静电伺服微加速度计的量程设计

详细推导了静电伺服加速度计在定极板上施加直流偏压、交流驱动电压，动极板上有反馈直流电压和交流检测电压的情况下，检测质量(动极板)受到的静电力。通过对静电力的分析，得出静电伺服彻。速度计的量程除了受系统能提供的最大静电力限制外，还需满足电刚度小于与机械刚度的条件，该电刚度是极板上所有的直流电压、交流电压产生的电刚度之和。离心实验证明，利用该原则设计的“叉指”结构静电伺服微加速度计的量程达到了设计值。该设计原则可以为此类加速度计的设计提供参考。     

双质量解耦硅微陀螺仪的非理想解耦特性研究和性能测试

为了分析双质量解耦硅微陀螺结构中的机械耦合误差,对微陀螺结构的非理想解耦特性进行了研究。首先,阐述了双质量解耦硅微陀螺仪的结构原理,推导了双质量解耦硅微陀螺仪的检测位移;接着构建检测框架在驱动模态下非理想的解耦模型,推导了由非理想解耦导致检测框架的平动位移与转动位移的公式;然后进行了结构非理想解耦特性仿真分析,对驱动模态时检测框架和检测模态时驱动框架的非理想运动特性进行仿真,结果表明检测框架的残余平动位移达到驱动位移的0.86%,最大转动残余位移达到了驱动位移的2.7%,而驱动框架的平动残余位移达到了检测位移的1.36%,转动残余位移达到了检测位移的0.87%;最后,对加工的双质量解耦硅微陀螺结构芯片的非理想解耦误差进行了测量,结果表明非真空封装下的正交误差达到158.65(o)/s,失调误差为19.03(o)/s,偏置稳定性达到12.01(o)/h。     

参数激励下静电驱动MEMS共振传感器的非线性动力特性研究

静电驱动微机电系统(MEMS)共振传感器因其结构简单、应用广泛等优点引起了研究人员广泛的关注,共振传感器件耦合系统在非线性静电力、压膜阻尼、参数激励下呈现出较复杂的非线性振动、不稳定性、分岔与混沌行为.提出参数激励作用下静电驱动微机电系统中梁式微结构共振传感器的动力学模型,采用多尺度方法对微系统的动力学方程进行摄动分析,探讨直流偏置电压、压膜阻尼和交流激励电压幅值对系统频率响应、共振频率的影响规律,结果表明:直流偏置电压和交流电压幅值都具有软化效应,且使共振频率漂移到较小的数值范围,压膜阻尼对共振频率的影响较小,但是增大压膜阻尼会使稳态振幅的峰值明显下降,为静电驱动微机电系统共振传感器的动力学分析与设计提供参考.     

一种微机电非线性耦合系统奇点稳定性研究

工程中许多微机电系统都采用电容驱动原理，这类结构实际上存在着强烈的静电和机械两个物理场的非线性耦合，因此系统的动态特性比较复杂。本文基于一种扭转微镜系统，通过数值分析方法，研究其非线性动态特性，根据理论分析和数值计算证明该系统在相平面中存在两个奇点，一个是稳定中心，一个是鞍点，且两个奇点位置均随施加电压的变化而逐渐靠近，从而得出系统的静态分叉点；同时分析了有阻尼和无阻尼时电压的变化对相轨道的影响，以及阻尼对吸合电压的影响，吸合电压随阻尼的增大而提高，这些研究结果不仅对扭转微镜的设计和应用提供了理论和方法，而且对用电容驱动的微机电系统的设计亦有参考价值。     

尺度依赖的静电驱动各向异性微板的Pull-in效应

在新修正偶应力理论的基础上建立了一种可用于分析静电驱动各向异性微板的尺度依赖模型。模型中包含有两个材料尺度参数,在考虑材料宏观各向异性的同时也考虑了微观各向异性程度对结构Pull-in特性的影响。通过虚功原理推导了静电驱动微板的非线性控制方程并显式地给出了Pull-in电压和挠度的表达式。算例结果表明:本文模型所预测的Pull-in电压和挠度分别大于和小于经典宏观板理论的预测结果,即反映了微尺度结构下的尺度效应。尺度效应的影响在板厚度与材料尺度参数接近时逐渐增加,而随着两者比值的增加,该影响逐渐减弱,最终可以忽略不计。此外,本文也讨论了初始间隙d对Pull-in电压以及尺度效应的影响。结果表明随着d的增加,Pull-in电压随之增大,而Pull-in挠度变化不大。     

硅微陀螺正交误差直流校正设计与分析

为硅微陀螺设计了一种正交误差直流校正方法,通过设计校正结构和加载直流电压实现正交校正。建立了存在正交误差时敏感质量的运动微分方程,分析明确了正交响应的成因和对驱动运动轨迹的影响。为硅微陀螺设计了正交校正结构,实现构建静电耦合弹性系数并利用驱动运动产生校正静电力。校正力的频率和相位无需电路控制,使该方法相较于传统校正方法具备特殊优势。设计并分析了校正电压的两种加载方式,通过实验测试验证了正交响应幅值随校正电压的变化规律。实测校正电压接近理论值,证明了校正结构设计的正确性。该方法在双线振动式硅微陀螺中具有重要应用价值。     

基于惯性-摩擦驱动的球基微驱动器逆转现象分析

在压电陶瓷等效电学模型的基础上,结合外加驱动信号波形分析了基于惯性-摩擦驱动的球基微驱动器在工作过程中金属球产生逆转现象的原因,建立了金属球的转速及位移模型,采用快速放电回路和加速压电陶瓷放电的方法减小金属球的逆转位移及振动;利用压电陶瓷管作为微驱动元件,设计了基于惯性-摩擦驱动的球基微驱动器,并采用不同频率的三角波信号对所设计微驱动器进行试验测试.结果表明:驱动信号频率越高,微驱动器的振动现象越明显;当驱动信号频率接近、等于或大于微驱动元件(压电陶瓷管)的固有放电周期时,金属球出现无规律运动,导致微驱动器失效;根据1 Hz低频信号时的试验结果与计算所得结果基本吻合,证明了所建立的逆转理论模型的合理性.     

微梳齿谐振器故障的动态仿真

研究微梳齿谐振器运动中的故障问题,建立了微梳齿结构的三维动力学模型,其中采用Couette模型和Stokes模型相组合的空气阻尼模型;运用有限元方法,分别对带有点粘结、梁裂纹的微梳齿结构进行了动力学特性分析.结果表明:粘结故障使梳齿结构固有频率升高,振幅减小,灵敏度降低.裂纹使微机械结构的固有频率和灵敏度都降低.     

一种谐振式微加速度计表芯非线性动力学分析及实验

在研制基于静电刚度谐振式微加速度计过程中,发现增大激励电压可以提高输出信噪比,但响应的振动幅度将不稳定,同时谐振频率也将会出现漂移。针对上述问题,建立了静电驱动微机械谐振系统等效行为模型,非线性动力学理论分析结果与实验现象一致,总结出需要从加速度计结构参数优化和减小激励电压两个方面来减小频率漂移和提高分辨率。将结构优化准则应用到制造的微加速度计上,实验结果表明:在5 V敏感电压下,闭环条件下单梁加速度计灵敏度为58 Hz/g,分辨率为3.5 mg。     

基于电压约束的微机械谐振器幅-频耦合抑制方法

针对微机械谐振器中存在的幅度-频率耦合带来振动稳定性变差的问题，提出了一种闭环自激控制的直流参考电压约束方法来抑制谐振器振幅。首先，从理论上分析了决定谐振器临界振幅的因素，利用计算机视觉辅助测量方法和高频方波调制方法获得相关尺寸参数及品质因数计算得到微机械谐振器的临界振幅。然后，提出频谱边带比的振动幅度测试方法实现封装后的振动幅度测试。最后，构建了自激振荡闭环测控电路分析模型，根据临界振幅计算得相应的临界直流参考电压为0.866V。恒温实验测试表明：直流参考电压为0.4 V（小于临界参考电压）时，谐振器能够稳定地保持恒定幅度振动；直流参考电压为1.0 V（大于临界参考电压）时，谐振器振动幅度不恒定，谐振器稳定性变差，所提方法通过确定临界参考电压值，并将直流参考电压约束在临界参考电压以内能有效抑制幅度-频率的耦合。     

Existence of Weak Solutions for the Three-Dimensional Motion of an Elastic Structure in an Incompressible Fluid

We study here the three-dimensional motion of an elastic structure immersed in an incompressible viscous fluid. The structure and the fluid are contained in a fixed bounded connected set Ω. We show the existence of a weak solution for regularized elastic deformations as long as elastic deformations are not too important (in order to avoid interpenetration and preserve orientation on the structure) and no collisions between the structure and the boundary occur. As the structure moves freely in the fluid, it seems natural (and it corresponds to many physical applications) to consider that its rigid motion (translation and rotation) may be large. The existence result presented here has been announced in [4]. Some improvements have been provided on the model: the model considered in [4] is a simplified model where the structure motion is modelled by decoupled and linear equations for the translation, the rotation and the purely elastic displacement. In what follows, we consider on the structure a model which represents the motion of a structure with large rigid displacements and small elastic perturbations. This model, introduced by [15] for a structure alone, leads to coupled and nonlinear equations for the translation, the rotation and the elastic displacement.     

Numerical analysis of gas bubbles in close proximity to a movable or deformable body

The growth and collapse of gaseous bubbles near a movable or deformable body are investigated numerically using the boundary element method and fluid–solid coupling technique. The fluid is treated as inviscid, incompressible and the flow irrotational. The unsteady Bernoulli equation is applied on the bubble surface as one of the boundary conditions of the Laplace’s equation for the potential. Good agreements between the numerical and experimental results demonstrate the robustness and accuracy of the present method. The translation and rotation of the rigid body due to the bubble evolution are captured by solving the six-degrees-of-freedom equations of motion for the rigid body. The fluid–solid coupling is achieved by matching the normal component of the velocity and the pressure at the fluid–solid interface. Compared to a fixed rigid body, the expansion of the bubble is not affected too much but much faster collapsing velocities during the collapsing phase of bubble can be observed when considering the motion of the rigid body. The rigid body is pushed away as the bubble grows and moved toward the bubble as the bubble collapses. The motion of two bubbles near a movable cylinder is also simulated. The large rotation of the cylinder and obvious deformation and distortion for the bubble in close proximity to a curved wall are observed in our codes. Finally, the growth and collapse of bubble near a deformable ellipsoid shell are also simulated using the combination of boundary element method (BEM) and finite element method (FEM) techniques. The oscillations of the ellipsoid shell can be observed during the growth and collapse of bubble, which much differs from the results obtained by only considering effects of a rigidly movable body on the bubble evolution.     

一飞机发动机动力特性分析

确定计算模型时，发动机定子按实际刚度，采用NASTRAN70．0程序对发动机整机进行了动力分析，分析结果与试验进行了比较，吻合度优于美国GE公司计算结果。作者认为造成偏磨故障的原因是弹性环压死，使压气机转子与定子反向平动的第六阶临界转速上升到接近放气阀门关闭时转速所致。根据动力响应计算结果，装配工艺采取措施后，克服了此偏磨故障。     

考虑卡西米尔力的静电激励NEMS吸合特性及其尺寸效应研究

基于应变梯度理论和哈密顿原理,并考虑卡西米尔力的影响,建立了静电激励纳米机电系统(NEMS)的尺寸效应模型,并得到模型的控制方程和边界条件。然后,引入广义微分求积法和拟弧长算法,得到模型的数值解。结果表明,当考虑卡西米尔力的影响时,系统两极的吸合电压有所减小。并且,当系统尺寸达到一个临界值时(即两电极间距小于“最小间距”,或可变形电极长度超过“拉起长度”),系统会在没有外加电压的作用下自动发生吸合,这将为NEMS的优化设计和定量分析提供理论基础。     

Design and traction performance of the movable lug wheel

A movable lug wheel using a rollers-sliding groove mechanism was designed, constructed and tested. Two types of lug moving patterns of the movable lug wheel were proposed and evaluated. Tests were conducted in a soil bin test apparatus to determine the traction performance of the wheel as affected by lug moving pattern, lug spacing, horizontal load and vertical load. Similar tests were also conducted using a fixed lug wheel. Generally, under the same level of vertical load, the fixed lug wheel sank more than the movable lug wheels did. However in general, under various horizontal loads, there was no significant difference of slip between the movable lug wheel and the fixed lug wheel. Among the test lug wheels, the movable lug wheel with lug moving pattern-2 required the smallest driving torque and developed the highest traction efficiency.     

Measurement of soil reaction forces on a single movable lug

In order to clarify characteristics of a new mechanism called a movable lug, a model of a single movable lug equipped with an L-shaped force transducer has been developed. The soil reaction forces (normal and tangential) on a flat single movable lug, a curved single movable lug and a fixed lug were measured on wet sandy loam soil in the laboratory soil bin test. These measured forces then were converted to lug pull and lift forces. The pull and lift forces obtained by the flat movable lug with 45° lug inclination angle and the curved movable lug were higher than those of the fixed lug. It was observed that the lift force of the fixed lug achieved its peak and dropped earlier than those of the movable lugs. However, the peaks of pull and lift forces of the flat and curved movable lugs were almost the same. The flat movable lug with 45° lug inclination angle generated a slightly higher peak of pull force than those with 30° and 60° lug inclination angles. However, the higher lug inclination angle produced, the lower peak of lift force. It was observed that the pull and lift forces increased as the sinkage increased. In contrast to the flat movable lug with 45° lug inclination angle, the curved movable lug produced greater lift force especially at high sinkage. The increase in lug slip from 5% to 25 and 50% caused an increase in the peaks of pull and lift forces. The soil moisture content affected the lug forces significantly.     

A semi-automated in-plane loader for materials testing

A universal testing machine is described for applying general in-plane loading as combinations of tension or compression, shear and in-plane rotation. It is composed of three computer-controlled hydraulic actuators connected to a movable head free to execute translation and rotation motions. Test specimens 1 in.×1.5 in. (25 mm×38 mm) are loaded through hydraulic grips for which the gripping pressure can be programmed. Other components include a mechanical specimen loader, a video digitizer for defining the specimen geometry, and a computer system that controls the test and gathers and stores the test data. A large number of tests can be conducted inexpensively over a broad range of loading conditions in this system, as opposed to the more generally available complex loading systems for which specimen costs are higher and testing time considerably longer. With rather limited changes, the system could be fully automated. The system has been used to characterize the fracture behavior of a series of carbon/epoxy composites over a broad range of in-plane loads.     

硅微机械谐振陀螺仪的非线性分析

给出了硅微机械谐振陀螺仪的结构,介绍了硅微机械谐振陀螺仪的工作原理,详细推导并给出了陀螺仪的输出频率和标度因数非线性的计算公式;基于影响谐振陀螺仪标度因数的参数,分析了由谐振器的振幅和梳齿静电驱动力引起的硅微机械谐振陀螺仪的非线性特性,给出了振动幅度与谐振频率关系的表达式.实验结果表明,陀螺仪的整体性能主要取决于谐振器振动幅度的稳定性.     

Inverse dynamics of the HALF parallel manipulator with revolute actuators

Recursive matrix relations for kinematics and dynamics of the HALF parallel manipulator are presented in this paper. The prototype of this robot is a spatial mechanism with revolute actuators, which has two translation degrees of freedom and one rotation degree of freedom. The parallel manipulator consists of a base plate, a movable platform and a system of three connecting legs, having wide application in the fields of industrial robots, simulators, parallel machine tools and any other manipulating devices where high mobility is required. Supposing that the position and the motion of the moving platform are known, an inverse dynamics problem is solved using the principle of virtual powers. Finally, some iterative matrix relations and graphs of the torques and powers for all actuators are analysed and determined. It is shown that this approach is an effective means for kinematics and dynamics modelling of parallel mechanisms.     

非保守圆薄板的轴对称振动和稳定性

建立了受切向均布随从力作用的圆薄板在面内周边可移、不可移两种情况下的轴对称控制方程，用打靶法直接导出求解变系数常微分方程特征值问题数值解的计算式．通过数值计算，给出了周边可移、不可移的简支、固支圆板自振频率和临界载荷的特征曲线以及相应的临界发散载荷，并分析了泊松比对圆板自振频率和临界载荷的影响．