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1.
    
An indirect, compositional depth profiling of an inorganic multilayer system using a helium low temperature plasma (LTP) containing 0.2% (v/v) SF6 was evaluated. A model multilayer system consisting of four 10 nm layers of silicon separated by four 50 nm layers of tungsten was plasma‐etched for (10, 20, 30) s at substrate temperatures of (50, 75, and 100) °C to obtain crater walls with exposed silicon layers that were then visualized using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) to determine plasma‐etching conditions that produced optimum depth resolutions. At a substrate temperature of 100 °C and an etch time of 10 s, the FWHM of the second, third, and fourth Si layers were (6.4, 10.9, and 12.5) nm, respectively, while the 1/e decay lengths were (2.5, 3.7, and 3.9) nm, matching those obtained from a SIMS depth profile. Though artifacts remain that contribute to degraded depth resolutions, a few experimental parameters have been identified that could be used to reduce their contributions. Further studies are needed, but as long as the artifacts can be controlled, plasma etching was found to be an effective method for preparing samples for compositional depth profiling of both organic and inorganic films, which could pave the way for an indirect depth profile analysis of inorganic–organic hybrid structures that have recently evolved into innovative next‐generation materials. Copyright © 2016 John Wiley & Sons, Ltd.  相似文献   

2.
    
Thin films of bromine‐terminated poly(bisphenol A octane ether) (BA‐C10) were prepared using 1,2‐dichlorobenzene (ODCB) as the solvent. The organization of the chains in these amorphous polymer films was evaluated using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) depth profiling. For the thin films, the bifunctional polymer chains were folded and anchored to the substrate via their two Br end groups and a polymer brush of chain loops was formed on the substrate. As the film thickness increased, polymer chains in a random coil conformation were found to reside on the top of the polymer brush. Depth profiling revealed that the polymer chains were densely packed at the interface. Moreover, the polymer films showed thermal stability, implying strong interactions between the end groups and the substrate. Copyright © 2015 John Wiley & Sons, Ltd.  相似文献   

3.
    
We propose a new approach to express SIMS depth profiling on a TOF.SIMS‐5 time‐of‐flight mass spectrometer. The approach is based on the instrument capability to independently perform raster scans of sputter and probe ion beams. The probed area can be much smaller than the diameter of a sputter ion beam, like in the AES depth profiling method. This circumstance alleviates limitations on the sputter beam–raster size relation, which are critical in other types of SIMS, and enables analysis on a curved‐bottomed sputter crater. By considerably reducing the raster size, it is possible to increase the depth profiling speed by an order of magnitude without radically degrading the depth resolution. A technique is proposed for successive improvement of depth resolution through profile recovery with account for the developing curvature of the sputtered crater bottom in the probed area. Experimental study of the crater bottom form resulted in implementing a method to include contribution of the instrumental artifacts in a nonstationary depth resolution function within the Hofmann's mixing–roughness–information depth model. The real‐structure experiment has shown that the analysis technique combining reduction of a raster size with a successive nonstationary recovery ensures high speed of profiling at ~100 µm/h while maintaining the depth resolution of about 30 nm at a 5 µm depth. Copyright © 2015 John Wiley & Sons, Ltd.  相似文献   

4.
Changes in element depth profiles in a YBaCuO superconducting film on a SrTiO3 substrate due to one year aging and annealing were investigated by the ion backscattering technique. Crystal perfection of the film was checked by the X-ray rocking curve method. It was found that the film was polycrystalline, with the preferred orientation of thec axis along the normal to the substrate surface with an angle dispersion of 2 °, and that the in-planea andb axes were randomly orientated. The aging experiments have shown that the oxygen content in the surface region increases with the time constant = 20 days. Annealing in a vacuum at 100 °C restores the initial oxygen content. After 2 hours of annealing in an oxygen atmosphere at 400 °C, an unexpectedly strong change in oxygen and copper depth profiles is observed. Since a strong correlation exists between the profile changes, a hypothesis has been advanced about the relationship between oxygen and copper transport in the process of annealing. Taking into account the polycrystalline structure of the film, one can conclude that intergrain diffusion dominates in the oxygen and copper transport.  相似文献   

5.
6.
    
The increased demand for sustainability requires, among others, the development of new materials with enhanced corrosion resistance. Transition metal diborides are exceptional candidates, as they exhibit fascinating mechanical and thermal properties. However, at elevated temperatures and oxidizing atmospheres, their use is limited due to the fact of their inadequate oxidation resistance. Recently, it was found that chromium diboride doped with silicon can overcome this limitation. Further improvement of this protective coating requires detailed knowledge regarding the composition of the forming oxide layer and the change in the composition of the remaining thin film. In this work, an analytical method for the quantitative measurement of depth profiles without using matrix-matched reference materials was developed. Using this approach, based on the recently introduced online-LASIL technique, it was possible to achieve a depth resolution of 240 nm. A further decrease in the ablation rate is possible but demands a more sensitive detection of silicon. Two chromium diboride samples with different Si contents suffering an oxidation treatment were used to demonstrate the capabilities of this technique. The concentration profiles resembled the pathway of the formed oxidation layers as monitored with transmission electron microscopy. The stoichiometry of the oxidation layers differed strongly between the samples, suggesting different processes were taking place. The validity of the LASIL results was cross-checked with several other analytical techniques.  相似文献   

7.
Sol-gel material based mirrors have been produced by forming alternate layers of high refractive index and low refractive index thin films. These mirrors have proven to have a high laser induced damage threshold [LIDT]. Using nitric acid stabilized zirconia derived from zirconium-n-propoxide and base catalyzed silica, a 16 layer mirror with a reflectivity of better than 94% at 351 nm and 45° angle of incidence was fabricated. This had an LIDT of 7.7 J/cm2 at 351 nm with a 0.7 ns pulse width. Crazing prevented further layers being deposited. Both spin and dip coating were attempted with dip coating yielding the best results.The coating structure has been analyzed using XPS depth profiling and AES. The bulk materials have been investigated using transmission electron microscopy (TEM), X-ray diffraction (XRD) and TGA. High refractive index layers using Hafnia with nitric or acetic acid have also been investigated as prospective high LIDT mirrors.Alternative acidic routes to silica have been studied as a possible low index material and a route to preventing crazing.  相似文献   

8.
We have developed multiple short‐period delta layers as a reference material for SIMS ultra‐shallow depth profiling. Boron nitride delta layers and silicon spacer layers were sputter‐deposited alternately, with a silicon spacer thickness of 1–5 nm. These delta‐doped layers were used to measure the sputtering rate change in the initial stage of oxygen ion bombardment. A significant variation of sputtering rate was observed in the initial 3 nm or less. The sputtering rate in the initial 3 nm was estimated to be about four times larger than the steady‐state value for 1000 eV oxygen ions. Copyright © 2003 John Wiley & Sons, Ltd.  相似文献   

9.
CuInSe2 (CIS) solar cells deposited on polyimide foil by the Solarion company in a web-coater-based process using sputter and evaporation techniques were investigated in the ion beam laboratory LIPSION of the University of Leipzig by means of Rutherford backscattering spectrometry (RBS) and particle-induced X-ray emission (PIXE) using high-energy broad ion beams and microbeams. From these measurements the composition of the absorber and the lateral homogeneity and film thicknesses of the individual layers could be determined on the basis of some reasonable assumptions. For the first time, quantitative depth profiling of the individual elements was performed by microPIXE measurements on a beveled section prepared by ion-beam etching of a CIS solar cell. Within the CIS absorber layer no significant concentration–depth gradients were found for Cu, In, and Se, in contrast with results from secondary neutral mass spectrometry (SNMS) depth profiling, which was applied to the same samples for comparison. Furthermore, both PIXE and SNMS showed the presence of a remarkable amount of Cd from the CdS buffer layer in the underlying absorber.  相似文献   

10.
    
Rapid, large‐scale exfoliation of graphene in water has expanded its potential for use outside niche applications. This work focuses on utilizing aqueous graphene dispersions to form thin films using layer‐by‐layer processing, which is an effective method to produce large‐area coatings from water‐based solutions of polyelectrolytes. When layered with polyethyleneimine, graphene flakes stabilized with cholate are shown to be capable of producing films thinner than 100 nm. High surface coverage of graphene flakes results in electrical conductivity up to 5500 S m−1. With the relative ease of processing, the safe, cost effective nature of the ingredients, and the scalability of the deposition method, this system should be industrially attractive for producing thin conductive films for a variety of electronic and antistatic applications.

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11.
    
AES sputter depth profiles of multilayers with constituents of very different backscattering factors show characteristic distortions in the shape of the intensity–depth profiles. These distortions are quantified by introducing an extension of the local effective backscattering factor concept developed in an earlier paper in the mixing‐roughness‐information depth (MRI) model for profile quantification. The extension is based on a linear superposition of two newly defined parameters, the effective backscattering factors for each interface that are diminished with distance from the respective interface by another characteristic parameter, the mean effective backscattering decay length. As shown for a Ni/C multilayer structure of six alternating layers of Ni (38 nm) and C (25 nm) on a Si substrate, AES intensity depth profiles calculated with the presented modification of the MRI model, yield an excellent agreement with the measured profile after some adjustment of the initial mean effective backscattering decay lengths and, sometimes, after a slight change of the backscattering factors given by the Ichimura–Shimizu relations. The backscattering effect is studied as a function of the single layer thickness. A critical layer thickness can be determined, below which the backscattering influence becomes negligible for typical AES depth profiling results. Copyright © 2007 John Wiley & Sons, Ltd.  相似文献   

12.
Berner  Alexander  Proaktor  Guy 《Mikrochimica acta》1994,114(1):195-203
A new model for the ionization depth distribution function has been proposed. Within the framework of this model full electron flux is considered to be divided into two fluxes propagating in forward and backward directions through a sample. The intensities of these fluxes can be derived on the basis of simple assumptions of electron-solid interactions. The approach can be effectively applied to a system with an arbitrary form of depth concentration profile. The obtained results are in reasonable agreement with Monte Carlo simulations and experimental results. Some mathematical techniques have been presented for quantitative analysis of thin films on substrates and element depth distribution.  相似文献   

13.
    
In this study 10 guaianolide-type sesquiterpene gamma-lactones named amphoricarpolides, isolated from the aerial parts of two endemic subspecies of Amphoricarpos neumayeri (ssp. neumayeri and ssp. murbeckii Bosnjak), were investigated by means of reversed-phase thin-layer chromatography. Methanol-water and tetrahydrofuran-water binary mixtures were used as mobile phase in order to determine lipophilicity parameters R (0) (M) and C(0). Some of the investigated compounds were screened for their cytotoxic activity against HeLa and B16 cells. Chromatographically obtained lipophilicity parameters were correlated with calculated logP values and IC(50) values. Principal component analysis identified the dominant pattern in the chromatographically obtained data.  相似文献   

14.
    
Thin films were fabricated layer‐by‐layer (LbL) via ionic bonds formed between a cationic ionomer and an anionic ionomer, which were produced via proton transfer from poly(styrene‐co‐styrenesulfonic acid) to poly(methyl methacrylate‐co‐4‐vinylpyridine) in an organic solvent, tetrahydrofuran. Ionic contents of the ionomers were very low down to 5.6 mol %, much lower than usual polyelectrolytes. The build up of the LbL films was demonstrated by UV/vis spectroscopy: the absorbance of the phenyl rings in styrene residues increased with the number of depositions (thus the number of layers). Transmission electron microscopy observation of strained thin films showed unique deformation mode, involving many bands that developed both in the parallel and perpendicular directions to the stress axis. This is quite different from the deformation modes seen for ionomer blend films and for coextruded polystyrene/poly(methyl methacrylate) multilayer tapes. © 2011 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 50: 101–105, 2012  相似文献   

15.
    
The effect of film thickness on the structural conformation of the surfaces of the amorphous state, edge‐on lamellae and flat‐on lamellae of a semiflexible polymer, poly(bisphenol‐A‐etheroctane), was investigated by time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) with the aid of principal component analysis (PCA). PCA results empirically indicate that a structurally regular polymer surface was obtained with the formation of the flat‐on lamellae from the amorphous state at a low degree of supercooling. A higher concentration of end group and cilium ion fragments, which are indicative of free chain ends, was observed on the edge‐on lamellar surfaces than on the amorphous and the flat‐on lamellar surfaces. This finding was attributed to the fact that the lateral surface of the edge‐on lamellae contains many growth fronts, leaving behind a large number of uncrystallized chain remnants on the surfaces. Structural disorder was facilitated on both edge‐on and flat‐on lamellar surfaces as the film thickness decreased. Hence, this PCA study offers new insights into the nonequilibrium nature of polymer crystals and the mechanism of polymer crystallization in thin and ultrathin films. Copyright © 2010 John Wiley & Sons, Ltd.  相似文献   

16.
《Electroanalysis》2005,17(18):1601-1608
Metallopolymer films have important applications in electrochemical catalysis. The alternate electrostatic layer‐by‐layer method was used to assemble films of [Ru(bpy)2(PVP)10Cl]Cl (denoted as ClRu‐PVP) and [Os(bpy)2(PVP)10Cl]Cl (ClOs‐PVP) metallopolymers onto pyrolytic graphite electrodes. Film thickness estimated by quartz crystal microbalance was 6–8 nm. The effects of pH, electrolyte species and concentration on the electrochemical properties of these electroactive polymers were studied using cyclic voltammetry (CV). Behavior in various electrolytes was compared. Also the mass changes within the ultra‐thin film during redox of Os2+/3+ were characterized by in situ electrochemical quartz crystal microbalance (EQCM). The results indicate rapid reversible electron transfer, and show that both ClRu‐PVP and ClOs‐PVP have compact surface structures while ClOs‐PVP is a little denser than ClRu‐PVP. Although hydrogen ions do not participate in the chemical reaction of either film, the movement of Na+ cation and water accompanies the redox process of ClOs‐PVP films.  相似文献   

17.
    
Three kinds of alkylimidazolium base room temperature ionic liquids (RTILs) were synthesized and their nano‐scale lubricant films were prepared on modified silicon wafers by dip‐coating method. The thicknesses of these films were measured and their relationship between thickness and solution concentration was obtained. Their surface morphologies were observed and contact angles of water on these films were determined. The adhesions and friction coefficients of these films were detected by contact mode AFM. As comparison, their macrotribological properties were evaluated on a UMT‐2MT tribo‐tester. It was found that, in microscale, 1‐hexyl‐3‐methyl‐imidazolium hexafluorophosphate performed the best tribological properties, while in macroscale, its tribological properties were similar with that of 1‐hexyl‐3‐methyl‐imidazolium tetrafluoroborate and better than that of 1‐hexyl‐3‐methyl‐imidazolium adipate. Copyright © 2009 John Wiley & Sons, Ltd.  相似文献   

18.
    
Lavender layers : A poly(p‐phenylene) anionic derivate and exfoliated Mg‐Al layered double hydroxide monolayers were assembled into ultrathin films with well‐defined blue fluorescence (see picture; the numbers indicate the number of bilayers), long‐range order, and high photostability. These films work as multiple quantum‐well structures for valence electrons.

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19.
    
An effect of measurement conditions on the depth resolution was investigated for dual‐beam time of flight‐secondary ion mass spectrometry depth profiling of delta‐doped‐boron multi‐layers in silicon with a low‐energy sputter ion (200 eV – 2 keV O2+) and with a high‐energy primary ion (30 keV Bi+). The depth resolution was evaluated by the intensity ratio of the first peak and the subsequent valley in B+ depth profile for each measurement condition. In the case of sputtering with the low energy of 250 eV, the depth resolution was found to be affected by the damage with the high‐energy primary ion (Bi+) and was found to be correlated to the ratio of current density of sputter ion to primary ion. From the depth profiles of implanted Bi+ primary ion remaining at the analysis area, it was proposed that the influence of high‐energy primary ion to the depth resolution can be explained with a damage accumulation model. Copyright © 2013 John Wiley & Sons, Ltd.  相似文献   

20.
Layer‐by‐layer (LBL) assembly is a versatile nanofabrication technique, and investigation of its kinetics is essential for understanding the assembly mechanism and optimizing the assembly procedure. In this work, the LBL assembly of polyelectrolyte and nanoparticles were monitored in situ by capillary electrophoresis (CE) for the first time. The assembly of poly(diallyldimethylammonium chloride) (PDDA), and gold nanoparticles (AuNPs) on capillary walls causes surface‐charge neutralization and resaturation, and thus yields synchronous changes in the electroosmotic flow (EOF). The EOF data show that formation of multilayers follows first‐order adsorption kinetics. On the basis of the fit results, influencing factors, including number of layers, concentration of materials, flow rate, and size of AuNPs, were investigated. The stability and robustness of the assembled coatings were also characterized by CE. It was found that degradation of PDDA layers follows first‐order chemical kinetics, while desorption of AuNPs takes place in a disorderly manner. The substrate strongly affects assembly of the underlying layer, while this effect is rapidly screened with increasing number of layers. Furthermore, we demonstrate that the EOF measuring step does not disturb LBL assembly, and the proposed method is reliable and rugged. This work not only studies in detail the LBL adsorption/desorption process of polyelectrolyte and nanoparticles, but also offers an alternative tool for monitoring multilayer buildup. It may also reveal the potential of CE in fields other than analytical separation.  相似文献   

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