Mechanical effects of polishing pad in copper electrochemical mechanical deposition for planarization

ECMD (electrochemical mechanical deposition) process consists of a traditional ECP (electrochemical plating) mechanism and a mechanical component. That is, this technique involves both electrochemical plating and mechanical sweeping of the material surface by the polishing pad. The mechanism of the ECMD process may be achieved through two mechanisms. The first mechanism may be the electrochemical plating on the surface where mechanical sweeping of polishing pad does not reach, and the second mechanism may be that the plating rate in the area that is mechanically swept may be reduced by the polishing pad. In this study, the effects of the mechanical component were investigated through various polishing pad types and hole ratios. In comparison to various polishing pad types using the manufactured the ECMD system, the plating rate and WIWNU (within wafer non-uniformity) using the experimental non-pore polishing pad were better than those of the experiments using other polishing pads.     

银胶体系中吖啶橙、吡啶共吸附竞争的研究

本文利用光学多道分析仪,着重研究了吖啶橙—银胶—吡啶体系;观察了吖啶橙荧光的两次瞬间增强的时间效应荧光谱;分析了吖啶橙与吡啶在银表面上共吸附竞争以及氯化钾在这一竞争中所起的作用。对于表面与分子间相互作用的这一规律作了初步探讨。     

银胶体系中吖啶橙、吡啶共吸附竞争的研究

本文利用光学多道分析仪,着重研究了吖啶橙—银胶—吡啶体系;观察了吖啶橙荧光的两次瞬间增强的时间效应荧光谱;分析了吖啶橙与吡啶在银表面上共吸附竞争以及氯化钾在这一竞争中所起的作用。对于表面与分子间相互作用的这一规律作了初步探讨。     

Detection and identification of explosives by surface enhanced Raman scattering

Surface Enhanced Raman Scattering (SERS) has undergone an important development over the last few years, particularly in the detection and identification of extremely low traces of explosives. The large number of studies and results generated by this increasing research makes a comprehensive overview necessary. This work reviews in detail that research focused on the identification of explosives by SERS, including TNT, DNT, RDX, PETN, TATP, HMTD, perchlorate, etc. either in bulk state, in solution or in vapor phase. In brief, TNT and DNT have been widely studied by SERS due to its aromatic structure and LODs down to 5–10 zg and 10^?17–10^?13 M have been achieved. The other explosives have been quite less researched; therefore, few results are available to be compared and a bit more modest LODs have been reached such as 10^?13 M for RDX, 10^?4 M for TATP, 5 pg for PETN, or 10^?9 M for perchlorate. In addition, the challenges of detecting both explosives vapors and perchlorate anion by SERS are thoroughly discussed.     

染料分子荧光淬灭规律研究

本文研究了若丹明B、若丹明6G和吖啶橙三种染料分子吸附于银表面上时的荧光变化规律,发现在银胶颗粒表面的吸附均造成了其荧光强度急剧而大幅度的淬灭,淬灭随时间呈双曲线型衰减。同时利用这一实验结果对分子在表面间的吸附系数与脱附系数——这些表征分子与表面相互作用的重要参数——表达式进行了初步推导。     

激光烧蚀法制备Au SERS活性基底

利用Nd:YAG(1064 nm)脉冲激光器对处于二次去离子水中的Au片进行烧蚀,我们可以得到nm级粗糙Au表面。利用激光烧蚀法可以制备出"化学纯净"的Au粗糙片,而不引入杂质离子。通过用C60作为探针分子,对这种粗糙Au表面的表面增强拉曼散射(SERS)进行研究发现,这种Au片是一种高效的SERS活性增强基底,其增强因子可达4×103。     

覆银银电极上哌啶分子的表面增强拉曼散射研究

通过改进电极修饰方法,在粗糙银电极上沉积银纳米颗粒,得到了哌啶分子吸附在覆银银电极上的高质量SERS谱,并研究了电位对哌啶分子在这种覆银银电极上SERS光谱的影响。实验表明,沉积有银纳米颗粒的粗糙银电极是一种新的高效SERS活性基底,分析并解释了覆银银电极能产生极强的增强效应的可能原因。     

Morphology, optical and electrical properties of Cu-Ni nanoparticles in a-C:H prepared by co-deposition of RF-sputtering and RF-PECVD

We report optical and electrical properties of Cu-Ni nanoparticles in hydrogenated amorphous carbon (Cu-Ni NPs @ a-C:H) with different surface morphology. Ni NPs with layer thicknesses of 5, 10 and 15 nm over Cu NPs @ a-C:H were prepared by co-deposition of RF-sputtering and RF-Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) from acetylene gas and Cu and Ni targets. A nonmetal-metal transition was observed as the thickness of Ni over layer increases. The surface morphology of the sample was described by a two dimensional (2D) Gaussian self-affine fractal, except the sample with 10 nm thickness of Ni over layer, which is in the nonmetal-metal transition region. X-ray diffraction profile indicates that Cu NPs and Ni NPs with fcc crystalline structure are formed in these films. Localized Surface Plasmon Resonance (LSPR) peak of Cu NPs is observed around 600 nm in visible spectra, which is widen and shifted to lower wavelengths as the thickness of Ni over layer increases. The variation of LSPR peak width correlates with conductivity variation of these bilayers. We assign both effects to surface electron delocalization of Cu NPs.     

电化学体系中吸附在金电极表面吡啶的紫外拉曼光谱研究

观察到波长为325nm的紫外光激发下吸附在金电极表面的吡啶的表面增强拉曼光谱(SERS)。结合其SERS谱随电位的变化关系,分析了其中的增强机制并表明随电位的负移吡啶的吸附方式发生改变。     

Rapid fabrication of superhydrophobic surfaces on copper substrates by electrochemical machining

Hierarchical micrometer-nanometer-scale binary rough structures were fabricated on copper substrates by electrochemical machining in a neutral NaCl electrolyte. The rough structures are composed of the micrometer scale potato-like structures and the nanometer scale cube-like structures. After modified by the fluoroalkylsilane, the copper surfaces reached superhydrophobicity with a water contact angle of 164.3° and a water tilting angle less than 9°. This method has a high processing efficiency which can take just 3 s to fabricate the roughness required by the superhydrophobic surface. The effect of the processing time on wettability of the copper surfaces was investigated in this paper. The possible mechanism of the formation of the hierarchical roughness was also proposed, and the wettability of the copper surfaces was discussed on the basis of the Cassie-Baxter theory.     

Silver nanostructure arrays abundant in sub-5 nm gaps as highly Raman-enhancing substrates

Two types of highly Raman-enhancing arrays substrates were fabricated using anodic aluminum oxide (AAO) templates by controlling the AAO template temperature and evaporated silver thickness during e-beam evaporating: complex patterned Ag nanoparticle arrays abundant in sub-5 nm gaps (type I); hexagonal Ag nanopore arrays (type II). The surface enhanced Raman scattering (SERS) enhancement factors (EF) of both substrates are estimated experimentally to exceed 10⁵, especially that of type I reaches 10⁷ due to the existence of numerous sub-5 nm gaps. The simulation using finite-difference time-domain (FDTD) method confirmed that gap effect has significantly improved the substrates’ SERS activity.     

光栅参数测量技术研究进展

光栅参数测量技术是衡量光栅制作水平的重要标准。本文从直接测量法和间接测量法两个角度对现阶段较成熟的光栅参数测量技术进行了研究。重点介绍了原子力显微镜（AFM）测量法、扫描电子显微镜（SEM）测量法、激光衍射（LD）测量法以及散射测量术的测量原理和研究进展,指出了这些方法各自的优缺点和适用范围。AFM测量法和SEM测量法均可测得光栅的局部形貌信息,可用于检测光栅表面形貌缺陷;LD测量法和散射测量术反映的是激光照射区域的平均结果,其中LD测量法能得到光栅周期参数,而椭偏测量术能得到光栅周期以外的其他形貌参数。这些方法测得的光栅参数结果比较吻合,其中LD测量法不确定度最小,AFM次之,SEM最大。文章最后对未来光栅参数测量技术的发展方向进行了论述。     

聚丙烯胺稳定铜纳米粒子的制备及其SERS活性研究

报道了聚丙烯胺稳定的球形和棒状铜纳米粒子的制备方法。在水溶液中空气条件下,通过水合肼还原二价铜离子到铜纳米粒子。聚丙烯胺的作用除稳定粒子防止聚集外,也可使粒子分散在水溶液中。该法的优点是在室温下,无需惰性气体保护,即可制备水溶液中分散的铜纳米粒子。紫外光谱和透射电镜监测了铜纳米粒子的生长过程。发现氢氧化钠的用量,聚丙烯胺浓度,反应时间等因素都影响到铜纳米粒子的组成,尺寸,形貌和聚集程度。氢氧化钠用量决定了制备粒子的组成成分是铜或氧化亚铜。所制备的球形铜纳米粒子表现出优良的表面增强拉曼散射活性。     

表面增强喇曼散射(SERS)光谱中影响增强效应因素的实验研究(Ⅲ)

本文研究了苯甲酸水溶液的pH值,电极外加电位对银电极表面吸附苯甲酸SERS光谱表面增强效应的影响。实验结果表明,苯甲酸以—COO~-根负离子吸附于银电极表面。通过改变溶液的pH值,使苯甲酸吸附于粗糙银电极表面,溶液pH值影响电极表面吸附苯甲酸的面密度,电极外加电位影响—COO~-根离子与银电极间的电荷迁移,电极外加电位也影响苯甲酸在粗糙银电极表面的吸附。     

Field emission properties of DLC and phosphorus-doped DLC films prepared by electrochemical deposition process

Field emission behavior of diamond-like carbon (DLC) and phosphorus-doped DLC (p-DLC) films prepared by electrochemical deposition process was comparatively investigated. It was shown phosphorus incorporation in the DLC film could lower the turn on field from 12 to 9.5 V/μm and increase the current density from 12.6 to 45.7 μA/mm² under high electric field. And better field emission performance of p-DLC films would be mainly attributed to the influence of the surface morphology and the changes of microstructure due to the phosphorus incorporation.     

Characterization of post-copper CMP surfaces with scanning probe microscopy: Part 1: Surface leakage measurement with conductive atomic force microscopy

We demonstrate in this paper for the first time the use of conductive atomic force microscopy (AFM) to measure surface leakage between copper structures with varying line width and spacing in the micro and sub micrometer ranges. Conducting atomic force microscopy allows subsequent measurement of the topography as well as the electrical properties of surfaces. The feasibility and interest of these measurements will be shown by studying the impact of chemical mechanical polishing (CMP) of an electrical interface bearing different micrometric copper structures. As expected the polishing time has a crucial impact on the current determined between closely spaced copper structures. This paper will also deal with issues observed during the measurement.     

UV photodetector behavior of 2D ZnO plates prepared by electrochemical deposition

Zinc oxide (ZnO) with 2D hexagonal structure was successfully prepared using electrochemical deposition (ECD) method on a quartz substrate pre-coated with indium-doped ZnO layer. The X-ray diffraction of the prepared sample confirmed that the hexagonal structure had a dominant c-axis orientation. The scanning electron microscopy revealed the 2D hexagonal structure of the prepared ZnO.     

金属胶体吸附的表面增强拉曼散射研究进展

表面增强拉曼光谱是一种非常有效的表征金属表面单分子层吸附状态的工具，本文介绍了表面增强拉曼散射研究金属胶体吸附的实验方法、研究进展、应用范围及前景。     

Structural and morphological properties of thin ZnO films grown by pulsed laser deposition

The pulsed laser deposition technique was used to produce zinc oxide thin films onto silicon and Corning glass substrates. Homogeneous surfaces exhibiting quite small Root Mean Square (RMS) roughness, consisting of shaped grains were obtained, their grain diameters being 40-90 nm at room temperature and at 650 °C growth respectively. Films were polycrystalline, even for growth at room temperature, with preferential crystallite orientation the (0 0 2) basal plane of wurtzite ZnO. Temperature increase caused evolution from grain to grain agglomeration structures, improving crystallinity. Compressive to tensile stresses transition with temperature was found while the lattice constant decreased.     

CEMS study on diluted magneto titanium oxide films prepared by pulsed laser deposition

6% ⁵⁷Fe doped titanium oxide films, prepared by pulsed laser deposition (PLD) on sapphire substrate at 650°C under various vacuum conditions, were characterized mainly by conversion electron Mössbauer spectrometry (CEMS). Two magnetic sextets with hyperfine fields 33 and 29 T, and one doublet were observed in the CEMS spectra of TiO₂ films prepared under PO₂ = 10^?6 and 10^?8 torr, which showed ferromagnetism at room temperature, whereas only the doublet of paramagnetic Fe³⁺ species was observed for the film prepared under PO₂ = 10^?1 torr.