In situ monitoring of the etching of thin silicon oxide films in diluted NH4F by IR ellipsometry

Infrared spectroscopic ellipsometry (IRSE) was applied to monitor the etching process of electrochemically formed silicon oxides (11.5 and 3.8 nm thick films) in diluted NH₄F solution. The optical properties of the amorphous silicon oxide film and the time dependent thicknesses of the oxide films during the etching process were deduced from quantitative evaluations of IRSE spectra.     

Stimuli-responsive mixed grafted polymer films with gradually changing properties: direct determination of chemical composition

Infrared spectroscopic ellipsometry (IRSE) and visible monochromatic ellipsometry (VISE) approaches were applied to investigate the chemical structure and thickness of ultrathin polymer films. Mixed polystyrene-poly(2-vinylpyridine) and polystyrene-poly(tert-butyl acrylate) polymer grafted films (mixed brushes) with gradually changing composition (1D gradient mixed brush) along the sample were prepared on a temperature gradient stage via two subsequent "grafting to" reactions. The films were characterized by high-precision mapping VISE at a single wavelength (632.8 nm) and IRSE. The set of 1D IRSE spectra of the polymer brush films obtained by mapping the 1D gradient brush were used to estimate the thickness and the local composition of the film and to construct the 1D map of the film in terms of the chemical composition of the brush. The results were compared with the data obtained using monochromatic ellipsometry where the brush composition was estimated from the results of two subsequent measurements followed each grafting step. The measurements of the brush thickness and composition with both methods were found to be in gratifying agreement. The results demonstrate the high potential of IRSE methods for the one-step characterization (by thickness and chemical composition) of ultrathin polymer films of complex composition.     

Toward a quantitative description of the anodic oxide films on aluminum

A method to quantify the composition of anodic oxide films on aluminum using Infrared Spectroscopic Ellipsometry (IRSE) is proposed. It consists of obtaining the absorption coefficient of the film as a function of wavelength. Using values of the absorption coefficients for the pure components of the film, the percentages (mole or wt%) of each component in the sample can be calculated.The method is demonstrated in a study of the structure of the oxide film on electropolished aluminum and the anodically formed barrier layer film. Both surface oxides were found to be initially a form of amorphous Al₂O₃. While the barrier film is essentially free of water as prepared, the film on electropolished aluminum contained about 25 wt% water. Hydration of both types of films by immersion in boiling water results in the formation of pseudoboehmite (AlOOH). The technique may have more general applicability to the quantitative determination of the composition of corrosion films and other surface layers on metals.     

Spectroscopic Ellipsometry for Characterization of Thin Films of Polymer Blends

Morphology, composition, miscibility, interdiffusion, and interactions at interfaces are important quantities of polymer blends. Many of these parameters can be probed with spectroscopic ellipsometry. Ellipsometry in the visible spectral range is very suitable for determination of thicknesses and the high frequency refractive indices of thin organic films. However the spectral contrast is low for many polymers in comparison to infrared spectroscopic ellipsometry (IRSE) where specific contributions of the molecular vibrations are probed. In the presented study the infrared optical constants of a double layer (206.6 nm in total) of poly(n-butyl methacrylate) (PnBMA) and poly(vinyl chloride) (PVC) and of the films of the single compounds have been determined with optical simulations using layer models. The multiple layer model served for simulation of the ellipsometric spectra taken after an annealing induced mixing process in a polymeric double layer. The ellipsometric spectra of a not completely mixed sample could be fitted in a three-layer model, in which a mixed interphase in between the two layers of the polymers is formed due to interdiffusion.     

Infrared optical properties and AFM of spin-cast chitosan films chemically modified with 1,2 Epoxy-3-phenoxy-propane

Chemical modification of spin-cast chitosan films has been performed. This modification involves the attachment of 1,2 Epoxy-3-phenoxy-propane, commonly known as glycidyl phenyl ether (GPE), to the amine group of the chitosan molecule. Optical properties of modified films have been determined in the infrared region of the spectrum using spectroscopic ellipsometry, and are reported in this paper. Special attention is paid to the infrared region where the index of refraction and extinction coefficients from 750 to 4000 cm(-1) were determined. Difference plots of IR optical data before and after chemical modification were generated to confirm that modification had occurred. Optical modeling of infrared spectroscopic ellipsometry (IRSE) data with respect to chemical bond vibrations has also been performed. This modeling involved curve fitting of resonant chemical bond absorptions using Lorentz oscillators. These oscillator models allow for comparison of modified chitosan to unmodified chitosan. The purpose of this research was to determine infrared optical constants of chemically modified chitosan films This work shows that surface chemistry of biomaterials can be studied quite sensitively with spectroscopy ellipsometry, detecting as little as 100 ng/cm(2) of GPE.     

Surface-enhanced infrared ellipsometry of self-assembled undecanethiol and dodecanethiol monolayers on disordered gold nanoisland substrates

Infrared spectroscopic ellipsometry (IRSE) is a powerful optical probe of various chemical and physical properties of molecules adsorbed onto solid surfaces. In particular, IRSE can be useful for detecting adsorption-induced changes in the IR spectra of self-assembled monolayers (SAMs), and unlike traditional IR absorption spectroscopies, IRSE provides useful information about the phase of the reflected radiation from the SAMs. However, in the standard IRSE experimental geometry using flat substrates for SAMs, the detectable signal containing these phase data is considerably weaker than the corresponding absorbance data. In our present work, we demonstrate that enhancing the local optical fields at the sample surface through the use of a disordered Au nanoisland substrate can substantially increase both these absorbance and phase signals. We also demonstrate how this surface-enhanced infrared spectroscopic ellipsometry (SEIRSE) can be utilized for straightforward analysis of absorption peak widths, as well as to obtain information about the orientation of the terminal methyl on adsorbed SAMs. As model SAMs for this study, we use undecanethiol (UDT) containing 10 CH(2) units and a terminal CH(3) group, as well as dodecanethiol (DDT) containing 11 CH(2) units with its terminal CH(3) at a different orientation than UDT. We show that surface-enhanced IRSE is sensitive to subtle vibrational signatures of the differently oriented terminal methyls of these two homologous alkanethiol SAMs.     

Optical properties of pentacene and perfluoropentacene thin films

The optical properties of pentacene (PEN) and perfluoropentacene (PFP) thin films on various SiO(2) substrates were studied using variable angle spectroscopic ellipsometry. Structural characterization was performed using x-ray reflectivity and atomic force microscopy. A uniaxial model with the optic axis normal to the sample surface was used to analyze the ellipsometry data. A strong optical anisotropy was observed, and enabled the direction of the transition dipole of the absorption bands to be determined. Furthermore, comparison of the optical constants of PEN and PFP thin films with the absorption spectra of the monomers in solution shows significant changes due to the crystalline environment. Relative to the monomer spectrum, the highest occupied molecular orbital to lowest unoccupied molecular orbital transition observed in PEN (PFP) thin film is reduced by 210 meV (280 meV). A second absorption band in the PFP thin film shows a slight blueshift (40 meV) compared to the spectrum of the monomer with its transition dipole perpendicular to that of the first absorption band.     

金属锌表面膜形成的椭圆偏振技术研究

介绍了近年作者课题组使用椭圆偏振技术研究金属锌表面氧化膜的形成,包括多晶锌表面自然氧化物薄膜的形成及其光学性能和电子结构、不同气氛自然氧化物膜的生长研究以及在碱性碳酸盐介质金属锌的电化学过程等方面的工作. 旨在通过原位和非原位椭圆偏振技术了解金属锌表面氧化物膜层的光、电性能以及膜层结构的改变和生长动力学,这对评估锌氧化层的总体性能有着重要意义.     

Optical and physical properties of cobalt oxide films electrogenerated in bicarbonate aqueous media

For the first time, cobalt oxide films that are highly protective against localized corrosion and depicting a wide variety of bright and uniform colors due to light interference, have been successfully electrogenerated on polycrystalline cobalt disk electrodes under potentiostatic polarization in a mild aqueous bicarbonate medium. Open circuit potential measurements have shown the formation of a film with a bilayered structure, organized as a thin Co3O4 outer layer and a thick CoO inner layer. The existence of Co3O4 as a thin outer layer, previously postulated from galvanostatic reduction experiments, has been confirmed from XPS analysis. Raman spectroscopy, performed using a very low laser intensity, has shown that the films are mainly composed of CoO. The broadness of the Raman bands observed is associated to the amorphous character of the film, a result that has been confirmed by spectroscopic ellipsometry and X-ray diffraction analysis. Overall film thicknesses, well controlled by the anodization duration, were determined and correlated using mechanical (atomic force microscopy and profilometry) and spectroscopic (specular UV-vis-NIR reflectance and ellipsometry) techniques. Spectroscopic ellipsometry, using a simple amorphous dispersion model, has proved efficient for measuring thicknesses of films ranging from 31 to 290 nm with very low standard deviations. The real part of the complex refractive indices of these films, ranging from 1.8 to 2.2 (at lambda = 632.8 nm) depending on the anodization duration, is in good agreement with values reported in the literature for CoO. The film with the highest refractive index, and consequently the more densely packed structure, was obtained following a 30-minute anodization period.     

Ellipsometric study of dissolution of anodic WO3 films in aqueous solutions. 2. Reaction mechanism

The present work demonstrates that the dissolution of anodic WO3 can be described in terms of general mechanisms already used to account for the physicochemical processes involved in the dissolution of oxides of other metals. The chemical dissolution of anodic WO3 films is characterized by in situ ellipsometry, which has proven to be a suitable technique for studying the processes taking place.(1) The capability of ellipsometry for distinguishing between thickness decrease and hydration and generation of porosity/roughness helps to analyze the thickness range within which reliable kinetic information can be obtained. The dissolution rate law found for anodic WO3 does not depend on the oxide thickness. The dissolution of anodic WO3 films includes hydration and roughening, besides thickness decrease, and is kinetically controlled by the OH- concentration at the oxide/electrolyte interface. Apart from OH-, the specific nature of electrolyte anions seems to play no kinetic role, except in promoting porosity/roughness.     

A nitrilo-tri-acetic-acid/acetic acid route for the deposition of epitaxial cerium oxide films as high temperature superconductor buffer layers

A water based cerium oxide precursor solution using nitrilo-tri-acetic-acid (NTA) and acetic acid as complexing agents is described in detail. This precursor solution is used for the deposition of epitaxial CeO₂ layers on Ni-5at%W substrates by dip-coating. The influence of the complexation behavior on the formation of transparent, homogeneous solutions and gels has been studied. It is found that ethylenediamine plays an important role in the gelification. The growth conditions for cerium oxide films were Ar-5% gas processing atmosphere, a solution concentration level of 0.25 M, a dwell time of 60 min at 900 °C and 5-30 min at 1050 °C. X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscopy (AFM), pole figures and spectroscopic ellipsometry were used to characterize the CeO₂ films with different thicknesses. Attenuated total reflection-Fourier transform infrared (ATR-FTIR) was used to determine the carbon residue level in the surface of the cerium oxide film, which was found to be lower than 0.01%. Textured films with a thickness of 50 nm were obtained.     

Measuring molecular order in poly(3-alkylthiophene) thin films with polarizing spectroscopies

We measured the molecular order of poly(3-alkylthiophene) chains in thin films before and after melting through the combination of several polarized photon spectroscopies: infrared (IR) absorption, variable angle spectroscopic ellipsometry (SE), and near-edge X-ray absorption fine structure (NEXAFS). The data from the various techniques can be uniformly treated in the context of the dielectric constant tensor epsilon for the film. The combined spectroscopies allow determination of the orientation distribution of the main-chain axis (SE and IR), the conjugated pi system normal (NEXAFS), and the side-chain axis (IR). We find significant improvement in the backbone order of the films after recrystallization of the material at temperatures just below the melting temperature. Less aggressive thermal treatments are less effective. IR studies show that the changes in backbone structure occur without significant alteration of the structure of the alkyl side chains. The data indicate that the side chains exhibit significant disorder for all films regardless of the thermal history of the sample.     

Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol–gel technique

Clear aluminium oxide sols without precipitation were synthesized via a non-aqueous sol–gel technique using three different alcohols (ethanol, isopropanol and n-butyl alcohol) as solvent, aluminium sec-butoxide as a precursor and acetyl acetone as a chelating agent. Although all sols could be successfully used to prepare thin films, the most stable one was prepared with n-butyl alcohol. Highly transparent, homogenous and amorphous aluminium oxide thin films were obtained on Si substrates after a heat treatment at 500 °C. X-Ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FT-IR) spectroscopy revealed all films were hydroxide free. The optical and structural properties of the films were particularly investigated. Any significant difference except from thickness on the film properties was not observed by changing the alcohol. Refractive index was used as an indication of the porosity of the films and ranged from 1.54 to 1.60.     

Au nanoparticle monolayers covered with sol-gel oxide thin films: optical and morphological study

In this work, we provide a detailed study of the influence of thermal annealing on submonolayer Au nanoparticle deposited on functionalized surfaces as standalone films and those that are coated with sol-gel NiO and TiO(2) thin films. The systems are characterized through the use of UV-vis absorption, X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), and spectroscopic ellipsometry. The surface plasmon resonance peak of the Au nanoparticles was found to red-shift and increase in intensity with increasing surface coverage, an observation that is directly correlated to the complex refractive index properties of Au nanoparticle layers. The standalone Au nanoparticles sinter at 200 °C, and a relationship between the optical properties and the annealing temperature is presented. When overcoated with sol-gel metal oxide films (NiO, TiO(2)), the optical properties of the Au nanoparticles are strongly affected by the metal oxide, resulting in an intense red shift and broadening of the plasmon band; moreover, the temperature-driven sintering is strongly limited by the metal oxide layer. Optical sensing tests for ethanol vapor are presented as one possible application, showing reversible sensing dynamics and confirming the effect of Au nanoparticles in increasing the sensitivity and in providing a wavelength dependent response, thus confirming the potential use of such materials as optical probes.     

Dense passivating poly(ethylene glycol) films on indium tin oxide substrates

We describe the formation and characterization of surface-passivating poly(ethylene glycol) (PEG) films on indium tin oxide (ITO) glass substrates. PEG chains with a molecular weight of 2000 and 5000 D were covalently attached to the substrates in a systematic approach using different coupling schemes. The coupling strategies included the direct grafting with PEG-silane, PEG-methacrylate, and PEG-bis(amine), as well as the two-step functionalization with aldehyde-bearing silane films and subsequent coupling with PEG-bis(amine). Elemental analysis by X-ray photoelectron spectroscopy (XPS) confirmed the successful surface modification, and XPS and ellipsometry provided values for film thicknesses. XPS and ellipsometry thickness values were almost identical for PEG-silane films but differed by up to 400% for the other PEG layers, suggesting a homogeneous layer for PEG-silane but an inhomogeneous distribution for other PEG coatings on the molecularly rough ITO substrates. Atomic force microscopy (AFM) and water contact angle goniometry confirmed the different degrees of surface homogeneity of the polymer films, with PEG-silane reducing the AFM rms surface roughness by 50% and the water contact angle hysteresis by 75% compared to uncoated ITO. The ability of the PEG layers to passivate the substrate against the nonspecific adsorption of biopolymers was tested using fluorescence-labeled immunoglobulin G and DNA oligonucleotides in combination with fluorescence microscopy. The results indicate a positive relationship between film density and homogeneity on one hand and the ability to passivate against biopolymer adhesion on the other hand. The most homogeneous layers prepared with PEG-silane reduced the nonspecific adsorption of fluorescence-labeled DNA by a factor of 300 compared to uncoated ITO. In addition, the study finds that the ratio of film thicknesses derived by ellipsometry and XPS is a useful parameter to quantify the structural integrity of PEG layers on molecularly rough ITO surfaces. The findings may be applied to characterize PEG or other polymeric films on similarly coarse substrates.     

Characterization and electrochemical deposition of natural melanin thin films

Melanin is an important class of biological pigments because of its distinct chemical and physical properties. The electrochemical deposition of natural melanin thin films was studied using two different techniques; constant potential and cyclic voltammetry along with a deposition time of five hours. The thin films deposited electrochemically on a fluorine-doped tin oxide conductive glass substrate using the constant potential method, exhibited faster growth rate and better adhesion to the fluorine-doped tin oxide working electrodes than those deposited using the cyclic voltammetry method. The thin films deposited on the fluorine-doped tin oxide conductor glass using the constant potential method were also more homogeneous than those deposited via the cyclic voltammetry technique. The increase of film thickness is related to the increase of electrochemical deposition time. Interestingly, the electrochemical deposition using the constant potential method had the advantage of consuming less electric charge. The physical and chemical structures of the melanin thin films were characterized using ultraviolet–visible absorption spectroscopy, Fourier-transform infrared spectroscopy, and X-ray diffraction analysis. The ultraviolet–visible absorption spectra showed the correlation between the variation of deposition rates of melanin and the type of electrochemical technique employed as well as the thickness of the film. The average thickness of the film is 500 nm which absorb 40% of light in both type of films. The atomic force microscopy images illustrated the homogeneous deposition of the melanin molecules on the fluorine-doped tin oxide conductive glass substrate, indicating that the thickness of the thin films can be controlled. We estimated an average grain size of 14.093 Å. The ease of preparing such thin films of organic materials can open new avenues towards the use of soft conductors, in contrast to the complex preparation of industrial semiconductors.     

Understanding and improving the deposition conditions of SiO2 thin films obtained by ultrasonic sol-gel procedure

Sol-gel deposition of an ultrasonically atomized aerosol has been proven to be a convenient thin film deposition method. Flexibility of the ultrasonic process allows the use of a large range of source solutions. In this paper we describe and discuss the deposition conditions of SiO₂ films. The chemical parameters are contemplated and we discuss the influence of ultrasonic waves on the reliability of our process. Source solutions and SiO₂ film properties are studied by viscosimetry, Fourier Transform IR spectroscopy and spectroscopic ellipsometry.     

Covalent molecular assembly of multilayer dendrimer ultrathin films in supercritical medium

Ultrathin films containing dendrimers are fabricated on amine- and anhydride-derivatized silicon dioxide surface through alternate layer-by-layer (LbL) assembly of pyromellitic dianhydride (PMDA) and poly(amidoamine) (PAMAM) dendrimer in supercritical carbon dioxide (SCCO2) with interlayer linkage established by covalent bonds. X-ray photoelectron and UV-visible absorption spectroscopies, atomic force microscopy (AFM), and ellipsometry were employed to study the interfacial chemistry, growth, morphology, and thickness of the assembled film. XPS analysis suggests that the PMDA/PAMAM interlayer covalent bond is established to completion, and functional surfaces for immobilization of the next layer are available after deposition of each layer. UV-visible absorption and ellipsometry revealed layer-by-layer growth of the film. The functional property film as a porous matrix was manifested in the reduction of the refractive index upon introduction of the dendrimer.     

Glass transition behavior of spin-coated thin films of a hydrophilic polymer on supported substrates

Using ellipsometry, it is found the glass transition temperature of the spin-coated polyacrylamide(PAL) thin films on the supported silicon(Si) substrates with an oxide layer decreases with decreasing the film thickness. But Tgs of the asprepared thin films are much higher than that of the bulk sample. Such observations can be attributed to the combined result of the "surface effect" and increased hydrogen bonding interaction between PAL chains due to spin coating/thin film confinement.     

Modelling the dielectric function of thin films measured by spectroscopic ellipsometry: determination of microstructure and density

The dielectric function of thin-film amorphous hydrogenated silicon (a-Si:H) deposited by the glow discharge and hot wire technique has been investigated by spectroscopic ellipsometry. An improved interpretation of the ellipsometric data taking into account the influence of hydrogen incorporation into the amorphous network enables to determine the film density and the void volume fraction of the material. Thus ellipsometry provides a convenient and contactless means of characterizing the structural properties of thin films. The film density varies considerably with substrate temperature and hydrogen content depending on the individual deposition technique. A reduction of film density is mainly caused by the formation of voids in the amorphous network. The influence of the substrate temperature on the growth of dense a-Si: H films is pointed out.