多层膜外退火方法制备MgB2超导薄膜

报道了利用电子束蒸发的Mg/B多层膜作为前驱体，然后退火制备MgB₂薄膜的工作. 实验中发现，采用翻转膜面的退火处理方式可以有效地避免降温过程中Mg蒸气在薄膜表面形成的颗粒凝结，由此稳定地实现了面积为10 mm×10 mm，均匀、平整的超导薄膜的制备，T_c达35 K，转变宽度为0.8 K，在5 μm×5 μm的区域内薄膜的平均粗糙度小于10 nm. 为了便于后续器件制作过程中的微加工工艺，研究了膜厚小于1000 ?时薄膜的成相规律，发现当样品厚度减薄后，T_c会有明显降低. 通过调整前驱薄膜中的不同分层厚度，仍可实现转变温度达30 K以上、厚度约600 ?的MgB₂薄膜，在20 K时的临界电流密度为2.4×10⁶ A/cm².     

电子束蒸发在不同Ar气氛下外退火制备MgB2超导薄膜

制备高质量的MgB2薄膜是实现MgB2超导电子器件应用的前提和基础.我们用电子束蒸发B膜和Mg/B多层膜为前驱然后后退火的方法,分别在高温区(~900℃)和中温区(~750℃)成功获得了MgB2超导薄膜.改变退火的Ar气压条件,采用B膜前驱退火的样品Tc可达到38K以上,转变宽度0.3K.Mg/B多层膜的结果尽管Tc稍低(Tc~35K),但薄膜表面更加均匀,且避免了高温下Mg蒸汽污染的问题.对于两种前驱退火中观察到的完全不同的退火气压影响,我们认为是与其各自的超导成相过程相联系的,在此基础上我们对退火气压效应给出了自己的分析和解释,为今后进一步细致研究退火过程中的薄膜生长机制提供了参考.     

多层膜外退火方法制备MgB2超导薄膜

报道了利用电子束蒸发的Mg/B多层膜作为前驱体,然后退火制备MgB2薄膜的工作.实验中发现,采用翻转膜面的退火处理方式可以有效地避免降温过程中Mg蒸气在薄膜表面形成的颗粒凝结,由此稳定地实现了面积为10 mm×10mm,均匀、平整的超导薄膜的制备,Tc达35 K,转变宽度为0.8 K,在5 μm×5 μm的区域内薄膜的平均粗糙度小于10 nm.为了便于后续器件制作过程中的微加工工艺,研究了膜厚小于1000 (A)时薄膜的成相规律,发现当样品厚度减薄后,Te会有明显降低.通过调整前驱薄膜中的不同分层厚度,仍可实现转变温度达30 K以上、厚度约600 (A)的MgB2薄膜,在20 K时的临界电流密度为2.4×106 A/cm2.     

电子束快退火法制备MgB_2薄膜及性质研究

利用电子束快退火法制备了MgB2超导薄膜.该方法利用高能电子束,在中真空条件下照射Mg-B多层前驱膜,照射时间维持在1s以下.在电子束的作用下,前驱膜中的Mg和B迅速反应,形成MgB2相.整个退火过程没有Mg蒸气与氩气保护,极短的退火时间有效地限制了前驱膜中Mg的流失和Mg与其它物质的反应.与传统制备工艺相比,该方法避免了混合物理化学气相沉积法中乙硼烷的使用;省去异位退火法中提供高Mg蒸气压的限制,避免在有Mg块存在情况下退火后样品表面存在Mg污染的问题.利用该方法在SiC(001)衬底上生长了100nm厚的MgB2薄膜,其超导转变温度Tc～35K,均方根粗糙度为3.6nm,临界电流密度Jc(5K,0T)=3.8×106 A/cm2.该方法对MgB2薄膜的大规模工业生产提供了一个新思路.     

Al2O3衬底MgB2超薄膜的研究

我们利用混合物理化学气相沉积法(Hybrid physical-chemical vapor deposition简称为HPCVD)在(000l)Al2O3衬底上制备了系列干净的MgB2超薄膜,并通过R-T测量、SEM测量、M-T测量、XRD测量对它们进行了表征,探究了其超导电磁性能和薄膜的生长机制.其中的7.5nm厚的MgB2超薄膜为已报导的蓝宝石衬底上生长的性能最高的超薄膜.     

MgB2 超薄膜的制备和性质研究

利用混合物理化学气相沉积法在6H-SiC(001)衬底上制备干净的MgB₂超导超薄膜.在本底气体压强、载气氢气流量等条件一定的情况下,改变B₂H₆流量及沉积时间,制备得到不同厚度的系列MgB₂超薄膜样品,并研究了超导转变温度T_c、剩余电阻率ρ_(42K)、上临界磁场H_c2等与膜厚的关系.该系列超薄膜沿c轴外延生长,随膜厚度的变小,T_c(0)降低,ρ_(42K)升高.膜在衬底上的生长遵循Volmer-Weber岛状生长模式.对于厚度为7.5 nm的MgB₂超薄膜,T_c(0) =32.8 K,ρ_(42K) =118 μΩcm,是迄今为止所观测到的厚度为7.5 nm的MgB₂超薄膜最高的T_c值;对于厚度为10 nm的MgB₂膜,T_c(0)=35.5 K,ρ_(42K)=17.7 μΩcm,上临界磁场μ₀H_c2估算为12 T左右,零磁场、4 K时的临界电流密度J_c=1.0×10⁷ A/cm²,是迄今为止10 nm厚MgB₂超薄膜的最高J_c值,且其表面连接性良好,均方根粗糙度为0.731 nm.这预示MgB₂超薄膜在超导纳米器件上具有广阔的应用前景. 关键词： 2超薄膜')" href="#">MgB₂超薄膜 薄膜生长 氢气流量 混合物理化学气相沉积     

磁控溅射法结合异位退火制备MgB_2超导薄膜的研究

采用磁控溅射法,结合真空异位退火,成功制备MgB_2超导薄膜,探索了退火温度、退火时间、磁控溅射功率和溅射气压对MgB_2薄膜超导特性的影响。通过XRD、SEM和PPMS测量的结果来分析退火及溅射的工艺参数对MgB_2超导薄膜的晶体结构、表面形貌及超导性能的影响。研究表明,退火温度为670℃,退火时间为2h,MgB_2靶溅射功率控制在300W,Ar溅射气压保持为2Pa,MgB_2薄膜表现出最优的超导特性,其临界电流密度Jc为1.8×105A/cm2。     

MgB2薄膜的制备与特殊性质

本文报道了利用混合物理化学气相沉积方法(HPCVD)在SiC衬底上制备出约150 nm厚,结构均匀的MgB2薄膜.由R~T曲线知道样品TC(0)高达40.1K.由M~T曲线知道其TC=40.4K,且曲线转变十分陡峭.X射线衍射分析表明薄膜具有较好的C轴取向,没有氧污染,却存在Mg的杂峰.由M~H曲线,利用毕恩模型计算得到了5 K零场条件下JC(0T,5K)=2.7×106A/cm2,Hc2=19.5 T.这些结果表明过量的Mg对MgB2薄膜的转变温度以及有些性质有较大的影响.     

MgB2超导薄膜的变温拉曼光谱研究

MgB₂作为迄今为止超导转变温度最高的合金超导体,由于其具有结构简单、相干长度长、晶界间不存在弱连接、上临界场很高、电-声散射时间短等特点,MgB₂超导薄膜在电子学领域有着广阔的的应用前景。拉曼光谱是研究电-声子相互作用和超导能带的一种有效方法,且已广泛用于分析MgB₂材料的电子、声子特征以及超导体能带结构,研究表明,样品质量、晶粒尺寸以及测试条件对MgB₂拉曼峰的峰位和峰形影响很大,其中拉曼光谱随温度的变化也是一个研究重点,但目前关于MgB₂变温拉曼光谱的研究,测试的温度范围相对较小,局限在83 K到室温区域或是转变温度附近。研究了大范围温度区间内MgB₂薄膜的拉曼光谱变化,采用混合物理化学沉积法在(0001)SiC衬底上制备了MgB₂多晶薄膜,薄膜的晶粒尺寸约为300 nm,超导转变温度为39.3 K,对其在10～293 K之间的拉曼光谱进行了测试,测量的波数范围为20～1 200 cm-1。变温拉曼光谱的测试结果显示,在高频620 cm-1附近以及低频80和110 cm-1附近存在MgB₂的拉曼峰。经分析,低频区域出现的两个拉曼峰的频率与超导能隙宽度相对应,表明MgB₂的双能隙特性。考虑到MgB₂中四种声子模式的拉曼活性,高频620 cm-1附近的拉曼峰应是由E_2g振动模所贡献的,且随着测试温度的降低,该拉曼峰的峰位未发生明显的偏移,但半高宽显著变小,从293 K时的380.7 cm-1减小到10 K时的155 .7 cm-1,分析表明E_2g声子与电子系统的非线性耦合所引起的非简谐效应可能是拉曼峰半高宽线性变小的主要原因。     

热处理工艺对MgB_2超导薄膜制备和表面形貌的影响

MgB_2作为一种独特而重要的高温超导材料(HTS),具备超导转变温度高,相干长度大,临界电流和临界磁场高等优势,具有在超导电子学领域大规模应用的潜力。基于MgB_2超导薄膜的超导器件的制备是该材料能否走向大规模应用的关键。在MgB_2超导薄膜的CVD法制备过程中,通过优化退火工艺的温度参数,使得MgB_2超导薄膜在单晶基片上的附着和稳定性增强。加入回火处理工艺,提高了薄膜表面的平整度,为MgB_2超导薄膜从材料走向器件创造了条件。     

利用电泳法在金属基底上制备MgB2超导厚膜

利用电泳技术在高熔点金属基底Ta，Mo和W上制备MgB₂超导厚膜.厚膜中的MgB2晶粒结合紧密，粒度小于1μm，呈随机取向生长.电阻测量表明沉积在Ta，Mo，W上的MgB₂厚膜的超导起始转变温度分别为36.5K，34.8K，33.4K，对应的转变宽度为0.3K，1.5K和2.0K.三种基底上制备的MgB₂厚膜的临界电流密度在不同温度下随外磁场的变化情况 基本相同，MgB₂/Mo厚膜的临界电流密 关键词： 2超导厚膜')" href="#">MgB₂超导厚膜 电泳 金属基底     

The microwave response of MgB2 /Al2O3 superconducting thin films

Microwave characteristics of MgB2/Al2O3 superconducting thin films were investigated by coplanar resonator technique. The thin films studied have different grain sizes resulting from different growth techniques. The experimental results can be described very well by a grain-size model which combines coplanar resonator theory and Josephson junction network model. It was found that the penetration depth and surface resistance of thin films with smaller grain sizes are larger than those of thin films with larger grain sizes.     

Anisotropy of the upper critical field in c-axis oriented MgB2 thin films

C-axis oriented MgB_2 thin films were synthesized on single-crystal MgO (111) substrates using a chemical vapour deposition technique. The as-formed films revealed a sharp superconducting transition temperature of 38K with the transition width 0.2K. The temperature dependence of the upper critical magnetic field H_{c2}(T) in the films was determined via resistivity for magnetic field H parallel and perpendicular to the c axis of the films. Using the Werthamer－Helfand－Hohenberg formula, we obtained the anisotropy ratio of the upper critical field γ=1.2.     

Optimization of annealing conditions of In2S3 thin films deposited by vacuum thermal evaporation

In₂S₃ thin films were grown on glass substrates by means of the vacuum thermal evaporation technique and subsequently thermally annealed in nitrogen and free air atmosphere from 250 to 350 °C for different durations. Experimental parameters have been adjusted in order to optimize the annealing conditions, and to obtain high band gap energy at low deposition temperature, as required for photovoltaic applications. In order to improve our understanding of the influence of the deposition and annealing parameters on device performance, we have investigated our indium sulfide material by X-ray diffraction, energy dispersive X-ray analysis (EDAX), atomic force microscopy (AFM) and spectrophotometry. The optical and structural properties of the films were studied as a function of the annealing temperature and durations. X-ray diffraction analysis shows the initial amorphous nature of deposited In-S thin films and the phase transition into crystalline In₂S₃ upon thermal annealing. Films show a good homogeneity and optical direct band gap energy about 2.2 eV. An annealing temperature of 350 °C during 60 min in air atmosphere were the optimal conditions.     

基态MgB2分子的结构与分析势能函数

应用群论及原子分子反应静力学方法推导MgB₂分子的电子状态及其离解极限,采用密度泛函B3LYP和从头计算QCISD方法在6-311++G**基组水平上,对MgB₂分子可能的状态进行优化计算,得出MgB₂的三重态能量最低,其稳定构型为C_2v,平衡核间距R_e=2.2977,键角α_BMgB=41.5521°,能量为-248.9645a.u.同时还计算了基态的简正振动频率:对称伸缩振动频率ν（B₂）=315.4430 cm^-1,反对称伸缩振动频率ν（A₁）=418.1883 cm^-1和弯曲振动频率ν（A₁）=968.9672 cm^-1.在此基础上,使用多体项展式理论方法,导出了基态MgB₂分子的解析势能函数,其等势面准确再现了基态MgB₂平衡结构和离解能,并由此讨论了B+MgB和Mg+BB分子反应的势能面静态特征. 关键词： 2')" href="#">MgB₂ 多体项展式理论 解析势能函数     

Rapid preparation of Mg（B1-xCx）2 superconductor using hybrid microwave method

The crystal structure and the superconductivity for samples Mg（B1-xCx）2 （0〈 x 〈0.09） prepared by a hybrid microwave synthesis have been investigated. The starting material B10C is also obtained by using the microwave method. The carbon can distribute uniformly in the Mg（B1-xCx）2 samples because boron and carbon are mixed on an atomic scale in the staring material B10C. The dependences of both lattice parameters and superconducting transition temperature Tc on carbon content accord with those reported in the literature. The upper critical field He2 at 20 K can be enhanced from about 4.3 T for x = 0 to 10 T for x = 0.05. The critical current density Jc of Mg（B0.95 C0.05）2 is 1.05×10^4 A/cm^2 at 20 K and 1 T.     

Influence of different mixing ratios of Mg and B powder on structural and superconducting properties in MgB2

We fabricated MgB₂ bulks by an in situ Mg diffusive reaction method from compacted B and compacted mixtures of Mg and B respectively. All samples were sintered at 1100 °C for 2 h. MgO impurity phase, density, and critical current density (J_c) were found to be dependent of the starting amount of mixing Mg powder. We also found that the MgO formation in MgB₂ matrix was not mainly attributed to the starting amount of additional Mg powder for Mg diffusive reaction. This indicates that MgO presented in the starting Mg powder is hardly diffused into compacted B.     

Investigation on properties of TiO2 thin films deposited at different oxygen pressures

TiO₂ thin films were prepared by electron beam evaporation at different oxygen partial pressures. The influences of oxygen partial pressure on optical, mechanical and structural properties of TiO₂ thin films were studied. The results showed that with the increase of oxygen partial pressure, the optical transmittance gradually increased, the transmittance edge gradually shifted to short wavelength, and the corresponding refractive index decreased. The residual stresses of all samples were tensile, and the value increased as oxygen partial pressure increasing, which corresponded to the evolutions of the packing densities. The structures of TiO₂ thin films all were amorphous because deposition particles did not possess enough energy to crystallize.