Quantitative thickness determination using x‐ray fluorescence: application to multiple layers

The fundamental parameter method using x‐ray fluorescence was applied to the quantitative determination of single and multiple layer thicknesses using a compact experimental setup. Focused white‐beam radiation was obtained from a high‐voltage Mo x‐ray tube and the fluorescence spectra were acquired using a Peltier‐cooled Si solid‐state detector. The results show that in the case of single layers the accuracy of the thicknesses obtained is very good whereas for multiple layer structures the agreement is poorer, especially for the thinnest layers. This indicates a possible drawback of the standard‐free thickness determination scheme based on fundamental parameters for complex samples. Copyright © 2004 John Wiley & Sons, Ltd.     

Micro‐beam x‐ray fluorescence analysis of individual particles with correction for absorption effects

A method of correction for absorption effects in micro‐beam x‐ray fluorescence analysis is described. A fast, energy‐dispersive, silicon drift detector (SDD) was used to measure the primary x‐ray beam transmitted through the sample. The absorption factors were calculated using the data acquired with the SDD. The possibility of using the coherently, incoherently and multiple scattered primary radiation for determining the mass of individual particles was examined. The proposed methods were validated with the use of NIST K3089 glass micro‐spheres of known composition. Copyright © 2006 John Wiley & Sons, Ltd.     

Portable x‐ray fluorescence spectrometer with a pyroelectric x‐ray generator

A portable x‐ray fluorescence spectrometer was assembled with an x‐ray generator that was driven by a 9 V dry electric battery. Several possible optimum geometries of the x‐ray generator and detector were evaluated, and the results showed that the intensity of fluorescent x‐rays was strong enough when the angle between the x‐ray generator and detector was as small as 30°. The geometrically optimized x‐ray spectrometer was applied to the analysis of paints, plastics and aluminum foils. Pigments in paint and toxic elements in plastic could be easily detected with on‐site analysis. Fe in aluminum foil was quantitatively determined down to the sub‐% level. The detection limit of Fe was 180 ppm for 100 s of measurement. Copyright © 2005 John Wiley & Sons, Ltd.     

The capabilities of an electrically cooled energy‐dispersive x‐ray detector for quantitative x‐ray fluorescence analysis

The capabilities of the Si PIN diode x‐ray detector were determined and compared with those of a standard Si(Li) detector. The x‐ray fluorescence (XRF) analysis systems assembled with these two detectors included annular radioisotope excitation sources of Cd‐109 and Fe‐55. The systems were calibrated for sensitivity and quantification was performed with fundamental parameters software. Based on the analysis of the standard reference material NIST 2710 (Montana soil), the elemental sensitivities and the limits of detection of both systems were obtained. The elemental sensitivities of the Si PIN detector for fluorescence x‐rays in the energy range up to 10 keV were comparable to those of the Si(Li) detector. At higher fluorescence x‐ray energies the sensitivity of the Si PIN detector gradually decreased and was smaller by a factor of ～4 at 20 keV. The reason was mainly the small thickness of the sensitive volume of the Si PIN diode (0.2 mm) and therefore the smaller relative efficiency of this detector. The assessed limits of detection (LODs) were comparable for the two detectors, which was mainly due to the lower spectral background of the Si PIN detector in excitation with the Cd‐109 source as a result of its smaller sensitive thickness. The accuracy of elemental determinations for the two detectors was comparable and within the limits of the assessed uncertainties, which were calculated considering all the steps of the analysis, i.e. spectrum measurement and analysis, sensitivity calibration and quantification. Copyright © 2004 John Wiley & Sons, Ltd.     

Composition determination for complex and transmitting samples in x‐ray quantitative analysis

In this work, quantitative analysis of x‐ray fluorescence measurements of transmitting samples with complex chemical composition is considered. A method is presented for analytical solution of sample composition including matrix effects, independent of sample thickness and requiring no standards. The method uses fundamental parameters and measured fluorescence signal intensities, and is applicable to transmission geometry measurements for which standard analyses are not applicable. Limitations of the analysis presented here are discussed. Copyright © 2008 John Wiley & Sons, Ltd.     

Nanoresolution interface studies in thin films by synchrotron x‐ray diffraction and by using x‐ray waveguide structure

In the last years we performed several measurements with synchrotron radiation of several facilities to reveal interesting interface phenomena on the nanoscale. We used both x‐ray diffraction [1] , [2] (XRD) and spectrometry techniques. In this paper, we briefly summarize the results obtained from diffraction measurements, which lead us to our recent grazing incidence x‐ray fluorescence analysis (GIXRF) and extended x‐ray absorption fine structure (EXAFS) experiments. We show how a combination of experimental methods of GIXRF analysis and EXAFS spectroscopy in fluorescence detection with x‐ray standing waves (XSW) technique was applied for the depth profiling of a‐Si/Co/a‐Si layers with nanometer resolution to monitor the growth of CoSi intermetallic phase. The investigated layers were placed into the waveguide structure formed by two Ta films to increase sensitivity and accuracy of the measurements. Copyright © 2009 John Wiley & Sons, Ltd.     

Improvements of the low‐energy performance of a micro‐focus x‐ray source for XRF analysis with the SEM

X‐ray Fluorescence (XRF) with a scanning electron microscope (SEM) is a valuable completion of the analytical capabilities of SEMs. Small and compact micro‐focus x‐ray sources are mounted to the microscope chamber, and the x‐ray spectra are monitored with conventional EDS systems. Up to now the x‐ray tubes used for the micro‐focus x‐ray sources are equipped with beryllium windows about 100 µm thick. The poly‐capillary x‐ray lenses have their transmission maximum at photon energies around 10 keV. It drops down in both low‐ and high‐energy ranges. Hence, L‐radiation from an Mo or Rh target will be strongly attenuated, and the excitation of fluorescence in the soft x‐ray range becomes very ineffective. A new micro‐focus x‐ray source was developed. It is characterised by a lower self‐absorption in the tube target, thin beryllium windows and an x‐ray optics having a large distance between its foci and the maximum of transmission at about 5 keV. Thus K line fluorescence of light elements becomes effectively excited by the L‐radiation from Mo or Rh tube targets. The detection limit for sodium oxide in glass was found to be below 1 mass%. Copyright © 2009 John Wiley & Sons, Ltd.     

X‐ray fluorescence analysis with a pyroelectric x‐ray generator

Several types of handy x‐ray fluorescence spectrometers are presented. The results obtained with a Niton spectrometer are presented as a goal to develop a laboratory‐made spectrometer using an Amptek Cool‐X pyroelectric x‐ray generator. A small and cheap charge‐up x‐ray emitting device and its spectrum are also presented. Handy x‐ray spectrometers are now progressing rapidly and the detection limits are in the range of a few ppm for certain elements. Copyright © 2005 John Wiley & Sons, Ltd.     

Literature trends in x‐ray emission spectrometry in the period 1990–2000–a review

A quantitative overview is given of the role that x‐ray emission analysis methods, in their various forms, play in the literature for the period from January 1990 to the end of December 2000. The major sources of information were computerized searches through Chemical Abstracts and Web of Science and, specifically for 1998, a manual search through Analytical Abstracts. Areas that are covered in this review pertain to the recent trends in x‐ray emission spectrometry in general and in some specific techniques such as x‐ray fluorescence analysis, synchrotron radiation‐induced and particle‐induced x‐ray emission, total‐reflection and micro‐x‐ray fluorescence analysis. A brief outline of recent developments in the specific fields is given, with emphasis on the various excitation and detection modes, on different application areas and on relative contributions of different countries and languages to the x‐ray emission spectrometry literature. It appears that environmental monitoring and research continue to be particularly important publication fields for x‐ray spectrometry. Copyright © 2003 John Wiley & Sons, Ltd.     

The effects of absorption edge structure of atoms in x‐ray fluorescence analysis

The effects of the absorption edge structure in x‐ray fluorescence (XRF) manifest themselves as a very strong attenuation of the analytical line radiation when it is in the x‐ray absorption near edge structure (XANES) range. In this paper, this effect is exemplified by an ultra‐strong Ba‐caused attenuation of the Ce Lβ₁ line. This case was experimentally studied. Comparison of measured and calculated relative intensities has shown that the actual mass attenuation coefficient of the Ce Lβ₁ line in Ba is 1.6 times greater than known values. This is due to that the Ce Lβ₁ line is within the initial range of L3 Ba absorption edge, i. e. the XANES range. Such an effect of the absorption edge structure of atoms must be considered using the fundamental parameters method in quantitative XRF analysis. This paper also presents some other possible cases of this effect. Copyright © 2009 John Wiley & Sons, Ltd.     

A new microfocus x‐ray source,iMOXS, for highly sensitive XRF analysis in scanning electron microscopes

Scanning electron microscopes are usually equipped with energy‐dispersive X‐ray detectors for electron probe microanalysis. This widespread analytical method allows investigators to determine the elemental composition of specimens with a spatial resolution of about 1 µm. However, owing to the electron–specimen interaction, the emitted spectra reveal, in addition to characteristic lines, also a high level of continuous bremsstrahlung background. As a result, elements with low concentrations cannot be identified. The minimum detection limit can be diminished by two orders of magnitude if the characteristic lines are excited as fluorescence by an additional x‐ray source. In this case, the emergence of bremsstrahlung is considerably reduced. Combining a high‐brilliance microfocus x‐ray tube with efficient polycapillary optics enables one to realize an experimental arrangement for performing local fluorescence analysis at the same point where the electron beam hits the sample. The polycapillary optics under consideration focuses the emitted x‐radiation onto focal spots between 30 and 100 µm in diameter. Count rates of several thousands cps have been achieved. Elemental maps have been obtained by means of the motorized specimen stage of the microscope. Copyright © 2005 John Wiley & Sons, Ltd.     

Characterization of x‐rays emerging from between reflector and sample carrier in reflector‐assisted TXRF analysis

The possible application of an Si reflector, which is placed just above the sample carrier in total reflection x‐ray fluorescence (TXRF) analysis, was investigated. The x‐rays that were emitted from an Mo tube and passed between the Si reflector and the Si sample carrier were analyzed with an Si drift detector. In our experimental setup, the angle between the reflector and the sample carrier can be changed by adjusting the inclination of the reflector. The intensity of the x‐rays that emerged from between the two Si surfaces drastically changed depending on the reflector angle. At a proper reflector angle, this intensity showed a maximum and, in addition, the Compton peak in the x‐ray spectrum was suppressed. When this x‐ray beam was used for excitation of TXRF signals, the highest intensity of x‐ray fluorescence emitted from the sample was detected, indicating that these experimental conditions are useful for the enhancement of TXRF intensities. Copyright © 2004 John Wiley & Sons, Ltd.     

Total reflection x‐ray fluorescence spectrometer with parallel primary beam

A new type of x‐ray optical device with two curved mirrors was tested experimentally for total reflection x‐ray fluorescence (TXRF). When focusing optics are used to increase the primary beam intensity at the sample position of TXRF spectrometers, it is always associated with an increase in the angular divergence, which is tolerable to only a limited extent. The possibility of improving the divergence by means of an additional curved mirror was reported in the past. One may hope that this additional mirror will correct some of the adverse characteristics of conventional x‐ray sources, such as the angular divergence and the intensity at the sample position. Copyright © 2005 John Wiley & Sons, Ltd.     

Planar waveguide‐resonator: a new device for x‐ray optics

Systematic investigations of the width dependence on the x‐ray beam propagation mechanism for a narrow extended slit formed by two plane dielectric plates are presented. It is shown that the mechanism of a multiple consecutive total reflection for Cu Kα radiation dominates in a slit width range s ≥ 3 µm. At the same time the manner of Cu Kα radiation propagation for super‐narrow slits s ≤ 0.1 µm is very different from the multiple total reflection mechanism. The x‐ray beam intensity proves to be constant for all this range of magnitude. This gives grounds to expect that the super‐narrow slit area is characterized by a specific type of mechanism of x‐ray beam propagation: waveguide‐resonance. A simple model for the waveguide‐resonance propagation mechanism based on the formation of a uniform x‐ray standing wave interference field in the total space of a narrow extended slit was developed. The design of a new x‐ray optical device, namely a planar x‐ray waveguide‐resonator, is proposed based on the waveguide‐resonance mechanism. Some properties of the composite planar x‐ray waveguide‐resonator are discussed. It is shown that under specific conditions the composite waveguide can demonstrate a partial tunneling effect of the x‐ray beam. The main applications of the new technique are discussed. Copyright © 2004 John Wiley & Sons, Ltd.     

Total reflection x‐ray fluorescence analysis—a review

Total reflection x‐ray fluorescence analysis (TXRF) is a special energy‐dispersive x‐ray analytical technique extending XRF down to the ultra trace element range. Detection limits of picograms or nanograms per gram levels are reached with x‐ray tube excitation. Using synchrotron radiation as excitation source, femtogram levels are detectable, particularly important for Si wafer surface analysis. TXRF is specially suited for applications in which only a very small amount of sample is available, as only a few micrograms are required for the analysis. In this review, an overview of theoretical principles, advantages, instrumentation, quantification and application is given. Chemical analysis as well as surface analysis including depth profiling and thin‐film characterization is described. Special research results on extension to low‐Z elements, excitation with synchrotron radiation and x‐ray absorption spectroscopy (XAS) for chemical speciation at trace levels are reviewed. Copyright © 2007 John Wiley & Sons, Ltd.     

The advantages of using digital signal processing in polarized x‐ray fluorescence analysis

Improving the specificity and productivity of XRF is of great relevance for the determination of trace elements in samples of diverse origin. The advantages of using digital signal processing in energy‐dispersive polarized x‐ray fluorescence analysis are demonstrated by comparing the instrumental sensitivities achieved with those obtained by using a conventional analogue signal processing‐based spectrometer. A compact geometry secondary target arrangement was designed to increase the effective solid angles and to reduce the distances between secondary target, sample and detector, thus achieving larger x‐ray fluxes for both the excitation and detection process, resulting in improved instrumental sensitivities. The performance of both spectrometers was evaluated for two different detectors: an Si(Li) detector and a thermoelectrically cooled passivated‐implanted planar silicon detector (X‐PIPS). The uncertainties achieved and accuracy are illustrated for the analysis of a group of sediment and organic‐origin certified reference materials using two different quantitative procedures. Copyright © 2006 John Wiley & Sons, Ltd.     

Laboratory vacuum spectrometer for the soft x‐ray region

A laboratory surface x‐ray absorption near edge structure ((S)XANES) spectrometer used for measurements in the soft x‐ray region is described. The x‐ray beam path of the spectrometer is enclosed in a vacuum chamber directly connected to the x‐ray generator output port. With this setup, the absorption of the x‐rays in the air is avoided. The developed spectrometer uses a monochromator equipped with cylindrically bent PET(002), KAP(001), and Ge(111) crystals of different Rowland radii working in the Johann focusing geometry. Nine stepping motors are used to control the positions of the monochromator, receiving slit, sample, and detectors. An x‐ray photon energy available in experiment ranges from about 1 keV to 5 keV. A registration of the photoelectrons emitted from the sample with the channeltron is used to carry out surface‐sensitive measurements. The performance of the developed spectrometer is illustrated by spectra measured at the absorption K‐edges of several elements from the Na‐Ti set. Copyright © 2008 John Wiley & Sons, Ltd.     

Time‐resolved x‐ray fluorescence for monitoring the intake of mineral nutrients in living plants

We have applied a time‐resolved means of measurement for studying living plants. The intake of mineral nutrients in a living plant such as stevia has been observed by this measuring instrument. A solution containing K, Ca, Mn, Fe, Cu, and Zn compounds was used as the mineral nutrient solution. The concentrations of the standard solutions were specifically chosen to obtain optimal intensities of the x‐ray peaks. The time dependence of the x‐ray fluorescence (XRF) intensity showed specific intake processes depending on the type of element. In addition, the experimental results suggest differences in the translocation of each element in the stevia stem. We conclude that time‐resolved XRF is a powerful technique for studying living plants. Copyright © 2007 John Wiley & Sons, Ltd.     

Semiconductor Peltier‐cooled detectors for x‐ray fluorescence analysis

We discuss recent results obtained in the development of Si(Li), Si p–i–n, CdTe p–i–n and CdZnTe x‐ray detectors with Peltier coolers for fabrication of laboratory and portable XRF analyzers. The characteristics of Si(Li) Peltier‐cooled detectors are close to those of detectors cooled with the liquid nitrogen and remain the most preferred type of detectors for the tasks of x‐ray fluorescence analysis. Considerable success was obtained in the improvement of the characteristics of CdTe p–i–n detectors and CdZnTe detectors with a metal–semiconductor–metal structure, effective in the energy range up to 100 keV. The spectra of all detectors are presented. Copyright © 2004 John Wiley & Sons, Ltd.