The dispersion properties of surface acoustic wave devices on AlN/LiNbO3 film/substrate structure

Highly c-axis oriented aluminum nitride (AlN) films were deposited on z-cut LiNbO₃ substrates by reactive rf magnetron sputtering. The crystalline properties investigated by X-ray diffraction (XRD) revealed that AlN film with (0 0 2) preferred orientation was improved by an increase of the deposition time within the experimental range. However, the surface morphology of AlN film measured by scanning probe microscopy (SPM) showed that the roughness was getting worse with increase of deposition time. Surface acoustic wave (SAW) properties, measured by a network analyzer in the structure consisting of highly c-axis AlN films on z-cut LiNbO₃ substrates, were investigated. The phase velocity (V_P) was significantly increased by the increase of h/λ, where h is the thickness of AlN film and λ is the wavelength. However, the insertion loss (IL) of SAW filters was also increased by the increase of h/λ. Experimental results on the temperature characteristics of SAW devices are also presented.     

Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

Propagation characteristics of surface acoustic waves(SAWs) in ZnO films/glass substrates are theoretically investigated by the three-dimensional(3D) finite element method. At first, for(11ˉ20) ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1ˉ100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k~2 of 2.4% in(90°, 56.5°, 0°) ZnO film/glass substrate structure; Love wave has a maximum k~2 of 3.81% in(56°, 90°, 0°) ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency(TCF) can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k~2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.     

MOCVD法生长SAWF用ZnO/Diamond/Si多层结构

使用等离子体辅助MOCVD系统在金刚石,硅衬底上成功地制备了氧化锌多层薄膜材料,通过两步生长法对薄膜质量进行了优化。XRD测试显示优化后的样品具有c轴的择优取向生长,PL谱测试表明样品经优化后不仅深能级发射峰消失,同时紫外发射峰增强。对优化后的样品的表面测试显示出较低的表面粗糙度。比较氧化锌多层薄膜结构的声表面波频散曲线,ZnO薄膜声表面滤波器受膜厚和衬底材料的影响较大。当ZnO薄膜较薄时,在它上面的传播速度将与衬底上的传播速度接近,与其他衬底上生长的薄膜相比,以金刚石这种快声速材料为衬底的ZnO多层薄膜结构,声表面波滤波器的中心频率将提高1倍左右。     

ZnO薄膜/金刚石在不同激励条件下声表面波特性的计算与分析

本文首先以刚度矩阵法为基础, 给出了ZnO薄膜/金刚石在四种不同激励条件下的有效介电常数计算公式. 然后以此为工具, 分别计算了多晶ZnO(002) 薄膜/多晶金刚石和单晶ZnO(002) 薄膜/多晶金刚石的声表面波特性, 并根据计算结果及设计制作声表面波器件的要求, 对ZnO膜厚的选择进行了详细地分析. 最后讨论了ZnO/金刚石/Si复合晶片可以忽略Si衬底对声表面特性影响时对金刚石膜厚的要求. 关键词： 声表面波 压电多层结构 有效介电常数 刚度矩阵法     

高温条件下Ga3PO7晶体热学及声表面波性质的理论研究

高温压电晶体是许多机电器件必需的一种多功能材料, Ga₃PO₇晶体的居里温度高达1364 ℃, 可应用于高温极限条件. 但是预测高温极限条件下晶体的结构以及物理性质的问题采用实验研究的手段非常困难, 而理论上的预测未见研究. 本文采用密度泛函-准谐振近似理论计算了温度在0-1200 ℃范围内Ga₃PO₇ 晶体的结构常数和热学性质, 结果表明Ga₃PO₇晶体的晶格常数a和c随温度的升高呈线性增大, 且c方向受温度影响更为显著; 晶体的密度随温度的升高而减小, 计算的a 和c方向平均热膨胀系数分别为1.67×10^-6 K^-1和3.58×10^-6 K^-1, 高温区定压热容为2.067 J/g·K, 与实验值一致. 计算了从常温到高温下该晶体的弹性常数以及体弹性模量的变化, 研究了高温条件下的声表面波特性, 发现随着温度的升高, 声表面波速度浮动较小, 而机电耦合系数略有增大; 在传播角为151° 时该晶体具有较好的温度稳定性且机电耦合系数达到最大值, 这表明Ga₃PO₇ 晶体是一种有望应用于高温环境下的压电晶体.     

Velocity of a SAW propagating in a 2D phononic crystal

We have studied the propagation of a surface acoustic waves (SAW), in a structure constituted by a 2D phononic film (a few micrometers thick and having lattice constants of a few hundreds of micrometers in the two directions of the propagation plane) deposited onto a homogeneous semi-infinite substrate. First, we have calculated the dispersion relations of the acoustic modes by using a plane waves expansion method. We found that the surface branch exhibits both the folding effect and a band gap for the propagation along some particular directions. This is a very interesting result which demonstrates that the effects related to the existence of the band gap (sound velocity dispersion, diffraction, refraction, ultrasound tunneling, etc.) can all appear, even if the thickness of the phononic film is much less than the penetration depth of the SAW. Then, we used an all-optical technique to monitor the spectral content of the SAW propagating along the GammaX direction in the reduced Brillouin zone. We show that a wave with frequency in the stop band, is destructively diffracted after it propagates through less than ten periods. Finally, we report on measurements of the Rayleigh wave phase velocity and we show that the transit time is independent of the distance traveled inside the phononic crystal, suggesting that tunneling trough the sample is involved.     

Combining Brillouin spectroscopy and laser-SAW technique for elastic property characterization of thick DLC films

Surface Brillouin spectroscopy (SBS) has been widely used for elastic property characterization of thin films. For films thicker than 500 nm, however, the wavelength of surface acoustic wave in the frequency range available for SBS is smaller than film thickness, and the SBS measures only the Rayleigh wave of the film. The laser-SAW technique, on the other hand, measures only the low-frequency portion of the surface acoustic wave dispersion and can estimate only one elastic modulus of the film (typically Young's modulus). In this work, we have combined the two methods to determine both Young's modulus and Poisson's ratio of a diamond-like carbon (DLC) film. It was found that reasonable estimates can be obtained for the longitudinal wave velocity, shear wave velocity, and Young's modulus of the film. The Poisson's ratio, however, still has a relatively large measurement error.     

Transmission of surface acoustic waves through the interface based on discontinuity of electrical boundary conditions on surface of potassium niobate

This paper presents theoretical investigation of the propagation of surface acoustic waves (SAWs) across the boundary between metallized (electrically shorted) and unmetallized (electrically open) regions on the surface of potassium niobate crystals. Potassium niobate is a very strong piezoelectric material and has the interesting property that only one type of SAW, namely a Rayleigh wave, can exist on unmetallized surface, where as two types of SAWs, namely Rayleigh and Bleustein-Gulyaev (BG), can exist on a metallized surface. Analysis shows that the Rayleigh wave propagates through the interface with very little change in amplitude or polarization. On the other hand, almost total reflection of the BG wave is expected. Details of the theoretical analysis and calculated results will be presented.     

Combining Brillouin spectroscopy and laser-SAW technique for elastic property characterization of thick DLC films

Surface Brillouin spectroscopy (SBS) has been widely used for elastic property characterization of thin films. For films thicker than 500 nm, however, the wavelength of surface acoustic wave in the frequency range available for SBS is smaller than film thickness, and the SBS measures only the Rayleigh wave of the film. The laser-SAW technique, on the other hand, measures only the low-frequency portion of the surface acoustic wave dispersion and can estimate only one elastic modulus of the film (typically Young's modulus). In this work, we have combined the two methods to determine both Young's modulus and Poisson's ratio of a diamond-like carbon (DLC) film. It was found that reasonable estimates can be obtained for the longitudinal wave velocity, shear wave velocity, and Young's modulus of the film. The Poisson's ratio, however, still has a relatively large measurement error.     

表面声波传感器及其应用

本文简要介绍多种表面声波传感器的结构、特点、应用及其研究进展概况。表面声波传感器依其波型分类,主要包括瑞利波、水平切变声板波、乐甫波和兰姆波传感器;其应用领域根据作用特点大致可分为物理传感器和化学、生物传感器,前者较易实现,后者特异性强,需要针对具体情况作更细致研究。由于表面声波的传播速度和相位对周围环境的参量变化极为敏感,因此有关传感器具有很高的灵敏度和广泛的应用领域。     

Brillouin light scattering characterization of the surface acoustic wave velocity in sp<Superscript>2</Superscript> allotropes thin films

Carbon thin films have been deposited by DC magnetron sputtering at different substrate temperatures ranging from 200 K to 400 K. The influence of the preparation substrate temperature on the elastic properties has been evidenced by means of the High Resolution Brillouin Spectroscopy. Thus, the surface acoustic wave (SAW) velocity evolution could be assessed for the different samples. The observed variation is analysed in terms of the relative population of sp² allotropes phases forming the film.     

Surface wave propagation in wood: prospective method for the determination of wood off-diagonal terms of stiffness matrix

Overall elastic properties of wood can be studied by ultrasonic methods. Orthotropic symmetry is assumed (nine constants). This article describes two methods developed for the determination of three off-diagonal terms of the stiffness matrix. The first method deals with bulk waves (BAW), and the second with surface wave (SAW) measurements. The BAW method requires repeated off-axis measurements and an optimization criterion for selecting the C_ij-terms. The SAW method gives the value of the C_ij-term corresponding to a specific plane of symmetry, from only one on-axis measurement. The six diagonal terms of the stiffness matrix can be obtained easily from on-axis bulk wave measurements. From the nine terms of the matrix, the compliance terms (S_ij) and corresponding technical terms are calculated. Technical constants determined from ultrasonic measurements are in agreement with those obtained by classical statistical methods. The experiments were performed on beech and spruce. The SAW technique is expected to be of more interest for further investigations of wood mechanical properties.     

Determination of the optical constants of metals and semiconductors by combining ellipsometry with electron spectroscopy microscopy and X-ray specular reflection analysis

The optical constants n(λ) and k(λ) of metals and semiconductors can be determined by spectroellipsometry, however, their apparent values are considerably affected by the roughness and oxide overlayer thickness dof the sample. Aluminium thin film samples of high perfection and very low roughness (<1 nm) have been studied by cross-disciplinary experimental methods: X-ray specular reflection analysis for determining the structure and thickness of the natural (hydrated) oxide overlayer and roughness of the substrate; plasmon electron energy loss spectroscopy supplied d. For calibration of the d measurements a special thin film multilayer system was developed, suitable for preparing cross-sectional samples for resolution transmission electron microscopy. Knowing the roughness and d-data, the optical constants n(λ) and k(λ) of aluminium were determined by spectroellipsometry in the spectral range λ=365–633 nm. Experimental results and a nomogram are presented for evaluating n(λ) and k(λ). The dependence of the ellipsometric optical constants on roughness and d is discussed. Very good agreement of the optical constants with the corrected ellipsometric results of Blanco and the synchrotron spectroscopy data of Hagemann was found. The cross-disciplinary methods can be applied to metals and semiconductors covered with an overlayer.     

Anomalous acoustoelectric effect in La0.67Ca0.33MnO3 films

We have studied the acoustoelectric (AE) effect produced by surface acoustic waves (SAW) in a monolithic layered structure, composed of a piezodielectric LiNbO3 substrate and a La0.67Ca0.33MnO3 film. The experiments unexpectedly revealed in the longitudinal AE effect an anomalous contribution, invariant upon reversal of SAW propagation, which coexists with the ordinary (odd in wave vector) effect. The anomalous effect dominates near the metal-insulator transition, while the ordinary effect prevails at high and low temperatures. We show that the anomalous effect is caused by strong modulation of the film conductivity produced by the SAW elastic deformations.     

Growth and characterization of piezoelectric Sr3Ga2Ge4O14 crystals

Langasite (La3Ga5SiO14, LGS) and its isomorphs, have attracted much attention for their potential for surface acoustic wave (SAW) and bulk acoustic wave (BAW) applications. Among these homologous compounds, Sr3Ga2Ge4O14 (SGG) attracted our attention due to its superior piezoelectric properties and lower growth temperature. In this work, SGG single crystal has been grown successfully by the vertical Bridgman method with crucible-sealing technique. SGG wafers of 2 in. have been fabricated. The basic physical properties of SGG crystals were measured. The results demonstrate that piezoelectric and mechanical properties of SGG crystals are better than that of LGS crystal and it is expected to be a potential substrate material for SAW and BAW applications.     

Coupling reducing k-points for photonic crystal fiber calculations

When describing localized electromagnetic modes in dielectric waveguides by the planewave method, a supercell geometry must necessarily be adopted. We demonstrate in the present work that the convergence of the calculations with respect to supercell size depends strongly on the choice of the transverse Bloch wave vector, k. We describe a method to derive k-points that minimize the coupling between repeated images of the guided modes in real space. Calculations have been done for a quadratic and a triangular photonic crystal fiber structure. With the new coupling reducing (CR) k-points, the convergence of the eigenfrequencies for both the fundamental and second order modes with respect to supercell size is considerably improved. The general approach outlined may also be applied in the case of three-dimensional photonic crystal structures.     

Characteristics of surface acoustic waves in (11$$\bar 2$$ 0)ZnO film/ R-sapphire substrate structures

(11\(\bar 2\)0)ZnO film/R-sapphire substrate structure is promising for high frequency acoustic wave devices. The propagation characteristics of SAWs, including the Rayleigh waves along [0001] direction and Love waves along [1ī00] direction, are investigated by using 3 dimensional finite element method (3D-FEM). The phase velocity (v _p), electromechanical coupling coefficient (k ²), temperature coefficient of frequency (TCF) and reflection coefficient (r) of Rayleigh wave and Love wave devices are theoretically analyzed. Furthermore, the influences of ZnO films with different crystal orientation on SAW properties are also investigated. The results show that the 1st Rayleigh wave has an exceedingly large k ² of 4.95% in (90°, 90°, 0°) (11\(\bar 2\)0)ZnO film/R-sapphire substrate associated with a phase velocity of 5300 m/s; and the 0th Love wave in (0°, 90°, 0°) (11\(\bar 2\)0)ZnO film/R-sapphire substrate has a maximum k ² of 3.86% associated with a phase velocity of 3400 m/s. And (11\(\bar 2\)0)ZnO film/R-sapphire substrate structures can be used to design temperature-compensated and wide-band SAW devices. All of the results indicate that the performances of SAW devices can be optimized by suitably selecting ZnO films with different thickness and crystal orientations deposited on R-sapphire substrates.     

Diagnostics of elastic properties of a planar interface between two rough media using surface acoustic waves

The results of experimental studies on the nonlinear elastic properties of a planar interface between two media are presented—an optically polished glass substrate and flat samples with different degrees of roughness. The nonlinear elastic properties of the interfaces between two media were investigated by the spectral method using surface acoustic waves (SAWs). The effect of external pressure applied to the interface on the efficiency of the generation of the second SAW harmonic was studied. Using the measured amplitudes of the first and second harmonics of the SAW that passes along the interface, the second-order nonlinear acoustic parameter was calculated as a function of the external pressure applied to the sample at a fixed amplitude of a probing wave. It was revealed that the nonlinear parameter of the SAW is a nonmonotonic function of the pressure at the boundary. The results were analyzed on the basis of an elastic contact nonlinearity, and it is concluded that these results can be used in nondestructive testing for roughness and waviness of surfaces of flat solids.     

Hypersound waves at the surface of CdZnTe crystals: The role of surface orientation and scattering at twin boundaries

The patterns of propagation of gigahertz surface acoustic waves (SAWs) are obtained for cuts of CdZnTe single crystals with different crystallographic orientations. By comparing the experimental patterns with the calculated ones, the existence of at least two SAW modes, one of which is a Rayleigh mode, is demonstrated. It is shown that the anisotropy of propagation of different SAW modes makes it possible to determine the local crystallographic orientation of the CdZnTe surface and detect local imperfections of the crystal structure. Strong anisotropic scattering of the Rayleigh wave by coherent twin boundaries is found.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动