共查询到20条相似文献,搜索用时 78 毫秒
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利用直流-射频-等离子体增强化学气相沉积技术在单晶硅表面制备了类金刚石薄膜,采用原子力显微镜、Raman光谱、x射线光电子能谱、红外光谱和纳米压痕仪考察了射频功率对类金刚石薄膜表面形貌、微观结构、硬度和弹性模量的影响.结果表明,制备的薄膜具有典型的含H类金刚石结构特征,薄膜致密均匀,表面粗糙度很小.随着射频功率的升高,薄膜中成键H的含量逐渐降低,而薄膜的sp33含量、硬度以及弹性模量先升高, 后降低,并在射频功率为100W时达到最大.
关键词:
等离子增强化学气相沉积
类金刚石薄膜
射频功率
结构和性 相似文献
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大面积均匀纳米金刚石薄膜制备研究 总被引:7,自引:0,他引:7
报道了一种利用偏压恒流等离子辅助热丝化学气相沉积城硅基板上制备大面积均匀纳米金刚石薄膜的新工艺,在不同沉积条件下研究了纳米金刚石薄膜的成核和生长过程,并通过扫描电镜、拉曼光谱和表面粗糙度测试仪观察了纳米金刚石薄膜的结构特征。最后成功制备了直径100mm、平均晶粒尺寸10nm的光滑纳米金刚石薄膜。 相似文献
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采用原子力显微镜(AFM)、俄歇电子能谱(AES)和显微压痕分析等手段对射频等离子体增强化学气相沉积法制备的掺氮类金刚石(DLC:N)薄膜的微观结构和力学性能进行了研究.结果表明,随着含氮量的增加,DLC薄膜的AFM表面形貌中出现了几十纳米的颗粒,原子侧向力显微镜和AES分析表明这种纳米颗粒是x大于0.126的非晶氮化碳CNx结构.这种非晶DLC/CNx的纳米复合结构,减小了薄膜的内应力,从而提高了薄膜与衬底的附着力.
关键词:
类金刚石碳膜
微观结构
附着特性 相似文献
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利用热丝化学气相沉积法研究了氮气浓度对金刚石薄膜成核和生长的影响.实验发现氮气的 加入对金刚石成核密度影响不大,但促进了已形成的金刚石核的长大.适量的氮气不仅使金 刚石生长速率得到很大的提高,而且稳定了金刚石薄膜(100)面的生长,使金刚石薄膜具有 更好的(100)织构.利用原位光发射谱对衬底附近的化学基团进行了研究.研究表明,氮气的 引入使得金刚石生长的气相化学和表面化学性质发生了很大变化.含氮基团的萃取作用提高 了金刚石表面氢原子的脱附速率,从而提高了金刚石膜的生长速率.而含氮基团的选择吸附 使金刚石
关键词:
氮气
金刚石薄膜
织构
原位光发射谱 相似文献
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采用射频等离子体增强化学气相沉积(RF-PECVD)法在石英片上生长类金刚石薄膜。通过紫外可见分光光度计、椭偏仪测试手段,研究不同射频功率条件下类金刚石薄膜的光学性能的变化。结果表明,射频功率对类金刚石薄膜的生长具有重要影响,在较低功率下生长的类金刚石薄膜,具有较高的光学透过率和较大的光学带隙。 相似文献
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低压下沉积c-BN薄膜是近年来凝聚态物理和材料科学研究的热门课题之一.我们应用热丝辅助射频等离子体化学气相沉积技术,在多种衬底上沉积了BN薄膜,并系统研究了热丝温度、衬底温度和射频电压等工艺参数对BN薄膜中立方相含量的影响. 相似文献
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采用化学气相沉积(CVD)技术,以高温高压(HTHP)合成的(100)金刚石和p型(100)Si为衬底制备了硫掺杂和硼-硫共掺杂金刚石薄膜,利用原子力显微镜(AFM)、扫描隧道显微镜(STM)及隧道电流谱(CITS)等手段分析同质和异质外延CVD掺杂金刚石薄膜的结构和性能.结果表明:异Si衬底上CVD金刚石的形核密度低,薄膜表面比较粗糙,粗糙度达到18.5nm;同质HTHP金刚石衬底上CVD金刚石薄膜晶粒尺寸约为10—50nm,表面平整,表面粗糙度为1.8nm.拉曼测试和电阻测量的结果显示,在HTHP金刚
关键词:
金刚石
掺杂
外延 相似文献
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纳米金刚石薄膜的沉积实验在自行研制的热丝化学气相沉积系统上完成。基体为金刚石微粉研磨和酸蚀后的硬质合金片,反应气体为CH4和H2混合气,V(CH4):V(H2)=1%-4%,基体温度800-1000℃,沉积时气压为0.8~2.0kPa。SEM观察表明,影响金刚石膜的表面形貌及粗糙度的关键参量是基体温度、反应气压及含炭气体的浓度,这些参数都会影响到薄膜的纯度、结晶习性和晶面完整性。沉积纳米金刚石薄膜工艺是通过高密度形核以及抑制金刚石膜在沉积过程中的晶粒长大来实现的。 相似文献
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研究了Er1.0P5O14铒非晶玻璃的红外量子剪裁现象. 从吸收谱和激发光谱的计算比较中肯定了Er1.0P5O14非晶 玻璃的1537.0 nm红外荧光为多光子量子剪裁荧光. 从Er1.0P5O14非晶玻璃的可见和红外荧光发射光谱中发现激发2H11/2, 4G11/2和4G9/2能级所导致的4I13/2→4I15/2量子剪裁红外荧光很强;基于自发辐射速率、无辐射弛豫速率和能量传递速率等参数的计算,对其量子剪裁机理进行了分析.发现起源于基态的强下转换能量传递{2H11/2→4I9/2,4I15/2→4I13/2},{4G11/2→4I13/2, 4I15/2→2H11/2},{4G9/2→4F7/2,4I15/2→4I13/2}和{4G9/2→4I13/2, 4I15/2→2H11/2}是导致Er1.0P5O14非晶玻璃具有强的三光子和四光子量子剪裁红外荧光的原因.研究结果对改善太阳能电池效率有一定意义. 相似文献
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An attempt is made to synthesize Nd2Co14C compound by mechanical alloying Nd16Co76B8−xCx (0x8) alloys and subsequent annealing. Phase formation and magnetic properties of Nd2Fe14B-type Nd16Co76B8−xCx alloys and their hydrides are investigated. The Nd2Co14(B,C) phase with Nd2Fe14B-type structure is formed for Nd16Co76B8−xCx (0x7) alloys, while NdCo7Cδ phase with TbCu7-type structure is observed in Nd16Co76C8 alloy. The lattice parameter c of the Nd2Co14(B,C) phase decreases with increasing the carbon content. A limit volume of the unit cell to form the Nd2Fe14B-type structure is estimated to be 0.870 nm3. The spin-reorientation temperature TSR increases with increasing the carbon content, due to an enhancement of magnetocrystalline anisotropy caused by carbon substitution for boron. After hydrogenation, the lattice expansion is observed for Nd16Co76B8−xCx (0x7) alloys. The spin-reorientation temperature of Nd16Co76B8−xCxHy (0x7) is much lower than that of the host alloys. Some structural and magnetic properties of hypothetic Nd2Co14C and Nd2Co14CHy compounds are estimated by extrapolation. 相似文献
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We study the discrete Painlevé equations associated to the affine Weyl group which can be obtained by the implementation of a special limits of -associated equations. This study is motivated by the existence of two -associated discrete both having a double ternary dependence in their coefficients and which have not been related before. We show here that two equations correspond to two different limits of a -associated discrete Painlevé equation. Applying the same limiting procedures to other -associated equations we obtained several -related equations most of which have not been previously derived. 相似文献
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Abstract Earlier, when investigating H-complexes of the RO-H…BR1 type in solutions 1–3 and crystalline state 4, the isotopic shift for frequencies of the stretching vibrations (OH) at substitution of H for D was shown to systematically decrease with increased strength of the H-bond. In strong H-complexes, the (OH) and (OD) bands in the i.r. spectra have a complex structure: depending on the strength of the H-complex in a wide range of frequencies (3000–1000 cm?1), several submaxima caused by a Fermi-resonance interaction of the fundamental tone of (OH) with combinations and overtones in the bending vibrations of R-O-H were observed 1–5. Hence, the frequencies and intensities of the (OH) and (OD) bands in strong H-complexes should be considered as corresponding to the gravity centre (°) and overall intensity (A°) of all the 相似文献