocapacitive and Electrocatalytic Properties

Electrochemically active hollow nanostructured materials hold great promise in diverse energy conversion and storage applications, however, intricate synthesis steps and poor control over compositions and morphologies have limited the realization of delicate hollow structures with advanced functional properties. In this study, we demonstrate a one‐step wet‐chemical strategy for co‐engineering the hollow nanostructure and anion intercalation of nickel cobalt layered double hydroxide (NiCo‐LDH) to attain highly electrochemical active energy conversion and storage functionalities. Self‐templated pseudomorphic transformation of cobalt acetate hydroxide solid nanoprisms using nickel nitrate leads to the construction of well‐defined NiCo‐LDH hollow nanoprisms (HNPs) with multi‐anion intercalation. The unique hierarchical nanosheet‐assembled hollow structure and efficiently expanded interlayer spacing offer an increased surface area and exposure of active sites, reduced mass and charge transfer resistance, and enhanced stability of the materials. This leads to a significant improvement in the pseudocapacitive and electrocatalytic properties of NiCo‐LDH HNP with respect to specific capacitance, rate and cycling performance, and OER overpotential, outperforming most of the recently reported NiCo‐based materials. This work establishes the potential of manipulating sacrificial template transformation for the design and fabrication of novel classes of functional materials with well‐defined nanostructures for electrochemical applications and beyond.     

Towards a multi-electrode array (MEA) system for patterned neural networks

Here we describe the development of a unique multi-electrode array (MEA) system capable of supporting patterned neural networks in vitro. The significant features of this BioMEMS system are: (1) precise and exclusive positioning of the neural cell bodies to the electrode region, (2) definition of interconnecting pathways among the neurons by using patterned self-assembled monolayers (SAMs), and (3) one-to-one stimulation and recording from precisely positioned neurons. We present for the first time the design and fabrication of an MEA chip supporting patterned neuronal networks, as well as the initial electrical recordings from two types of neurons.     

Microfluidic fabrication of complex-shaped microfibers by liquid template-aided multiphase microflow

This study presents a simple microfluidic approach to the rapid fabrication of complex-shaped microfibers (e.g., single hollow, double hollow, and microbelt), with highly uniform structures, based on a combination of the spontaneous formation of polymeric jet streams and in situ photopolymerization. Two laminar flows of a photocurable fluid and a liquid template (nonpolymerizing fluid) spontaneously form jet streams in equilibrium states in microfluidic channels because of the minimization of the interfacial energy between the two fluids. The formation of the jet streams strongly depends on the spreading coefficients and the evolution time along the downstream of the microfluidic system. Thus, the simple control of the spreading coefficients can guide microfibers into various shapes. The sizes of the core and shell of the hollow fibers can also be readily manipulated by the flow rates of the polymerizing fluid and the liquid template phase. Asymmetric hollow fibers can also be produced in different evolutionary states in the microfluidic system. The microfluidic approach shown here represents a significant step toward the easy fabrication of microfibers with readily controllable structures and geometries. We anticipate that this novel fabrication approach and the prediction method based on spreading coefficients presented in this work can be applied to produce a wide variety of functional microfibrous materials.     

A Self‐contained Two‐electrode Nanosensor for Electrochemical Analysis in Aqueous Microenvironments

We describe the development, fabrication, and characterization of a novel two‐electrode nanosensor contained within the tip of a needle‐like probe. This sensor consists of two, vertically aligned, carbon structures which function as individual electrodes. One of the carbon structures was modified by silver electrodeposition and chlorination to enable it to function as a pseudo‐reference electrode. Performance of this pseudo‐reference electrode was found to be comparable to that of commercially available Ag/AgCl reference electrodes. The unmodified carbon structure was employed as a working electrode versus the silver‐plated carbon structure to form a two‐electrode sensor capable of characterizing redox‐active analytes. The nanosensor was demonstrated to be capable of electrochemically characterizing the redox behavior of para‐aminophenol (PAP) in both bulk solutions and microenvironments. PAP was also measured in cell lysate to show that the nanosensor can detect small concentrations of analyte in heterogenous environments. As the working and reference electrodes are contained within a single nanoprobe, there was no requirement to position external electrodes within the electrochemical cell enabling analysis within very small domains. Due to the low‐cost manufacturing process, this nanoprobe has the potential to become a unique and widely accessible tool for the electrochemical characterization of microenvironments.     

Measurements of scattered light on a microchip flow cytometer with integrated polymer based optical elements

Flow cytometry is widely used for analyzing microparticles, such as cells and bacteria. In this paper, we report an innovative microsystem, in which several different optical elements (waveguides, lens and fiber-to-waveguide couplers) are integrated with microfluidic channels to form a complete microchip flow cytometer. All the optical elements, the microfluidic system, and the fiber-to-waveguide couplers were defined in one layer of polymer (SU-8, negative photoresist) by standard photolithography. With only a single mask procedure required, all the fabrication and packaging processes can be finished in one day. Polystyrene beads were measured in the microchip flow cytometer, and three signals (forward scattering, large angle scattering and extinction) were measured simultaneously for each bead. To our knowledge this is the first time forward scattered light and incident light extinction were measured in a microsystem using integrated optics. The microsystem can be applied for analyzing different kinds of particles and cells, and can easily be integrated with other microfluidic components.     

Metallic mesoporous nanocomposites for electrocatalysis

We describe the fabrication, characterization, and applications of ultrathin, free-standing mesoporous metal membranes uniformly decorated with catalytically active nanoparticles. Platinum-plated nanoporous gold leaf (Pt-NPG) made by confining a plating reaction to occur within the pores of dealloyed silver/gold leaf is 100 nm thick and contains an extremely high, uniform dispersion of 3 nm diameter catalytic particles. This nanostructured composite holds promise as a prototypical member of a new class of fuel cell electrodes, showing good electrocatalytic performance at low platinum loading (less than 0.05 mg cm-2), while also maintaining long-term stability against coarsening and aggregation of catalytic nanoparticles.     

Control of the water adhesion on hydrophobic micropillars by spray coating technique

We present an alternative approach for controlling the water adhesion on solid superhydrophobic surfaces by varying their coverage with a spray coating technique. In particular, micro-, submicro-, and nanorough surfaces were developed starting from photolithographically tailored SU-8 micropillars that were used as substrates for spraying first poly(tetrafluoroethylene) submicrometer particles and subsequently iron oxide nanoparticles. The sprayed particles serve to induce surface submicrometer and nanoscale roughness, rendering the SU-8 patterns superhydrophobic (apparent contact angle values of more than 150°), and also to tune the water adhesion between extreme states, turning the surfaces from “non-sticky” to “sticky” while preserving their superhydrophobicity. The influence of the chemical properties and of the geometrical characteristics of the functionalized surfaces on the wetting properties is discussed within the frame of the theory. This simple method can find various applications in the fabrication of microfluidic devices, smart surfaces, and biotechnological and antifouling materials.     

Inherently aligned microfluidic electrodes composed of liquid metal

This paper describes the fabrication and characterization of microelectrodes that are inherently aligned with microfluidic channels and in direct contact with the fluid in the channels. Injecting low melting point alloys, such as eutectic gallium indium (EGaIn), into microchannels at room temperature (or just above room temperature) offers a simple way to fabricate microelectrodes. The channels that define the shape and position of the microelectrodes are fabricated simultaneously with other microfluidic channels (i.e., those used to manipulate fluids) in a single step; consequently, all of the components are inherently aligned. In contrast, conventional techniques require multiple fabrication steps and registration (i.e., alignment of the electrodes with the microfluidic channels), which are technically challenging. The distinguishing characteristic of this work is that the electrodes are in direct contact with the fluid in the microfluidic channel, which is useful for a number of applications such as electrophoresis. Periodic posts between the microelectrodes and the microfluidic channel prevent the liquid metal from entering the microfluidic channel during injection. A thin oxide skin that forms rapidly and spontaneously on the surface of the metal stabilizes mechanically the otherwise low viscosity, high surface tension fluid within the channel. Moreover, the injected electrodes vertically span the sidewalls of the channel, which allows for the application of uniform electric field lines throughout the height of the channel and perpendicular to the direction of flow. The electrodes are mechanically stable over operating conditions commonly used in microfluidic applications; the mechanical stability depends on the magnitude of the applied bias, the nature of the bias (DC vs. AC), and the conductivity of the solutions in the microfluidic channel. Electrodes formed using alloys with melting points above room temperature ensure mechanical stability over all of the conditions explored. As a demonstration of their utility, the fluidic electrodes are used for electrohydrodynamic mixing, which requires extremely high electric fields (~10(5) V m(-1)).     

Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect

Microfluidic devices are currently being used in many types of biochemical microsystems for liquid phase analysis in the frame of medical applications. This paper presents a new technique for the realization of microfluidic channels using SU-8, a commonly used epoxy-based negative photo-resist. These microchannels were fabricated by a single stepper UV-photolithography process. By changing the process parameters, e.g. the optical focus depth and the UV exposure dose, well-defined, covered microchannels with various dimensions and aspect ratios were realized and proven to be effective for the fluid transport by capillarity. This technique can easily be used for the fabrication of microfluidic devices in the microanalysis and lab-on-chip applications realm.