Secondary electron contrast modulation in SU‐8 photoresist films exposed holographically

We report a Secondary Electron (SE) contrast modulation observed in scanning electron microscope photographs of the cross‐section of SU‐8 photoresist films exposed holographically. The modulation occurs along the whole depth of the sample and its contrast disappears when the samples are submitted to the post exposure bake (PEB). Diffraction and atomic force microscopy measurements of the samples were performed before and after PEB to investigate this modulation. The results indicate that this SE emission contrast modulation comes from the spatial chemical modulation generated by the photolysis during the exposure of the SU‐8 films. © 2009 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 48: 226–230, 2010     

A two‐stage surface treatment for the long‐term stability of hydrophilic SU‐8

The use of SU‐8 photoresist as a structuring material for portable capillary‐flow cytometry devices has been restricted by the near‐hydrophobic nature of the SU‐8 surface. In this work, we evaluate the use of chemical and plasma treatments to render the SU‐8 surface hydrophilic and characterise the resulting surface utilising a combination of techniques including contact angle goniometry, atomic force microscopy and X‐ray photoelectron spectroscopy. In particular, for low‐power plasma treatments, we find that the chemistry of the plasma used to modify the SU‐8 surface and the incorporation of O₂ on that modified surface are paramount for improved surface wettability, whilst plasma‐induced surface roughness is not a necessary requirement. We demonstrate a technique to obtain a hydrophilic SU‐8 surface with contact angle as low as 7° whilst controlling and significantly reducing the level of surface roughness generated via the applied plasma. An additional chemical treatment step is found to be essential to stabilise the activated SU‐8 surface, and incubation of the samples with ethanolamine is demonstrated as an effective second‐stage treatment. Application of the optimised two‐stage surface treatment to cross‐linked SU‐8 is shown to result in a smooth hydrophilic surface that remains stable for over 3 months. Copyright © 2015 The Authors Surface and Interface Analysis Published by John Wiley & Sons Ltd.     

Photo‐hardenable and patternable PDMS/SU‐8 hybrid functional material: A smart substrate for flexible systems

The fabrication of flexible electronics and systems, using rigid and brittle materials directly produced on stretchable substrate, leads to some issues and incompatibilities. These include rigidity for processing and modular flexibility for applications, macroscopic flexibility, and local rigidity to shield components from strain, compatibility with technological steps, and at the same time allowing patterning and machining. The development of smart substrate materials which meet such needs is therefore a promising route for flexible systems. Here, we demonstrate that by mixing polydimethylsiloxane (PDMS) and SU‐8 photoresist, we obtain both a photo‐hardenable and patternable stretchable hybrid material. A set of PDMS/SU‐8 and baking process combinations have been tested to determine an effective photo‐sensitive mixture. A standard photolithographic approach has been used on tensile test samples demonstrating a local hardening of millimeter‐sized ultraviolet exposed features and a local strain reduction reaching 35%. In addition, surface topography analysis and wet‐etching techniques have been used to demonstrate a light‐induced molding process and a selective etching of micrometer‐sized ultraviolet exposed patterns. The combined functional properties of the following material, its simplicity of implementation, and the well‐known assets of PDMS and SU‐8 make the PDMS/SU‐8 material very interesting and promising for various applications, especially stretchable systems. © 2015 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2015 , 53, 1281–1291     

Microfluidic chip fabrication using hot embossing and thermal bonding of COP

The application of silicon mold inserts by micro‐hot embossing molding has been explored in microfluidic chip fabrication. For the mold insert, this study employed an SU‐8 photoresist to coat the silicon wafer. Ultraviolet light was then used to expose the pattern on the SU‐8 photoresist surface. This study replicates the microstructure of the silicon mold insert by micro‐hot embossing molding. Different processing parameters (embossing temperature, embossing pressure, embossing time, and de‐molding temperature) for the cycle‐olefin polymer (COP) film of microfluidic chips are evaluated. The results showed that the most important parameter for replication of molded microfluidic chip is embossing temperature. De‐molding temperature is the most important parameter for surface roughness of the molded microfluidic chip. The microchannel is bonded with a cover by thermal bonding processing to form the sealed microfluidic chip. The bonding temperature is the most important factor in the bonding strength of the sealed microfluidic chip. Copyright © 2009 John Wiley & Sons, Ltd.     

Optical order of the polymer phase within polymer/fullerene blend films

This study reports on how the degree of polymer order within a polymer/fullerene blend can be investigated by spectroscopic methods. Non‐annealed blend compositions with 0–80 wt % fullerene content were analyzed using temperature dependent photoluminescence (PL) and room temperature spectroscopic ellipsometry (SE) measurements. To evaluate the SE data with respect to the optical order, an optical model was developed, including a lower and higher ordered polymer phase within a fullerene matrix. This was done using an effective medium approach describing the polymer by combining lower and higher ordered polymer properties (polymer‐EMA). The polymer/fullerene blend was then evaluated using another EMA consisting of the polymer‐EMA and the dielectric function of the disordered fullerene. The degree of optical order obtained by SE, was confirmed using another independent measurement, photoluminescence spectroscopy, according to the method of Francis C. Spano (2005). The volume fraction of the ordered polymer within the polymer‐EMA was found to be between 70 and 60 vol % for fullerene contents lower than 20 wt % in the polymer/fullerene blend. Above 20 wt % fullerene, the optical order of the polymer strongly decreases all the way down to 0 vol %. In contrast to the complementary performed X‐ray diffraction measurements, which address only the long‐range structural order of the blends, we give quantitative information on the optical order, including information on the composition, that is, volume fractions of the higher and lower ordered polymer. The gained information on the tilt of the polymer molecules with respect to the substrate is discussed comparing XRD results from the literature with those obtained by our SE model. Finally, the developed model is used to describe the influence of the P3HT molecular weight on the optical order. Results obtained with our model were compared to the structural data and mobility data in the literature. © 2012 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys, 2012     

Glass/SU‐8 microchip for electrokinetic applications

In this communication, we describe the fabrication and electric characterization of a hybrid glass/SU‐8 microchannels for high‐performance electrokinetic applications. The bonding process employed SU‐8 film as intermediate layer with reduced baking times; all the procedure took less than 50 min (only about 10 min disregarding the cleaning and dehydration steps). Additionally, further steps to improve the adhesion of the substrate to the SU‐8 were not needed. The developed configuration aggregates the advantages of both substrates, including (i) simple fabrication techniques; (ii) high compatibility for integration of microelectromechanical, optical, and electrochemical components (SU‐8); (iii) high and stable electroosmotic mobility (μ_EO); and (iv) satisfactory heat dissipation capacity (glass). Electroosmotic mobilities were measured as a function of the pH using the current monitoring method, whereas the heat dissipation capacity was investigated through Ohm's law plots for both glass and glass/SU‐8 microchips. The measured μ_EO values were similar for both microdevices, with mobilities of the order of 4.0–4.5 × 10^?4 cm² V^?1 cm^?1 at 4–12 pH range using phosphate buffer (10 and 20 mmol/L). The heat dissipation assays were carried out in microchannels filled with 20 mmol/L phosphate buffer. A considerable Joule heating was observed only at electric field strengths greater than 580 V cm^?1 in hybrid glass/SU‐8 microdevices, representing a substantial increase of 48% when compared to all SU‐8 microdevices.     

Determination of optical constants of sol‐gel derived Zn0.9Mg0.1O films by spectroscopic ellipsometry with various models

The Zn_0.9Mg_0.1O thin films were prepared on Si (100) substrates by the sol‐gel method. The structural and the optical properties of Zn_0.9Mg_0.1O thin films, submitted to an annealing treatment in the 400–700 °C ranges, are studied by X‐ray diffraction (XRD) and ultraviolet (UV)‐visible spectroscopic ellipsometry (SE). The thickness, refractive index, and extinction coefficient of these films have been determined by analyzing the SE spectra using parameterized dispersion model. Moreover, we made a detailed comparison among various dispersion models and found that the Sellmeier model was superior to others in fitting the ellipsometric spectra in the transparent region. In the interband transition region, point‐by‐point fit was used. The spectral dependence of the refractive index and extinction coefficient was obtained in the photon energy range of 1.5–4.71 eV. The influence of annealing temperature on the refractive index, the extinction coefficient, and the optical bandgap energy was also discussed. We found that the refractive index and the extinction coefficient increase with increasing the annealing temperature, meaning the optical quality of Zn_0.9Mg_0.1O films is improved by annealing. Copyright © 2009 John Wiley & Sons, Ltd.     

Product or sum: comparative tests of Voigt,and product or sum of Gaussian and Lorentzian functions in the fitting of synthetic Voigt‐based X‐ray photoelectron spectra

A comparative study for the fitting of X‐ray photoelectron spectra (XPS) using different model functions is presented. Synthetically generated test spectra using Gaussian/Lorentzian convolution and a real measured spectrum are fitted with the three commonly used models: product, sum and Gaussian/Lorentzian convolution functions. In these limited tests, it was found that the sum function is superior to the product function, particularly for low‐noise spectra. Copyright © 2007 John Wiley & Sons, Ltd.     

Quantification of AES depth profiling data of polycrystalline Al films with Gaussian and non‐Gaussian surface height distributions

Sputtering‐induced roughness is the main distortional factor on the depth resolution of measured depth profiles, in particular, for sputtering of polycrystalline metals. Frequently, the surface height distribution of the sputtering‐induced roughness exhibits an asymmetrical feature. In such a case, a non‐Gaussian height distribution function (HDF) has to be applied for the quantification of a measured depth profile. By replacing the usually applied Gaussian HDF with that of an asymmetrical triangle in the Mixing‐Roughness‐Information depth model, measured Auger electron spectroscopy depth profiling data of the interface of polycrystalline Al films on Si are perfectly fitted. The asymmetric triangle height distributions obtained from the best fit are a reasonable approximation of the height distributions measured by atomic force microscopy. Copyright © 2013 John Wiley & Sons, Ltd.     

Novel Nanostructured Electrodes Obtained by Pyrolysis of Composite Polymeric Materials

In this work, we compare pyrolyzed carbon derived from the photoresist SU‐8 alone or in combination with polystyrene and poly(styrene)‐block‐poly(dimethylsiloxane) copolymer (PS‐b‐PDMS), to be used as novel materials for micro‐ and nanoelectrodes. The pyrolyzed carbon films are evaluated with scanning electron microscopy, thermal gravimetric analysis, X‐ray photoelectron spectroscopy, contact angle analysis, and Raman spectroscopy. Furthermore, the standard rate constant for electron transfer is determined from cyclic voltammograms and found to be lower for PS‐b‐PDMS compared to PS and SU‐8 films. This may be related to the lower carbon content of PS‐b‐PDMS, as well as to its higher microstructural disorder.     

Thermophysical analysis of SU8‐modified microstructures created by visible light lithography

SU8 has been modified with photoinitiators Rose Bengal, H‐NU 470 and H‐NU 535, to conduct visible light lithography. The thermophysical properties of the lithographically transformed modified SU8 photoresins were investigated. The influence of the concentration of visible light photosensitizer and photoinitiator as well as exposure time to visible laser on thermal stability and curing kinetics were analyzed. Significant differences in the thermophysical properties were observed in these three photoinitiator groups of modified SU8 photoresins. These results provide with usable quantitative information regarding resin formulation to optimize lithography processing parameters, and therefore, the ultimate properties of lithographically formed microstructures. © 2009 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 48: 47–54, 2010     

On the relevance of the 8‐chain model and the full‐network model for the deformation and failure of networks formed through photopolymerization of multifunctional monomers

Crosslinked networks were synthesized by copolymerization of mono‐functional tert‐butyl acrylate (tBA) with diethyleneglycol dimethacrylate (DEGDMA) or polyethylene glycol dimethacrylates (PEGDMA). By varying the chain length and concentration of the difunctional PEGDMA, we obtained tBA‐PEGDMA copolymer networks while by varying the concentration of difunctional DEGDMA, we obtained tBA‐DEGDMA crosslinked networks. The various materials were submitted to large deformations through uniaxial tension tests. For moderate weight percent of crosslinking agent, up to 20%, the networks showed standard S‐shape stress–strain curves, characteristic of rubber‐like elasticity. Two macromolecular models, the 8‐chain model and the full‐network model, were applied to fit the uniaxial tensile response of the materials. Both models provide good representations of the overall uniaxial stress–strain response of each material. After fitting to stress–strain data, the network models were employed to predict the shear modulus and the elongation at break. Neither the 8‐chain nor the full network model were capable of predicting the failure strain or shear modulus, indicating these models are best used to describe stress–strain relations rather than predict mechanical properties for the network polymers considered here. © 2008 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 46: 1226–1234, 2008     

Comparison of PARAFAC and PARALIND in modeling three‐way fluorescence data array with special linear dependences in three modes: a case study in 2‐naphthol

Owing to excited‐state proton transfer in 2‐naphthol solutions, the fluorescence excitation–emission matrices (EEMs) have factors that are highly dependent in three modes. For the first time such EEMs are used to compare the capability of PARALIND (PARAFAC with linear dependence) and conventional PARAFAC in modeling three‐way EEMs having linearly dependent factors in three modes. Two primary conclusions have been drawn. First, the results indicate that a 3‐factor PARAFAC model fit the data better than two PARALIND models (type 1 and 2) in this case while equally well with a specially PARALIND model (type 3); second, a negative core consistency (CC) in the 3‐factor PARAFAC model is reported but the type 3 PARALIND model reports a nearly 100 CC. This work has demonstrated that a properly constrained PARALIND can fit the very special EEMs of 2‐naphthol. The presence of negative CC associated with a perfect PARAFAC model would imply the presence of very special linear dependences in EEMs, which would be used as an “alarm” for the investigators to interpret the data more carefully when dealing with complicated environmental EEMs in the absence of a priori knowledge. Copyright © 2010 John Wiley & Sons, Ltd.     

Measurement of Signal‐to‐Noise Ratio In Graphene‐based Passive Microelectrode Arrays

This work aims to investigate the influence of various electrode materials on the signal‐to‐noise ratio (SNR) of passive microelectrode arrays (MEAs) intended for use in neural interfaces. Noise reduction substantially improves the performance of systems which electrically interface with extracellular solutions. The MEAs are fabricated using gold, indium tin oxide (ITO), inkjet printed (IJP) graphene, and chemical vapor deposited (CVD) graphene. 3D‐printed Nylon reservoirs are adhered to glass substrates with identical MEA patterns and filled with neuronal cell culture media. To precisely control the electrode area and minimize the parasitic coupling of metal interconnects and solution, SU‐8 photoresist is patterned to expose only the area of the electrode to solution and cap the remainder of the sample. Voltage signals with varying amplitude and frequencies are applied to the solution using glass micropipettes, and the response is measured on an oscilloscope from a microprobe placed on the contact pad external to the reservoir. The time domain response signal is transformed into a frequency spectrum, and SNR is calculated. As the magnitude or the frequency of the input signal gets larger, a significantly increased signal‐to‐noise ratio was observed in CVD graphene MEAs compared to others. This result indicates that 2‐dimensional nanomaterials such as graphene can provide better signal integrity and potentially lead to improved performance in hybrid neural interface systems.     

A Simple Imprint Method for Multi‐Tiered Polymer Nanopatterning on Large Flexible Substrates Employing a Flexible Mold and Hemispherical PDMS Elastomer

This work reports a facile method to fabricate multi‐tiered polymer nanopatterns on SU‐8 by the combination of imprint‐ and photo‐lithography. First, SU‐8 is imprint patterned using a polymeric flexible mold with an anti‐adhesion coating that is deposited on a transparent and flexible substrate, at room temperature under low pressure. Next, the resulting SU‐8 nanopatterns are exposed to UV light through a chromium mask by a photolithographic process. Removal of the unexposed SU‐8 leaves behind multi‐tiered structures. The use of a hemispherical poly(dimethylsiloxane) pad facilitates the evacuation of trapped air during the imprinting process. Line/space patterns of 500 nm with the smallest line width of 200 nm were homogeneously imprint‐patterned on SU‐8 on a large flexible substrate, and three‐tiered structures, ranging in thickness from 300 nm to 2 µm, were successfully formed.

     

Resonant soft x‐ray scattering and reflectivity study of the phase‐separated structure of thin poly(styrene‐b‐methyl methacrylate) films

Combined soft X‐ray scattering and reflectometry techniques promise analysis of polymer thin film domain structure and composition without resorting to chemical modification or isotopic labeling. This work explores the capabilities of these techniques in polymer films of poly(styrene‐b‐methyl methacrylate) (P(S‐b‐MMA)). The results demonstrate that the techniques give detailed information on the domain structure of thin films using well‐known modeling procedures. Discrepancies were noted between the X‐ray optical parameters that are needed to best fit the reflectivity data to the model and the expected parameters. The sources of these discrepancies are discussed in terms of instrument configuration parameters, sample attributes, and, particularly, anisotropy of the chromophore parameters. The results show that fitting the soft X‐ray reflectivity data is much more sensitive to these X‐ray optical parameters than the soft X‐ray scattering data. Nevertheless, fits to both types of data yield quantitative measures of the polymer film's lamellar morphology that are consistent with each other and with literature values. © 2012 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys, 2013     

An easily organic–inorganic hybrid optical sensor based on dithizone impregnation on mesoporous SBA‐15 for simultaneous detection and removal of Pb(II) ions from water samples: Response‐surface methodology

In this study, a novel organic–inorganic hybrid adsorbent for single‐step detection and removal of Pb(II) ions based on dithizone (DZ) anchored on mesoporous SBA‐15 was fabricated. The designed solid optical sensor revealed rapid colorimetric responses and high selectivity. Central composite design (CCD) combined with desirability function (DF) was applied to evaluate the interactive effects and optimization of important variables such as pH value, mesoporous SBA‐15 dosage, contact time and initial concentration of Pb(II) ions and optimum conditions for each of the factors were obtained 6.0, 25 mg, 30 min and 20 μg ml^{− 1}, respectively. This adsorbent or solid optical chemo sensor exhibited a linear range of 1.0 to 100.0 μg ml⁻¹ of Pb(II) ion concentration with a detection limit of 0.07 μg ml⁻¹. This adsorbent was applied to determine and remove the Pb(II) in spiked samples. Various isotherm models such as Langmuir, Freundlich, Temkin and Dubinin–Radushkevich were studied for fitting the experimental equilibrium data. Langmuir model was chosen as an efficient model. Various kinetic models such as pseudo‐first, second order intraparticle, diffusion models were studied for analysis of experimental adsorption data and the pseudo second order model was chosen as an efficient model.     

Oxygen concentration and modeling thermal decomposition of a high‐performance material: A case study of polyimide (Cirlex)

Kinetic decomposition models for the thermal decomposition of a high‐performance polymeric material (Polyimide, PI) were determined from specific techniques. Experimental data from thermogravimetric analysis (TGA) and previously elucidated decomposition mechanism were combined with numerical simulating tool to establish a comprehensive kinetic model for the decomposition of PI under three atmospheres: nitrogen, 2% oxygen, and synthetic air. Multistaged kinetic models with subsequent and competitive reactions were established by taking into consideration the different types of reactions that may be occurring during the thermal decomposition of the material (chain scission, thermo‐oxidation, char formation). The decomposition products and decomposition mechanism of PI which was established in our previous report allowed for the elucidation of the kinetic decomposition models. A three‐staged kinetic thermal decomposition pathway was a good fit to model the thermal decomposition of PI under nitrogen. The kinetic model involved an autocatalytic type of reaction followed by successive nth order reactions. Such types of models were set up for the evaluation of the kinetics of the thermal decomposition of PI under 2% oxygen and in air, leading to models with satisfactory fidelity.     

The Estimation of Statistical Parameters Determining the Relaxation Times of Nematic Elastomers: A Three‐Chain Network Model

A simplified “three‐chain” network model formed from freely jointed polymer chains consisting of Gaussian elements with fixed mean‐square lengths is proposed for describing local dynamic properties of nematic elastomers. The boundaries of a polymer network are supposed to be fixed when sample volume and shape do not change with ordering. Relaxation times characterising intrachain motions in both isotropic and ordered states are determined by two factors. The first (“dynamic”) factor is related to the friction of chain elements and the second one (“statistical” factor) is determined by statistical mean–square fluctuations of segment projections on the three axes of rectangular frame of reference. The “statistical” factor of relaxation times is calculated here as a function of the order parameter and the parameter characterising the degree of network crosslinking. Statistical factor obtained in the framework of a network model consisting of Gaussian subchains is compared with that calculated here by using freely‐jointed‐rods chain model. Good agreement is shown between statistical factors obtained in the framework of the two chain models considered. This result confirms the validity of describing the dynamics of real rod‐like mesogenic groups in nematic elastomers in terms of a simplified chain model consisting of Gaussian segments with fixed average lengths which do not change with ordering. The influence of “dynamic” factor on the relaxation spectrum of a nematic elastomer is discussed qualitatively.     

A new spline approach for data fitting

This paper presents an extension of the Modified Spline Technique (MST) formulation for data fitting named power spline, which gives consistent results for sets of data of concave and convex curves. This method is based on a technique which couples an implicit formulation of the maximum likelihood principle to the spline method, making the method suitable to fit data when no physical model is available. The MST method proved to be better than to the spline method and the extended spline fit technique (EST), because it provided accurate results for the first and second derivatives in sets of data where the EST solution developed inaccuracies. The EST method is a formulation that couples Least Squares to the spline method. There are, however, some sets of data where the MST method would show inconsistent solutions for the first and second derivatives. The power spline method eliminates these problems for concave or convex curves. Another improvement on the method is a more flexible choice for the interval boundaries.¹