Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm ×10 mm ×20 μm diaphragm, over which waveguides were placed at 50 μm intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

Integrated Optic Pressure Sensor Using Intermodal Interference between Two Mutual Orthogonal Guided-Modes

We theoretically and experimentally investigated fundamental characteristics of an integrated optic pressure sensor using intermodal interference between the lowest-order TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide along an edge of the diaphragm. Its operation is based on a difference of phase retardations produced in the two guided modes through the photoelastic effect. The sensor was fabricated by bonding two glass substrates together: a Corning 0211 glass 300 μMm thick to form a waveguide and a thick substrate with a 10 mm × 10 mm square hole to define the diaphragm. The fabricated sensor was successfully tested using a He-Ne laser at 633 nm. The halfwave pressure was measured to be 77 kPa which is almost double the theoretical estimate.     

Reverse-symmetry waveguides: theory and fabrication

We present an extensive theoretical analysis of reverse-symmetry waveguides with special focus on their potential application as sensor components in aqueous media and demonstrate a novel method for fabrication of such waveguides. The principle of reverse symmetry is based on making the refractive index of the waveguide substrate less than the refractive index of the medium covering the waveguiding film (n_water=1.33). This is opposed to the conventional waveguide geometry, where the substrate is usually glass or polymers with refractive indices of ≈1.5. The reverse configuration has the advantage of deeper penetration of the evanescent electromagnetic field into the cover medium, theoretically permitting higher sensitivity to analytes compared to traditional waveguide designs. We present calculated sensitivities and probing depths of conventional and reverse-symmetry waveguides and describe schemes for easy implementation of reverse symmetry. Polymer waveguides are demonstrated to be candidates for cheap, mass-producible reverse-symmetry sensor modules. The grating-coupled waveguiding films of controlled thickness are produced by soft lithography. The resulting films are combined with air-grooved polymer supports to form freestanding single-material polymer waveguides of reverse symmetry capable of guiding light. Received: 20 December 2001 / Published online: 14 March 2002     

1.5μm Ti:LiNbO_3光波导TE_0模偏振器

在1.523μm波长He-Ne激光,对于Z切Ti扩散LiNbO_3光波导及其带有金属包覆/介质缓冲层的偏振器结构,理论上计算了单模波导的工艺参数和基模的吸收损耗系数.文中用TM_0模的共振吸收效应,在1.5μm波长首次研制成Ti:LiNbO_3光波导TE_0模偏振器.当器件长度为2mm和9mm时,其消光比分别为20dB和25dB.     

AWG中波导间耦合造成的相位畸变的分析

用(1,1)阶Pad啨近似的广角BPM计算了阵列波导光栅(AWG)中由于阵列波导间耦合造成的相位畸变以及由于相位畸变引起的相位误差分别考虑了光从中心/非中心输入波导入射两种情况结果表明,波导间的耦合会造成显著的相位畸变,但由此引起的相位误差却很小,光从中心输入波导入射时对应的相位误差10-3rad,从非中心输入波导入射时的相位误差约为10-2rad针对波导阵列边缘效应引起的相位畸变,设计AWG结构时,在阵列部分两侧增加了边缘辅助波导结构,从而消除了边缘效应,使得边缘阵列波导对应的相位误差从10-1rad量级减小为10-3(10-2)rad量级.     

新颖的微弯结构Mach-Zehnder干涉仪型传感器及其优化设计

介绍了一种改进的Mach-Zehnder干涉仪型传感器,采用微弯结构波导代替了传统的MZ干涉结构的两臂. 利用三维波束传播法（3D-BPM）对传感器的敏感区域,微弯结构的形状进行了研究,同时研究了微弯结构的振幅和周期对灵敏度的影响,并采用梯度算法对这两个最重要的参数进行综合优化. 模拟结果表明,优化后的传感器敏感度比优化前提高了一倍多.     

InGaAsP/InP evanescent mode waveguide optical isolators and their application to InGaAsP/InP/Si hybrid evanescent optical isolators

We theoretically investigated InGaAsP/InP evanescent mode waveguide optical isolators and proposed their application to InGaAsP/InP/Si hybrid evanescent optical isolators. InGaAsP/InP evanescent optical isolators are composed of semiconductor optical amplifier (SOA) waveguides having InGaAsP multiple quantum well (MQW) active layer and upper InGaAsP waveguide layer with ferromagnetic layer. Optical isolation is obtained for evanescent optical mode in the InGaAsP waveguide layer. InGaAsP/InP/Si hybrid evanescent optical isolators are theoretically proposed based on the idea of InGaAsP/InP evanescent optical isolators. InGaAsP/InP/Si hybrid evanescent optical isolators are composed of ferromagnetic metal loaded silicon evanescent waveguides with wafer-bonded InGaAsP/InP optical gain material. The optical isolation and propagation loss are discussed with the structure of silicon evanescent waveguides, and optical isolation of 8.0 dB/mm was estimated. The concept of semiconductor evanescent mode optical isolators is feasible with InP based photonic integrated circuits and advanced silicon photonics.     

双层声波导乐甫波传感器的质量敏感度分析

本文推导了双层声波导结构乐甫波传感器的频散方程和质量敏感度。首先,根据连续边界条件求解声波波动方程,并推导双层声波导结构下乐甫波传播的频散方程;然后根据微扰理论推导乐甫波传感器的质量敏感度。文中并最后给出基于ST-90°X石英基片的乐甫波传感器的算例分析。基片表面依次覆盖二氧化硅和金两层声波导,根据上述推导式子计算出乐甫波相速度及质量敏感度随着声波导层厚度变化的特性。结果表明:声波导层厚度增加时,乐甫波相速度减小,乐甫波模式增多,控制波导层厚度可以获得单一的乐甫波模式;选择波导层的厚度,乐甫波传感器可获得最大质量敏感度。     

Design and analysis of a vertical directional coupler between a three-dimensional plasmonic slot waveguide and a silicon waveguide

The design of a vertical directional coupler between a three-dimensional plasmonic slot waveguide and a silicon waveguide is theoretically investigated in detail. It consists of two steps: the design of isolated plasmonic slot waveguide and silicon waveguide and the determination of the gap between the two waveguides and the length of a coupling region. The designed structure transfers 70.8% of the power carried by the silicon waveguide mode to the plasmonic slot waveguide mode when the gap is 150 nm and the coupling length is 2.14 μm. The wavelength dependence of our vertical directional coupler is also studied. The analysis shows that the amount of the transferred power changes slightly over a very wide wavelength range between 1.40 μm and 1.61 μm. Moreover, if we employ the fabrication technology for silicon photonics, it is quite tolerant to the variation of the length of its coupling section. Finally, the vertical directional coupler is considered for a polarizer.     

High sensitivity photonic crystal waveguide sensors

A theoretical investigation of the sensitivity of an optical liquid sensor, based on photonic crystal waveguide, is carried out. The sensing principle is based on the variation of the effective index of the waveguide induced by analyte refractive index change. The sensor modelling is carried out by using the 3D finite element method. The influence of geometrical parameters on the sensor sensitivity has been investigated. The results show that the sensitivity can be optimized by an appropriate choice of the geometrical parameters and a sensitivity superior to 20 has been achieved, near the cut-off in the slow light region, which is several times higher than that can be achieved with conventional waveguides.     

Simulation of micro/nanometer-scale self-organized lightwave network (SOLNET) using the finite difference time domain method

A simulator for self-organized lightwave network (SOLNET) is developed. The simulator is based on the finite difference time domain method. SOLNET enables us to construct self-aligned coupling waveguides between misaligned micro/nanometer-scale optical devices by self-focusing, which arises from an increase in refractive index induced by write beams in photo-refractive materials. The SOLNET simulator reveals that an L-shaped nanometer-scale optical waveguide of SOLNET is grown from a 0.5-μm-wide optical waveguide when write beams are introduced from the optical waveguide into photo-refractive materials, where a wavelength filter is embedded. The SOLNET simulator also reproduces coupling path construction between a 2-μm-wide optical waveguide and a 0.5-μm-wide optical waveguide having a wavelength filter on the core edge. The optical waveguides are placed with misalignment of 0.5-μm offset. By introducing write beams from the 2-μm-wide optical waveguide, the incident write beams and reflected write beams from the wavelength filter merge into one optical waveguide in the photo-refractive materials, constructing a self-aligned coupling waveguide.     

A design for a nonreciprocal phase shifter

A design is described for a nonreciprocal phase shifter, which is the key element in the constitution of a Mach-Zehnder interferometric isolator consisting of a magneto-optical channel waveguide. A four-layered structure waveguide is dealt with in which a cover layer having a larger refractive index than that of the film is placed on the magneto-optic thin film; it is revealed that the phase shifter length can be shortened by up to 6 mm at the 1.15 m wavelength, which is half the length of a nonreciprocal phase shifter constructed of a three-layered waveguide without a large refractive index cover layer. Two types of channel waveguides are investigated: a rib waveguide and a strip-loaded waveguide; they are found to have the same phase shifter length for the optimum condition.     

平面光波导用于实时测试生化反应新方法的研究

在分析经典消逝波光波导生化传感器的基础上,为寻找性能更佳的传感器,探讨用更为直观的截止特性来进行生化传感。分别对三层及四层平板波导进行了研究,指出了作为基于截止特性的生化传感器三层波导结构存在的局限性。在理论上研究了可以在四层波导中使用变折射率材料来进行基于截止特性的生化传感,并给出了由空气隙、极化聚合物、高折射率薄膜、待测物组成的传感器结构示意图。用数值分析的方法绘出了此装置的灵敏度与高折射率薄膜厚度的关系曲线,并将它同经典消逝波光波导生化传感器灵敏度与薄膜厚度关系图进行了比较。结果表明,这种新型传感器理论上可以在较厚的薄膜结构中达到很高的灵敏度。     

基于非对称脊波导的多种聚合物弯波导性能分析

以缩短马赫-曾德尔(M-Z)电光调制器分支波导为目的,将有机聚合物非对称结构的脊波导应用于S弯波导中。采用半矢量有限差分光束传输分析法,系统地分析了不同参数下采用非对称脊波导的三种常见弯波导,即正弦弯、圆弧弯和余弦弯分支波导的TM00光场传输损耗,并与采用对称脊波导的结构相比较。研究表明,在芯层厚度h=1.5μm、脊高为0.3μm、脊宽w=4μm、分支高度G=11μm的情况下,当脊波导短边芯层平板宽度s≥2μm时,在相同传输损耗条件下,正弦弯、圆弧弯和余弦弯分支波导长度分别可减少40%、30%和25%,该结果对有机聚合物M-Z调制器中分支波导的设计具有一定的参考价值。     

Characterization and sensor properties of sol-gel SiO2:TiO2 film/ion-exchange glass optical waveguides

The paper presents the characterization and sensor properties of composite sol-gel SiO₂:TiO₂ film/ion-exchange glass optical waveguides. In the theoretical part of the paper the analysis involving the influence of the parameters of a uniform waveguide film on homogeneous sensitivity has been presented. It has been shown that the highest sensitivity can be obtained making use of the interference of TM₀-TM₁ modes. In the experimental part of the work the manufacturing technology of composite sol-gel SiO₂:TiO₂ film/ion-exchange glass optical waveguides has been described and the analysis results of the produced structures have been presented. The paper presents the influence of the thickness of the uniform waveguide film and the influence of the refractive index of the cover on effective refractive indexes. The produced waveguide structures are characterized by high homogeneous sensitivity.     

利用51微米激光器测量中红外光波导损耗(英文)

一种新型的采用AlGaAs材料设计制成的光波导显示了其在中红外激光器方面的应用。波导部分包含在两个GaAs的包层之间,两个包层的掺杂材料限制光场在波导中传播并且降低损耗。三个不同长度的波导经过切入式测量得到它们的内部传播损耗为1 5dB/cm和耦合损耗为9dB。所采用的中红外激光器的波长是5 1μm,输出功率在45毫瓦以上。从光波导输出的光功率只有几个毫瓦。     

High-sensitivity fiber-tip pressure sensor with graphene diaphragm

A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector, which, in conjunction with the reflection at the fiber end-air interface, forms a low finesse Fabry-Perot interferometer. The graphene based sensor demonstrated pressure sensitivity over 39.4 nm/kPa with a diaphragm diameter of 25 μm. The use of graphene as diaphragm material would allow highly sensitive and compact fiber-tip sensors.     

费米折射率波导的包层吸收模谱特性和溶液浓度传感研究

采用0.004AgNO3-0.996NaNO3混合熔融盐,用离子交换技术在德国B270光学玻璃上制备了费米折射率分布渐变波导,理论分析了费米折射率分布渐变波导的包层吸收模谱特性.导波损耗测试实验验证了解析结果.在此基础上,提出了一种用于液体包层吸收损耗测试的双样品盒串连的波导回路.测试结果证实表征溶液包层吸收特征的折射率虚部与溶液浓度之间具有十分显著的线性关系,测试灵敏度与波导的模式和波导参量有关,尤其与波导层厚度有非常敏感的关联性.利用这个关系传感测试了13种不同浓度的耐晒果绿染料水溶液样品的浓度,结果显示测试值与实际配制浓度值的均方差小于0.07%.     

Dynamic response of sensor diaphragm with residual stress in contact with liquids

The dynamic response of a sensor diaphragm with residual stress in contact with a liquid is theoretically investigated in this paper. The liquid is assumed to be incompressible and inviscid. The acoustic radiation as the main source of energy dissipation in a medium virtually added the mass of the diaphragm and decreased the quality factor of the diaphragm. The effects of the residual stress on the added virtual mass and the quality factor of the diaphragm are presented. Finally, forced oscillations of the sensor diaphragm with residual stress in contact with a liquid are investigated. It is found that the requirements of high sensitivity and large vibration displacement are contradictory. The analysis and results are valuable for conducting the design of circular sensor diaphragms for biological applications.     

Optical sensing by silicon slot-based directional couplers

A theoretical investigation of an optical liquid sensor, based on asymmetric directional coupler employing slot optical waveguides, is carried out. The sensing principle is based on the shift in the waveguide transmitted spectrum induced by analyte refractive index change. Silicon-on-insulator technology has been assumed in sensor design, and sensor modelling is carried out by using the coupled modes theory and the finite element method. The influence of geometrical parameters on the sensor characteristics has been investigated. A minimum detectable refractive index change of the order of 10^?6 can be theoretically predicted.