高性能透射式GaAs光电阴极量子效率拟合与结构研究

为了探索高性能透射式GaAs光电阴极的特征结构,对光电阴极量子效率公式进行了光谱反射率与短波截止限的修正,并利用修正后的公式对ITT透射式GaAs光电阴极量子效率(≈43%)曲线进行了拟合,得到拟合相对误差小于5%时的结构参数为:窗口层Ga_1-xAl_xAs的厚度介于0.3-0.5 μm,Al组分x值为0.7,发射层GaAs的厚度介于1.1-1.4 μm.另外,根据拟合结果讨论了均匀掺杂透射式GaAs光电阴极的优化结构参数,如果光电阴极具有0.4 μm厚的Ga_1-xAl_xAs(x=0.7)窗口层和1.1-1.5 μm厚的GaAs发射层,则积分灵敏度可以达到2350 μA/lm以上. 关键词： 透射式GaAs光电阴极 量子效率 积分灵敏度 光学性能     

透射式蓝延伸GaAs光电阴极的光电发射特性研究

利用计算光学性能、量子效率和积分灵敏度的理论模型,分别研究比较了我国和ITT典型透射式蓝延伸GaAs光阴极的光电发射特性,包括阴极的光学性质和性能参数。结果表明我国的透射式蓝延伸光阴极积分灵敏度已经达到2 100μA.lm-1,但与ITT的2 750μA.lm-1相比还存在一定的差距。分析的主要原因是一方面是GaAlAs窗口层的厚度和Al组分大小对于短波响应,特别是对蓝延伸起着决定的作用;另一方面阴极性能参数电子扩散长度和后界面复合速率的大小对长波响应和短波响应也有着重要的影响,这些因素都受制于基础工业制造水平的落后。     

透射式指数掺杂GaAs光电阴极最佳厚度研究

通过研究指数掺杂GaAs光电阴极中光电子扩散漂移长度与均匀掺杂GaAs光电阴极中光电子扩散长度的差异,确定透射式指数掺杂GaAs光电阴极的最佳厚度范围为16—22 μm.利用量子效率公式对透射式指数掺杂GaAs光电阴极最佳厚度进行了仿真分析,发现厚度为20 μm时阴极积分灵敏度最大.外延生长阴极厚度分别为16和20 μm的两种透射式指数掺杂GaAs样品并进行了激活实验,测得样品的积分灵敏度分别为1228和1547 μA/lm,两者的比值为796%. 实验结果与仿真结果符合. 关键词： GaAs光电阴极 透射式 指数掺杂 厚度     

激活台内透射式GaAs光电阴极的光谱响应特性研究

利用在线光谱响应技术,对透射式GaAs光电阴极在高温激活和低温激活后的光谱响应特性进行了测试,计算并比较了高温激活和低温激活后阴极的积分灵敏度和光谱响应特性参数.结果发现,与高温激活相比,低温激活后GaAs光电阴极的积分灵敏度提高了13％,低温激活后阴极的截止波长和峰值波长均向长波有微小偏移.将已获得的测试曲线与铟封后的三代像增强器的光谱响应曲线进行了比较,结果发现铟封前后的光谱响应曲线存在明显差异.     

三代管MCP离子阻挡膜研究

三代管中GaAs光电阴极的表面Cs-O层经不住正离子的轰击,但在MCP的通道内,由于二次电子倍增,在MCP通道的输出端,电子密度较大,所以MCP通道内的残余气体分子就会被电离,正离子在电场的作用下向阴极方向运动,最终轰击阴极的表面Cs-O层,使阴极的灵敏度衰退.所以在MCP的输入端制作一层Al₂O₃离子阻挡膜对延长阴极的寿命是至关重要的作用.本文介绍了MCP离子阻挡膜的离子阻挡和电子透射原理,离子阻挡膜厚度的确定以及离子阻挡膜的制作工艺.     

NEA GaAs光电阴极激活工艺研究

本文报道了 GaAs 反射式光电阴极的激活工艺过程和结果.通过实验确定了 GaAs表面的热清洁温度,利用钼丝热辐射加热方法达到了比较理想的清洁效果,采用铯分子源和高纯氧作氧源获得了高于1000μA/1m 的激活积分灵敏度.     

对三代微光管光谱响应的测试分析

利用自行研制的光谱响应测试仪对国产三代微光管进行了光谱响应测试,给出了三代微光管的光谱响应特性,利用曲线拟合方法估算了GaAs光电阴极材料的性能参数。结果显示该三代微光管的积分灵敏度约800μA/lm左右,所选GaAs材料的电子扩散长度为2.0μm,与1.6μm的阴极厚度相当,电子表面逸出几率为0.38,后界面复合速率为106cm/s。发现GaAs材料的扩散长度偏低,以及阴极的后界面复合速率太大是限制三代微光管光电发射性能进一步提高的重要原因。     

GaAs光电阴极与景物反射光谱的光谱匹配系数

本文根据光谱匹配系数的表达式,计算了GaAs光电阴极与暗绿色涂层、粗糙混凝土和绿色草木的光谱匹配系数.在满月光下,其结果分别为0.4519、0.5184 和0.6927;在晴朗星光下,分别为0.5866、0.6125和0.6513并分析比较了GaAs和两种S₂₅光电阴极与景物反射光谱的光谱匹配系数,说明具有良好观测效果的三代夜视仪是与光电阴极与景物反射光谱之间良好的匹配程度分不开的.     

光电子技术与器件 其他

O462.3 2006043514铟封前后透射式GaAs光电阴极光谱响应特性的测试与分析=Measurement and analysis of spectral response charac-teristic of transmission-mode GaAs photocathode beforeand after indiumseal[刊,中]/杜晓睛(重庆大学光电工程学院.重庆(400044)) ,常本康…∥光学学报.—2006 ,26(4) .—536-540利用自行研制的光谱响应测试仪工程化样机以及在线光谱响应测试技术,考察了铟封前后透射式GaAs光电阴极的光谱响应特性曲线的变化,并根据测试曲线,获得了铟封前后阴极光谱响应特性参量、积分灵敏度以及阴极参量等多个性能参量…     

发射层厚度对透射式GaAs光电阴极表面光电压谱的影响

通过求解一维稳态少子扩散方程,推导了含有后界面复合速率和发射层厚度的透射式GaAs光电阴极表面光电压谱理论方程.通过对发射层厚度分别为1.6 μm和2.0 μm,掺杂浓度为1×1019 cm－3的GaAs透射式阴极样品测试,理论曲线和实验曲线基本一致.通过引入表面光电压谱积分灵敏度公式,仿真探讨了表面光电压谱在一定体材料参量条件下,积分灵敏度受发射层厚度的影响|发现在体材料参量一定条件下,透射式GaAs光电阴极具有最佳厚度,同时最佳厚度受后界面复合速率的影响更大,同时GaAlAs窗口层也能很好降低发射层后界面复合速率.     

Influence of the antireflection,window, and active layers on optical properties of exponential-doping transmission-mode GaAs photocathode modules

In order to well study the influence of the thickness and doping concentration on optical properties of transmission-mode GaAs photocathode, three exponential-doping and one uniform-doping photocathode modules were prepared by molecular beam epitaxy with a structure of glass/Si₃N₄/Ga_1 ? xAl_xAs/GaAs. By use of the spectrophotometer, the optical properties were separately measured including the reflectivity and transmissivity curves. Based on thin film optical principles, the optical properties and their integral values are calculated by matrix formula for the four-layer photocathode module. The result shows that the antireflection and window layers affect the peak and valley of the optical property curves and the active layer influences the absorptivity values of the transmission-mode cathode modules. The photocathode module has high absorptivity within the response waveband when the optimal module has the Si₃N₄ antireflection layer of 0.1 μm, the Ga_1 ? xAl_xAs window layer of more than 0.4 μm, and the GaAs active layer of 1.5 μm–2 μm and low average doping concentration.     

铟封前后透射式GaAs光电阴极光谱响应特性的测试与分析

利用自行研制的光谱响应测试仪工程化样机,对透射式GaAs光电阴极在高温激活结束、低温激活结束以及铟封成管后的光谱响应特性进行了测试。结果显示,铟封后阴极整个响应波段的光谱响应下降,长波响应受到最显著的影响,表现为800~815 nm之间长波响应大幅度衰减,截止波长和峰值波长向短波移动,峰值响应和积分灵敏度减小,最终的光谱响应曲线变得平坦。阴极参量的计算结果反映铟封后阴极的表面逸出几率降低,说明铟封引起阴极表面激活层发生变化,使得能量较低的长波段光生电子不容易逸出,阴极长波响应和灵敏度随之降低。进一步分析了铟封过程中影响阴极表面激活层的因素。     

Research on quantum efficiency of transmission-mode InGaAs photocathode

To investigate the quantum efficiency of high performance transmission-mode InGaAs photocathode, the quantum efficiency curve is fitted by using the multilayer optical thin film theory and the first principle calculation. A series of the performance parameters are obtained with the relative error less than 5%. It indicates that the thickness of the emission layer is 0.7–0.9 μm, the thickness of the window layer is 0.1–0.3 μm. Meanwhile the results from the first principle calculation are proved to be reliable as well. In addition, the long-wave response will increase and the highest integral sensitivity will be obtained when the thickness of the emission layer is the optimum value. For the InGaAs photocathode, the back interface recombination velocity mainly leads to the low integral sensitivity, which is caused by the material lattice mismatch.     

Spectral transmittance and module structure fitting for transmission-mode GaAs photocathodes

A transmission-mode GaAs photocathode includes four layers of glass,Si 3 N 4 ,Ga 1x Al x As and GaAs. A gradient-doping photocathode sample was obtained by molecular beam epitaxy and its transmittance was measured by spec-trophotometer from 600 nm to 1100 nm. The theoretical transmittance is derived and simulated based on the matrix formula for thin film optics. The simulation results indicate the influence of the transition layers and the three thin-film layers except glass on the transmittance spectra. In addition,a fitting coefficient needed for error modification enters into the fitted formula. The fitting results show that the relative error in the full spectrum reduces from 19.51% to 4.35% after the formula is modified. The coefficient and the thicknesses are gained corresponding to the minimum relative error,meanwhile each layer and total thin-film thickness deviation in the module can be controlled within 7%. The presence of glass layer roughness,layer interface effects and surface oxides is interpreted on the modification.     

Quantum efficiency conversion from the reflection-mode GaAs photocathode to the transmission-mode one

In the article, the transmission-mode negative electron affinity GaAs photocathode is compared with the reflection-mode one in structure, working principle and the quantum efficiency equation. The key point to establish relation between the two modes is that the active-layer is in full accord and the biggest difference is that the incident direction of photons is inverse. Based on the relation and difference above, we obtain the electron escape probability P and the spectrum absorption coefficient α of the reflection-mode GaAs photocathode by multilayer film matrix theory. The quantum efficiency of the transmission-mode GaAs photocathode can be estimated through the coefficients P and α of the reflection-mode one. Two groups of samples are analyzed, the one group contains uniform doping reflection-mode and transmission-mode GaAs photocathodes and the other contains exponential doping ones. Through the analysis and curve fitting, we find that the conversion difference of the uniform-doping is about 11.22% while that of the exponential-doping is about 5.46%. Another four groups of samples with exponential-doping active layer are experimentalized and the differences of them are all less than 6%. The results prove the suggested method is feasible and effective and it is more suitable for the conversion of GaAs photocathode with exponential-doping active layer.     

利用梯度掺杂获得高量子效率的GaAs光电阴极

获得高量子效率且稳定性良好的阴极一直是近年来发展GaAs光电阴极的重要方向。对晶面为(100),掺杂Be,厚度为1μm分子束外延生长的反射式GaAs发射层,设计了一种从体内到表面掺杂浓度由高到低分布的新型梯度掺杂结构。掺杂浓度的范围从1×1019cm-3到1×1018cm-3,并利用(Cs,O)激活技术制备了GaAs光电阴极。光谱响应测试曲线显示,与传统均匀掺杂的GaAs光电阴极相比,梯度掺杂的GaAs光电阴极的量子效率在整个波段都有提高,积分灵敏度可达1580μA/lm,且具有更好的稳定性。讨论了这种新型GaAs光电阴极获得更高量子效率的内在机理。该设计结构是现实可行的,且具有很大发展潜力,它为国内发展高性能GaAs光电阴极提供了一条重要途径。