金属氧化物与现代微电子学——过渡金属前体化合物及转化为材料的化学过程

金属氧化物薄膜如HfO₂（被称为高k电介质）是现代微电子器件的关键组件,广泛用于计算机（平板电脑,笔记本电脑和台式机）、智能电话、智能电视、汽车和医疗设备中。具有大介电常数（k）的金属氧化物已经取代了介电常数小的SiO₂（k=3.9）,从而使得微电子元件进一步小型化。过渡金属化合物在化学气相沉积（CVD）和原子层沉积（ALD）中被广泛用作前体,通过与O₂、H₂O或O₃的反应生成金属氧化物薄膜。微电子金属氧化物膜是纳米材料最广泛应用的一个领域。本文概观该领域的最新进展,包括我们对d⁰过渡金属配合物与O₂反应的研究。     

金属氧化物与现代微电子学——过渡金属前体化合物及转化为材料的化学过程（英文）

金属氧化物薄膜如HfO_2(被称为高k电介质)是现代微电子器件的关键组件,广泛用于计算机(平板电脑,笔记本电脑和台式机)、智能电话、智能电视、汽车和医疗设备中。具有大介电常数(k)的金属氧化物已经取代了介电常数小的SiO_2(k=3.9),从而使得微电子元件进一步小型化。过渡金属化合物在化学气相沉积(CVD)和原子层沉积(ALD)中被广泛用作前体,通过与O2、H_2O或O_3的反应生成金属氧化物薄膜。微电子金属氧化物膜是纳米材料最广泛应用的一个领域。本文概观该领域的最新进展,包括我们对d0过渡金属配合物与O_2反应的研究。     

Criegee自由基CH2O2与H2O反应机理及动力学的理论研究

在6-311＋G(2d,2p)水平下, 采用密度泛函理论(DFT)的B3LYP方法, 研究了Criegee 自由基CH₂O₂与H₂O的反应. 结果表明反应存在三个通道: CH₂O₂＋H₂O®HOCH₂OOH (R1); CH₂O₂＋H₂O®HCO＋OH＋H₂O (R2); CH₂O₂＋H₂O®HCHO＋H₂O₂ (R3), 各通道的势垒高度分别为43.35, 85.30和125.85 kJ/mol. 298 K下主反应通道(R1)的经典过渡态理论(TST)与变分过渡态理论(CVT)的速率常数k^TST与k^CVT均为2.47×10^－17 cm³•molecule^－1•s^－1, 而经小曲率隧道效应模型(SCT)校正后的速率常数k^CVT/SCT为 5.22×10^－17 cm³•molecule^－1•s^－1. 另外, 还给出了200～2000 K 温度范围内拟合得到的速率常数随温度变化的三参数Arrhenius方程.     

多金属氧酸盐修饰的过渡金属配合物的催化效果和电化学行为

基于水热技术,合成了多金属氧酸盐修饰的2种新的过渡金属配合物[Cu（dmbipy）²（SiW¹²O⁴⁰）][Cu（dmbipy）（H₂O）₃]·3H₂O（1）和{（Hdmphen）²[Ag₂（dmphen）²（SiW¹²O⁴⁰）]}_n（2）（dmbipy=4,4’-二甲基-2,2’-联吡啶,dmphen=2,9-二甲基-1,10-菲咯啉）。配合物1的最小不对称单元包含2种不同的Cu（Ⅱ）单元,其中Cu（Ⅱ）离子都采用了五配位的模式,并且水分子也参与了配位。氢键将不同的Cu（Ⅱ）单元连接形成了一维链,并延伸至二维层。在配合物2中,多金属氧酸盐连接Ag（Ⅱ）离子形成一维链。氢键和π…π堆积作用将一维链拓展成了二维层。     

Cr2O3和CrO3/Cr2O3催化剂的2-氯-1,1,1-三氟乙烷气相氟化反应的活性物种和失活

采用沉淀法和浸渍法制备了2种铬基（Cr₂O₃和CrO₃/Cr₂O₃）催化剂,用于气相氟化2-氯-1,1,1-三氟乙烷合成1,1,1,2-四氟乙烷。研究发现含有低价铬（Cr³⁺）物种的Cr₂O₃催化剂上2-氯-1,1,1-三氟乙烷的稳态转化率为18.5%,而含有高价铬（Cr⁶⁺）物种和低价铬（Cr³⁺）物种的CrO₃/Cr₂O₃催化剂初始转化率达到30.6%,然而存在明显的失活。含有Cr⁶⁺物种的CrO₃/Cr₂O₃催化剂的2-氯-1,1,1-三氟乙烷氟化反应初始TOF值为1.71×10^-4 mol_HCFC-133a·mol_Cr（Ⅵ）^-1·s^-1,高于含有Cr³⁺物种的Cr₂O₃催化剂（4.16×10^-5 mol_HCFC-133a·mol_Cr（Ⅲ）^-1·s^-1）。Cr₂O₃催化剂在氟化反应前后催化剂的物相结构保持不变;而含有高价铬物种的CrO₃/Cr₂O₃催化剂经HF反应后生成了CrO_xF_y活性物种。然而,CrO_xF_y物种在反应中挥发或转化成稳定但无活性的CrF₃,从而导致催化剂失活。     

用XPS和XAES分析电化学沉积的DLC膜

采用电化学沉积方法，以甲醇溶剂作碳源，直流电压作用下在单晶硅表面沉积得到碳薄膜。通过研究石墨、金刚石和样品薄膜的XPS和XAES谱图特征，证明了此方法沉积得到的是DLC薄膜;利用曲线拟合技术在C_1s电子能谱图中拟合出sp³峰与sp²峰，并计算出样品薄膜中sp³碳的相对含量为55%;研究石墨、金刚石和样品薄膜的一阶微分XAES谱图，用线性插入法估算出样品薄膜中sp³碳的相对含量为60%。     

Bi2O3掺杂对Ag(Nb0.8Ta0.2)O3陶瓷结构和介电性能的影响

本文研究了Bi₂O₃掺杂对Ag(Nb_0.8Ta_0.2)O₃陶瓷的结构和介电性能的影响。X射线衍射(XRD)结果表明,Bi₂O₃的掺杂可以使陶瓷中Ag⁺被还原并析出,且银析出的量随Bi₂O₃掺杂量的增加而不断增加,这可能源自于Bi³⁺对Ag⁺的取代。在一定范围内增大Bi₂O₃掺杂量可提高Ag(Nb_0.8Ta_0.2)O₃陶瓷的室温介电常数,降低介电损耗,并使温度系数向负值方向移动。当Bi₂O₃的掺杂量约为3.5wt%时,样品具有较大的介电常数(ε=672)和较小的介电损耗(tanδ=7.3×10^-4)。     

Cr2O3和CrO3/Cr2O3催化剂的2-氯-1，1，1-三氟乙烷气相氟化反应的活性物种和失活

采用沉淀法和浸渍法制备了2种铬基（Cr₂O₃和CrO₃/Cr₂O₃）催化剂,用于气相氟化2-氯-1,1,1-三氟乙烷合成1,1,1,2-四氟乙烷。研究发现含有低价铬（Cr³⁺）物种的Cr₂O₃催化剂上2-氯-1,1,1-三氟乙烷的稳态转化率为18.5%,而含有高价铬（Cr⁶⁺）物种和低价铬（Cr³⁺）物种的CrO₃/Cr₂O₃催化剂初始转化率达到30.6%,然而存在明显的失活。含有Cr⁶⁺物种的CrO₃/Cr₂O₃催化剂的2-氯-1,1,1-三氟乙烷氟化反应初始TOF值为1.71×10^-4 mol_HCFC-133a·mol_Cr(Ⅵ)^-1·s^-1,高于含有Cr³⁺物种的Cr₂O₃催化剂（4.16×10^-5 mol_HCFC-133a·mol_Cr(Ⅲ)^-1·s^-1）。Cr₂O₃催化剂在氟化反应前后催化剂的物相结构保持不变;而含有高价铬物种的CrO₃/Cr₂O₃催化剂经HF反应后生成了CrO_xF_y活性物种。然而,CrO_xF_y物种在反应中挥发或转化成稳定但无活性的CrF₃,从而导致催化剂失活。     

席夫碱大环铜配合物的化学核酸酶活性研究

对3种结构相近的席夫碱四氮大环草酰胺铜配合物（CuL^1～3）的化学核酸酶活性进行比较研究。结果表明：这类配合物的化学核酸酶活性与中心金属离子的类型、配体的结构、溶液的pH值、离子强度及配合物的浓度等都有关系。3种配合物表现出来的化学核酸酶活性顺序为CuL³＞CuL²＞CuL¹。CuL³的DNA切割反应表现为典型的假一级连续反应。在80 μmol·L^-1 CuL³和2 mmol·L^-1 H₂O₂的存在下,就超螺旋DNA向切口开环型DNA进而向线型DNA的转化而言,反应速率常数分别为0.044 0±0.001 5 min^-1(k₁)和0.003 52±0.000 18 min^-1(k₂)。     

棒状CuFe4Ox的可控合成及其异戊醇脱氢反应的催化性能

利用液相沉淀法可控合成了均匀的棒状CuFe₄O_x催化剂。通过原位X射线粉末衍射（XRD）、高分辨透射电子显微镜（TEM）及程序升温还原（TPR）等手段表征其晶相结构、形貌和还原性能。通过还原棒状CuFe₄O_x获得Cu⁰/Fe₃O₄ 纳米棒,原位X射线光电子能谱（XPS）用于确定Cu⁰/Fe₃O₄ 表面的相组成。通过液相沉淀法制备棒状CuFe₄O_x,在120℃保持3 h后加入Na₂CO₃溶液至pH等于9时所得棒状形貌最为规整。以异戊醇脱氢反应作为探针反应,比较了Cu⁰/Fe₃O₄ 纳米棒和Cu⁰/Fe₃O₄ 纳米颗粒的催化反应性能,发现Cu⁰/Fe₃O₄ 纳米棒比Cu⁰/Fe₃O₄ 纳米粒子具有更好的活性和稳定性,表明棒状Fe₃O₄ 担载的Cu纳米粒子具有更好的结构稳定性。     

Reactivities of d<Superscript>0</Superscript> transition metal complexes toward oxygen: Synthetic and mechanistic studies

Transition metals such as Fe in porphyrin complexes are known to bind or react with O₂, and such reactions are critical to many biological functions and catalytic oxidation using O₂. The transition metals in these reactions often contain valence d electrons, and oxidation of metals is an important step. In recent years, reactions of O₂ with d⁰ transition metal complexes such as Hf(NR₂)₄ (R = alkyl) have been used to make metal oxide thin films as insulating gate materials in new microelectronic devices. This feature article discusses our recent studies of such reactions and the formation of TiO₂ thin films. In contrast to the reactions of many d ⁿ complexes where metals are often oxidized, reactions of d⁰ complexes such as Hf(NMe₂)₄ and Ta(NMe₂)₄(SiR₃) with O₂ usually lead to the oxidation of ligands, forming, e.g., -ONMe₂ and -OSiR₃ from -NMe₂ and -SiR₃ ligands, respectively. Mechanistic and theoretical studies of these reactions have revealed pathways in the formation of the metal oxide thin films as microelectronic materials.     

Solvent Isotope Effect on the Rate Constants of Singlet-Oxygen Quenching by edta and Its Metal Complexes

The reactivity of singlet oxygen (O₂(¹Δ_g)) with edta and its metal complexes with Al³⁺, Cu²⁺, Fe³⁺, and Mn²⁺ was investigated. The emission of singlet oxygen at 1270 nm in D₂O was measured in order to determine the quenching efficiency of edta and edta-metal complexes for different metal/edta ratios. The sum of the rate constant (k_r + k_q) of the chemical reaction between singlet oxygen and the acceptor (k_r) and of the physical quenching of singlet oxygen by the acceptor (k_q) was obtained by a Stern-Volmer analysis. Measurements of the oxygen consumption in H₂O were used to determine quantum yields of the sensitized photooxidation, and the combined results of these experiments allowed the determination of k_r and k_q separately. A strong isotope effect was observed between the deuterated and the hydrogenated solvents. This effect was shown to be independent of the analytical procedure used. The isotope effect, as well as the reactivity of edta and its metal complexes, depend markedly on the complexed metal ion.     

Fine Control of the Redox Reactivity of a Nonheme Iron(III)–Peroxo Complex by Binding Redox‐Inactive Metal Ions

Redox‐inactive metal ions are one of the most important co‐factors involved in dioxygen activation and formation reactions by metalloenzymes. In this study, we have shown that the logarithm of the rate constants of electron‐transfer and C−H bond activation reactions by nonheme iron(III)–peroxo complexes binding redox‐inactive metal ions, [(TMC)Fe^III(O₂)]⁺‐M^{n +} (M^{n +}=Sc³⁺, Y³⁺, Lu³⁺, and La³⁺), increases linearly with the increase of the Lewis acidity of the redox‐inactive metal ions (ΔE ), which is determined from the g_zz values of EPR spectra of O₂^.−‐M^{n +} complexes. In contrast, the logarithm of the rate constants of the [(TMC)Fe^III(O₂)]⁺‐M^{n +} complexes in nucleophilic reactions with aldehydes decreases linearly as the ΔE value increases. Thus, the Lewis acidity of the redox‐inactive metal ions bound to the mononuclear nonheme iron(III)–peroxo complex modulates the reactivity of the [(TMC)Fe^III(O₂)]⁺‐M^{n +} complexes in electron‐transfer, electrophilic, and nucleophilic reactions.     

Insertion of Molecular Oxygen in Transition‐Metal Hydride Bonds,Oxygen‐Bond Activation,and Unimolecular Dissociation of Metal Hydroperoxide Intermediates. Short Communication

Thermal activation of molecular oxygen is observed for the late‐transition‐metal cationic complexes [M(H)(OH)]⁺ with M=Fe, Co, and Ni. Most of the reactions proceed via insertion in a metal? hydride bond followed by the dissociation of the resulting metal hydroperoxide intermediate(s) upon losses of O, OH, and H₂O. As indicated by labeling studies, the processes for the Ni complex are very specific such that the O‐atoms of the neutrals expelled originate almost exclusively from the substrate O₂. In comparison to the [M(H)(OH)]⁺ cations, the ion? molecule reactions of the metal hydride systems [MH]⁺ (M=Fe, Co, Ni, Pd, and Pt) with dioxygen are rather inefficient, if they occur at all. However, for the solvated complexes [M(H)(H₂O)]⁺ (M=Fe, Co, Ni), the reaction with O₂ involving O? O bond activation show higher reactivity depending on the transition metal: 60% for the Ni, 16% for the Co, and only 4% for the Fe complex relative to the [Ni(H)(OH)]⁺/O₂ couple.     

High Performance Full Sodium‐Ion Cell Based on a Nanostructured Transition Metal Oxide as Negative Electrode

A novel design of a sodium‐ion cell is proposed based on the use of nanocrystalline thin films composed of transition metal oxides. X‐ray diffraction, Raman spectroscopy and electron microscopy were helpful techniques to unveil the microstructural properties of the pristine nanostructured electrodes. Thus, Raman spectroscopy revealed the presence of amorphous NiO, α‐Fe₂O₃ (hematite) and γ‐Fe₂O₃ (maghemite). Also, this technique allowed the calculation of an average particle size of 23.4 Å in the amorphous carbon phase in situ generated on the positive electrode. The full sodium‐ion cell performed with a reversible capacity of 100 mA h g^?1 at C/2 with an output voltage of about 1.8 V, corresponding to a specific energy density of about 180 W h kg^?1. These promising electrochemical performances allow these transition metal thin films obtained by electrochemical deposition to be envisaged as serious competitors for future negative electrodes in sodium‐ion batteries.     

DNA degradation and oxidation of o-phenylenediamine. Metal ions and H2O2, 8

In earlier papers it has been stated, that the catalytic activity of several metal complexes in H₂O₂ decomposition is caused by the formation of ternary HOO^?-Me²⁺-ligand complexes. The present investigation deals with the effect of traces of metal ions on two other reactions. The degradation of DNA by autoxidizable, H₂O₂ producing methylhydrazines is stopped by P₂O₇^4?. This effect is shown to be due to complex formation of the metal ions with P₂O₇^?4, preventing the formation of the catalytically active ternary complex. The catalysis of the H₂O₂ oxidation of o-phenylenediamine by pyridine-2,6-dicarboxylic acid is dependent on traces of Fe²⁺ ions; this latter effect is equally suppressed by P₂O₇^?4.     

Reactivity of metal oxides: Thermal and photochemical dissolution of MO and MFe2O4 (M=Ni, Co, Zn)

Dissolution rates of NiO, CoO, ZnO, α-Fe₂O₃ and the corresponding ferrites in 0.1 mol dm⁻³ oxalic acid at pH 3.5 were measured at 70 °C. The dissolution of simple oxides proceeds through the formation of surface metal oxalate complexes, followed by the transfer of surface complexes (rate-determining step). At constant pH, oxalate concentration and temperature, the trend in the first-order rate constant for the transfer of the surface complexes (k_Me; Me=Ni, Co, Zn, Fe) parallels that of water exchange in the dissolved metal ions (k_−w). Thus, the most important factor determining the rates of dissolution of metal oxides is the lability of Me-O bonds, which is in turn defined by the electronic structure of the metal ion and its charge/radius ratio. UV (384 nm) irradiation does not increase significantly the dissolution rates of NiO, CoO and ZnO, whereas hematite is highly sensitive to UV light. For ferrites, the reactivity order is ZnFe₂O₄>CoFe₂O₄?NiFe₂O₄. Dissolution is congruent, with rates intermediate between those of the constituent oxides, Fe₂O₃ and MO (M=Co, Ni, Zn), reflecting the behavior of very thin leached layers with little Zn and Co, but appreciable amounts of Ni. The more robust Ni²⁺ labilizes less the corresponding ferrite. The correlation between log k_M and log k_−w is somewhat blurred and displaced to lower k_M values. Fe(II), either photogenerated or added as salt, enhances the rate of Fe(III) phase transfer. A simple reaction mechanism is used to interpret the data.     

Tailoring Transition‐Metal Hydroxides and Oxides by Photon‐Induced Reactions

Controlled synthesis of transition‐metal hydroxides and oxides with earth‐abundant elements have attracted significant interest because of their wide applications, for example as battery electrode materials or electrocatalysts for fuel generation. Here, we report the tuning of the structure of transition‐metal hydroxides and oxides by controlling chemical reactions using an unfocused laser to irradiate the precursor solution. A Nd:YAG laser with wavelengths of 532 nm or 1064 nm was used. The Ni²⁺, Mn²⁺, and Co²⁺ ion‐containing aqueous solution undergoes photo‐induced reactions and produces hollow metal‐oxide nanospheres (Ni_0.18Mn_0.45Co_0.37O_x) or core–shell metal hydroxide nanoflowers ([Ni_0.15Mn_0.15Co_0.7(OH)₂](NO₃)_0.2?H₂O), depending on the laser wavelengths. We propose two reaction pathways, either by photo‐induced redox reaction or hydrolysis reaction, which are responsible for the formation of distinct nanostructures. The study of photon‐induced materials growth shines light on the rational design of complex nanostructures with advanced functionalities.     

Some dn Metal Complexes with 4,4'-bipyridine and Trichloroacetates. Preparation,characterization and thermal properties

The new mixed ligand complexes with formulae Co(4-bpy)₂L₂⋅2H₂O (I), Cu(4-bpy)₂L₂⋅H₂O (II) and Cd(4-bpy)L₂⋅H₂O (III) (4-bpy=4,4'-bipyridine, L=CCl₃COO^–) were prepared. Analysis of the IR spectra indicate that 4-bpy is coordinated with metal ions and carboxylates groups bond as bidentate chelating ligands. The electronic spectra are in accordance with pseudo-octahedral environment around the central metal ion in the Co(II) and Cu(II) complexes. The thermal decomposition of the synthesized complexes was studied in air. A coupled TG-MS system was used to analyse the principal volatile thermal decomposition products of Co(II) and Cu(II) complexes. Corresponding metal oxides were identified as a final product of pyrolysis with intermediate formation of metal chlorides. This revised version was published online in July 2006 with corrections to the Cover Date.