Fabrication of Refractive Microlens Array with no Dead Area

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小F数衍射微透镜阵列光学性能研究

本文基于小光点扫描,在国内首次提出了一种测试小F数衍射微透镜阵列光学性能的方法.利用光通信用半导体激光器和探测器建立了一套测试系统,并对所研制的大阵列,小单元尺寸的多相位菲涅耳衍射微透镜阵列的衍射效率和点扩散函数进行了测试.结果表明,衍射微透镜实际衍射光斑比理论衍射受限光斑扩展不大,8相位和16相位石英微透镜的衍射效率分别高达80.2%和87.5%,说明本实验室对多相位的设计理论和制作工艺已基本掌握,满足应用的要求.     

凹折射微透镜阵列的离子束刻蚀制作

利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

Efficiency improvement and spectral shift of an organic light-emitting device with a square-based microlens array

In this paper, we present and analyze the influences of the fill factor and the height ratio of square-based microlens arrays on the optical characteristics of an organic light-emitting device (OLED). These properties include spectral shift, CIE coordinates, viewing-angle dependence, luminous current efficiency and luminous power efficiency. Both the luminous current efficiency and luminous power efficiency of the OLED were found to increase linearly with increasing the fill factor of microlenses. It is also found that the full width at half maximum (FWHM) of the OLED spectra and CIE coordinate decreased linearly with increasing the fill factor of the microlenses. Besides, the efficiency improvement of the OLED increased with the height ratio of attached microlenses. Compared to the OLED, the luminous current efficiency and luminous power efficiency of the device can be enhanced by 42% and 47%, respectively, by attaching the microlens array having a fill factor of 90% and a height ratio of 0.57. We also observed blue shifts at different viewing angles when microlens arrays were attached to the OLED, which is the evidence that the waveguiding modes are being extracted. In our planar OLED, the peak wavelength blue shifted and the FWHM decreased with increasing the viewing angles due to the microcavity effect.     

用于近场集成光学头的面阵平面微透镜

讨论了采用常规的光刻热熔法及灰度掩模技术制作非梯度折射率型平面折射和平面衍射微透镜的情况。定性地分析了在不同的工艺条件下可能得到的平面端面微光学器件的种类和形貌特征。给出了在石英衬底表面通过光刻热熔工艺和氢离子束蚀刻所得到的球面及圆弧轮廓特征的凹形掩模的SEM照片 ,并对用于近场集成光学头的平面微透镜和半导体激光器的集成结构作了初步分析。利用这一技术所制成的平面折射微透镜可以很方便地与半导体光源等器件匹配耦合及集成固联     

Optical inspection and characterization of microoptics using confocal microscopy

With the growing demand for microoptics in different areas the importance of the characterization increases. Methods for a fast defect detection in microlens arrays are developed. We present a technique where the confocal principle is applied for determining the variation and the absolute value of the focal length. Additionally, using a self–filtering method the deviation of the periodic structure of microlens arrays is investigated theoretically and experimentally. Point-like defects as well as aberrations have been detected. The introduced methods allow the fast, parallel characterization of microlens arrays.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

平面微透镜的表面凸起现象分析

介绍了用离子交换法制得的平面微透镜的表面凸起现象,建立了分析这一现象的理论模型并给出了计算凸起程度的公式。平面微透镜的表面凸起有利于提高数值孔径和缩短交换时间,我们将它引入了平面微透镜阵列的设计和制作中并获得了良好的结果。     

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.     

微透镜阵列线性光学扫描器

本文介绍了一种新型的线性扫描光学系统，它由一对处于望远型结构的微透镜阵列和一个普通的会聚透镜组成。微透镜阵列采用二元光学技术进行设计和制作。该装置具有扫描灵敏度高（～１０００）、扫描范围大（±１００ｍｍ）、结构紧凑、价格低廉等优点。     

用光敏玻璃制作微透镜列阵

对特种光敏玻璃及其微透镜列阵的成型机理及制作工艺进行了研究。采用六角密排结构，在远紫外线下曝光，问时进行热循环处理，成功制作出直径为４００μｍ、表面凸起高度达９．０μｍ的微透镜列阵。     

Photoresist reflow method of microlens production Part I: Background and experiments

We present a two part study of melted microlens arrays. This first part concentrates on the production and measurement of microlens arrays while the second part examines attempts to model the microlens profiles. In this paper we first review some of the fabrication techniques used over the past twenty years to produce lens arrays. Some applications of microlens arrays are then discussed. Particular emphasis is placed on the photoresist reflow method of microlens production that was suggested by Popovic et al., as this was the method used to produce the microlens examined in this study. Lenses produced using this method can have large deviations from the spherical case, i.e. the profile that would be expected from a simple minimisation of the surface energy. These deviations have not been explained to date in the literature, however a number of possible causes for this deviation are given in this paper.Therefore the fundamental questions we wish to explore here are: (1) Why physically do dips occur? and (2) Can the resulting surface profile be predicted? Any model developed to quantitatively estimate the optical effects of surface shape will depend on the physical assumptions made regarding the surface formation mechanism. However as we shall indicate at this point only an informed guess regarding the relative importance of a number of possible mechanisms can be made.     

Research on micro-optical lenses fabrication technology

We present a detail investigation on the development of a series of gradient index (GRIN) optical glass microlens and polymer microlens and microlens arrays in our laboratory in recent years. The special glass material GRIN lenses have been fabricated mainly by using ion-exchange technology, which are applied to construct micro-optic devices and other applications. On one hand, we demonstrated the light propagation and imaging properties of GRIN lenses and the results analyzed. On the other hand, we have explored a drop-on-demand ink-jet printing method to produce microlens array using nano-scale polymer droplets involved with a uniform ultraviolet light and heat solidifying process. The experimental setup for manufacturing polymer microlens array and the performance of refractive microlens elements are also given in this paper.     

菲涅耳微透镜列阵衍射效率的测试与分析

归纳了目前二元位相型菲涅耳微透镜列阵衍射效率测试中所用各种衍射效率的不同定义，提出规范定义的建议。并设计了测量衍射效率的系统，方法简单易行，适于测试具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。     

平面交叉玻璃波导型微透镜阵列光学性能研究

介绍了平面交叉玻璃光波导型半球形微透镜阵列的制作方法.利用积分形式的光线方程式讨论了半球形微透镜的光学特性,得到了半球形微透镜的光线轨迹方程式和焦距表示式,理论结果与实验数据是一致的.     

Electrically controllable microlens array fabricated by anisotropic phase separation from liquid-crystal and polymer composite materials

Anisotropic phase separation has been used to fabricate an electrically switchable microlens array from nematic liquid crystals. Nematic liquid-crystal-based microlens arrays have been built with diameters of approximately 400 microm and natural focal lengths as small as 1.6 mm. The focal length of each microlens in the array can be changed in milliseconds by an applied electric field. These devices, which have no internal substructures to scatter light, offer higher efficiency and greater light throughput than polymer dispersed devices.     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

Tunable microlens arrays using polymer network liquid crystal

A tunable-focus microlens array based on polymer network liquid crystal (PNLC) is demonstrated. The PNLC was prepared using an ultraviolet (UV) light exposure through a patterned photomask. The photocurable monomer in each of the UV exposed spot forms an inhomogeneous centro-symmetrical polymer network which acts as a lens when a homogeneous electric field is applied to the cell. The focal length of the microlens arrays is tunable with the applied voltage.     

微透镜阵列光学相控阵扫描技术研究进展

光学相控阵光束扫描技术在激光雷达、空间光通信和光开关等领域拥有巨大的应用潜力。微透镜阵列光学相控阵可以通过微透镜阵列间μm量级的相对位移同时对多个出射光束的二维倾斜相位进行调制,从而实现大角度二维光束扫描,具有出射口径大、结构简单、体积小、微惯性、多功能等优点。首先介绍了微透镜阵列光学相控阵的扫描原理,之后对微透镜阵列光学相控阵国内外的发展现状、应用和现阶段存在的问题进行了阐述,最后对微透镜阵列光学相控阵的发展趋势进行了展望。